CN207571298U - Laser radar array element and laser radar - Google Patents
Laser radar array element and laser radar Download PDFInfo
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- CN207571298U CN207571298U CN201721540826.2U CN201721540826U CN207571298U CN 207571298 U CN207571298 U CN 207571298U CN 201721540826 U CN201721540826 U CN 201721540826U CN 207571298 U CN207571298 U CN 207571298U
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Abstract
This application involves a kind of laser radar array element and laser radars, and including emitting the VCSEL lasers of laser and receiving the avalanche photodide of laser, VCSEL lasers are arranged in parallel with avalanche photodide；VCSEL lasers are equipped with the laser surface of emission, and VCSEL lasers emit surface-emission laser by laser, and avalanche photodide is equipped with laser pick-off face, and avalanche photodide receives laser by laser pick-off face.Above-mentioned laser radar array element and laser radar, VCSEL lasers as laser emitter are arranged in parallel with the avalanche photodide as laser pickoff, transmitting-receiving detection is carried out with the parallel arrangement that avalanche photodide is combined by VCSEL lasers, take full advantage of the advantage that VCSEL lasers are small and can vertically paste, reduce the position of transmitting terminal and receiving terminal, so as to reduce the volume of radar, convenient for integrating, the processing of being sealed property is also allowed for.
Description
Technical field
This application involves radio detection and ranging technical field, more particularly to a kind of laser radar array element and laser thunder
It reaches.
Background technology
Radar (Radar) is the electronic equipment using electromagnetic wave detection target, and basic principle is radar emission electromagnetic wave pair
Target is irradiated and receives its echo, distance, range rate (the radially speed thus to obtain target to electromagnetic emission point
Degree), orientation, the information such as height.The type of radar is various, by frequency range point, can be divided into over-the-horizon radar, microwave radar, millimeter wave
Radar and laser radar etc..Wherein, laser radar is the thunder to emit the characteristic quantities such as the position of detecting laser beam target, speed
Up to system.Its operation principle be to objective emission detectable signal (laser beam), it is then that the slave target received is reflected
Signal (target echo) is compared with transmitting signal, after making proper treatment, so that it may obtain the related metrical information of target.
Traditional laser radar mainly occurs in a manner of mixed move, to add a rotation among row's transmitting terminal and receiving terminal
Motor is rotated, and can carry out 360 ° of scannings in this way, this laser radar there are it is certain the problem of, such as small product size is excessive
Be inconvenient to integrate, volume is excessive also to reduce leakproofness treatment effect, make its poor sealing and lead to laser service life
Decline.
Utility model content
Based on this, it is necessary in view of the above-mentioned problems, providing a kind of small, the laser thunder handled convenient for integrated and leakproofness
Up to array element and laser radar.
A kind of laser radar array element, including emitting the VCSEL lasers of laser and receiving the avalanche photodide of laser,
The VCSEL lasers are arranged in parallel with the avalanche photodide；
The VCSEL lasers are equipped with the laser surface of emission, and the VCSEL lasers are sent out by the laser surface of emission
Laser is penetrated, the avalanche photodide is equipped with laser pick-off face, and the avalanche photodide passes through the laser pick-off face
Receive laser.
In one embodiment, the VCSEL lasers further include laser anode, laser cathode and laser transmitting
Portion；
The laser anode is arranged at intervals with the laser cathode and the laser emission part, the laser
Cathode contacts setting with the laser emission part, and the laser surface of emission is set on the laser emission part and swashs far from described
The upper surface of light device cathode.
In one embodiment, upper surface of the laser emission part far from the laser cathode further includes the surface of emission
Area is electrically connected, the surface of emission electrical connection area is electrically connected with the laser anode.
In one embodiment, the avalanche photodide further includes APD anodes, APD cathode and APD receiving parts；
The APD anodes and the APD cathode and the APD receiving parts are arranged at intervals, the APD cathode with it is described
The contact setting of APD receiving parts, the laser pick-off face is set on upper surface of the APD receiving parts far from the APD cathode.
In one embodiment, upper surface of the APD receiving parts far from the APD cathode is further included connects with the laser
The receiving plane electrical connection area of receipts face contact, the receiving plane electrical connection area are electrically connected with the APD anodes.
In one embodiment, the surface of emission electrical connection area passes through gold thread, silver wire and copper wire with the laser anode
In any one electrical connection, receiving plane electrical connection area passes through arbitrary in gold thread, silver wire and copper wire with the APD anodes
A kind of electrical connection.
In one embodiment, the shape in the laser surface of emission and the laser pick-off face be circle, it is rectangle, just more
Any one in side shape and star.
A kind of laser radar, which is characterized in that including being made of matrix and at least two laser radar array elements as described above
Laser radar subarray；
The laser radar array element is spaced in the same direction is set on body upper surface, the VCSEL in the laser radar array element
Laser is set to the side of described matrix upper surface, and the avalanche photodide in the laser radar array element is set to
The opposite side of described matrix upper surface.
In one embodiment, described matrix is matrix made of aluminium nitride.
In one embodiment, the laser radar includes being rearranged by at least two laser radar subarrays sharp
Optical radar array, the lidar array are any one shape in rectangular, round, regular polygon and star.
Above-mentioned laser radar array element and laser radar, the VCSEL lasers as laser emitter are with being used as laser pick-off
The avalanche photodide of device is arranged in parallel, wherein, VCSEL lasers launch laser beam by the laser surface of emission, via
After detected object reflection, received by avalanche photodide by laser pick-off face, it is achieved thereby that the transmitting of laser is with connecing
It receives, and then obtains related metrical information.Above-mentioned laser radar array element and laser radar pass through VCSEL lasers and avalanche optoelectronic two
The parallel arrangement that pole pipe is combined carries out transmitting-receiving detection, and it is small and can be vertical to take full advantage of VCSEL lasers
The advantage of stickup reduces the position of transmitting terminal and receiving terminal, so as to reduce the volume of radar, convenient for integrating, also allows for
The processing of being sealed property.
Description of the drawings
Fig. 1 is the overall structure diagram of one embodiment of the application laser radar array element；
Fig. 2 is the side view of laser radar array element in Fig. 1；
Fig. 3 is the vertical view of VCSEL lasers in Fig. 1；
Fig. 4 is the vertical view of avalanche photodide in Fig. 1；
Fig. 5 is the structure diagram of one embodiment of the application laser radar；
Fig. 6 is the vertical view of laser radar in Fig. 5；
Fig. 7 is the structure diagram of one embodiment of the application laser radar；
Fig. 8 is the detection principle schematic diagram of one embodiment of the application laser radar.
Specific embodiment
Object, technical solution and advantage to make the application are more clearly understood, with reference to the accompanying drawings and embodiments, to this
Application is described in further detail.It should be appreciated that the specific embodiments described herein are only used to explain the application,
The protection domain of the application is not limited.
Fig. 1 is the overall structure diagram of 10 1 embodiment of the application laser radar array element.As shown in Figure 1, the present embodiment
In, laser radar array element 10 includes：Emit the VCSEL lasers 100 of laser and receive the avalanche photodide 200 of laser,
The VCSEL lasers 100 are arranged in parallel with the avalanche photodide 200；
The VCSEL lasers 100 are equipped with the laser surface of emission 110, and the VCSEL lasers 100 pass through the laser
The device surface of emission 110 emits laser, and the avalanche photodide 200 is equipped with laser pick-off face 210, the avalanche photodide
200 receive laser by the laser pick-off face 210.
Laser radar array element 10 is to form the minimum unit of lidar array, and many identical laser radar array elements 10 are pressed
Laser radar system can be rearranged according to certain rule.(the Vertical-Cavity Surface- of VCSEL lasers 100
Emitting Laser) it is a kind of semiconductor laser, laser vertical is projected in top surface, with general with the individual chips cut
It is made, laser is different by the edge-emitting laser that edge projects.During making, VCSEL is more than edge-emitting laser
Many advantages, such as edge-emitting laser can not be tested after completing.If an edge-emitting laser can not operate, no matter
It is because the quality of loose contact either substance growth is bad, can all wastes manufacturing process and the processing time of substance processing；
However VCSEL can manufacture it is any during, test its quality and make issue handling.Further, VCSEL laser
Device 100 includes the laser surface of emission 110, and VCSEL lasers 100 send out laser for radar by the laser surface of emission 110
Detection.Avalanche photodide 200 (Avalanche Photo Diode, abridge APD) is a kind of light detection two of p-n junction type
Pole pipe, it makes use of the avalanche multiplication effects of carrier to amplify photosignal to improve the sensitivity of detection.Avalanche optoelectronic two
The basic structure of pole pipe 200 usually using easily generate avalanche multiplication effect Read diode structures (i.e. N+PIP+ types structure,
P+ one sides receive light), when work, adds larger reverse biased so that it reaches avalanche multiplication state；Its light absorption area with times
It is basically identical (being that there are the P areas of high electric field and I areas) to increase area.Further, avalanche photodide 200 connects including laser
Receipts face 210, avalanche photodide 200 receive the laser being reflected back in radar detection by laser pick-off face 210.Specifically should
Used time, can be parallel with avalanche photodide 200 on matrix by VCSEL lasers 100 for device is fixedly installed, base
Body is for carrying VCSEL lasers 100 and avalanche photodide 200, and further, matrix 300 can be aluminium nitride.
Above-mentioned laser radar array element, the VCSEL lasers as laser emitter and the snowslide light as laser pickoff
Electric diode is arranged in parallel, wherein, VCSEL lasers launch laser beam by the laser surface of emission, via detected object
After reflection, received by avalanche photodide by laser pick-off face, it is achieved thereby that the transmitting and reception of laser, and then obtain
Related metrical information.Above-mentioned laser radar array element is arranged in parallel by VCSEL lasers with what avalanche photodide was combined
Mode carries out transmitting-receiving detection, takes full advantage of the advantage that VCSEL lasers are small and can vertically paste, reduces hair
End and the position of receiving terminal are penetrated, so as to reduce the volume of radar, convenient for integrating, also allows for the processing of being sealed property.
Fig. 2 is the side view of one embodiment of the application laser radar array element, and Fig. 3 is VCSEL lasers in the embodiment
100 vertical view.Referring to figs. 2 and 3, the VCSEL lasers 100 further include laser anode 120, laser cathode 130
With laser emission part 140；
The laser anode 120 is arranged at intervals with the laser cathode 130 and the laser emission part 140,
The laser cathode 130 contacts setting with the laser emission part 140, and the laser surface of emission 110 is set on described sharp
Upper surface of the light device emission part 140 far from the laser cathode 130.
In the present embodiment, VCSEL lasers 100 are equipped with laser anode 120, laser cathode 130 and laser transmitting
Portion 140.Wherein, laser positive and negative anodes connection power positive cathode, is powered from outside；Laser emission part 140 includes various
The layer structure of stimulated radiation laser, for laser generation radiation laser.The laser surface of emission 110 is set on laser emission part 140
Upper surface far from the laser cathode 130, the laser emission section 140 of VCSEL lasers 100 will be excited the laser generated
Emitting the output phase by laser emitting surface 110 stress light beam.
Further, upper surface of the laser emission part 140 far from the laser cathode 130 is additionally provided with the surface of emission
Area is electrically connected, the surface of emission electrical connection area is electrically connected with the laser anode 120.Laser emission section 140 is far from laser
The upper surface of cathode 130 is additionally provided with surface of emission electrical connection area, is electrically connected with laser anode 120.Specifically, gold thread can be passed through
Connect surface of emission electrical connection area and laser anode 120.
Fig. 4 is the vertical view of avalanche photodide 200 in an embodiment.With reference to figure 2 and Fig. 4, the avalanche optoelectronic two
Pole pipe 200 is additionally provided with APD anodes 220, APD cathode 230 and APD receiving parts 240；
The APD anodes 220 are arranged at intervals with the APD cathode 230 and the APD receiving parts 240, and the APD is born
Pole 230 contacts setting with the APD receiving parts 240, and the laser pick-off face 210 is set on the APD receiving parts 240 far from institute
State the upper surface of APD cathode 230.
In the present embodiment, avalanche photodide 200 is additionally provided with APD anodes 220, APD cathode 230 and APD receiving parts
240.Wherein, APD positive and negative anodes connection external power supply positive and negative anodes are powered for device work；APD receiving parts include various receptions
The layer structure of laser, for receiving the laser of reflection, to obtain Correlated Case with ARMA Measurement information.Laser pick-off face 210 is received set on APD
The first surface in portion 240, avalanche photodide 200 receive Laser emission end by laser pick-off face 210 and emit to detection object
Product and the laser being reflected back, so as to subsequent measurement.
Further, the upper surface of the APD receiving parts 240 far from APD cathode 230 is additionally provided with and the laser pick-off face
The receiving plane electrical connection area of 210 contacts, the receiving plane electrical connection area are electrically connected with the APD anodes 220.APD receiving parts 240
First surface be equipped with the receiving plane that contact with laser pick-off face 210 and be electrically connected area, APD anodes 220 are connect by gold thread and this
Realize electrical connection in receipts face electrical connection area.
Further, the shape in the laser surface of emission 110 and the laser pick-off face 210 be circle, it is rectangle, just more
Any one in side shape and star.The shape in the laser surface of emission 110 and laser pick-off face 210 can be set according to demand
Meter.VCSEL lasers 100 are by 100 outside outgoing laser beam of the laser surface of emission, so the transmitting of VCSEL lasers 100 swashs
Shape, the size of light beam are determined by shape, the size of the laser surface of emission 110.Avalanche photodide 200 is connect by laser
Receipts face 210 receives the exploring laser light of reflection, so the size and shape of 200 acceptable laser beam of avalanche photodide are by swashing
The size and shape of light receiving surface 210 determine.Generally, consider for transmitting-receiving efficiency and process conditions, the laser surface of emission
110 and the shape in laser pick-off face 210 be all made as circle.
Further, the surface of emission electrical connection area passes through with the laser anode 120 in gold thread, silver wire and copper wire
Any one electrical connection, the receiving plane electrical connection area pass through arbitrary in gold thread, silver wire and copper wire with the APD anodes 220
A kind of electrical connection.The surface of emission electrical connection area be electrically connected with the laser anode 120, specifically, can by gold thread, silver wire and
Any one in copper wire realizes electrical connection.Receiving plane, which is electrically connected area and APD anodes 220, can also pass through gold thread, silver wire and copper
Any one in line realizes electrical connection.In one embodiment of the application, high ductibility and security consideration for gold,
It is electrically connected using gold thread, it can be ensured that the detection accuracy energy of laser radar system.
In addition, based on above-mentioned laser radar array element, the application also provides a kind of laser radar.
In one embodiment, the laser radar of the application is included by 300 and at least two laser as described above of matrix
The laser radar subarray 20 that radar array element 10 forms；
The laser radar array element 10 is spaced in the same direction is set on 300 upper surface of matrix, the institute in the laser radar array element 10
State the side that VCSEL lasers 100 are set to 300 upper surface of described matrix, the snowslide in the laser radar array element 10
Photodiode 200 is set to the opposite side of 300 upper surface of described matrix.
Fig. 5 is the structure diagram of one embodiment of the application laser radar, and Fig. 6 is laser radar embodiment shown in Fig. 5
Vertical view.With reference to figure 5 and Fig. 6, in the present embodiment, laser radar is included by matrix 300 and 20 laser thunders as described above
The laser radar subarray 20 formed up to array element 10, the laser radar array element 10 are arranged at intervals at 300 upper surface of matrix in the same direction.
Wherein, the VCSEL lasers 100 in laser radar array element 10 are set to the side of 300 upper surface of matrix, laser radar
Avalanche photodide 200 in array element 10 is set to the opposite side of 300 upper surface of matrix.Laser radar subarray 20 is by 20
Identical laser radar array element 10 forms, and is set to parallel on same matrix 300, spacing distance can radar resolution ratio and
Volume requirement is set.
Further, described matrix 300 is aluminium nitride.Matrix 300 carries VCSEL lasers 100 and two pole of avalanche optoelectronic
Pipe 200, so it needs to have insulation performance, and with certain degree of hardness.In one embodiment, using aluminium nitride as base
Body.Aluminium nitride is a kind of ceramics insulator, has higher heat-transfer capability, and casting technique making can be used, and is a kind of common
High power integrated circuit substrate and packaging material.
Further, the laser radar includes rearranging laser thunder by at least two laser radar subarrays 20
Up to array, the lidar array is any one shape in rectangular, round, regular polygon and star.Fig. 7 swashs for the application
The structure diagram of one embodiment of optical radar, as shown in fig. 7, in the present embodiment, lidar array is by 32 laser radar
Array 20 arranges squarely radar array according to the arrangement mode of 4*8.It, can be according to the detection condition of laser radar during concrete application
Carry out array arrangement, can using formed shape as rectangular, round, regular polygon and star in any one shape laser radar battle array
Row.
Above-mentioned laser radar, by the VCSEL lasers as laser emitter and the avalanche optoelectronic as laser pickoff
The parallel laser radar array element being set on the matrix of carrying of diode is arranged side by side in the same direction, wherein, wherein, VCSEL lasers lead to
It crosses the laser surface of emission and launches laser beam, after being reflected via detected object, laser pick-off is passed through by avalanche photodide
Face receives, it is achieved thereby that the transmitting and reception of laser, and then obtain related metrical information.Above-mentioned laser radar passes through VCSEL
Laser carries out array arrangement with the parallel arrangement that avalanche photodide is combined, so as to carry out transmitting-receiving detection, fully
The advantage that VCSEL lasers are small and can vertically paste is utilized, reduces the position of transmitting terminal and receiving terminal, so as to
The volume of radar can be reduced.Furthermore, it is possible to the density of VCSEL lasers and APD is arranged according to demand, so as to changing radar
Resolution ratio, convenient for integrated；The laser radar being made of above-mentioned small laser radar array element also allows for being fully sealed
Property processing.
Fig. 8 is the detection principle schematic diagram of one embodiment of the application laser radar.As shown in figure 8, swashing using the application
When optical radar carries out radar detection, the continuous light pulse signal after the transmitting of VCSEL Laser emissions end is modulated is to detecting article
In target face, then using APD receiving terminals receive reflected light, using between them phase difference carry out operation and be converted to away from
From data, then the data that each test cell is tested carry out 3D drawing, finally obtain radar scanning image.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the application, and description is more specific and detailed, but simultaneously
Cannot the limitation to utility model patent range therefore be interpreted as.It should be pointed out that the ordinary skill people for this field
For member, under the premise of the application design is not departed from, various modifications and improvements can be made, these belong to the application's
Protection domain.Therefore, the protection domain of the application patent should be determined by the appended claims.
Claims (10)
1. a kind of laser radar array element, which is characterized in that including emitting the VCSEL lasers of laser and receiving the snowslide light of laser
Electric diode, the VCSEL lasers are arranged in parallel with the avalanche photodide；
The VCSEL lasers are equipped with the laser surface of emission, and the VCSEL lasers emit surface launching by the laser and swash
Light, the avalanche photodide are equipped with laser pick-off face, and the avalanche photodide is received by the laser pick-off face
Laser.
2. laser radar array element according to claim 1, which is characterized in that the VCSEL lasers further include laser
Anode, laser cathode and laser emission part；
The laser anode is arranged at intervals with the laser cathode and the laser emission part, the laser cathode
Setting is contacted with the laser emission part, the laser surface of emission is set on the laser emission part far from the laser
The upper surface of cathode.
3. laser radar array element according to claim 2, which is characterized in that the laser emission part is far from the laser
The upper surface of device cathode further includes surface of emission electrical connection area, and the surface of emission electrical connection area is electrically connected with the laser anode.
4. laser radar array element according to claim 3, which is characterized in that the avalanche photodide further includes APD
Anode, APD cathode and APD receiving parts；
The APD anodes are arranged at intervals with the APD cathode and the APD receiving parts, and the APD cathode connect with the APD
The contact setting of receipts portion, the laser pick-off face is set on upper surface of the APD receiving parts far from the APD cathode.
5. laser radar array element according to claim 4, which is characterized in that the APD receiving parts are far from the APD cathode
Upper surface further include the receiving plane electrical connection area contacted with the laser pick-off face, receiving plane electrical connection area with it is described
APD anodes are electrically connected.
6. laser radar array element according to claim 5, which is characterized in that the surface of emission electrical connection area and the laser
Device anode is led to by any one electrical connection in gold thread, silver wire and copper wire, the receiving plane electrical connection area with the APD anodes
Cross any one electrical connection in gold thread, silver wire and copper wire.
7. laser radar array element according to claim 1, which is characterized in that the laser surface of emission and the laser connect
The shape in receipts face is any one in circle, rectangle, regular polygon and star.
8. a kind of laser radar, which is characterized in that including as matrix and at least two as described in claim 1-7 any one
The laser radar subarray of laser radar array element composition；
The laser radar array element is spaced in the same direction is set on body upper surface, the VCSEL laser in the laser radar array element
Device is set to the side of described matrix upper surface, and the avalanche photodide in the laser radar array element is set to described
The opposite side of body upper surface.
9. laser radar according to claim 8, which is characterized in that described matrix is matrix made of aluminium nitride.
10. laser radar according to claim 8, which is characterized in that the laser radar is included as described at least two
Laser radar subarray rearranges lidar array, and the lidar array is rectangular, round, regular polygon and star
In any one shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721540826.2U CN207571298U (en) | 2017-11-15 | 2017-11-15 | Laser radar array element and laser radar |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721540826.2U CN207571298U (en) | 2017-11-15 | 2017-11-15 | Laser radar array element and laser radar |
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| CN207571298U true CN207571298U (en) | 2018-07-03 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108963750A (en) * | 2018-07-18 | 2018-12-07 | 度亘激光技术（苏州）有限公司 | A kind of VCSEL and APD integrated chip and preparation method thereof |
-
2017
- 2017-11-15 CN CN201721540826.2U patent/CN207571298U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108963750A (en) * | 2018-07-18 | 2018-12-07 | 度亘激光技术（苏州）有限公司 | A kind of VCSEL and APD integrated chip and preparation method thereof |
| CN108963750B (en) * | 2018-07-18 | 2023-08-29 | 度亘激光技术（苏州）有限公司 | VCSEL and APD integrated chip and preparation method thereof |
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