CN207489826U - Wafer carrier system, wafer carrier and electronic module tag - Google Patents
Wafer carrier system, wafer carrier and electronic module tag Download PDFInfo
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- CN207489826U CN207489826U CN201720966499.0U CN201720966499U CN207489826U CN 207489826 U CN207489826 U CN 207489826U CN 201720966499 U CN201720966499 U CN 201720966499U CN 207489826 U CN207489826 U CN 207489826U
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Abstract
A kind of wafer carrier system includes multiple wafer carriers, carrying box body, electronic module tag and multiple information carrying means.Box body is carried to carry multiple wafers.Electronic module tag includes power supply unit, infrared transmission component and electric paper display.Electric paper display can show wafer information.Electric paper display can be shown in display surface when the voltage that power supply unit provides is less than working voltage less than wafer information shown before working voltage.Multiple information carrying means are set to multiple work stations.When each wafer carrier is transported to each work station, fresh information can be transmitted by being set to the information carrying means of work station, the extremely infrared transmission component of each wafer carrier, and the electric paper display of each wafer carrier can correspond to display surface and show fresh information.It can make associated user that can still check relevant information in display surface when power supply unit out of power whereby.
Description
Technical field
The utility model is related to a kind of wafer carrier system, wafer carrier and electronic module tag, it is particularly a kind of to
The wafer carrier system of carrying wafer carrier, the wafer carrier for being provided with electronic module tag and to be set to wafer carrier
Electronic module tag.
Background technology
During wafer manufactures, wafer needs are transmitted between different work stations.In order to avoid wafer transports
In the process, it is influenced by external environment, wafer can be mostly set in wafer cassette by relevant manufactures, make wafer whereby in transport process
In be not easily susceptible to external environment influence.It is brilliant in order to which relevant device or personnel is made to know the relevant information of the wafer in wafer cassette
The outside of circle box mostly can be provided with a display unit, and relevant information is shown with corresponding.So, display unit easily has the electric power insufficient
Problem when display unit electric power deficiency, will not show any information in its picture, and relevant device or personnel are by nothing
From the relevant information for learning the wafer cassette.
Utility model content
The main purpose of the utility model is that a kind of wafer carrier system, wafer carrier and electronic module tag are provided,
To improve in the prior art, electric power deficiency easily occurs for the associated display unit of wafer carrier, and causes relevant device or people
Member have no way of learning wafer carrier relevant information the problem of.
To achieve these goals, the utility model provides a kind of wafer carrier system, it includes：Multiple wafer carriers,
One carrying box body, an electronic module tag and multiple information carrying means.Each wafer carrier includes：One carrying box body and one
Electronic module tag.Carrying box body includes a pedestal, an outer housing and a bearing structure.Bearing structure and pedestal or outer housing
It is connected, to carry multiple wafers, shell physical efficiency is fixed to each other bearing structure with pedestal, to form one in carrying in box body
Confined space, multiple wafers are then correspondingly arranged in confined space.The outside of electronic module tag setting carrying box body, without
In confined space, electronic module tag includes：One power supply unit, an infrared transmission component and an electric paper display
(Electronic Paper,ePaper).Infrared transmission component includes a receiving unit and a transmitting element, receiving unit
And transmitting element can be operated independently, and infrared transmission component can penetrate receiving unit and transmitting element is carried out at the same time information
Transmission and reception.Electric paper display is electrically connected power supply unit and infrared transmission component, electric paper display include
One display surface, display surface can correspond to one wafer information of display；The voltage that electric paper display can be provided in power supply unit is less than one
It during working voltage, is shown in display surface, the shown wafer information before less than working voltage.Multiple information carrying means are set
It is placed in multiple work stations；When each wafer carrier is transported to each work station, it is set to the information carrying means of work station
A messaging unit can transmit a fresh information, until the receiving unit of each wafer carrier, and the electricity of each wafer carrier
Sub- paper display can correspond to display surface and show fresh information, and an information receiving unit of information carrying means can receive hair
Send the information that unit is transmitted.
To achieve these goals, the utility model provides a kind of wafer carrier, it includes：One carrying box body and an electronics
Label model.Carrying box body includes a pedestal and an outer housing, and pedestal is carrying multiple wafers, shell physical efficiency and pedestal
It is fixed to each other, to form a confined space in box body in carrying, multiple wafers are then correspondingly arranged in confined space.Electronics mark
The outside of module setting carrying box body is signed, without being located in confined space, electronic module tag includes：It is one power supply unit, one red
Outside line transmission assembly and an electric paper display.Infrared transmission component includes a receiving unit and a transmitting element, receives
Unit can be with an external equipment wireless connection, and to receive a fresh information, receiving unit and transmitting element can be operated independently,
And infrared transmission component can penetrate receiving unit and transmitting element is carried out at the same time the transmission and reception of information.Electric paper display
It is electrically connected power supply unit and infrared transmission component, electric paper display includes a display surface, display surface can correspond to display
One wafer information or fresh information；Electric paper display can be when the voltage that power supply unit provides be less than a working voltage, Yu Xian
Show in face and show, shown wafer information or fresh information before less than working voltage.
Preferably, each electronic module tag also includes a processing unit, and processing unit is electrically connected power supply unit, place
Managing unit can be when the voltage that power supply unit provides electric paper display be less than working voltage, and control electric paper display is in display
A low voltage warning information is shown in face.
Preferably, each wafer carrier also includes a sensing unit, and sensing unit is electrically connected power supply unit, and sensing is single
Whether member can sense wafer carrier by carrying, selectively to control whether power supply unit supplies electricity to electric paper display.
Preferably, electronic module tag is removable installed in carrying box body, and electronic module tag includes multiple operations
Unit, electric paper display can be corresponding to show different wafer informations or update letter when one of operating unit is operated
Breath.
Preferably, each work station also includes a charging unit, and each charging unit can be to the power supply list of wafer carrier
Member charges.
To achieve these goals, the utility model provides a kind of electronic module tag, fits to be set to a wafer
Tool, electronic module tag include：One power supply unit, an infrared transmission component and an electric paper display.Infrared transmission group
Part includes a receiving unit and a transmitting element, and receiving unit can be believed with an external equipment wireless connection with receiving a update
Breath, receiving unit and transmitting element can be operated independently, and infrared transmission component can penetrate receiving unit and transmitting element
It is carried out at the same time the transmission and reception of information.Electric paper display is electrically connected power supply unit and infrared transmission component, Electronic Paper
Display includes a display surface, and display surface can correspond to one wafer information of display or fresh information；Electric paper display can be in confession
When the voltage that electric unit provides is less than a working voltage, show a low voltage warning information and display surface low in display surface
Shown wafer information or fresh information before working voltage.
Preferably, each electronic module tag also includes a processing unit, and processing unit is electrically connected power supply unit, place
Managing unit can be when the voltage that power supply unit provides electric paper display be less than working voltage, and control electric paper display is in display
A low voltage warning information is shown in face.
Preferably, each wafer carrier also includes a sensing unit, and sensing unit is electrically connected power supply unit, and sensing is single
Whether member can sense wafer carrier by carrying, and processing unit can be when sensing unit senses wafer carrier by carrying, control power supply
Unit does not power to electric paper display, shows wafer carrier not by the wafer information before carrying so that electric paper display corresponds to
Or fresh information.
Preferably, electronic module tag is removable installed in carrying box body, and electronic module tag includes multiple operations
Unit, electric paper display can be corresponding to show different wafer informations or update letter when one of operating unit is operated
Breath；Wafer carrier also includes a wireless charging module, is electrically connected power supply unit, the wireless charging module can with one outside
Wireless charging module cooperates, to charge to power supply unit.
The beneficial effects of the utility model can be：The voltage that electric paper display can be provided in power supply unit is less than one
It during working voltage, is shown in display surface, shown wafer information or fresh information before less than working voltage, it whereby can be with
Make associated user that can still check relevant information in display surface when power supply unit out of power.
Description of the drawings
Fig. 1 is the schematic diagram of the wafer carrier system of the utility model.
Fig. 2 is the block schematic diagram of the wafer carrier system of the utility model.
Fig. 3 is the first embodiment schematic diagram of the wafer carrier of the utility model.
Fig. 4 is the partial schematic diagram of the first embodiment of the wafer carrier of the utility model.
Fig. 5 is the schematic diagram of the second embodiment of the wafer carrier of the utility model.
Fig. 6,7 schematic diagram for the 3rd embodiment of the wafer carrier of the utility model.
Specific embodiment
Also referring to Fig. 1 and Fig. 2, the schematic diagram of the wafer carrier system of the utility model is shown.It is as shown in the figure, brilliant
Circle carrier system 1 includes multiple wafer carriers 10, a transmission device 20 and multiple work stations 30.Multiple wafer carriers 10 can quilt
20 carrying of transmission device, to be moved between multiple work stations 30.The transmission device 20 can be according to actual demand, be machine
Tool arm, transmission crawler belt etc., do not limit in this；The work station 30 for example can be to that should carry out different processing procedures to wafer
Work station 30, the work station 30 can also be store wafer carrier 10 storage space, can be changed according to demand.
Multiple work stations 30 are provided with multiple information carrying means 31, to carry out the friendship of relevant information to each wafer carrier 10
It changes.In preferable application, each work station 30 is to include at least two information carrying means 31, each 10 quilt of wafer carrier
When being transported to work station 30, information carrying means 31 will be exchanged with each other information with wafer carrier 10；Then, wafer carrier 10 is carried
Fortune and before leaving work station 30, can carry out information exchange with the information carrying means of the work station 30 31 again.When
So, according to actual demand, each work station 30 can also only be had there are one information carrying means 31, and can be in wafer
When tool 10 enters or leaves work station 30, information exchange is carried out with wafer carrier 10.
After the information carrying means 31 of each work station 30 reads the information of each wafer carrier 10, the correlation of each work station 30
Carrier equipment (be, for example, mechanical arm) is by can be according to the relevant information of wafer carrier 10, and wafer carrier 10 is transported to by correspondence
Different work station 30 or it is transported to specific position in work station 30.In other words, the information carrying means of each work station 30
31 can be according to the information of wafer carrier 10, and classifies to wafer carrier 10, so that different wafer carriers 10 is transported
To different work stations 30 or carried out different relevant treatment operations.
Also referring to Fig. 3 and Fig. 4, each wafer carrier 10 can include a carrying box body 11 and an electronic tag
Module 12.It can include a pedestal 111, an outer housing 112 and a bearing structure 113 to carry box body 11.Bearing structure 113
It is connected with outer housing 112, bearing structure 113 is carrying multiple wafer W.Outer housing 112 can be mutually solid with pedestal 111
Fixed, to form a confined space SP in box body 11 in carrying, multiple wafer W, which can then be corresponded to, to be arranged in confined space SP.
In various embodiments, bearing structure 113 can also be connected with pedestal 111, shown in figure be only demonstration form, not with
It is limited.Can be according to changes in demand, figure about pedestal 111, the external form of outer housing 112 and its connection mode to each other
Shown in be only one form of which.
The outside of the setting carrying box body 11 of electronic module tag 12, without being located in confined space SP；In practical applications,
Electronic module tag 12 can be the outside for being fixedly installed on pedestal 111 or outer housing 112.Electronic module tag 12 can wrap
Contain：One power supply unit 121, an infrared transmission component 122 and an electric paper display (Electronic Paper,
ePaper)123.Power supply unit 121 can be rechargeable battery, and power supply unit 121 is providing electronic module tag
Electric energy needed for 12 each component.Preferably, power supply unit 121 can support wireless charging technology, and side that can be wireless
Formula charges.
Infrared transmission component 122 to the information carrying means 31 of each work station 30 carry out information exchange；In reality
In the application of border, infrared transmission component 122 includes a receiving unit 1221 and a transmitting element 1222, receiving unit 1221 and
Transmitting element 1222 can be operated independently, and infrared transmission component 122 can penetrate receiving unit 1221 and transmitting element
1222 simultaneously with the information carrying means 31 of each work station 30 into the transmission and reception of row information.Relatively, each work station
30 information carrying means 31 equally can be to include an information transmission unit 312 and an information receiving unit 313, and each
A information carrying means 31 then can penetrate information transmission unit 312 and information receiving unit 313, respectively with receiving unit 1221 and
Transmitting element 1222 is exchanged with each other information.
One fresh information 311 is obtained by the information carrying means 31 of each work station 30, the fresh information 311 can be with
Be wafer carrier 10 in this work station 30, information, time of the relevant treatment carried out etc..Electric paper display 123 is electrical
Connection infrared transmission component 122 and power supply unit 121, electric paper display 123 include a display surface 1231, display surface
1231 can correspond to one wafer information 1232 of display or the fresh information 311.It illustrates, each infrared transmission component
122 transmit with the information of each information carrying means 31, are compatible semiconductor communications protocol (SECS/GEM).In different applications
In, electronic module tag 12 can also integrate to be set in pedestal 111 or outer housing 112.
Electric paper display 123 can be when the voltage that power supply unit 121 provides be less than a working voltage, in display surface 1231
Middle display, shown wafer information 1232 or fresh information 311 before less than working voltage.In other words, electric paper display
123 can show the picture before being powered down in display surface 1231, without such as general LCD screen, picture after a loss of power
It is rendered as blank.In this way, associated user or equipment is in the brownout that power supply unit 121 provides, it still can be in display surface
The related wafer information 1232 of wafer carrier 10 or fresh information 311 are watched in 1231, wafer carrier 10 is learnt without having no way of
Relevant information.Electric paper display 123 can be affixed in housing in specific application, and but not limited to this；It is described
Electric paper display 123 for example can be using microcapsules (Microcapsules) electrophoretic techniques, micro-cup (Microcup) electrophoresis
Technology, electronics powder fluid QR-LPD (Quick Response Liquid Powder Display) technology, E-Ink Electronic Paper skills
Art, cholesterol liquid crystal (Cholesteric Liquid Crystal) technology, electrochemical reaction display technology, flexible liquid crystal are shown
Show technology, toner display technology, electrowetting
(electrowetting) display technology and organic light emitting display (organic light-emitting diode)
Technology etc. is not limited in this.
In preferable application, electronic module tag 12 can include a processing unit 124, be electrically connected power supply
Unit 121, electric paper display 123 and infrared transmission component 122, processing unit 124 can be carried in power supply unit 121
When the voltage of supplied for electronic paper display 123 is less than the working voltage, corresponding control electric paper display 123 is in its display surface
A low voltage warning information 1233 is shown in 1231, allows associated user or equipment that can learn the crystalline substance in display surface 1231 whereby
Justify the too low information of the electric energy of the power supply unit 121 of carrier 10.
In different embodiments, processing unit 124 detect power supply unit 121 electric energy deficiency when, can be penetrate it is red
Outside line transmission assembly 122 transmits a Charging signal 1241 to work station 30, and using enables the relevant device of work station 30 by wafer
Carrier 10 is transported to specific position, is charged with the power supply unit 121 to wafer carrier 10；Preferably, power supply unit 121
And work station 30 can be the corresponding relevant apparatus with wireless charging, and during the reception Charging signal 1241 of work station 30, you can
It charges through the charging unit 32 of energy wireless charging to wafer carrier 10.In another embodiment, wafer carrier 10 is in each
When being waited for relevant treatment during carrying or in work station 30 in a work station 30, the energy wireless charging of work station 30
Charging unit 32 can charge to the power supply unit 121 of wafer carrier 10, to avoid the power supply unit of each wafer carrier 10
121 occur the problem of electric energy is too low.In another embodiment, to the transmission device 20 of each wafer carrier 10 of carrying, also may be used
To be provided with relevant wireless charging device, and can be during by each wafer carrier 10 of carrying, to each wafer
Carrier 10 charges.
In different applications, each wafer carrier 10 can also include a sensing unit 125,125 electricity of sensing unit
Property connection power supply unit 121, whether sensing unit 125 can sense wafer carrier 10 by carrying (movement).When sensing unit 125 is felt
When surveying wafer carrier 10 by carrying (or the speed of carrying is higher than predetermined speed), corresponding control power supply unit 121 can be made not
It powers to electric paper display 123, shows wafer carrier 10 not by before carrying (movement) so that electric paper display 123 corresponds to
Wafer information 1232 or fresh information 311.In other words, power supply unit 121 can be only in electric paper display 123 not by carrying
Offer electric energy electron paper display 123 when (or the speed of carrying is higher than predetermined speed), and electric paper display 123
Can electric energy be just only expended when display surface 1231 is replaced and shows different information, remaining time neither expends electric energy.
Referring to Fig. 5, the schematic diagram of the second embodiment of its wafer carrier for the utility model.As shown in the figure, this reality
Applying the wafer carrier 10 of example, the difference lies in the outer housing 112 of each wafer carrier 10 can with above-mentioned first embodiment maximum
To be to have a snap-in structure 1121, and electronic module tag 12 is removably to be mutually clamped with snap-in structure 1121.Also that is,
Electronic module tag 12 can be removable installed in carrying box body 11.The external form of the snap-in structure 1121 can be foundation
Demand is changed, and shown in figure is only a wherein demonstration form.It is to make electronic module tag 12 using mechanical structure in figure
Carrying box body 11 is removable installed in, but not limited to this, and in various embodiments, electronic module tag 12 can also
It is to utilize magnetic or other modes, and is removably secured setting carrying box body 11.
It is the schematic diagram of the 3rd embodiment of the wafer carrier of the utility model also referring to Fig. 6 and Fig. 7.Such as figure
Shown, the difference lies in the pedestal 111 of each wafer carrier 10 can be corresponding to the present embodiment with previous embodiment maximum
It is set to the side of outer housing 112, and the non-limiting downside for being set to outer housing 112.It is noted that aforementioned each implementation
The electronic module tag 12 of each wafer carrier 10 in example, which can also be, includes multiple operating units 126, and the Electronic Paper is shown
Show that device can be corresponding to show the different wafer informations or the update when one of them operating unit 126 is operated
Information.
Claims (10)
1. a kind of wafer carrier system, which is characterized in that the wafer carrier system includes：
Multiple wafer carriers, each wafer carrier include：
One carrying box body, it includes have a pedestal, an outer housing and a bearing structure, the bearing structure and the pedestal or institute
Outer housing to be stated to be connected, to carry multiple wafers, the shell physical efficiency is fixed to each other the bearing structure with the pedestal,
To form a confined space in the carrying box body, multiple wafers are then correspondingly arranged in the confined space；
One electronic module tag sets the outside of the carrying box body, without being located in the confined space, the electronics mark
Label module includes：
One power supply unit；
One infrared transmission component, it includes having a receiving unit and a transmitting element, the receiving unit and the transmission are single
Member can be operated independently, and the infrared transmission component can penetrate the receiving unit and the transmitting element is carried out at the same time
The transmission and reception of information；And
One electric paper display, is electrically connected said supply unit and the infrared transmission component, the Electronic Paper are shown
Device includes a display surface, and the display surface can correspond to one wafer information of display；The electric paper display can be in the power supply
When the voltage that unit provides is less than a working voltage, shown in the display surface, it is shown before less than the working voltage
The wafer information；
Multiple information carrying means are set to multiple work stations；Each wafer carrier is transported to each described work
When standing, a fresh information can be transmitted by being set to a messaging unit of the described information transmitting device of the work station, until
The receiving unit of each wafer carrier, and the electric paper display of each wafer carrier, can correspond to
The display surface shows the fresh information, and an information receiving unit of described information transmitting device can receive the transmission list
The information that member is transmitted.
2. according to wafer carrier system described in claim 1, which is characterized in that each electronic module tag also includes
One processing unit, the processing unit are electrically connected said supply unit, and the processing unit can be provided in said supply unit
When the voltage of the electric paper display is less than the working voltage, the electric paper display is controlled to be shown in the display surface
Show a low voltage warning information.
3. according to wafer carrier system described in claim 1, which is characterized in that each wafer carrier also includes a sense
Survey unit, the sensing unit is electrically connected said supply unit, the sensing unit can sense the wafer carrier whether by
Carrying, selectively to control whether said supply unit supplies electricity to the electric paper display.
4. according to wafer carrier system described in claim 1, which is characterized in that the electronic module tag is removably disposed
In the carrying box body, the electronic module tag includes multiple operating units, and the electric paper display can be in wherein one
It is corresponding to show the different wafer informations or the fresh information when a operating unit is operated.
5. according to wafer carrier system described in claim 1, which is characterized in that each work station also includes a charging
Device, each charging unit can charge to the said supply unit of the wafer carrier.
6. a kind of wafer carrier, which is characterized in that the wafer carrier includes：
One carrying box body, it includes having a pedestal and an outer housing, the pedestal is carrying multiple wafers, the outer housing
It can be fixed to each other with the pedestal, to form a confined space in the carrying box body, then correspondence is set multiple wafers
It is placed in the confined space；And
One electronic module tag sets the outside of the carrying box body, without being located in the confined space, the electronics mark
Label module includes：
One power supply unit；
One infrared transmission component, it includes having a receiving unit and a transmitting element, the receiving unit can with one outside set
Standby wireless connection, to receive a fresh information, the receiving unit and the transmitting element can be operated independently, and described red
Outside line transmission assembly can penetrate the receiving unit and the transmitting element is carried out at the same time the transmission and reception of information；An and electronics
Paper display, is electrically connected said supply unit and the infrared transmission component, the electric paper display include one
Display surface, the display surface can correspond to one wafer information of display or the fresh information；The electric paper display can be in described
When the voltage that power supply unit provides is less than a working voltage, shown in the display surface, the institute before less than the working voltage
The wafer information of display or the fresh information.
7. according to the wafer carrier described in claim 6, which is characterized in that each electronic module tag also includes at one
Unit is managed, the processing unit is electrically connected said supply unit, and the processing unit can be in described in said supply unit offer
When the voltage of electric paper display is less than the working voltage, the electric paper display is controlled to show one in the display surface
Low voltage warning information.
8. according to the wafer carrier described in claim 7, which is characterized in that each wafer carrier also includes a sensing list
Member, the sensing unit are electrically connected said supply unit, and whether the sensing unit can sense the wafer carrier by carrying,
The processing unit can be when the sensing unit senses the wafer carrier by carrying, and control said supply unit is not to described
Electric paper display is powered, and shows the wafer carrier not by the wafer before carrying so that the electric paper display corresponds to
Information or the fresh information.
9. according to the wafer carrier described in claim 6, which is characterized in that the electronic module tag is removable installed in institute
Carrying box body is stated, the electronic module tag includes multiple operating units, and the electric paper display can be in one of institute
It is corresponding to show the different wafer informations or the fresh information when stating operating unit and being operated；The wafer carrier also wraps
Containing a wireless charging module, said supply unit is electrically connected, which can be with external wireless charging mould
Block cooperates, to charge to said supply unit.
10. a kind of electronic module tag, which is characterized in that the electronic module tag is fitted to be set to a wafer carrier, described
Electronic module tag includes：
One power supply unit；
One infrared transmission component, it includes having a receiving unit and a transmitting element, the receiving unit can with one outside set
Standby wireless connection, to receive a fresh information, the receiving unit and the transmitting element can be operated independently, and described red
Outside line transmission assembly can penetrate the receiving unit and the transmitting element is carried out at the same time the transmission and reception of information；And
One electric paper display, is electrically connected said supply unit and the infrared transmission component, the Electronic Paper are shown
Device includes a display surface, and the display surface can correspond to one wafer information of display or the fresh information；The Electronic Paper is shown
Device can show that a low voltage warning is believed when the voltage that said supply unit provides is less than a working voltage in the display surface
Breath and the display surface shown wafer information or the fresh information before less than the working voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720966499.0U CN207489826U (en) | 2017-08-03 | 2017-08-03 | Wafer carrier system, wafer carrier and electronic module tag |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720966499.0U CN207489826U (en) | 2017-08-03 | 2017-08-03 | Wafer carrier system, wafer carrier and electronic module tag |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207489826U true CN207489826U (en) | 2018-06-12 |
Family
ID=62484602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720966499.0U Expired - Fee Related CN207489826U (en) | 2017-08-03 | 2017-08-03 | Wafer carrier system, wafer carrier and electronic module tag |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207489826U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110009281A (en) * | 2019-04-02 | 2019-07-12 | 云南电网有限责任公司电力科学研究院 | A kind of Warehouse Management System and its management method |
| WO2022193336A1 (en) * | 2021-03-19 | 2022-09-22 | 台湾积体电路制造股份有限公司 | Wafer carrier identification card replacement device |
| CN115332128A (en) * | 2022-10-14 | 2022-11-11 | 西安奕斯伟材料科技有限公司 | Wafer carrier management system and method |
-
2017
- 2017-08-03 CN CN201720966499.0U patent/CN207489826U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110009281A (en) * | 2019-04-02 | 2019-07-12 | 云南电网有限责任公司电力科学研究院 | A kind of Warehouse Management System and its management method |
| WO2022193336A1 (en) * | 2021-03-19 | 2022-09-22 | 台湾积体电路制造股份有限公司 | Wafer carrier identification card replacement device |
| CN115332128A (en) * | 2022-10-14 | 2022-11-11 | 西安奕斯伟材料科技有限公司 | Wafer carrier management system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180612 Termination date: 20200803 |
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| CF01 | Termination of patent right due to non-payment of annual fee |