CN207800563U - The equipment for handling miniature discoid part - Google Patents
The equipment for handling miniature discoid part Download PDFInfo
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- CN207800563U CN207800563U CN201820109292.6U CN201820109292U CN207800563U CN 207800563 U CN207800563 U CN 207800563U CN 201820109292 U CN201820109292 U CN 201820109292U CN 207800563 U CN207800563 U CN 207800563U
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- miniature
- discoid part
- rolling
- equipment
- discoid
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Abstract
The utility model provides a kind of equipment of the miniature discoid part of processing, including three regions, is followed successively by frame top light source and the area of observation coverage, intermediate treatment area, lower machine people and motor control zone from top to bottom.According to the equipment of the miniature discoid part of processing described in the utility model, when handling chip or miniature discoid part, electric pushrod coordinates with robot arm, it can be achieved that arm end degree of freedom moves.Electric pushrod provides up and down motion, and robot arm can be such that rolling mechanism is moved in a certain plane, and rolling mechanism can make chip or discoid part dynamic around rolling support wheel and the circle center line connecting shaft rotation for the driving wheel that rolls.With simple in structure, floor space is small, the big advantage of handling capacity.
Description
Technical field
The utility model is related to testing equipment field, more particularly to a kind of equipment of the miniature discoid part of processing.
Background technology
Miniature discoid part especially semiconductor wafer, production technology is complicated, and causing these parts always to will appear can not keep away
The defect or mistake exempted from, so effective detection means is extremely necessary.Detection technique relatively broad at present is examined for optics
It surveys, by applying light source, surface reflection is collected to analyze discoid part surface characteristic in adjustment plate-like part angle direction.It is existing
There are relevant treatment or detection device complex, volume is big, of high cost, and handling capacity is small, cannot meet testing requirements.
In view of this, needing to be improved the prior art, with satisfaction at present to the equipment of the miniature discoid part of processing
Requirement.
Utility model content
Technical problem to be solved in the utility model is to overcome the deficiencies of the prior art and provide a kind of miniature plate-like of processing
The equipment of part has simple in structure relative to existing detection device, and floor space is small, the big advantage of handling capacity.
To achieve the above object, utility model provides the following technical solutions：
A kind of equipment of the miniature discoid part of processing, including three regions, be followed successively by from top to bottom frame top light source and
The area of observation coverage, intermediate treatment area, lower machine people and motor control zone.
Further, overall structure includes three-dimensional device framework, and light source and sight are equipped on the top of device framework
Area is surveyed, robot arm and motor control zone are installed in the lower part of device framework, in the both sides of device framework setting workbench A
With workbench B.
Further, it is that miniature hdd fills part treatment region at the middle part of device framework, including electric pushrod, robot
Arm, switching mechanism protective shell, switching mechanism and discoid part.
Further, to be detected or processing discoid part or chip are from workbench A, by electric pushrod and robot
Arm adjustment posture picks up to piece test processing region and combines switching mechanism to chip or the progress optics inspection of miniature discoid part
It looks into or is surface-treated, after having handled, send to workbench B.
Description of the drawings
Fig. 1 is the overall construction drawing of the miniature discoid part of processing of the utility model；
The miniature hdd of Fig. 2 the utility model fills part treatment region general structure schematic diagram；
Fig. 3 is the end effector hand supporting structure schematic diagram of the utility model；
Fig. 4 is that structural schematic diagram is rolled in the end effector handspring of the utility model；
Reference sign：
1, device framework；2, robot arm and motor control zone；3, electric pushrod；4, robot arm；5, tipper
Structure protective shell；6, rolling mechanism；7, workbench A；8, workbench B；9, discoid part；10, light source and the area of observation coverage；11, robot
Pedestal；12, robot arm driving motor；13, roll support wheel；14, roll driving wheel；15, chip or miniature discoid part
Clamping device；16 chips or miniature discoid part；17, roll mechanism driving-motor；18, pinion gear；19, roller A；20, roller B；21、
Bearing；22, the sides holder A；23, the sides holder B.
(pay attention to：Shown structure in attached drawing simply to illustrate that utility model feature signal, be not intended to according to attached drawing
Shown structure.)
Specific implementation mode
The utility model is described in further detail in the following with reference to the drawings and specific embodiments：
As shown in Figure 1, according to the equipment of the miniature discoid part of processing described in the utility model, including three regions, by
Top to bottm is followed successively by frame top light source and the area of observation coverage, intermediate treatment area, lower machine people and motor control zone.
Overall structure includes three-dimensional device framework 1, and light source and the area of observation coverage 10 are equipped on the top of device framework 1,
Robot arm and motor control zone are installed in the lower part of device framework 1, device framework 1 both sides setting workbench A7 and
Workbench B8.
The middle part of device framework 1 be miniature hdd fill part treatment region, including electric pushrod 3, robot arm 4,
Switching mechanism protective shell 5, switching mechanism 6 and discoid part 9.
To be detected or processing discoid part or chip are adjusted from workbench A7 by electric pushrod 3 and robot arm 4
Posture picks up to piece test processing region and combines switching mechanism 6 part is optically inspected or is surface-treated.It has handled
Afterwards, it send to workbench B8.
As shown in Fig. 2, miniature hdd dress part treatment region includes robot base 11, robot arm driving motor 12, turns over
Roll support wheel 13, rolling driving wheel 14, chip or miniature discoid part clamping device 15 and chip or miniature discoid part 16.Its
In, 11 centrally disposed electric pushrod 3 of robot base, electric pushrod 3 is driven by robot arm driving motor 12.
Wherein, electric pushrod 3 provides up and down motion, and robot arm 4 can be such that rolling mechanism 6 is moved in a certain plane,
Rolling mechanism 6 can make chip or miniature discoid part 16 around the circle center line connecting shaft rotation of rolling support wheel 13 and the driving wheel 14 that rolls
It is dynamic.
As shown in figure 3, end effector hand holder include rolling mechanism driving-motor 17, pinion gear 18, roller A19 and roller B20,
Bearing 21, the sides holder A 22, the sides holder B 23.
Wherein, holder generally " [" type structure, including bottom and the sides holder A 22 of two bottom sides and the sides holder B 23.
It is horizontally installed with rolling mechanism driving-motor 17 on bottom, pinion gear 18, roller A19 and roller B20 are provided on the sides holder B 23.
And wherein, roller A19 and roller B20 is arranged by bearing 21 in the circular hole of the sides holder B 23, and the setting of pinion gear 18 exists
23 outside of the sides holder B, and coordinate with rolling mechanism driving-motor 17.
As shown in figure 4, end effector hand tumble mechanism includes rolling support wheel 13 and rolling driving wheel 14, roll support wheel
13 all have cross support construction with rolling driving wheel 14, and the support construction of two-wheeled is coaxial by a cuboid fixed part
It is connected, in 14 outside of rolling driving wheel, chip or miniature discoid part clamping device 12 are fixed on the cuboid fixed part.
Wherein, rolling driving wheel 14 has a circle external tooth, for being engaged with pinion gear 18.
In the structure that Fig. 4 is shown, 19a and 20a is the front-end surface of roller A19 and roller B20, and 14a is rolling driving wheel 14
Close to holder side surface, 14b is rolling 14 lubrication groove surface periphery of driving wheel, and 14c is 14 lubrication groove surface lateral margin of rolling driving wheel,
14d is the inside diameter surface of rolling driving wheel 14, and 13d is rolling 14 inside diameter surface of driving wheel.The mechanism driving-motor 17 that rolls drives
When the driving wheel 14 that rolls rotates, in the sides holder B 23,19a is contacted with 14b, and 20a is contacted with 14d.Likewise, in the sides holder A 22,
Also corresponding contact.
According to the above structure, according to the equipment of the miniature discoid part of processing described in the utility model, in processing chip or
When miniature discoid part 16, electric pushrod 3 coordinates with robot arm 4, it can be achieved that the degree of freedom of arm end 4 moves.It is electronic
Push rod 3 provides up and down motion, and robot arm 4 can be such that rolling mechanism 6 is moved in a certain plane, and rolling mechanism 6 can make chip
Or miniature discoid part 16 is dynamic around rolling support wheel 13 and the circle center line connecting shaft rotation for the driving wheel 14 that rolls.
According to the equipment of the miniature discoid part of processing described in the utility model, with traditional miniature discoid part of processing
Equipment is compared, and is had the characteristics that：
(1) structure is further simplified；
(2) rotational angle is flexible, and processing capacity improves.
The above, the only preferred embodiment of utility model, are not intended to limit the protection domain of utility model,
It is all within the spirit and principle of utility model made by all any modification, equivalent and improvement etc., should be included in practical new
Within the protection domain of type.
Claims (8)
1. a kind of equipment of the miniature discoid part of processing, including three regions, are followed successively by frame top light source and sight from top to bottom
Survey area, intermediate treatment area, lower machine people and motor control zone, it is characterised in that：
Overall structure includes three-dimensional device framework (1), and light source and the area of observation coverage are equipped on the top of device framework (1)
(10), robot arm and motor control zone are installed in the lower part of device framework (1), are arranged in the both sides of device framework (1)
Workbench A (7) and workbench B (8)；
It is that miniature hdd fills part treatment region at the middle part of device framework (1), including electric pushrod (3), robot arm
(4), switching mechanism protective shell (5), rolling mechanism (6) and discoid part (9)；
To be detected or processing discoid part or chip are adjusted at workbench A (7) by electric pushrod (3) and robot arm (4)
Whole posture picks up to piece test processing region and combines roller structure (6) to chip or miniature discoid part (16) progress optics
It checks or is surface-treated, after having handled, send to workbench B (8).
2. the equipment of the miniature discoid part of processing according to claim 1, it is characterised in that：
Miniature hdd dress part treatment region includes robot base (11), robot arm driving motor (12), rolling support wheel
(13), rolling driving wheel (14), chip or miniature discoid part clamping device (15) and chip or miniature discoid part (16).
3. the equipment of the miniature discoid part of processing according to claim 2, it is characterised in that：
Robot base (11) centrally disposed electric pushrod (3), electric pushrod (3) are driven by robot arm driving motor (12)
Dynamic, electric pushrod (3) provides up and down motion, and robot arm (4) can be such that rolling mechanism (6) is moved in a certain plane, rolls
Mechanism (6) can make chip or miniature discoid part (16) around the circle center line connecting of rolling support wheel (13) and rolling driving wheel (14)
Shaft rotation is dynamic.
4. the equipment of the miniature discoid part of processing according to claim 3, it is characterised in that：
End effector hand holder includes rolling mechanism driving-motor (17), pinion gear (18), roller A (19) and roller B (20), bearing
(21), the sides holder A (22), the sides holder B (23).
5. the equipment of the miniature discoid part of processing according to claim 4, it is characterised in that：
Holder generally " [" type structure, including bottom and the sides holder A (22) of two bottom sides and the sides holder B (23), on bottom
It is horizontally installed with rolling mechanism driving-motor (17), pinion gear (18), roller A (19) and roller B are provided on the sides holder B (23)
(20)。
6. the equipment of the miniature discoid part of processing according to claim 5, it is characterised in that：
Roller A (19) and roller B (20) is arranged by bearing (21) in the circular hole of the sides holder B (23), and pinion gear (18) setting is being propped up
On the outside of the sides frame B (23), and coordinate with rolling mechanism driving-motor (17).
7. the equipment of the miniature discoid part of processing according to claim 6, it is characterised in that：
End effector hand tumble mechanism includes rolling support wheel (13) and rolling driving wheel (14), roll support wheel (13) and rolling
Driving wheel (14) all has cross support construction, and the support construction of two-wheeled is coaxially connected by a cuboid fixed part,
On the outside of rolling driving wheel (14), chip or miniature discoid part clamping device (15) are fixed on the cuboid fixed part.
8. the equipment of the miniature discoid part of processing according to claim 7, it is characterised in that：
The driving wheel (14) that rolls has a circle external tooth, for being engaged with pinion gear (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820109292.6U CN207800563U (en) | 2018-01-23 | 2018-01-23 | The equipment for handling miniature discoid part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820109292.6U CN207800563U (en) | 2018-01-23 | 2018-01-23 | The equipment for handling miniature discoid part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207800563U true CN207800563U (en) | 2018-08-31 |
Family
ID=63269962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820109292.6U Active CN207800563U (en) | 2018-01-23 | 2018-01-23 | The equipment for handling miniature discoid part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207800563U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108054124A (en) * | 2018-01-23 | 2018-05-18 | 哈工大机器人（合肥）国际创新研究院 | The equipment for handling miniature discoid part |
-
2018
- 2018-01-23 CN CN201820109292.6U patent/CN207800563U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108054124A (en) * | 2018-01-23 | 2018-05-18 | 哈工大机器人（合肥）国际创新研究院 | The equipment for handling miniature discoid part |
| CN108054124B (en) * | 2018-01-23 | 2024-05-03 | 哈工大机器人（合肥）国际创新研究院 | Device for treating miniature disk-shaped parts |
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