Utility model content
The purpose of this utility model is to provide a kind of test device of deep ultraviolet detector, to simple in structure, Neng Gouyou
Effect tests detector sensitivity, so as to obtain test data, convenient for improving the efficiency of research and development.
To achieve these goals, the utility model provides a kind of test device of deep ultraviolet detector, including having out
The test chamber at mouth end, the openend are provided with openable and closable end cap, and the test chamber bottom is sequentially arranged at intervals with deep ultraviolet
Light source and testboard, the deep ultraviolet light source are electrically connected with external control cabinet, deep ultraviolet detector are provided on the testboard,
The first convex lens, the second convex lens and third convex lens are sequentially arranged at intervals between the deep ultraviolet light source and the testboard
Mirror, the light that the deep ultraviolet light source is sent out is successively by first convex lens, second convex lens, the third convex lens
Mirror is exposed on the detection end face of the deep ultraviolet detector;
Thermal imaging system and visible-light detector are additionally provided in the test chamber, the thermal imaging system and the visible ray are visited
It surveys device and is electrically connected the external control cabinet.
Preferably, in the center of the deep ultraviolet light source, the center of first convex lens, second convex lens
The center of the detection end face of the heart, the center of the third convex lens and the deep ultraviolet detector is on same straight line.
Preferably, the image space of first convex lens, second convex lens and the third convex lens is adjustable
It is whole.
Preferably, between the visible-light detector setting and first convex lens and second convex lens.
Preferably, the thermal imaging system is fixed in the end cap towards on the end face of the test chamber.
Preferably, the thermal imaging system is set between first convex lens and second convex lens.
Preferably, the external control cabinet includes controller, and the controller is electrically connected the deep ultraviolet detection
Device, the thermal imaging system, the visible-light detector and deep ultraviolet light source, the controller are also electrically connected with display screen.
Preferably, the junction of the end cap and the test chamber is provided with sealing device.
Preferably, the sealing device is sealing ring, the affixed openend with the test chamber of the sealing ring.
Test device provided by the utility model, including the test chamber with openend, the openend is provided with can
The end cap of folding, the test chamber bottom are sequentially arranged at intervals with deep ultraviolet light source and testboard, and the deep ultraviolet light source is electrically connected
External control cabinet is connected to, deep ultraviolet detector is provided on the testboard, between the deep ultraviolet light source and the testboard
The first convex lens, the second convex lens and third convex lens are sequentially arranged at intervals with, the light that the deep ultraviolet light source is sent out is successively
The detection of the deep ultraviolet detector is exposed to by first convex lens, second convex lens, the third convex lens
On end face;Thermal imaging system and visible-light detector are additionally provided in the test chamber, the thermal imaging system and the visible ray are visited
It surveys device and is electrically connected the external control cabinet.In above device, test chamber is provided with, test chamber is realized and the external world by end cap
Isolation so that the closed environment every light is obtained in test chamber, is arranged at intervals deep ultraviolet light source, first convex successively in test chamber
Lens, the second convex lens, third convex lens and deep ultraviolet detector, wherein deep ultraviolet detector are arranged on testboard, are being surveyed
Examination intracavitary is additionally provided with visible-light detector and thermal imaging system, deep ultraviolet light source, deep ultraviolet detector, visible-light detector and heat
Imager is electrically connected external control cabinet.
End cap is opened during test, tested deep ultraviolet probe is arranged on testboard, and be fixed so that darkviolet
The end of probe of detector fixes end cap and test chamber facing towards deep ultraviolet light source direction so that test chamber is inside and outside every light, passes through
External control cabinet starts dark purple light source, and the light that deep ultraviolet light source is sent out is successively by the first convex lens, the second convex lens and the
Three convex lenses are finally converged on the detection end face of deep ultraviolet detector, deep ultraviolet detector by the real-time data transmission of detection extremely
External control cabinet, tester can obtain the detecting parameter of deep ultraviolet detector by control cabinet in real time, so as to fulfill to depth
The Validity Test of ultraviolet detector, while the bright of adjustment deep ultraviolet light source can be needed according to test by external control cabinet
Degree, so as to meet test data of the deep ultraviolet detector under different light-intensity conditions, is supervised in real time additionally by visible-light detector
The intensity for the light surveyed inside test chamber enables tester to understand and grasp the light intensity inside test chamber in real time, consequently facilitating
The brightness of deep ultraviolet light source is adjusted, so that brightness meets the test request of deep ultraviolet detector, additionally by thermal imaging system
The temperature change and internal heat distribution situation in test chamber can be monitored in real time so that tester is grasped in test chamber in real time
Heat distribution situation, consequently facilitating adjustment test parameter so that the data of test are more accurate.Furthermore deep ultraviolet light source is sent out
The light gone out is diversity, the acquisition end face of deep ultraviolet detector is finally converged to by three step lens, so that dark purple
Outer line detector can resulting structure light, ensure the light-inletting quantity of test, and then ensure the accuracy of test data.
Specific embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and it is not intended that the utility model
Limitation.
It please refers to Fig.1, Fig. 1 is a kind of structural representation of specific embodiment of test device provided by the utility model
Figure.
In a kind of specific embodiment, test device provided by the utility model, including the test with openend
Chamber 1, the openend are provided with openable and closable end cap 2, and 1 bottom of test chamber is sequentially arranged at intervals with 11 He of deep ultraviolet light source
Testboard 5, the deep ultraviolet light source 11 are electrically connected with external control cabinet 4, deep ultraviolet detector 6 are provided on the testboard 5,
The first convex lens 10, the second convex lens 8 and third are sequentially arranged at intervals between the deep ultraviolet light source 11 and the testboard 5
Convex lens 7, the light that the deep ultraviolet light source 11 is sent out is successively by first convex lens 10, second convex lens 8, institute
Third convex lens 7 is stated to expose on the detection end face of the deep ultraviolet detector 6;Thermal imaging is additionally provided in the test chamber 1
Instrument 3 and visible-light detector 9, the thermal imaging system 3 and the visible-light detector 9 are electrically connected the external control cabinet 4.
In above device, test chamber 1 is provided with, test chamber 1 is realized by end cap 2 is isolated with extraneous so that is obtained in test chamber 1 close
The environment every light is closed, is arranged at intervals deep ultraviolet light source 11, the first convex lens 10, the second convex lens 8, successively in test chamber 1
Three convex lenses 7 and deep ultraviolet detector 6, wherein deep ultraviolet detector 6 are arranged on testboard 5, are additionally provided in test chamber 1
Visible-light detector 9 and thermal imaging system 3, deep ultraviolet light source 11, deep ultraviolet detector 6, visible-light detector 9 and thermal imaging system 3
It is electrically connected external control cabinet 4.
End cap 2 is opened during test, tested deep ultraviolet probe is arranged on testboard 5, and be fixed so that dark purple
The end of probe of chromakey detector fixes end cap 2 and test chamber 1 facing towards 11 direction of deep ultraviolet light source so that test chamber 1 it is inside and outside every
Light starts dark purple light source by external control cabinet 4, and the light that deep ultraviolet light source 11 is sent out is successively by the first convex lens 10, the
Two convex lenses 8 and third convex lens 7 are finally converged on the detection end face of deep ultraviolet detector 6, and deep ultraviolet detector 6 will detect
Real-time data transmission to external control cabinet 4, tester can obtain the detection of deep ultraviolet detector 6 by control cabinet in real time
Parameter, so as to fulfill the Validity Test to deep ultraviolet detector 6, while can be according to the needs of test by external control cabinet 4
The brightness of deep ultraviolet light source 11 is adjusted, so as to meet test data of the deep ultraviolet detector 6 under different light-intensity conditions, is in addition led to
The intensity for the light crossed inside 9 real-time monitoring and test chamber 1 of visible-light detector enables tester to understand and grasp survey in real time
The light intensity inside chamber 1 is tried, consequently facilitating the brightness of adjustment deep ultraviolet light source 11, so that brightness meets deep ultraviolet detector 6
Test request, can monitor temperature change in test chamber 1 in real time additionally by thermal imaging system 3 and internal heat is distributed feelings
Condition so that tester grasps the heat distribution situation in test chamber 1 in real time, consequently facilitating the parameter of adjustment test so that survey
The data of examination are more accurate.Furthermore the light that deep ultraviolet light source 11 is sent out is diversity, is finally converged to by three step lens
The acquisition end face of deep ultraviolet detector 6 so that deep UV detector can resulting structure light, ensure test into
Light quantity, and then ensure the accuracy of test data.
Based on above device, component is few simple in structure, and manufacture is at low cost, and effectively detector sensitivity can be surveyed
Examination, so as to obtain test data, convenient for improving the efficiency of research and development.
It is to be appreciated that the illuminator of above-mentioned deep ultraviolet light source 11 is Surface-mount LED lamp or lamp bead, the material of the illuminator
Matter derives from a wealth of sources, and is capable of the cost of efficient apparatus reduction manufacture, while illumination effect is good, can provide continuous and effective for test
Light source, furthermore it is low in energy consumption, power consumption can be effectively reduced, saves testing cost, in addition service life is long, can effectively reduce
The cost of maintenance.In order to ensure that the quantity of illuminator is set as multiple by luminous intensity, generally matrix form is taken to be arranged on depth
On the light emitting end surface of ultraviolet source 11, the quantity generally set is the quantity such as 2 × 2 or 3 × 3, luminous so as to be further ensured that
Intensity avoids test data being caused error occur due to light intensity deficiency, effectively improves the precision of test.
It should be pointed out that above-mentioned test chamber 1 is rectangular configuration with end cap 2, one end of end cap 2 is hinged and test chamber 1
The side of port, the free end of end cap 2 are fixed by the outer wall being buckled with test chamber 1, this kind of connection mode is easy to operation,
It is repositioned when end cap 2 being avoided to be fixed with test chamber 1 so that sealing effect is good, effectively avoids extraneous light and close beta ring
The influence in border.
It is further understood that, the center of the deep ultraviolet light source 11, the center of first convex lens 10, described second
The center of the detection end face at the center of convex lens 8, the center of the third convex lens 7 and the deep ultraviolet detector 6 is in
On same straight line.The center of above three lens is on same straight line, while the center of the end face of deep ultraviolet detector 6 and depth
The center of ultraviolet source 11 is also on above-mentioned straight line simultaneously, and when deep ultraviolet light source 11 works, light can have above structure
Effect eventually arrives at he of deep ultraviolet detector 6 by the convergence of each lens and surveys on end face, so that deep ultraviolet detector 6 can have
Effect obtains the light source of test, further improves the precision of test, ensures the effect of test.
Further, the image space of first convex lens 10, second convex lens 8 and the third convex lens 7
It is adjustable.Relative position between above-mentioned each lens can be adjusted, while the relatively deep ultraviolet source 11 of the first lens
Position can also be adjusted, third lens can also be adjusted with respect to the position of testboard 5, the adjustment of above-mentioned each lens
Direction motion bit on the line between center of the centre of luminescence to the detection end face of deep ultraviolet detector 6 of deep ultraviolet light source 11
It puts, above structure can carry out the adjustment of focal length so that light effectively so that by improving the position of each lens in test process
It can effectively collect on the detection end face of deep ultraviolet detector 6, effectively eliminate error, so as to improve the precision of test, simultaneously
It disclosure satisfy that the testing requirement to different light requirement detectors, that is, realize the survey to the deep ultraviolet detector 6 of different sensitivity
Examination.
It can be manually adjusted it is to be appreciated that the position of above-mentioned each lens is adjusted by opening end face,
External control cabinet 4 can be electrically connected by setting electric device, then by electric device, so as to fulfill external Electronic control.
Further, the visible-light detector 9 setting and first convex lens 10 and second convex lens 8 it
Between.By will be seen that optical detector 9 is arranged on above-mentioned position, the detection end face into deep ultraviolet detector 6 can be effectively obtained
Light intensity, can shape after the first convex lens 10 since the light sent out by deep ultraviolet light source 11 is dispersed structure
Into directional light, the light intensity in 10 rear end of the first convex lens is best at this time, by will be seen that optical detector 9 is arranged on energy at this
It is enough so that the data obtained are more accurate, and then convenient for test please in light intensity monitoring, convenient for adjustment of the test man to light intensity,
Further improve the precision of test.
Further, the thermal imaging system 3 is fixed in the end cap 2 towards on the end face of the test chamber 1.It is above-mentioned heat into
As the installation position of instrument 3 is in the top of test chamber 1, and installation position is in the center at 1 top of test chamber, by will be hot
Imager 3 is arranged on above-mentioned position, can effectively obtain in test chamber 1 each part temperatures variation, and can to back each portion
Part is imaged according to temperature variations so that tester, convenient for subsequent operation, makes convenient for the test status inside observation
What must be tested is better, effectively improves the precision of test.
Specifically, the thermal imaging system 3 is set between first convex lens 10 and second convex lens 8.It is above-mentioned
The observation position of position is in the center of test chamber 1, and the range of the position side is wide, can effectively realize to test chamber 1
Interior each component is effectively monitored, and ensures the effect of monitoring so that tester can grasp internal situation in real time, convenient for logical
The external control cabinet 4 of adjustment is crossed to realize the test condition inside adjustment, ensures final test effect and precision.
Specifically understand, the external control cabinet 4 includes controller, and the controller is electrically connected described dark purple
External detector 6, the thermal imaging system 3, the visible-light detector 9 and deep ultraviolet light source 11, the controller are also electrically connected with
Display screen.1 inside deep ultraviolet detector 6 of above controller real-time architecture test chamber, thermal imaging system 3 and visible-light detector 9 are real
When the data fed back, while carry out by display screen the display of data, observation and record of the personnel easy to operation to data, so as to
Convenient for the operation of test, realized additionally by operation and control device to being adjusted by the electric current of deep ultraviolet light source 11, so that deep
The brightness of ultraviolet source 11 is adjusted, and then meets the Validity Test of deep ultraviolet detector 6, and ensures the precision of test.
Specifically, the junction of the end cap 2 and the test chamber 1 is provided with sealing device.Above-mentioned sealing device causes
Effective sealing is realized in 1 port of test chamber with end cap 2, i.e., so that being realized inside test chamber 1 after fixed between end cap 2 and test chamber 1
It carries out every light, and can ensure every light effect with outside so that extraneous light will not cause the test wrapper to internal test chamber 1
The influence in border.
Specifically, the sealing device is sealing ring, the affixed openend with the test chamber 1 of the sealing ring.It is above-mentioned
Sealing ring is by being arranged on the open end of test chamber 1 so that cover board can ensure when being fixed with test chamber 1 in test chamber 1
It is effective every light between portion and external environment, further improve the precision of test.
It should be pointed out that above-mentioned sealing ring is every finish matter, and with good leakproofness, can be felt,
Rubber etc..
The various embodiments described above are only the preferred embodiments of the utility model, in the art, every to be based on this reality
With the changes and improvements in new technique scheme, should not exclude except the scope of protection of the utility model.