CN207880445U - One kind is for gas cylinder safely protective device on integrated circuit production line - Google Patents
One kind is for gas cylinder safely protective device on integrated circuit production line Download PDFInfo
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- CN207880445U CN207880445U CN201820262747.8U CN201820262747U CN207880445U CN 207880445 U CN207880445 U CN 207880445U CN 201820262747 U CN201820262747 U CN 201820262747U CN 207880445 U CN207880445 U CN 207880445U
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- cylinder
- gas
- gas cylinder
- production line
- integrated circuit
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Abstract
The utility model discloses one kind for gas cylinder safely protective device on integrated circuit production line, including tracheae, pipe clamp, air cylinder fixed plate, cylinder, protection bracket, semicircle protective plate and gas cylinder collar nut, the tracheae is fixed on air cylinder fixed plate upper surface by pipe clamp, cylinder is fixed in the air cylinder fixed plate lower face, the guide rod end connection protection bracket of cylinder, the semicircle protective plate of welding on bracket, the gas cylinder collar nut is protected to connect gas cylinder, and among semicircle protective plate；The cylinder is connected with solenoid valve, and solenoid valve connects relay, and relay connects gas cabinet PLC, the master board of gas cabinet PLC connection gas management systems.The device integral structure is compact, simple, operate, control it is simple and convenient；Intelligent, safe and reliable, PLC is automatically controlled；Control and executing agency's security isolation, reach the safety anti-explosive requirement of integrated circuit production line.
Description
Technical field
The utility model is related to safety device, more particularly to one kind are anti-for gas cylinder safely on integrated circuit production line
Protection unit.
Background technology
Gas cylinder safely protective device on traditional integrated circuit production line is that a cylindric plastics fool proof cap is buckled in gas
On bottle valve.Due to gas system be aim at equipment in FAB, board provides gas, be that one of entire production line is non-
Often important link, and gas system includes bulk gas：N2、O2、Ar；Special gas：SiH4、NF3、CH4、B2H6（2%）、
CO2, TMBPH3 (0.5) etc., some of which gas is toxic gas, although such method may be implemented when manually replacing gas cylinder
Certain protection warning function is played, but this method is more demanding to the overall qualities and working sense of responsibility of personnel, it is necessary to people
For go careful verification to need replacing status information, the consistency of the gas information and gas holder information of new gas cylinder of gas cylinder, connect and change
Material, such efficiency is low, inevitably causes gas leakage or personnel to hinder because of human factor or miss change gas cylinder due to work carelessness in the course of time
It dies.
Invention content
The utility model provides a kind of for gas on integrated circuit production line to solve the above-mentioned deficiency of the prior art
Bottle safety device, the device effectively can reliably play safety protection function, improve working efficiency.
The above-mentioned purpose of the utility model is realized by technical solution below：One kind being used for integrated circuit production line
Gas cylinder safely protective device, including tracheae, pipe clamp, air cylinder fixed plate, cylinder, protection bracket, semicircle protective plate and gas cylinder connect
Head nut, the tracheae are fixed on air cylinder fixed plate upper surface by pipe clamp, and cylinder, gas are fixed in the air cylinder fixed plate lower face
The guide rod end connection protection bracket of cylinder, protects the semicircle protective plate of welding, the gas cylinder collar nut on bracket to connect gas cylinder,
And among semicircle protective plate；The cylinder is connected with solenoid valve, and solenoid valve connects relay, and relay connects gas cabinet
PLC, the master board of gas cabinet PLC connection gas management systems.
When gas cylinder is in normal gas supply working condition, cylinder stretches out, and semicircle protective plate plays safety protection function.It should
Device is only after operating personnel's typing personal information, gas cylinder information, gas holder information and the gas cylinder information that needs replacing, warp
Gas management system comprehensive descision fits like a glove meet replacement condition after, from gas management system to gas cabinet control PLC send
Allow to replace and instruct, PLC controls output relay so that solenoid valve obtains electric, the semicircle protective plate of cylinder drive of protective device
It withdraws together, after withdrawing in place, operating personnel just can be with self-changeable gas cylinder.
The utility model compared with prior art the advantages of be：The device major function is to realize to prevent artificially to gas cylinder
Replacement process in due to human factor or work carelessness caused by change wrong gas cylinder or gas leakage.Its integral structure is tight
Gather, simply, operate, control it is simple and convenient；Intelligent, safe and reliable, PLC is automatically controlled；Control and executing agency's security isolation,
Reach the safety anti-explosive requirement of integrated circuit production line.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the dimensional structure diagram of the utility model.
Specific implementation mode
The present invention is described in further detail with reference to embodiment.
As shown in Figure 1 and Figure 2, a kind of for gas cylinder safely protective device on integrated circuit production line, including tracheae 1, pipe clamp
2, air cylinder fixed plate 3, cylinder 4, protection bracket 5, semicircle protective plate 6 and gas cylinder collar nut 7, the tracheae 1 pass through pipe clamp 2
It is fixed on 3 upper surface of air cylinder fixed plate, cylinder 4 is fixed in 3 lower face of the air cylinder fixed plate, and the guide rod end connection of cylinder 4 is anti-
Bracket 5 is protected, protects the semicircle protective plate 6 of welding on bracket 5, the gas cylinder collar nut 7 to connect gas cylinder, and positioned at semicircle anti-
Among backplate 6；The cylinder 4 is connected with solenoid valve 8, and solenoid valve 8 connects relay 9, and relay 9 connects gas cabinet PLC 10,
The master board 11 of the connection gas management systems of gas cabinet PLC 10.
When gas cylinder is in normal gas supply working condition, cylinder 4 stretches out, and semicircle protective plate 6 plays safety protection function.
The device only after operating personnel's typing personal information, gas cylinder information, gas holder information and the gas cylinder information that needs replacing,
After gas management system comprehensive descision fits like a glove and meets replacement condition, sent out from gas management system to gas cabinet control PLC
It send to allow to replace and instruct, PLC controls output relay so that solenoid valve obtains electric, and the cylinder 4 of protective device drives semicircle protection
Plate 6 is withdrawn together, and after withdrawing in place, operating personnel just can be with self-changeable gas cylinder.
Since the installation space of the utility model is limited, whole device is fixed on pipe clamp on 6 bronze medal tracheaes of ψ, therefore, fixed
The intensity and fixed form of pipe clamp are extremely important.
Since the installation space of the utility model is limited, whole device is fixed on pipe clamp on 6 bronze medal tracheaes of ψ, therefore it is required that
Selection acts the light aluminium alloy ultra-low friction cylinder of gentle material.
It is the compact-sized, light-weight of the protective device, flexible movements, intelligence, safe and reliable.
The above specific embodiments are only exemplary, is to preferably make skilled artisans appreciate that originally
Patent, be not to be construed as include to this patent range limitation；As long as appointing according to made by spirit disclosed in this patent
How with change or modification, the range that this patent includes is each fallen within.
Claims (1)
1. one kind is for gas cylinder safely protective device on integrated circuit production line, it is characterised in that：Including tracheae（1）, pipe clamp
（2）, air cylinder fixed plate（3）, cylinder（4）, protection bracket（5）, semicircle protective plate（6）With gas cylinder collar nut（7）, the gas
Pipe（1）Pass through pipe clamp（2）It is fixed on air cylinder fixed plate（3）Upper surface, the air cylinder fixed plate（3）Cylinder is fixed in lower face（4）,
Cylinder（4）Guide rod end connection protection bracket（5）, protect bracket（5）The semicircle protective plate of upper welding（6）, the gas cylinder connects
Head nut（7）Gas cylinder is connected, and positioned at semicircle protective plate（6）Among；The cylinder（4）It is connected with solenoid valve（8）, solenoid valve
（8）Connect relay（9）, relay（9）Connect gas cabinet PLC（10）, gas cabinet PLC（10）Connect the master of gas management system
Control panel（11）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820262747.8U CN207880445U (en) | 2018-02-23 | 2018-02-23 | One kind is for gas cylinder safely protective device on integrated circuit production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820262747.8U CN207880445U (en) | 2018-02-23 | 2018-02-23 | One kind is for gas cylinder safely protective device on integrated circuit production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207880445U true CN207880445U (en) | 2018-09-18 |
Family
ID=63497315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820262747.8U Active CN207880445U (en) | 2018-02-23 | 2018-02-23 | One kind is for gas cylinder safely protective device on integrated circuit production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207880445U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110185924A (en) * | 2018-02-23 | 2019-08-30 | 上海欧控电气技术有限公司 | One kind is for gas cylinder safely protective device on integrated circuit production line |
-
2018
- 2018-02-23 CN CN201820262747.8U patent/CN207880445U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110185924A (en) * | 2018-02-23 | 2019-08-30 | 上海欧控电气技术有限公司 | One kind is for gas cylinder safely protective device on integrated circuit production line |
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