CN207615267U - It is a kind of to solve the dirty device of former silicon chip surface - Google Patents
It is a kind of to solve the dirty device of former silicon chip surface Download PDFInfo
- Publication number
- CN207615267U CN207615267U CN201721602214.1U CN201721602214U CN207615267U CN 207615267 U CN207615267 U CN 207615267U CN 201721602214 U CN201721602214 U CN 201721602214U CN 207615267 U CN207615267 U CN 207615267U
- Authority
- CN
- China
- Prior art keywords
- belt conveyor
- silicon chip
- air
- former silicon
- lateral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
The dirty device of former silicon chip surface is solved the utility model discloses a kind of,Including the first supporting rack,The upper surface of first supporting rack is equipped with the first belt conveyor,First belt conveyor is arranged horizontal by 35 degree of angles,The upper surface front and rear sides of first belt conveyor are set there are two front and back symmetrically arranged first backplate,The lateral surface of first backplate is equipped with the first supporting plate,The upper surface of first supporting plate is equipped with second support bar,The lateral surface upper end of second support bar is equipped with jet pipe,The lateral surface lower end of jet pipe is equipped with the nozzle being arranged vertically downward,The dirty device of this solution original silicon chip surface,It is simple in structure,It is easy to operate,It occupies little space when use,Quickly former silicon chip can be cleaned,Waste liquid collecting box can be collected cleaning solution,Former silicon chip can be fixed on the first belt conveyor by silica gel locating piece,Filtering dust net can remove the dust in air,Silica gel piece can be dried processing by air-heater.
Description
Technical field
The utility model is related to battery production equipment technical fields, specially a kind of to solve the dirty dress of former silicon chip surface
It sets.
Background technology
There are the dirty silicon chip surfaces that is attached to remove for former silicon chip film source before cell piece produces, and causes that battery is made
Bad order after piece.There are three types of existing original silicon chip physical cleanings.Scrub is cleaned:Particle contamination can be removed and be sticked to original with most of
Film on silicon chip.High-pressure wash：It is that liquid injection original silicon chip surface, the pressure of nozzle is used to be up to hundreds of atmospheric pressure.Ultrasound
Wave cleans：Ultrasonic wave acoustic energy is passed to solution, and the pollution on former silicon chip is washed off by cavitation effect.But existing former Wafer Cleaning is set
It is standby often to scratch former silicon chip during cleaning former silicon chip, generate cut and damage so as to cause the lateral surface of former silicon chip.
Utility model content
The technical problems to be solved in the utility model is to overcome existing defect, and it is dirty to provide the former silicon chip surface of kind of solution
Device can quickly clean former silicon chip, and the cleaning and use to former silicon chip bring facility, and to former silicon chip
Cleaning process in will not scratch former silicon chip, further improve the cleaning efficiency of former silicon chip, can effectively solve background technology
The problems in.
To achieve the above object, the utility model provides the following technical solutions：It is a kind of to solve the dirty dress of former silicon chip surface
It sets, including the first supporting rack, the upper surface of first supporting rack is equipped with the first belt conveyor, the first belt conveyor and water
Plane is arranged in 3-5 degree angle, and the upper surface front and rear sides of the first belt conveyor set that there are two front and back symmetrically arranged first shields
Plate, the lateral surface of the first backplate are equipped with the first supporting plate, and the upper surface of the first supporting plate is equipped with second support bar, second support bar it is outer
Side upper end is equipped with jet pipe, and the lateral surface lower end of jet pipe is equipped with the nozzle being arranged vertically downward, the lower section of the first belt conveyor
Equipped with cleaning solution liquid reserve tank, the upper surface of cleaning solution liquid reserve tank is equipped with liquid pump, and the liquid outlet of liquid pump passes through drainage tube and jet pipe
Upper surface is connected, and the lower right of the first belt conveyor is equipped with the second belt conveyor, and the lower surface of the second belt conveyor is set
There is the second supporting rack, the front and rear sides face of the second belt conveyor sets that there are two front and back symmetrically arranged second backplate, the second shields
The lateral surface of plate is equipped with the second supporting plate, and the second splint upper surface is equipped with second support bar, and the lateral surface of second support bar is equipped with heat
Wind turbine, the lateral surface lower end of air-heater are equipped with the taper exhaust duct being arranged vertically downward, and the rear side of the second belt conveyor is equipped with
The air inlet of Rose Box, air-heater is connected by induced duct with the upper surface of Rose Box, and the upper surface of Rose Box is equipped with microcontroller,
The input terminal of microcontroller is electrically connected with the output end of external power supply, the output end of microcontroller respectively with liquid pump, air-heater, the second skin
It is electrically connected with the input terminal of conveyer and the first belt conveyor.
As a kind of optimal technical scheme of the utility model, the upper surface of first belt conveyor is fixed equipped with silica gel
The upper surface of position block, silica gel locating piece is equipped with silicon chip card slot.
As a kind of optimal technical scheme of the utility model, the leading flank of the cleaning solution liquid reserve tank is observed equipped with liquid level
The trailing flank of window, cleaning solution liquid reserve tank is equipped with inlet tube.
As a kind of optimal technical scheme of the utility model, the lower left of first belt conveyor is received equipped with waste liquid
The right side upper end of header, waste liquid collecting box is equipped with diversion trench.
As a kind of optimal technical scheme of the utility model, the Rose Box is internally provided with filtering dust net, filtering
The trailing flank of case is equipped with air inlet pipe.
Compared with prior art, the utility model has the beneficial effects that：The dirty device of this solution original silicon chip surface, structure
Simply, easy to operate, when use, occupies little space, and can quickly be cleaned to former silicon chip, and waste liquid collecting box can be to cleaning
Liquid is collected, and former silicon chip can be fixed on the first belt conveyor by silica gel locating piece, and filtering dust net can incite somebody to action
Dust in air is removed, and silica gel piece can be dried processing by air-heater.
Description of the drawings
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the utility model structural front view；
Fig. 3 is the utility model structure top view.
In figure：1 liquid pump, 2 cleaning solution liquid reserve tanks, 3 first supporting racks, 4 second supporting plates, 5 second support bars, 6 second supports
Frame, 7 second backplates, 8 second belt conveyors, 9 air-heaters, 10 taper exhaust ducts, 11 induced ducts, 12 filtering dust nets, 13 mistakes
Filter box, 14 drainage tubes, 15 jet pipes, 16 first support bars, 17 first belt conveyors, 18 silica gel locating pieces, 19 waste liquid collecting boxes,
20 first supporting plates, 21 air inlet pipe, 22 diversion trenches, 23 observation window of liquid level mouths, 24 first backplates, 25 microcontrollers.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
- 3 are please referred to Fig.1, the utility model provides a kind of technical solution：It is a kind of to solve the dirty device of former silicon chip surface,
Including the first supporting rack 3, the upper surface of the first supporting rack 3 is equipped with the first belt conveyor 17, the first belt conveyor 17 and water
Plane is arranged in 3-5 degree angle, and the lower left of the first belt conveyor 17 is equipped with waste liquid collecting box 19, the right side of waste liquid collecting box 19
Face upper end is equipped with diversion trench 22, and waste liquid collecting box 19 can be collected cleaning solution, the upper surface of the first belt conveyor 17
Front and rear sides are set there are two front and back symmetrically arranged first backplate 24, and the lateral surface of the first backplate 24 is equipped with the first supporting plate 20, the
The upper surface of one supporting plate 20 is equipped with second support bar 5, and the lateral surface upper end of second support bar 5 is equipped with jet pipe 15, jet pipe 15 it is outer
Side lower end is equipped with the nozzle being arranged vertically downward, and the lower section of the first belt conveyor 17 is equipped with cleaning solution liquid reserve tank 2, cleaning solution
The leading flank of liquid reserve tank 2 is equipped with observation window of liquid level mouth 23, and the trailing flank of cleaning solution liquid reserve tank 2 is equipped with inlet tube, cleaning solution liquid storage
The upper surface of case 2 is equipped with liquid pump 1, and the liquid outlet of liquid pump 1 is connected by drainage tube 14 with the upper surface of jet pipe 15, and the first belt is defeated
The upper surface of machine 17 is sent to be equipped with silica gel locating piece 18, the upper surface of silica gel locating piece 18 is equipped with silicon chip card slot, is positioned by silica gel
Former silicon chip can be fixed on the first belt conveyor 17 by block 18, and the lower right of the first belt conveyor 17 is equipped with the second belt
The lower surface of conveyer 8, the second belt conveyor 8 is equipped with the second supporting rack 6, and the front and rear sides face of the second belt conveyor 8 is set
There are two front and back symmetrically arranged second backplate 7, the lateral surface of the second backplate 7 is equipped with the second supporting plate 4,4 upper surface of the second supporting plate
Equipped with second support bar 5, the lateral surface of second support bar 5 is equipped with air-heater 9, the lateral surface lower end of air-heater 9 be equipped with vertically to
Silica gel piece can be dried processing, by air-heater 9 after second belt conveyor 8 in the taper exhaust duct 10 of lower setting
Side is equipped with Rose Box 13, and Rose Box 13 is internally provided with filtering dust net 12, and filtering dust net 12 can be by the dust in air
It removes, the trailing flank of Rose Box 13 is equipped with air inlet pipe 21, the upper table that the air inlet of air-heater 9 passes through induced duct 11 and Rose Box 13
Face is connected, and the upper surface of Rose Box 13 is equipped with microcontroller 25, and the input terminal of microcontroller 25 is electrically connected with the output end of external power supply,
The output end of microcontroller 25 respectively with liquid pump 1, the input terminal of air-heater 9, the second belt conveyor 8 and the first belt conveyor 17
Electrical connection, the control of microcontroller 25 liquid pump 1, air-heater 9, the second belt conveyor 8 and the first belt conveyor 17 are all made of existing
Common method in technology, the dirty device of this solution original silicon chip surface is simple in structure, easy to operate, occupied space when use
It is small, quickly former silicon chip can be cleaned.
When in use：External power supply is connected, former silicon chip is placed on silica gel locating piece 18, microcontroller 25 controls the first skin
It works with conveyer 17 and former silicon chip is transported to the lower section of jet pipe 15, microcontroller 25 controls liquid pump 1 and works, and will be cleaned by liquid pump 1
Cleaning solution in liquid liquid reserve tank 2 pumps in jet pipe 15, and the cleaning solution in jet pipe 15 is via the spray being arranged in 15 lower surface of jet pipe
Head is sprayed at the upper surface of former silicon chip, and the former silicon chip after the completion of cleaning drops on the second belt conveyor 8, by the second skin
Former silicon chip is transported to the lower section of air-heater 9 with conveyer 8, blow out hot wind by air-heater 9 is dried processing to former silicon chip.
The utility model can be operated easily, and occupied space is few when use, easy to operate and use；It can be quick
Former silicon chip is cleaned, ease of use is improved；Filtering dust net 12 can remove the dust in air, and improving makes
Use convenience.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of solving the dirty device of former silicon chip surface, including the first supporting rack (3), it is characterised in that：First support
The upper surface of frame (3) is equipped with the first belt conveyor (17), and the first belt conveyor (17) is arranged horizontal by 3-5 degree angle,
The upper surface front and rear sides of first belt conveyor (17) are set there are two front and back symmetrically arranged first backplate (24), the first backplate
(24) lateral surface is equipped with the first supporting plate (20), and the upper surface of the first supporting plate (20) is equipped with second support bar (5), second support bar
(5) lateral surface upper end is equipped with jet pipe (15), and the lateral surface lower end of jet pipe (15) is equipped with the nozzle being arranged vertically downward, the first skin
Lower section with conveyer (17) is equipped with cleaning solution liquid reserve tank (2), and the upper surface of cleaning solution liquid reserve tank (2) is equipped with liquid pump (1), liquid pump
(1) liquid outlet is connected by drainage tube (14) with the upper surface of jet pipe (15), and the lower right of the first belt conveyor (17) is set
There are the second belt conveyor (8), the lower surface of the second belt conveyor (8) to be equipped with the second supporting rack (6), the second belt conveyor
(8) front and rear sides face is set there are two front and back symmetrically arranged second backplate (7), and the lateral surface of the second backplate (7) is equipped with second
Supporting plate (4), the second supporting plate (4) upper surface are equipped with second support bar (5), and the lateral surface of second support bar (5) is equipped with air-heater
(9), the lateral surface lower end of air-heater (9) is equipped with the taper exhaust duct (10) being arranged vertically downward, the second belt conveyor (8)
Rear side is equipped with Rose Box (13), and the air inlet of air-heater (9) is connected by induced duct (11) with the upper surface of Rose Box (13), mistake
The upper surface of filter box (13) is equipped with microcontroller (25), and the input terminal of microcontroller (25) is electrically connected with the output end of external power supply, single
The output end of piece machine (25) respectively with liquid pump (1), air-heater (9), the second belt conveyor (8) and the first belt conveyor (17)
Input terminal electrical connection.
2. a kind of dirty device of the former silicon chip surface of solution according to claim 1, it is characterised in that：First belt
The upper surface of conveyer (17) is equipped with silica gel locating piece (18), and the upper surface of silica gel locating piece (18) is equipped with silicon chip card slot.
3. a kind of dirty device of the former silicon chip surface of solution according to claim 1, it is characterised in that：The cleaning solution storage
The leading flank of liquid case (2) is equipped with observation window of liquid level mouth (23), and the trailing flank of cleaning solution liquid reserve tank (2) is equipped with inlet tube.
4. a kind of dirty device of the former silicon chip surface of solution according to claim 1, it is characterised in that：First belt
The lower left of conveyer (17) is equipped with waste liquid collecting box (19), and the right side upper end of waste liquid collecting box (19) is equipped with diversion trench
(22)。
5. a kind of dirty device of the former silicon chip surface of solution according to claim 1, it is characterised in that：The Rose Box
(13) be internally provided with filtering dust net (12), the trailing flank of Rose Box (13) is equipped with air inlet pipe (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721602214.1U CN207615267U (en) | 2017-11-27 | 2017-11-27 | It is a kind of to solve the dirty device of former silicon chip surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721602214.1U CN207615267U (en) | 2017-11-27 | 2017-11-27 | It is a kind of to solve the dirty device of former silicon chip surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207615267U true CN207615267U (en) | 2018-07-17 |
Family
ID=62824358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721602214.1U Expired - Fee Related CN207615267U (en) | 2017-11-27 | 2017-11-27 | It is a kind of to solve the dirty device of former silicon chip surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207615267U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109731819A (en) * | 2018-12-26 | 2019-05-10 | 顾雨彤 | A kind of polysilicon chip process units |
| CN112027579A (en) * | 2020-08-24 | 2020-12-04 | 湖南生命元医药有限责任公司 | Automatic carry production line on-line cleaning equipment |
| CN113857125A (en) * | 2021-09-28 | 2021-12-31 | 杭州中欣晶圆半导体股份有限公司 | Full-automatic efficient brushing and cleaning device for silicon wafer surface and operation method |
-
2017
- 2017-11-27 CN CN201721602214.1U patent/CN207615267U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109731819A (en) * | 2018-12-26 | 2019-05-10 | 顾雨彤 | A kind of polysilicon chip process units |
| CN112027579A (en) * | 2020-08-24 | 2020-12-04 | 湖南生命元医药有限责任公司 | Automatic carry production line on-line cleaning equipment |
| CN113857125A (en) * | 2021-09-28 | 2021-12-31 | 杭州中欣晶圆半导体股份有限公司 | Full-automatic efficient brushing and cleaning device for silicon wafer surface and operation method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207615267U (en) | It is a kind of to solve the dirty device of former silicon chip surface | |
| CN206527080U (en) | A kind of glass washing device | |
| CN203508457U (en) | Workpiece cleaning device | |
| CN204672607U (en) | High pressure automatic cleaning system | |
| CN207839478U (en) | A kind of cosmetics glass object cleaning sterilizing device | |
| CN206661873U (en) | A kind of information communication rack dust arrester | |
| CN203141288U (en) | Double-faced polishing machine for printed circuit board | |
| CN202120879U (en) | Hot water heating device for cleaning and drying silicon wafers | |
| CN203700756U (en) | Cloth cleaning device | |
| CN110575989A (en) | cleaning machine for chip silicon production process and using method thereof | |
| CN207254829U (en) | A kind of bearing machining cleaning device | |
| CN214555698U (en) | Batch cleaning rack for production of mobile phone screen protection films | |
| CN212041678U (en) | Drying device for cleaned computer hardware | |
| CN205949396U (en) | Ultrasonic cleaning machine | |
| CN206104460U (en) | Cross valve SEC takes over environmental protection self - cleaning device | |
| CN208758131U (en) | A kind of novel copper alloy wire water washing device | |
| CN209222733U (en) | A kind of cleaning line binary channels transit type cleaning machine | |
| CN205762692U (en) | A kind of glass washing device | |
| CN205362514U (en) | Waste recovery device of thread rolling machine | |
| CN215466319U (en) | Workpiece surface cleaning equipment | |
| CN205512222U (en) | Kernel of corn vibration cleaning equipment | |
| CN211384160U (en) | Filter plate decontamination device for water purifying device | |
| CN220861717U (en) | Dust collector is used in polysaccharide production | |
| CN219560690U (en) | Integrated circuit board dust collector for integrated circuit test | |
| CN203181960U (en) | Vortex type airflow vegetable washer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180717 Termination date: 20191127 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |