CN207816206U - Based on the microscopical three-dimensional surface topography instrument of mating plate - Google Patents
Based on the microscopical three-dimensional surface topography instrument of mating plate Download PDFInfo
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- CN207816206U CN207816206U CN201721635477.2U CN201721635477U CN207816206U CN 207816206 U CN207816206 U CN 207816206U CN 201721635477 U CN201721635477 U CN 201721635477U CN 207816206 U CN207816206 U CN 207816206U
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- mating plate
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- surface topography
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Abstract
The utility model discloses one kind being based on the microscopical three-dimensional surface topography instrument of mating plate, including lighting module and image-forming module；The lighting module includes light source, optics collimator and cylindrical lens are arranged along same optical axis successively, the image-forming module includes micro objective, and tube lens and camera are arranged along same optical axis successively, and the angle of the optical axis of the image-forming module and the optical axis of lighting module is 90 degree.The utility model measurement surface pattern by the way of mating plate scanning, is scanned into sheet scan, and non-point by point scanning measures, and effectively improves measuring speed.
Description
Technical field
The utility model patent is related to measuring surface form technology, more particularly to a kind of based on the microscopical three-dimensional table of mating plate
Face pattern instrument, imaging precision can reach microscopical micron level.
Background technology
Object surface appearance includes rough object surfaces degree, percent ripple, surface texture etc., in engineering, the surface of part
Pattern can influence even to determine its performance, measure and characterize and is very important when its surface.Three-dimensional surface shape detection is to obtain
A kind of important means of body surface morphological feature, and record, the basis for comparing and replicating objective pattern are taken, it is in machine
Device vision, automatic processing and the fields such as biology and medicine are of great significance and wide application prospect.
3 d surface topography detection is broadly divided into contact surface topography detection and contactless surface topography detects two kinds.
Wherein, non-contact 3-D Shape measure technology is largely to use optical measuring technique, in conjunction with conventional optical metrology technology and
Information optics and the information processing technology mainly have phase-shifting interferometry, laser holographic method, optical features method, laser light contact pilotage at present
The methods of method.Existing most of non-contact 3-D surface topographic apparatus fos are complicated, and price is costly.
Utility model content
The utility model solves the deficiencies in the prior art, provides a kind of based on mating plate (light sheet) microscopical three
Surface topographic apparatus fo is tieed up, which has the characteristics that speed is fast, at low cost and imaging resolution is high.
The technical solution that the utility model patent uses is as follows：
The utility model proposes one kind being based on the microscopical three-dimensional surface topography instrument of mating plate, including lighting module and imaging
Module；
The lighting module includes light source, and optics collimator and cylindrical lens are arranged along same optical axis successively, it is described at
As module includes micro objective, tube lens and camera are arranged along same optical axis successively, the optical axis and photograph of the image-forming module
The angle of the optical axis of bright module is 90 degree.
In further specific implementation mode, the light source is attached by only focusing on cylindrical lens focus after cylindrical lens
Closely, to form mating plate.
In further specific implementation mode, image Z axis location information i.e. vertical sample surface that the camera obtains
The computational methods in direction are：Z=i × Pixel_size × sin (π/4)/M, Pixel_size are image slices vegetarian refreshments pixel value, M
For microscopical object lens enlargement ratio, i is the pixel abscissa in image.
In further specific implementation mode, the camera is CCD or CMOS.
In further specific implementation mode, three-dimensional surface topography instrument lower part installation one can be moved along X-axis and Y-axis
Motor workbench, workbench is horizontally disposed.
The utility model proposes a kind of automatically scanning pattern instrument 3-D view joining method,
Sample to be tested is scanned on the directions x or the directions y (parallel sample surface direction) including x-y electric tables
Step；
This series of images is carried out being spliced to form 3 d surface topography figure step by horizontal coordinate progress sequence.
The utility model patent has the beneficial effect that：
1) the utility model measurement surface pattern by the way of mating plate scanning, is scanned into sheet scan, non-to sweep point by point
Measurement is retouched, measuring speed is effectively improved.
2) the utility model is simple in structure, of low cost.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is image pixel positions and function of spatial position relation principle figure.
Wherein, light source 1, optics collimator 2, cylindrical lens 3, sample to be tested 4, micro objective 5, tube lens 6, camera
7。
Specific implementation mode
Embodiment 1
The utility model proposes one kind being based on the microscopical three-dimensional surface topography instrument of mating plate, including two main modulars：
Lighting module and image-forming module.
The lighting module includes light source 1, optics collimator 2 and cylindrical lens 3.Light beam of light source passes through optics collimator school
After standard, focus to form mating plate by cylindrical lens.
The producing method of mating plate can there are many, then generated by cylindrical lens as point source of light expands, or by dotted
Light source irradiates line style laser generator to generate.Its effect is to dissipate a branch of collimated light in one dimension with sector to generate one
Mating plate.A here as example generates linear light piece to reduce cost and simplied system structure using first way.
Light beam of light source size after calibration is limited, by only focusing on a direction after cylindrical lens to form mating plate,
Focus direction is in cylindrical lens near focal point.Mating plate is irradiated on sample to be tested 4, and the subregion on sample to be tested 4 is illuminated.
The image-forming module includes micro objective 5, tube lens 6 and camera 7.The optical axis of the image-forming module and illumination
The angle of the optical axis of module is 90 degree, anti-on sample surfaces after the mating plate that lighting module generates is irradiated on sample to be tested
It penetrates or back scattering.Micro objective 5 acquires reflected light or rear orientation light, obtains imaging, then imaging passes through lens barrel
Lens focus on camera chip imaging, according to the function of pixel position and the spatial position where sample on camera image
Relationship obtains surface profile image of the sample to be tested by mating plate irradiation area.
Embodiment 2
As shown in Figure 1,1 light beam of light source forms mating plate, light after the calibration of optics collimator 2, by the focusing of cylindrical lens 3
Piece is parallel to the directions x, is irradiated on sample to be tested 4.Micro objective 5 acquires reflection or the backscattering light of sample to be tested 4, obtains
Imaging, imaging are focused on by tube lens 6 on camera 7, and the optical imagery in mating plate region is formed in camera chip 7.
Sample 4 is scanned in y-direction using electric platforms, a series of optical imagery in different mating plates regions is obtained, by a system
Row optical imagery is spliced in order, obtains the complete surface profile pattern of sample.
As shown in Fig. 2, the image Img that camera obtains, resolution ratio is M × N, and the image longitudinal axis is to indicate Z-direction (vertical sample
Surface direction).The light reflection and back scattering of incident laser are reached into object lens, reach imaging surface by tube lens.At
In image planes, the distance of neutrality line of this apart from image planes is i × Pixel_size, and i is the pixel number of the point, Pixel_size
It is the size of a square pixel.Assuming that the first row of Img represents the position of Z=0, and the pixel (i, j) in image, z
Shaft position information computational methods are：
Z=i × Pixel_size × sin (π/4)/M, Pixel_size are image slices vegetarian refreshments pixel value, and M is microscopical
Enlargement ratio.
The three-dimensional surface topography instrument is installed on one and just sets on microscope, is just setting microscope and is carrying the electronic work of x-y
Platform can be scanned sample to be tested on the directions x or the directions y (parallel sample surface direction) using x-y electric tables.
During scan sample, camera chip has recorded a series of surface profile image of sample to be tested subregions.It is by this
After row image is spliced in order, the complete 3 d surface topography of sample to be tested is obtained.
Assuming that the image of ith detection is denoted as Imgi, pixel is M × N.K width images are acquired, and then one three will be established
Dimension data, is defined as ST, and number of pixels is M × N × K.The quick splicing of image will be carried out according to following steps：
For i=1:K；
ST(:,:, i) and=Imgi；
end
The position of the x and y of three-dimensional data determine that the z-axis position in three-dimensional data is believed according to the data of electric table
Breath is determined according to above-mentioned z-axis positional information calculation method.
To sum up, the utility model light beam of light source focuses to form mating plate by cylindrical lens after optics collimator is calibrated
It is irradiated on sample to be tested.Micro objective acquires reflection or the backscattering light of sample to be tested, obtains imaging, and imaging passes through
Tube lens focus in camera chip, the optical imagery in mating plate region are formed in camera chip, using electric platforms to sample
Product are scanned, and obtain a series of optical imagery in different mating plates regions, a series of optical imagerys are spliced in order, are obtained
To the complete surface profile pattern of sample.Using the high microscopical object lens of amplification factor, then the three-dimensional of high resolution is can get
Surface topography.
Embodiment in foregoing description can be further combined or replace, and embodiment is only new to this practicality
The preferred embodiment of type patent is described, and is not defined to the conception and scope of the utility model patent, is not departing from
Under the premise of the utility model patent design philosophy, technical solution of the professional and technical personnel in the art to the utility model patent
The various changes and modifications made, belong to the scope of protection of the utility model.
Claims (2)
1. one kind being based on the microscopical three-dimensional surface topography instrument of mating plate, it is characterised in that：Including lighting module and image-forming module；
The lighting module includes light source, and optics collimator and cylindrical lens are arranged along same optical axis successively, the imaging mould
Block includes micro objective, and tube lens and camera are arranged along same optical axis successively, optical axis and the illumination mould of the image-forming module
The angle of the optical axis of block is 90 degree；
The light source is by only focusing on cylindrical lens near focal point after cylindrical lens, to form mating plate；Or by dotted
Light source irradiates line style laser generator, and dissipating a branch of collimated light in one dimension with sector generates a mating plate；
Three-dimensional surface topography instrument lower part installation one can be along the motor workbench that X-axis and Y-axis move, and workbench is horizontally disposed.
2. according to claim 1 be based on the microscopical three-dimensional surface topography instrument of mating plate, it is characterised in that:The camera
For CCD or CMOS.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721635477.2U CN207816206U (en) | 2017-11-30 | 2017-11-30 | Based on the microscopical three-dimensional surface topography instrument of mating plate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721635477.2U CN207816206U (en) | 2017-11-30 | 2017-11-30 | Based on the microscopical three-dimensional surface topography instrument of mating plate |
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| CN207816206U true CN207816206U (en) | 2018-09-04 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020150853A1 (en) * | 2019-01-21 | 2020-07-30 | 中国科学院宁波工业技术研究院慈溪生物医学工程研究所 | Light sheet microscope for corneal nerve imaging |
-
2017
- 2017-11-30 CN CN201721635477.2U patent/CN207816206U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020150853A1 (en) * | 2019-01-21 | 2020-07-30 | 中国科学院宁波工业技术研究院慈溪生物医学工程研究所 | Light sheet microscope for corneal nerve imaging |
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