CN207662476U - A kind of micro- gas mass flow gauge for photovoltaic industry - Google Patents
A kind of micro- gas mass flow gauge for photovoltaic industry Download PDFInfo
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- CN207662476U CN207662476U CN201721219059.5U CN201721219059U CN207662476U CN 207662476 U CN207662476 U CN 207662476U CN 201721219059 U CN201721219059 U CN 201721219059U CN 207662476 U CN207662476 U CN 207662476U
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- mass flow
- gas
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- gas mass
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Abstract
A kind of micro- gas mass flow gauge for photovoltaic industry.It mainly solves the technical problems such as existing micro- gas mass flow gauge metering inaccuracy.Its key points of the technical solution are that：Thermal type gas quality sensor based on MEMS, for the mass flow of gas to be converted analog voltage signal；Signal conditioning circuit, for being amplified, filtering by the analog signal of the output of thermal type gas quality sensor, in order to which A/D is converted；12 A/D converters, the analog signal for exporting signal conditioning circuit are converted into digital signal, and are sent into high speed microprocessor and are handled；High speed microprocessor：Digital information for receiving the gas mass flow that A/D converter is sent carries out accumulation calculating, and the data-signal of gaseous mass and cumulative signal is sent into industrial personal computer by the RS485 serial communication interfaces of itself.It mainly applied to silicon chip, in cell piece manufacturing enterprise, can Improving The Quality of Products, save the purposes of raw materials for production.
Description
Technical field
The utility model is related to a kind of gas mass flow gauge, especially a kind of micro- gas mass flow for photovoltaic industry
Gauge.
Background technology
Currently, in photovoltaic silicon wafer and cell piece manufacturing enterprise, most of streams for adjusting and controlling gas using butterfly valve
Amount, and butterfly valve has the following disadvantages：
（1）Flow adjustment range is small, and the fluctuation of service under small guide vane and big aperture is unfavorable for controlling and adjusting small gas
The flow of body can not also accurately control the flow of minute gas；
（2）The pressure and operating temperature range used is small, and leakproofness is poor, easily leads to the leakage of productivity gas, Yi Zao
At the pollution of production work environment；
Accuracy and stability and production work environment of the utility model device from minimum gas flow measurement and control
Environmentally friendly degree set out, by will be based on thermal mass sensor, signal conditioning circuit, the A/D converter of MEMS, high speed microprocessor
Device, proportion magnetic valve and industrial personal computer are combined a kind of micro- gas mass flow gauge of composition and are come, and on the one hand can accurately control
With gas flow needed for adjusting production process, product matter is improved in turn to reach accurately and consistently control production process
The purpose of amount and benefit；On the other hand the flowmeter is controlled by the intelligence of proportion magnetic valve and industrial personal computer and high speed microprocessor
System, can effectively extended operating temperature and operating pressure range, and the leakage of productivity gas can be effectively prevented, reached
Prevent the purpose of pollution production work environment.
Invention content
To solve the shortcomings of the prior art, the purpose of this utility model be to provide it is a kind of can not only be used for controlling and
The minimum gas flow needed for production process is adjusted, can simultaneously be effectively prevents from producing gases used leakage, improves production
Micro- gas mass flow gauge for photovoltaic industry of the comfort level of working environment.
Technical solution adopted by the utility model to solve its technical problems is：The system comprises：
Thermal type gas quality sensor based on MEMS, for the mass flow of gas to be converted analog voltage signal；
Signal conditioning circuit, for the analog signal of the output of thermal type gas quality sensor to be amplified, is filtered, with
Profit
It is converted in A/D converter；
12 A/D converters, the analog signal for exporting signal conditioning circuit is converted into digital signal, and is sent into
High speed microprocessor is handled；
High speed microprocessor, the digital information for receiving the gas mass flow that A/D converter is sent carry out cumulative meter
It calculates, and the data-signal of gaseous mass and cumulative signal is sent by industrial personal computer by the RS485 serial communication interfaces of itself, separately
Outside, high speed microprocessor can also be according to the underlying order of industrial personal computer, for controlling the inlet and outlet of micro- gas mass flow gauge
Proportion magnetic valve, and then achieve the purpose that control minimum gas mass flow.
Industrial personal computer, for receiving and handling the gaseous mass information that high speed microprocessor is sent, and with preset gas
The technological parameter of weight is contrasted, and the aperture of proportion magnetic valve is controlled by comparison, is finally reached control gas
The purpose of mass flow.
Ratio electromagnetism magnet valve, for controlling the gas mass flow for flowing into and out micro- gas mass flow gauge.
The utility model has the beneficial effects that：It is a kind of flowmeter with minimum gas quality control and adjusting, can
To accurately control the flow of gas needed for production, moreover it is possible to pass through industrial personal computer and high speed microprocessor intelligent control inlet and outlet ratio
Example solenoid valve, effectively prevent producing the gases used leakage in flowmeter part.It mainly be applied to gaseous mass control and
It adjusts.
Description of the drawings
Fig. 1 is the principles of the present invention block diagram.
Fig. 2 is the installation effect figure of the utility model.
Specific implementation mode
The utility model is described in further details with reference to the accompanying drawings and examples.
Embodiment 1, refering to fig. 1 to Fig. 2, system described in the utility model includes：
Thermal type gas quality sensor based on MEMS, for the mass flow of gas to be converted analog voltage signal；
Signal conditioning circuit, for the analog signal of the output of thermal type gas quality sensor to be amplified, is filtered, with
Profit
It is converted in A/D converter；
12 A/D converters, the analog signal for exporting signal conditioning circuit is converted into digital signal, and is sent into
High speed microprocessor is handled.
Embodiment 2, refering to fig. 1 to Fig. 2, the utility model also can high speed microprocessor, sent for receiving A/D converter
Gas mass flow digital information, carry out accumulation calculating, and by the RS485 serial communication interfaces of itself by gaseous mass
Data-signal and cumulative signal be sent into industrial personal computer, in addition, high speed microprocessor can also be used for according to the underlying order of industrial personal computer
The inlet and outlet proportion magnetic valve of micro- gas mass flow gauge is controlled, and then reaches the mesh of control minimum gas mass flow
's.Remaining is the same as embodiment 1.
Embodiment 3, refering to fig. 1 to Fig. 2, the utility model can also industrial personal computer, for receiving and handling high speed microprocessor
The gaseous mass information sent, and contrasted with the technological parameter of preset gaseous mass, it is controlled by comparison
The aperture of proportion magnetic valve processed is finally reached the purpose of control gas mass flow.Ratio electromagnetism magnet valve, for control into and
Flow out the gas mass flow of micro- gas mass flow gauge.Remaining combination with any of the above embodiment or 2 above example.
It is a kind of flowmeter with minimum gas quality control and adjusting, it is mainly used in silicon chip, cell piece life
It produces in enterprise, can strictly measure and control the flow of micro- gas such as oxygen, phosphorus oxychloride in silicon chip, cell piece production process, into
And achievees the purpose that the production process for controlling the products such as silicon chip, cell piece and Improving The Quality of Products, saves raw materials for production.It can
To accurately control the flow of gas needed for production, moreover it is possible to pass through industrial personal computer and high speed microprocessor intelligent control inlet and outlet ratio
Example solenoid valve, effectively prevent producing the gases used leakage in flowmeter part.It mainly be applied to gaseous mass control and
It adjusts.
The flowmeter includes：Thermal type gas quality sensor based on MEMS, for converting the mass flow of gas
Analog voltage signal；Signal conditioning circuit, for being amplified, filtering by the analog signal of the output of thermal type gas quality sensor
Wave, in order to which A/D is converted；12 A/D converters, the analog signal for exporting signal conditioning circuit are converted into counting
Word signal, and be sent into high speed microprocessor and handled；High speed microprocessor：The gas matter sent for receiving A/D converter
The digital information of flow is measured, carries out accumulation calculating, and believe the data of gaseous mass by the RS485 serial communication interfaces of itself
Number and cumulative signal be sent into industrial personal computer, in addition, high speed microprocessor can also be according to the underlying order of industrial personal computer, for controlling micro- gas
The inlet and outlet proportion magnetic valve of weight flowmeter, and then achieve the purpose that control minimum gas mass flow；Industrial personal computer：
For receiving and handling the gaseous mass information that high speed microprocessor is sent, and with the technological parameter of preset gaseous mass
It is contrasted, the aperture of proportion magnetic valve is controlled by comparison, be finally reached the purpose of control gas mass flow.
Claims (5)
1. a kind of micro- gas mass flow gauge for photovoltaic industry, it is characterized in that：It includes：Heating type gas matter based on MEMS
Quantity sensor, for the mass flow of gas to be converted analog voltage signal；
Signal conditioning circuit, for the analog signal of the output of thermal type gas quality sensor to be amplified, filtering operation, with
It is converted convenient for A/D；
12 A/D converters, the analog signal for exporting signal conditioning circuit are converted into digital signal, and are sent into high speed
Microprocessor is handled；
High speed microprocessor, the digital information for receiving the gas mass flow that A/D converter is sent carry out accumulation calculating,
And the data-signal of gaseous mass and cumulative signal are sent by industrial personal computer by the RS485 serial communication interfaces of itself, in addition, high
Fast microprocessor can also be according to the underlying order of industrial personal computer, for controlling the inlet and outlet ratio electricity of micro- gas mass flow gauge
Magnet valve, and then achieve the purpose that control minimum gas mass flow.
2. it is used for micro- gas mass flow gauge of photovoltaic industry according to claim 1, it is characterized in that：The industrial personal computer is used
Receive and handle the gaseous mass information that high speed microprocessor is sent, and with the technological parameter of preset gaseous mass into
Row is contrasted, and the aperture of proportion magnetic valve is controlled by comparison, is finally reached the purpose of control gas mass flow：Ratio
Solenoid valve, for controlling the gas mass flow for flowing into and out micro- gas mass flow gauge.
3. it is used for micro- gas mass flow gauge of photovoltaic industry according to claim 1, it is characterized in that：The flowmeter packet
It includes：Signal conditioning circuit makes MEMS for being amplified, filtering by the analog signal of the output of thermal type gas quality sensor
For thermal type gas quality flow at 0 to 5SLPM, corresponding output analog voltage, to 4.5V, and makes the analog voltage of output 0.5
The functional relation of linearisation is presented between gas mass flow.
4. it is used for micro- gas mass flow gauge of photovoltaic industry according to claim 1, it is characterized in that：The high speed microprocessor
Device for receiving the digital signal information that A/D converter is sent, and converts the information into RS485, MODBUSRTU protocol data
Format is uploaded to industrial personal computer.
5. it is used for micro- gas mass flow gauge of photovoltaic industry according to claim 1, it is characterized in that：The ratio electromagnetism
Valve sends the control information of high speed microprocessor to according to industrial personal computer, and ratio electromagnetism is controlled indirectly by high speed microprocessor
The aperture of valve is finally reached the purpose for the gas mass flow for controlling into and out mass flowmenter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721219059.5U CN207662476U (en) | 2017-09-22 | 2017-09-22 | A kind of micro- gas mass flow gauge for photovoltaic industry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721219059.5U CN207662476U (en) | 2017-09-22 | 2017-09-22 | A kind of micro- gas mass flow gauge for photovoltaic industry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207662476U true CN207662476U (en) | 2018-07-27 |
Family
ID=62936993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721219059.5U Expired - Fee Related CN207662476U (en) | 2017-09-22 | 2017-09-22 | A kind of micro- gas mass flow gauge for photovoltaic industry |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207662476U (en) |
-
2017
- 2017-09-22 CN CN201721219059.5U patent/CN207662476U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180727 Termination date: 20190922 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |