CN207851234U - The crystal grain point measurement machine of probe unit and adjust automatically probe pressure - Google Patents
The crystal grain point measurement machine of probe unit and adjust automatically probe pressure Download PDFInfo
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- CN207851234U CN207851234U CN201820308898.2U CN201820308898U CN207851234U CN 207851234 U CN207851234 U CN 207851234U CN 201820308898 U CN201820308898 U CN 201820308898U CN 207851234 U CN207851234 U CN 207851234U
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- pressure sensor
- probe unit
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Abstract
The utility model is related to a kind of probe unit and the crystal grain point measurement machines of adjust automatically probe pressure, including probe unit, Z axis apparatus for automatically lifting and controller, the probe unit includes manual position adjusting part, pressure sensor and probe, and the pressure sensor is used for detection probe pressure；In the detection process of entire LED chip, since probe pressure is adjusted by Z axis apparatus for automatically lifting and is remained within a preset range, to ensure that the good contact of probe and LED chip, crystal grain point measurement machine is enable normally to detect the luminescent properties of LED chip；Will not be excessive because of probe pressure, lead to the component undergoes deformation of fixed probe and make elastic failure, due to the component regardless of fixed probe caused by elastic failure maintenance problem, improve the stability of crystal grain point measurement machine, reduce maintenance cost.
Description
Technical field
The utility model is related to semiconductor detection technique field more particularly to a kind of probe unit and adjust automatically probe pressures
The crystal grain point measurement machine of power.
Background technology
Existing crystal grain point measurement machine includes probe, shrapnel and Z axis apparatus for automatically lifting, and Z axis apparatus for automatically lifting passes through lifting
Contact of the probe with LED chip is controlled, the luminescent properties of LED chip are detected, probe is arranged on shrapnel, and shrapnel provides for probe
Certain deflection makes probe pressure be maintained in suitable range.Crystal grain point measurement machine is during high speed detection, due to visiting
Needle force is not easy to control, when probe pressure is excessive, causes shrapnel to occur compared with large deformation, shrapnel holds in the case of high frequency deformation
The shrapnel of easy elastic failure, elastic failure can lead to probe and LED chip poor contact, to influence the normal inspection of LED chip
It surveys；And the shrapnel of failure is needed replacing during maintenance, and it is time-consuming and laborious, lead to maintenance cost height.
Utility model content
The purpose of this utility model is to provide a kind of intelligent, non-damageable probe unit and adjust automatically probe pressures
The crystal grain point measurement machine of power.
In order to solve the above-mentioned technical problem, technical solution provided by the utility model is：
A kind of probe unit, including manual position adjusting part, pressure sensor and probe, the probe are arranged in pressure
On sensor, the pressure sensor is arranged on manual position adjusting part, and the pressure sensor is used for detection probe pressure
Power.
Wherein, two foil gauges patch hole is offered on the pressure sensor, the foil gauge patch passes through link slot between hole
The strain end of connection, the pressure sensor is equipped with stage portion.
Wherein, the probe unit further includes terminal plate and pressing plate, and the terminal plate is fixed on the lower section of stage portion, described
Probe is pressed between pressing plate and terminal plate.
Wherein, the manual position adjusting part include pedestal, X to regulating platform, Y-direction regulating platform and Z-direction regulating platform and
Adjustment X is respectively used to the X of regulating platform, Y-direction regulating platform and Z-direction regulating platform position to adjusting nut, Y-direction adjusting nut and Z-direction
Adjusting nut.
Wherein, the probe unit further includes the connector for being fixedly connected with Z-direction regulating platform and pressure sensor.
Another technical solution provided by the utility model is：
A kind of crystal grain point measurement machine of adjust automatically probe pressure, including above-mentioned probe unit, Z axis apparatus for automatically lifting and
Controller, the controller are electrically connected with the pressure sensor in Z axis apparatus for automatically lifting and probe unit, and the controller connects
The pressure data of pressure sensor is received, and the lifting of Z axis apparatus for automatically lifting is controlled according to the pressure data.
Wherein, when the pressure data is equal to preset value, the controller control Z axis apparatus for automatically lifting stops rising
Drop.
The beneficial effects of the utility model are：By pressure sensor detection probe pressure, and pressure data is transferred to
Controller, controller receives the pressure data of pressure sensor transmission, and controls Z axis automatic lifting dress according to the pressure data
Set lifting.In the detection process of entire LED chip, since probe pressure is adjusted by Z axis apparatus for automatically lifting and is protected always
It holds within a preset range, to ensure that the good contact of probe and LED chip, crystal grain point measurement machine is enable normally to detect LED
The luminescent properties of chip；Will not be excessive because of probe pressure, lead to the component undergoes deformation of fixed probe and makes elastic failure, by
In the component regardless of fixed probe caused by elastic failure maintenance problem, therefore improve the stabilization of crystal grain point measurement machine
Property, reduce maintenance cost.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of probe unit embodiment described in the utility model；
Fig. 2 is the decomposition diagram of probe unit embodiment described in the utility model；
1, manual position adjusting part；11, pedestal；12, X is to regulating platform；13, Y-direction regulating platform；14, Z-direction regulating platform；
15, X is to adjusting nut；16, Y-direction adjusting nut；17, Z-direction adjusting nut；2, pressure sensor；21, foil gauge pastes hole；22, even
Access slot；23, stage portion；3, probe；4, terminal plate；5, pressing plate；6, connector.
Specific implementation mode
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
The utility model discloses a kind of crystal grain point measurement machine of adjust automatically probe pressure, including probe unit, Z axis are automatic
Lifting gear and controller, as the embodiment of the probe unit, as depicted in figs. 1 and 2, including manual position adjusting part
1, pressure sensor 2 and probe 3, the probe 3 are arranged on pressure sensor 2, and the pressure sensor 2 is arranged in manual position
It sets on adjusting part 1, the pressure sensor 2 is used for detection probe pressure；The controller and Z axis apparatus for automatically lifting and spy
Pressure sensor 2 in needle device is electrically connected, and the controller receives the pressure data of pressure sensor 2, and according to the pressure
Force data controls the lifting of Z axis apparatus for automatically lifting.
The pressure data that pressure sensor 2 transmits is received by controller, when the pressure data is equal to preset value, institute
It states controller control Z axis apparatus for automatically lifting and stops lifting.In the detection process of entire LED chip, since probe pressure is logical
Z axis apparatus for automatically lifting is crossed to adjust and remain within a preset range, will not be excessive because of probe pressure, lead to fixed probe
3 component undergoes deformation and make elastic failure, to ensure that the good contact of probe 3 and LED chip, enable crystal grain point measurement machine
The luminescent properties of enough normal detection LED chips；It is repaired caused by elastic failure due to regardless of the component of fixed probe 3
Problem, therefore the stability of crystal grain point measurement machine is improved, reduce maintenance cost.
In the present embodiment, when the pressure data is equal to preset value, the controller controls Z axis apparatus for automatically lifting
Stop lifting.
In the present embodiment, offer two foil gauges patch hole 21 on the pressure sensor 2, foil gauge patch hole 21 it
Between connected by link slot 22, the strain end of the pressure sensor 2 is equipped with stage portion 23.The probe unit further includes wiring
Plate 4 and pressing plate 5, the terminal plate 4 are fixed on the lower section of stage portion 23, the probe be pressed in pressing plate 5 and terminal plate 4 it
Between.During probe and LED chip contact, stage portion 23 supports the probe pressure on terminal plate 4 as supporting point, due to
There is terminal plate 4 certain flexibility can generate good deformation under the reaction force of LED chip, make pressure sensor 2
Accurate detection probe pressure and it can be transferred to controller, controller receives pressure data, controls Z axis apparatus for automatically lifting liter
Drop, enables probe 3 and LED chip well to contact.
In the present embodiment, the manual position adjusting part 1 includes pedestal 11, X to regulating platform 12, Y-direction regulating platform 13
With Z-direction regulating platform 14 and be respectively used to adjustment X to the X of 14 position of regulating platform 12, Y-direction regulating platform 13 and Z-direction regulating platform to tune
Save nut 15, Y-direction adjusting nut 16 and Z-direction adjusting nut 17.During probe unit use, by X to adjusting nut
15, Y-direction adjusting nut 16 and Z-direction adjusting nut 17, can manually adjust as needed X to regulating platform 12, Y-direction regulating platform 13 and
The position of Z-direction regulating platform 14 improves the flexibility of probe unit.
In the present embodiment, the probe unit further includes for being fixedly connected with Z-direction regulating platform 14 and pressure sensor 2
Connector 6.When pressure sensor 2 damages, without entire probe unit is needed to change, the pressure sensor 2 of damage is only needed to change i.e.
Can, maintenance cost is low.
Operation principle:
In this embodiment, the pressure sensor 2 uses piezoresistive pressure sensor, the Z axis apparatus for automatically lifting packet
Motor and synchronous pulley are included, in the process of work, pressure sensor 2 passes through internal elastomer detection probe to crystal grain point measurement machine
Pressure, when probe 3 and LED chip contact, the detecting head on elastomer can deform upon, and generate electric signal, pressure sensor 2
It converts the electrical signal to pressure data and is sent to controller；Controller receives the pressure data and sends out pulse signal to electricity
Machine；Motor receives the pulse signal and controls the lifting of Z axis apparatus for automatically lifting by synchronous pulley.When described pressure data etc.
When preset value, the controller control Z axis apparatus for automatically lifting stops lifting.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
All any modification, equivalent and improvement etc., should be included in the utility model made by within the spirit and principle of utility model
Protection domain within.
Claims (7)
1. a kind of probe unit, which is characterized in that including manual position adjusting part, pressure sensor and probe, the probe
It is arranged on pressure sensor, the pressure sensor is arranged on manual position adjusting part, and the pressure sensor is used for
Detection probe pressure.
2. probe unit according to claim 1, which is characterized in that offer two foil gauges patch on the pressure sensor
Hole, the foil gauge patch are connected between hole by link slot, and the strain end of the pressure sensor is equipped with stage portion.
3. probe unit according to claim 2, which is characterized in that the probe unit further includes terminal plate and pressing plate,
The terminal plate is fixed on the lower section of stage portion, and the probe is pressed between pressing plate and terminal plate.
4. probe unit according to claim 1, which is characterized in that the manual position adjusting part include pedestal, X to
Regulating platform, Y-direction regulating platform and Z-direction regulating platform and adjustment X is respectively used to regulating platform, Y-direction regulating platform and Z-direction regulating platform position
X to adjusting nut, Y-direction adjusting nut and Z-direction adjusting nut.
5. probe unit according to claim 4, which is characterized in that the probe unit further includes for being fixedly connected with Z
To the connector of regulating platform and pressure sensor.
6. a kind of crystal grain point measurement machine of adjust automatically probe pressure, which is characterized in that including as described in claim any one of 1-5
Probe unit, Z axis apparatus for automatically lifting and controller, in the controller and Z axis apparatus for automatically lifting and probe unit
Pressure sensor is electrically connected, and the controller receives the pressure data of pressure sensor, and controls Z axis according to the pressure data
Apparatus for automatically lifting lifts.
7. crystal grain point measurement machine according to claim 6, which is characterized in that when the pressure data is equal to preset value, institute
It states controller control Z axis apparatus for automatically lifting and stops lifting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820308898.2U CN207851234U (en) | 2018-03-06 | 2018-03-06 | The crystal grain point measurement machine of probe unit and adjust automatically probe pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820308898.2U CN207851234U (en) | 2018-03-06 | 2018-03-06 | The crystal grain point measurement machine of probe unit and adjust automatically probe pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207851234U true CN207851234U (en) | 2018-09-11 |
Family
ID=63409293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820308898.2U Active CN207851234U (en) | 2018-03-06 | 2018-03-06 | The crystal grain point measurement machine of probe unit and adjust automatically probe pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207851234U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095638A (en) * | 2019-05-28 | 2019-08-06 | 浪潮商用机器有限公司 | A kind of PCB electronic component test method and system based on oscillograph probe |
| CN110941210A (en) * | 2019-10-15 | 2020-03-31 | 大族激光科技产业集团股份有限公司 | Probe pressure automatic control system |
| CN113533939A (en) * | 2021-08-09 | 2021-10-22 | 苏州联讯仪器有限公司 | Probe station for chip test |
| CN114859213A (en) * | 2022-07-05 | 2022-08-05 | 深圳市标谱半导体科技有限公司 | Test needle adjusting part and chip test equipment |
-
2018
- 2018-03-06 CN CN201820308898.2U patent/CN207851234U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095638A (en) * | 2019-05-28 | 2019-08-06 | 浪潮商用机器有限公司 | A kind of PCB electronic component test method and system based on oscillograph probe |
| CN110941210A (en) * | 2019-10-15 | 2020-03-31 | 大族激光科技产业集团股份有限公司 | Probe pressure automatic control system |
| CN113533939A (en) * | 2021-08-09 | 2021-10-22 | 苏州联讯仪器有限公司 | Probe station for chip test |
| CN113533939B (en) * | 2021-08-09 | 2022-03-15 | 苏州联讯仪器有限公司 | Probe station for chip test |
| CN114859213A (en) * | 2022-07-05 | 2022-08-05 | 深圳市标谱半导体科技有限公司 | Test needle adjusting part and chip test equipment |
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