CN207740200U - A kind of composite molecular pump - Google Patents
A kind of composite molecular pump Download PDFInfo
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- CN207740200U CN207740200U CN201820052424.6U CN201820052424U CN207740200U CN 207740200 U CN207740200 U CN 207740200U CN 201820052424 U CN201820052424 U CN 201820052424U CN 207740200 U CN207740200 U CN 207740200U
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Abstract
The utility model discloses a kind of composite molecular pump, composite molecular pump therein includes molecular pump ontology, controller, magnetic suspension bearing control system, permanent magnet high-speed motor control system；Molecular pump ontology, magnetic suspension bearing control system, permanent magnet high-speed motor control system is electrically connected in the controller.The utility model Active Magnetic Suspending Bearing realizes the numerical control system of active magnetic bearings using concentration feedback control algorithm using DSP as platform.
Description
Technical field
The utility model is related to pumping equipments, and in particular to a kind of hybrid magnetic bearing magnetic suspension composite molecular pump.
Background technology
Currently, molecular pump is the mechanical turbine formula pumping equipment designed according to molecular motion rule, can obtain
Ultra-high vacuum is the required equipment of the systems such as accelerator, electronic collision machine, laser, has a wide range of applications field.It is taken out
Mechanism of qi reason is that the rigid body surface by high-speed motion in molecular flow region passes to gas molecule with momentum, and gas molecule is made to exist
Directed flow is generated in the direction of motion on rigid body surface, to achieve the purpose that pumping.From the pumping volume of molecular pump：Molecule
The rotor blade of pump must have with linear velocity similar in gas molecular velocities, have such high speed can just make gas molecule
Change the characteristic of random scatter after colliding with movable vane piece and makees directed movement.
Molecular pump is mainly used in solar energy power generating industry, semiconductor industry, vacuum coating industry, sapphire screen production
Industry and scientific research institutions.For example, some critical process in semiconductor chip manufacturing industry, such as the growth of plasma etching, film all need
It to complete under a high vacuum, while have gas generation in process, so as to cause being greatly lowered for vacuum degree, thus
It is required that molecular pump has larger pumping speed to improve vacuum degree rapidly in wider vacuum range, it is often several in pressure to need molecular pump
There is larger exhaust capacity when pa to tens pa.With the continuous development and innovation of these application fields, it is desirable that molecular pump is also wanted
Corresponding technical merit, such as smaller volume, lower power consumption, 360 degree of indifference installations etc. are kept up at any time.
Existing molecular pump is broadly divided into conventional mechanical bearings brace type molecular pump and Active Magnetic Suspending Bearing brace type point
Son pump.Wherein in the process of running, there are machines between molecular pump rotor and mechanical bearing for conventional mechanical bearings brace type molecular pump
Tool is worn, and bearing needs to regularly replace, can be only applied to low side industry and be also gradually eliminated；And existing active magnetic
The magnetic force that bearing support formula molecular pump is used for suspending molecule pump rotor system is all provided by Active Magnetic Suspending Bearing, this magnetic force is not
Its own gravity of rotor-support-foundation system is only overcome also to overcome disturbance of rotor-support-foundation system during high-speed cruising, so fever can be compared with
Greatly, while in order to adapt to molecular pump 360 degree of arbitrary this mounting means of installation can be realized, it in the design process must be in radial direction
With it is axial all there are larger electromagnetic force surpluses to ensure to be needed according to client come installation and debugging molecular pump, it is not only unrestrained in this way
Design space is taken and has also increased design cost, while various surplus designs also ultimately increase the loss of molecular pump.
Utility model content
The main purpose of the utility model is to provide a kind of composite molecular pump and control methods.
The technical solution adopted in the utility model is：A kind of composite molecular pump, including molecular pump ontology, controller, magnetcisuspension
Floating axle holds control system, permanent magnet high-speed motor control system；Molecular pump ontology, magnetic suspension shaft is electrically connected in the controller
Hold control system, permanent magnet high-speed motor control system；The molecular pump ontology includes pump case, impeller, spacer ring, stationary plate, draft stage
Stator, permanent magnet high-speed motor, electromagnetic spindles, recirculated water spacer ring, Signal connector, upper protection bearing, upper radial transducer and passive
Magnetic bearing component, upper radial Active Magnetic Bearing, lower radial Active Magnetic Bearing, lower radial transducer and passive magnetic bearing
Component, gas outlet flange, protective gas flange, upper axial backmixing magnetic bearing, lower axial backmixing magnetic bearing, lower protection axis
It holds, axial sensor, thrust disc；
The composite molecular pump includes two radial hybrid magnetic suspension bearings and two axial backmixing magnetic suspension bearings：Upper diameter
To Active Magnetic Bearing, lower radial Active Magnetic Bearing, upper axial backmixing magnetic bearing, lower axial backmixing magnetic bearing；
The radial hybrid magnetic suspension bearing of described two is made of stator and rotor, the magnetic poles several again that stator is 4 or 4,
If molded by dry plate 0.15-0.5mm thickness silicon steel sheet stacks, on magnetic pole then coiling radially inlays a circle in iron core again
Permanent magnet is process；Rotor, which is made and covered using the circular ring shape silicon steel plate stacking of multi-disc 0.15-0.5mm thickness, is attached to electromagnetic spindles
On；
Two axial backmixing magnetic suspension bearings are also made of stator and rotor, stator using hollow conducting magnet core,
Magnet exciting coil and set of permanent magnets at；Rotor is made by solid magnetic conduction disk；
Diameter in upper radial transducer and passive magnetic bearing component and lower radial transducer and passive magnetic bearing component
It is sensed to sensor for inductance type, coil is wrapped on the journal bearing iron core of fixed radial permanent magnet, reduces radial mixing
The axial space of magnetic suspension bearing；Axial sensor is inductance type transducer；
Electromagnetic spindles are made of mandrel and each bearing rotor assembly；
Two radial hybrid magnetic suspension bearings and two axial backmixing magnetic suspension bearings carry out electromagnetic spindles by magnetic force
Five degree of freedom controls, the geometric center for being suspended in bearing stator for making electromagnetic spindles stablize, without Mechanical Contact；Two of which
Four spatial degrees of freedom of radial hybrid magnetic suspension bearing control rotor, including control rotor the directions x, the directions y translation and
Around the rotation of x-axis and y-axis, a spatial degrees of freedom of two Axial Magnetic Bearing control rotors, including rotor is controlled in the side z
To translation；It removes outside the degree of freedom that z-axis rotates, remaining five degree of freedom is all controlled by magnetic suspension bearing.
The advantages of the utility model：
The utility model reduces fever, rotor-support-foundation system drive part uses Permanent Magnet and Electric to further decrease design space
Machine, therefore molecular pump rotor system is not powered in Active Magnetic Suspending Bearing, is influenced by Magnetic Field for Permanent Magnet Electrical Machines, when static,
Rotor-support-foundation system can be supported by protection bearing, and after Active Magnetic Suspending Bearing is powered, Active Magnetic Suspending Bearing can export a magnetic
Power helps passive magnetic suspension bearing to overcome the magnetic biasing pulling force of motor-field generation and finds equalization point, finally by molecular pump rotor system
System is suspended in the suspension center of magnetic levitation bearing system.After molecular pump brings into operation, Active Magnetic Suspending Bearing passes through sensor
The operating condition of system detectio rotor-support-foundation system, in rotor rotation process, the distance of rotor range sensor position of magnetic pole is different,
Different voltage values is just will produce, by the electric mould electrotransformation of number, the real-time displacement signal that sensor is detected turns through oversampling circuit
It changes, the electromagnetic force that control signal makes Active Magnetic Suspending Bearing adjust all directions in real time is finally provided by controller so that rotor
System can surround the rotating operation at its rotation geometry center always.
The control method of the controller of the utility model is established on the basis of electromagnetic principles, by the structure of magnetic bearing
Model inference goes out electromagnetism Bearing Capacity Formula, further derives the mathematical model of magnetic bearing on this basis, dynamic in conjunction with rotor
Theory of mechanics establishes centralized control model.According to electromagnetic bearing to digitial controller proposed requirement, use with DSP processing
Device is that the hardware plan of core designs.It is corresponding according to, to the design requirement of power amplifier, being developed in active magnet bearing systems
Pwm power amplifier.On the basis of these hardware systems, using the Software for Design of digitial controller, state sky is applied
Between feedback control algorithm, digital filtering, hardware filtering and data communication control.
Other than objects, features and advantages described above, the utility model also has other purposes, feature and excellent
Point.Below with reference to figure, the utility model is described in further detail.
Description of the drawings
The attached drawing constituted part of this application is used to provide a further understanding of the present invention, the utility model
Illustrative embodiments and their description are not constituted improper limits to the present invention for explaining the utility model.
Fig. 1 is a kind of structure chart of composite molecular pump of the utility model；
Fig. 2 is that a kind of radial transducer of composite molecular pump of the utility model mixes passive magnetic bearing structural schematic diagram
Structural schematic diagram；
Fig. 3 is a kind of control method flow chart of composite molecular pump of the utility model；
Fig. 4 is a kind of magnetic suspension bearing control algolithm block diagram of composite molecular pump of the utility model.
Reference numeral：
1 it is pump case, 2 be impeller, 3 be spacer ring, 4 be stationary plate, 5 be draft stage stator, 6 be permanent magnet high-speed motor, 7 is electromagnetism
Main shaft, 8 be recirculated water spacer ring, 9 be Signal connector, 10 be upper protection bearing, 11 be upper radial transducer and passive magnetic bearing
Component, 12 for upper radial Active Magnetic Bearing, 13 are lower radial Active Magnetic Bearing, 14 are lower radial transducer and passive magnetic force
Bearing assembly, 15 be gas outlet flange, 16 be protective gas flange, 17 be upper axial backmixing magnetic bearing, 18 be that lower axial direction is mixed
Close magnetic bearing, 19 be lower protection bearing, 20 be axial sensor, 21 be thrust disc, 22 be permanent magnet, 23 be coil.
Specific implementation mode
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
With reference to figure 1, as shown in Figure 1, a kind of composite molecular pump, including molecular pump ontology, controller, magnetic suspension bearing control
System, permanent magnet high-speed motor control system；Molecular pump ontology, magnetic suspension bearing control system is electrically connected in the controller
System, permanent magnet high-speed motor control system；The molecular pump ontology includes pump case 1, impeller 2, spacer ring 3, stationary plate 4, draft stage stator
5, permanent magnet high-speed motor 6, electromagnetic spindles 7, recirculated water spacer ring 8, Signal connector 9, upper protection bearing 10, upper radial transducer and by
Dynamic magnetic bearing component 11, upper radial Active Magnetic Bearing 12, lower radial Active Magnetic Bearing 13, lower radial transducer and passive
Magnetic bearing component 14, gas outlet flange 15, protective gas flange 16, upper axial backmixing magnetic bearing 17, lower axial backmixing magnetic
Power bearing 18, lower protection bearing 19, axial sensor 20, thrust disc 21；
The composite molecular pump includes two radial hybrid magnetic suspension bearings and two axial backmixing magnetic suspension bearings：Upper diameter
To Active Magnetic Bearing 12, lower radial Active Magnetic Bearing 13, upper axial backmixing magnetic bearing 17, lower axial backmixing magnetic bearing
18；
The radial hybrid magnetic suspension bearing of described two is made of stator and rotor, the magnetic poles several again that stator is 4 or 4,
If molded by dry plate 0.15-0.5mm thickness silicon steel sheet stacks, on magnetic pole then coiling radially inlays a circle in iron core again
Permanent magnet is process；Rotor, which is made and covered using the circular ring shape silicon steel plate stacking of multi-disc 0.15-0.5mm thickness, is attached to electromagnetic spindles
On；
Two axial backmixing magnetic suspension bearings are also made of stator and rotor, stator using hollow conducting magnet core,
Magnet exciting coil and set of permanent magnets at；Rotor is made by solid magnetic conduction disk；
In upper radial transducer and passive magnetic bearing component 11 and lower radial transducer and passive magnetic bearing component 14
Radial transducer be inductance type sensing, coil is wrapped on the journal bearing iron core of fixed radial permanent magnet, reduces radial
The axial space of hybrid magnetic suspension bearing；Axial sensor 20 is inductance type transducer；
Electromagnetic spindles 7 are made of mandrel and each bearing rotor assembly；
Two radial hybrid magnetic suspension bearings and two axial backmixing magnetic suspension bearings carry out electromagnetic spindles by magnetic force
Five degree of freedom controls, the geometric center for being suspended in bearing stator for making electromagnetic spindles stablize, without Mechanical Contact；Two of which
Four spatial degrees of freedom of radial hybrid magnetic suspension bearing control rotor, including control rotor the directions x, the directions y translation and
Around the rotation of x-axis and y-axis, a spatial degrees of freedom of two Axial Magnetic Bearing control rotors, including rotor is controlled in the side z
To translation；It removes outside the degree of freedom that z-axis rotates, remaining five degree of freedom is all controlled by magnetic suspension bearing.
With reference to figure 2, as shown in Fig. 2, the control method of the composite molecular pump, includes the following steps：
S1, controller power on, and power to magnetic suspension molecular pump system；
S2, controller first control rotor-support-foundation system axial suspension；
S3, controller control radial suspension on rotor-support-foundation system；
S4, controller control radial suspension under rotor-support-foundation system；
S5, controller control rotor-support-foundation system integrated suspension, and find rotor-support-foundation system in the outstanding of passive magnetic levitation bearing system
It is floating to stablize center；
S6, controller control rotor-support-foundation system operation, and Active Magnetic Suspending Bearing system is used by sensor feedback signal
Pid control algorithm is corrected rotor-support-foundation system running orbit.
The utility model provides a kind of novel hybrid magnetic suspension bearing technology and its manufacturing method.
The hybrid magnetic suspension bearing of the utility model has 4, including two radial hybrid magnetic suspension bearings and two axial directions
Hybrid magnetic suspension bearing.Radial hybrid magnetic suspension bearing is made of stator and rotor, and stator uses 4 or 4 magnetic pole sides several again
Case, molded by multi-disc 0.15-0.5mm thickness silicon steel sheet stacks, on magnetic pole then coiling radially inlays one in iron core again
Circle permanent magnet is process；Rotor, which is made and covered using the circular ring shape silicon steel plate stacking of multi-disc 0.15-0.5mm thickness, is attached to electromagnetism master
On axis.Axial backmixing magnetic suspension bearing is also made of stator and rotor, and stator uses hollow conducting magnet core, magnet exciting coil and permanent magnetism
Body forms；Rotor is made by solid magnetic conduction disk.Radial transducer is sensed using inductance type, and coil is wrapped in fixed radial forever
On the journal bearing iron core of magnet, to reduce the axial space of radial hybrid magnetic suspension bearing.Axial sensor is using electricity
Sensing type sensor.Electromagnetic spindles are made of mandrel and each bearing rotor assembly, and to improve main axis stiffness, mandrel is using non-magnetic
High-strength alloy Steel material is completed through repeatedly annealing.Four hybrid magnetic suspension bearings carry out five by magnetic force to electromagnetic spindles
A degree of freedom control, the geometric center for being suspended in bearing stator for making electromagnetic spindles stablize, without any Mechanical Contact.Wherein two
A radial direction hybrid magnetic suspension bearing controls four spatial degrees of freedom of rotor, that is, control rotor the directions x, the directions y it is flat
Rotation dynamic and around x-axis and y-axis, two Axial Magnetic Bearings control a spatial degrees of freedom of rotor, that is, control rotor
Translation in the directions z.It removes outside the degree of freedom that z-axis rotates in this way, remaining five degree of freedom all receives magnetic suspension bearing
Control.
The control method of the utility model is as follows:The utility model use hybrid magnetic suspension bearing, i.e., by set of permanent magnets at
Passive magnetic suspension bearing and the Active Magnetic Suspending Bearing that is made of electromagnetic core ledger line circle formed by reasonably designing.Wherein
The advantages of passive magnetic suspension bearing, which has, to occupy little space, and magnetic density is high and there is no heating loss, but also have simultaneously
Ability of Resisting Disturbance is small, uncontrolled disadvantage；And Active Magnetic Suspending Bearing then have it is actively controllable, and can according to design exclude one
The advantages of cutting disturbance, but it has occupied space big simultaneously, can continue to generate heat in the case of high speed rotation.The utility model
The shortcomings that the advantages of actually using situation according to molecular pump, combine both bearings, minimum has compressed both bearings.This
It in utility model, occupies little space in view of passive magnetic suspension bearing and characteristic that magnetic density is high, it is contemplated that maglev molecular pump
Weight is relatively large in the entire system for rotor-support-foundation system, needs larger magnetic force to balance the gravity of rotor-support-foundation system, and this
Gravity different size of ratio can decompose radial and axial magnetic with the variation of the setting angle of maglev molecular pump
Above suspension bearing, if only using Active Magnetic Suspending Bearing, it is contemplated that mounting means is uncertain, in order to adapt to various installations
Mode is it is necessary to designing larger surplus to Active Magnetic Suspending Bearing, that is, to greatly increase holding for Active Magnetic Suspending Bearing
Power is carried, different with mounting means in this way, be bound to the surplus mistake for causing at least one direction magnetic suspension bearing to reserve
Greatly, this design scheme can not only increase the volume of magnetic suspension system also can waste magnetic suspension bearing under different setting angles
Performance, while can also increase the axis radial direction ratio of rotor-support-foundation system, be unfavorable for the operation stability of magnetic suspension rotor system, it is comprehensive
The static suspension magnetic force of molecular pump rotor system is provided in consideration the utility model using passive magnetic suspension bearing, that is, logical
Permanent magnetic is crossed to offset the gravity of rotor-support-foundation system.And permanent magnet magnetic field density is high, and volume small as possible can be used to realize big weight
Measure the static bearing of rotor-support-foundation system.The static suspension magnetic force of molecular pump rotor system, molecule are provided by passive magnetic suspension bearing
No matter how pump, which is installed, does not all need Active Magnetic Suspending Bearing output magnetic force to provide magnetic force, thus substantially reduces fever.
Since passive magnetic suspension bearing can only realize static bearing or low speed bearing, as long as extraneous a little disturbance is easy for losing
It goes to balance, the utility model applies Active Magnetic Suspending Bearing simultaneously.In the present invention, Active Magnetic Suspending Bearing is mainly
Inhibit maglev molecular pump itself to generate in the process of running and the extraneous disturbance brought, ensures that maglev molecular pump can be put down
Steady high-speed cruising, since Active Magnetic Suspending Bearing no longer needs to provide the weight that enough magnetic force carrys out balance molecule pump rotor system
Power, the ratio that volume can design is pure much smaller with Active Magnetic Suspending Bearing, and just this additional space can install accordingly
Sensor and passive magnetic suspension bearing permanent magnet.Active Magnetic Suspending Bearing in the utility model is using concentration feedback control
Algorithm realizes the numerical control system of active magnetic bearings using DSP as platform.
The utility model reduces fever, rotor-support-foundation system drive part uses Permanent Magnet and Electric to further decrease design space
Machine, therefore molecular pump rotor system is not powered in Active Magnetic Suspending Bearing, is influenced by Magnetic Field for Permanent Magnet Electrical Machines, when static,
Rotor-support-foundation system can be supported by protection bearing, and after Active Magnetic Suspending Bearing is powered, Active Magnetic Suspending Bearing can export a magnetic
Power helps passive magnetic suspension bearing to overcome the magnetic biasing pulling force of motor-field generation and finds equalization point, finally by molecular pump rotor system
System is suspended in the suspension center of magnetic levitation bearing system.After molecular pump brings into operation, Active Magnetic Suspending Bearing passes through sensor
The operating condition of system detectio rotor-support-foundation system, in rotor rotation process, the distance of rotor range sensor position of magnetic pole is different,
Different voltage values is just will produce, by the electric mould electrotransformation of number, the real-time displacement signal that sensor is detected turns through oversampling circuit
It changes, the electromagnetic force that control signal makes Active Magnetic Suspending Bearing adjust all directions in real time is finally provided by controller so that rotor
System can surround the rotating operation at its rotation geometry center always.
The control method of the controller of the utility model is established on the basis of electromagnetic principles, by the structure of magnetic bearing
Model inference goes out electromagnetism Bearing Capacity Formula, further derives the mathematical model of magnetic bearing on this basis, dynamic in conjunction with rotor
Theory of mechanics establishes centralized control model.According to electromagnetic bearing to digitial controller proposed requirement, use with DSP processing
Device is that the hardware plan of core designs.It is corresponding according to, to the design requirement of power amplifier, being developed in active magnet bearing systems
Pwm power amplifier.On the basis of these hardware systems, using the Software for Design of digitial controller, state sky is applied
Between feedback control algorithm, digital filtering, hardware filtering and data communication control.
The above is only the preferred embodiment of the present invention, is not intended to limit the utility model, all in this practicality
Within novel spirit and principle, any modification, equivalent replacement, improvement and so on should be included in the guarantor of the utility model
Within the scope of shield.
Claims (1)
1. a kind of composite molecular pump, which is characterized in that including molecular pump ontology, controller, magnetic suspension bearing control system, permanent magnetism
High-speed electric expreess locomotive control system；Molecular pump ontology, magnetic suspension bearing control system, permanent magnetism high speed is electrically connected in the controller
Electric machine control system；The molecular pump ontology include pump case (1), impeller (2), spacer ring (3), stationary plate (4), draft stage stator (5),
Permanent magnet high-speed motor (6), electromagnetic spindles (7), recirculated water spacer ring (8), Signal connector (9), upper protection bearing (10), upper radial biography
Sensor and passive magnetic bearing component (11), upper radial Active Magnetic Bearing (12), lower radial Active Magnetic Bearing (13), lower diameter
To sensor and passive magnetic bearing component (14), gas outlet flange (15), protective gas flange (16), upper axial backmixing magnetic force
Bearing (17), lower axial backmixing magnetic bearing (18), lower protection bearing (19), axial sensor (20), thrust disc (21)；
The composite molecular pump includes two radial hybrid magnetic suspension bearings and two axial backmixing magnetic suspension bearings：It is upper radial main
Dynamic magnetic bearing (12), lower radial Active Magnetic Bearing (13), upper axial backmixing magnetic bearing (17), lower axial backmixing magnetic force axis
It holds (18)；
The radial hybrid magnetic suspension bearing of described two is made of stator and rotor, the magnetic poles several again that stator is 4 or 4, if by
Dry plate 0.15-0.5mm thickness silicon steel sheet stacks are molded, and on magnetic pole then coiling radially inlays a circle permanent magnetism in iron core again
Body is process；Rotor is made and is covered using the circular ring shape silicon steel plate stacking of multi-disc 0.15-0.5mm thickness and is attached on electromagnetic spindles；
Two axial backmixing magnetic suspension bearings are also made of stator and rotor, and stator is using hollow conducting magnet core, excitation
Coil and set of permanent magnets at；Rotor is made by solid magnetic conduction disk；
In upper radial transducer and passive magnetic bearing component (11) and lower radial transducer and passive magnetic bearing component (14)
Radial transducer be inductance type sensing, coil is wrapped on the journal bearing iron core of fixed radial permanent magnet, reduces radial
The axial space of hybrid magnetic suspension bearing；Axial sensor (20) is inductance type transducer；
Electromagnetic spindles (7) are made of mandrel and each bearing rotor assembly；
Two radial hybrid magnetic suspension bearings and two axial backmixing magnetic suspension bearings carry out five by magnetic force to electromagnetic spindles
Degree of freedom controls, the geometric center for being suspended in bearing stator for making electromagnetic spindles stablize, without Mechanical Contact；Two of which is radial
Hybrid magnetic suspension bearing controls four spatial degrees of freedom of rotor, including control rotor in the directions x, the translation in the directions y and around x-axis
And the rotation of y-axis, a spatial degrees of freedom of two Axial Magnetic Bearing control rotors, including rotor is controlled in the directions z
Translation；It removes outside the degree of freedom that z-axis rotates, remaining five degree of freedom is all controlled by magnetic suspension bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820052424.6U CN207740200U (en) | 2018-01-12 | 2018-01-12 | A kind of composite molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820052424.6U CN207740200U (en) | 2018-01-12 | 2018-01-12 | A kind of composite molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207740200U true CN207740200U (en) | 2018-08-17 |
Family
ID=63122884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820052424.6U Active CN207740200U (en) | 2018-01-12 | 2018-01-12 | A kind of composite molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207740200U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108457873A (en) * | 2018-01-12 | 2018-08-28 | 天津飞旋高速电机科技有限公司 | A kind of composite molecular pump and control method |
| CN112985808A (en) * | 2021-04-29 | 2021-06-18 | 天津飞旋科技股份有限公司 | Method and device for calibrating center point of magnetic suspension bearing |
-
2018
- 2018-01-12 CN CN201820052424.6U patent/CN207740200U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108457873A (en) * | 2018-01-12 | 2018-08-28 | 天津飞旋高速电机科技有限公司 | A kind of composite molecular pump and control method |
| CN112985808A (en) * | 2021-04-29 | 2021-06-18 | 天津飞旋科技股份有限公司 | Method and device for calibrating center point of magnetic suspension bearing |
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| CP02 | Change in the address of a patent holder |
Address after: Block 90, 12th Avenue, Tianjin Binhai New Area Development Zone, 300450 Co-patentee after: Tianjin Feixuan science and Technology Co Ltd Patentee after: Tianjin Feixuan high-speed motor technology Co. Ltd. Address before: Block 90 D, 12th Avenue, Baodi District Development Zone, Tianjin City, 300450 Co-patentee before: Tianjin Feixuan science and Technology Co Ltd Patentee before: Tianjin Feixuan high-speed motor technology Co. Ltd. |
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| CP02 | Change in the address of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Block 90, 12th Avenue, Tianjin Binhai New Area Development Zone, 300450 Patentee after: TIANJIN EMAGING HIGH SPEED MOTOR TECHNOLOGY Co.,Ltd. Patentee after: Tianjin Feixuan Technology Co.,Ltd. Address before: Block 90, 12th Avenue, Tianjin Binhai New Area Development Zone, 300450 Patentee before: TIANJIN EMAGING HIGH SPEED MOTOR TECHNOLOGY Co.,Ltd. Patentee before: TIANJIN EMAGING TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |