CN207475555U - A kind of ultra wide band multichannel optoelectronic integration detector for microwave photon system - Google Patents
A kind of ultra wide band multichannel optoelectronic integration detector for microwave photon system Download PDFInfo
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- CN207475555U CN207475555U CN201721341114.8U CN201721341114U CN207475555U CN 207475555 U CN207475555 U CN 207475555U CN 201721341114 U CN201721341114 U CN 201721341114U CN 207475555 U CN207475555 U CN 207475555U
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Abstract
The utility model discloses a kind of ultra wide band multichannel optoelectronic integration detector for microwave photon system, including optical detection converting unit connected in sequence, low noise amplification unit and microwave amplitude balanced unit.Optical detection converting unit is used to detect and acquire optical signal, and be converted into microwave signal;Low noise amplification unit is used to implement the amplification of microwave signal;Microwave amplitude balanced unit is used to implement the equilibrium of microwave signal.The utility model has broken existing individual optical detection, opto-electronic conversion and analog radio frequency processing, mainly realizes optical detection, opto-electronic conversion and analog radio frequency integration, has the characteristics that opto-electronic conversion frequency bandwidth, multichannel, miniaturization.
Description
Technical field
The utility model belongs to microwave photon technology field, and in particular to a kind of ultra wide band for microwave photon system is more
The design of channel optoelectronic integration detector.
Background technology
Microwave photon technology (ROF) is the intersection of emerging microwave of recent decades and photon combination of major
Section, is the new technique of generation, transmission, control and processing that a kind of method using photonic propulsion realizes microwave signal, core
It is the advantage using microwave and photon technology, solves microwave current from device level, module level and photon field can't resolve
The problem of.
Array high-speed photodetector is the core component in microwave photon field, is to convert optical signals to microwave signal
Critical piece, domestic single pass level has reached 18GHz.Existing market is clear and definite to array high-speed photodetector
Demand be miniaturization multichannel array InGaAs photodetector assemblies, core technology be two pieces:High-speed array light
The encapsulation coupling of electric explorer, array microwave matching circuit.Existing arrayed optical electric explorer all there are coupling technique and
Broadband Matching technology is relatively difficult to achieve, and the problem of SIP encapsulating structure poor air-tightness.
Utility model content
The purpose of this utility model is that all there are coupling technique and broadbands in order to solve existing arrayed optical electric explorer
Matching technique is relatively difficult to achieve, and the problem of SIP encapsulating structure poor air-tightness, it is proposed that a kind of ultra-wide for microwave photon system
Band multichannel optoelectronic integration detector.
The technical solution of the utility model is:A kind of ultra wide band multichannel optoelectronic integration for microwave photon system is visited
Device is surveyed, including optical detection converting unit connected in sequence, low noise amplification unit and microwave amplitude balanced unit;Optical detection turns
The input terminal for changing unit is the input terminal of optoelectronic integration detector, and the output terminal of microwave amplitude balanced unit is optoelectronic integration
The output terminal of detector;Optical detection converting unit, low noise amplification unit and microwave amplitude balanced unit are using sintering and gold
The mode of silk bonding is integrally attached to aluminium housing surface;Optical detection converting unit is for detecting and acquiring optical signal, and by its turn
Microwave signal is changed to, low noise amplification unit is used to implement the amplification of microwave signal, and microwave amplitude balanced unit is used to implement micro-
The equilibrium of wave signal.
The beneficial effects of the utility model are:The utility model has broken existing individual optical detection, opto-electronic conversion and mould
Intend radio frequency processing, mainly realize optical detection, opto-electronic conversion and analog radio frequency integration, mainly include three functional units, i.e.,
Optical detection converting unit for detecting and acquiring optical signal, and is converted into microwave signal;Low noise amplification unit, is used for
Realize the amplification of microwave signal;Microwave amplitude balanced unit is used to implement the equilibrium of microwave signal.Each unit can individually into
Row test and debugging so that entire probe access has very good measurability and adjustability.Three of the utility model
Functional unit using sintering and gold wire bonding, is integrally attached to aluminium housing surface, convenient for fault location and repair.This practicality is new
Type utmostly improves integrated level, entire detector size in a manner that single side integrates under the premise of testability is ensured
Only 54mm*33mm*7mm can realize level Hermetic Package.
Preferably, optical detection converting unit includes input optical fibre connected in sequence, APD detector modules, trans-impedance amplifier
Module, limiting amplifier module, clock and data recovery circuit module and data selector module, input optical fibre are optical detection
The input terminal of converting unit, the output terminal of data selector module are the output terminal of optical detection converting unit.
The advantageous effect of above-mentioned preferred embodiment is:APD detector modules are used to detect and acquire optical signal, and will collect
Optical signal be converted to current signal;The current signal that trans-impedance amplifier module is used to export APD detector modules is put
Greatly, while interference signal therein is filtered out;Limiting amplifier module be used for the current signal that trans-impedance amplifier module exports into
Row is further amplified, while play the role of signal shaping and overvoltage protection;Clock and data recovery circuit module is used for according to limit
The current data signal extraction clock signal of width amplifier module output, and obtain the phase of current data signal and clock signal
Relationship forms multidiameter delay data-signal;Data selector module is more for being exported to clock and data recovery circuit module
Circuit-switched data signal carries out parallel-serial conversion, obtains microwave signal and exports.
Preferably, input optical fibre is 5 road metallized optical fibres.
The advantageous effect of above-mentioned preferred embodiment is:Realize multichannel opto-electronic conversion.
Preferably, the photosurface diameter of APD detector modules
The advantageous effect of above-mentioned preferred embodiment is:The photosurface size of APD detector modules is much smaller than in the utility model
Low speed photo detector photosurface size, convenient for the Miniaturization Design of entire ultra wide band multichannel optoelectronic integration detector.
Preferably, the replacement of automatic gain control amplifier module can be used in limiting amplifier module.
The advantageous effect of above-mentioned preferred embodiment is:Automatic gain control amplifier module utilizes the principle of negative-feedback, to defeated
The amplitude for going out signal is sampled, and obtains a control voltage, and then reversely adjust amplification factor, equally can be to amplifying across resistance
The current signal of device module output is further amplified, while play the role of signal shaping and overvoltage protection.
Preferably, the output terminal of clock and data recovery circuit module forms 16 channel parallel data signals, data selector
Module selects 1 data selector using 16.
The advantageous effect of above-mentioned preferred embodiment is:The input way of data selector module and clock and data recovery circuit
The output way of module matches, and parallel-serial conversion is carried out to the multichannel data signal of clock and data recovery circuit module output,
It obtains microwave signal and exports.
Preferably, low noise amplification unit includes input matching network module connected in sequence, transistor modular and defeated
Go out matching network module;Input terminal of the input terminal of input matching network module for low noise amplification unit, output matching network
The output terminal of module is the output terminal of low noise amplification unit;Input matching network module and output matching network module use
T shapes or π shape LC match circuits.
The advantageous effect of above-mentioned preferred embodiment is:Input matching network module and output matching network module are using routine
T shapes or π shape LC match circuits, the best source matching and conjugate impedance match, transistor modular for being used to implement low noise amplification unit are made
For the core of low noise amplification unit, low noise, suitable gain and the stability of low noise amplification unit are realized.
Preferably, microwave amplitude balanced unit includes input matching circuit module connected in sequence, minor matters resonator module
And output matching circuit module;Input matching circuit module includes four sections of transmission line l being sequentially connected in series1、l2、l3And l4, l2With
l3Connecting node be also parallel with 1/4 wavelength transmission line l of open-end5, l1Input terminal as microwave amplitude balanced unit;
Output matching circuit module includes four sections of transmission line l being sequentially connected in series18、l19、l20And l21, l19And l20Connecting node it is also in parallel
There is 1/4 wavelength transmission line l of open-end22, l21Output terminal as microwave amplitude balanced unit;Minor matters resonator module packet
Include the transmission line l being sequentially connected in series6, transmission line l7, resistance R0, transmission line l8With transmission line l9, l6With l4Connection, l9With l18Connection;l6
On be also associated with the first minor matters circuit and the second minor matters circuit, l9On be also associated with third minor matters circuit and the 4th minor matters circuit;
First minor matters circuit includes the resistance R being sequentially connected in series1, transmission line l10And 1/4 wavelength transmission line l of open-end11, R1With l6
Connection;Second minor matters circuit includes the resistance R being sequentially connected in series2, transmission line l12And 1/4 wavelength transmission line l of open-end13,
R2With l6Connection;Third minor matters circuit includes the resistance R being sequentially connected in series3, transmission line l14And 1/4 wavelength transmission of open-end
Line l15, R3With l9Connection;4th minor matters circuit includes the resistance R being sequentially connected in series4, transmission line l16And 1/4 wave of open-end
Long transmission line l17, R4With l9Connection.
The advantageous effect of above-mentioned preferred embodiment is:1/4 wavelength transmission line that open-end is employed in the utility model takes
Generation lamped element L, C, with the variation of length of transmission line, open circuit cutting back transmission line show as perception, parallel resonance, capacitive and
The characteristics such as series resonance, therefore select appropriate resonant frequency, Q values and cascade number, it is possible to approach the equal of arbitrary needs
Weighing apparatus response.
Preferably, the three dB bandwidth f of optoelectronic integration detector3dBMeet:
Wherein fRCRepresent RC bandwidth restricteds, calculation formula is:
Wherein εrFor the relative dielectric constant of semiconductor, ε0For the permittivity of vacuum of semiconductor, L is entirely exhausts thickness
Degree, RTFor the all-in resistance of optoelectronic integration detector, A is the part table area of optoelectronic integration detector.
ftRepresent transition time bandwidth restricted, calculation formula is:
Wherein vhFor cavity speed, L is entirely exhausts layer thickness.
The advantageous effect of above-mentioned preferred embodiment is:Three dB bandwidth is to weigh the most important parameters of detector high frequency characteristics, is passed through
The rationally all-in resistance R of setting optoelectronic integration detectorTAnd part table area A, it determines suitable three dB bandwidth, is conducive to reality
Its existing matched well between follow-up radio circuit.
Description of the drawings
Fig. 1 show a kind of ultra wide band multichannel photoelectricity for microwave photon system of the utility model embodiment offer
Integrative detection device structure diagram.
Fig. 2 show the optical detection converting unit structure diagram of the utility model embodiment offer.
Fig. 3 show the low noise amplification cellular construction block diagram of the utility model embodiment offer.
Fig. 4 show the T shape LC match circuit schematic diagrames of the utility model embodiment offer.
Fig. 5 show the π shape LC match circuit schematic diagrames of the utility model embodiment offer.
Fig. 6 show the microwave amplitude balanced unit structure diagram of the utility model embodiment offer.
Specific embodiment
It is described in detail the illustrative embodiments of the utility model with reference to the drawings.It should be appreciated that show in attached drawing
The embodiment for going out and describing is only exemplary, it is intended that is illustrated the principle and spirit of the utility model, and is not limited this
The range of utility model.
The utility model embodiment provides a kind of ultra wide band multichannel optoelectronic integration for microwave photon system and visits
Device is surveyed, as shown in Figure 1, balanced single including optical detection converting unit connected in sequence, low noise amplification unit and microwave amplitude
Member.Input terminal of the input terminal of optical detection converting unit for optoelectronic integration detector, the output terminal of microwave amplitude balanced unit
Output terminal for optoelectronic integration detector.Optical detection converting unit, low noise amplification unit and microwave amplitude balanced unit are equal
Aluminium housing surface is integrally attached to by the way of sintering and gold wire bonding, convenient for fault location and repair.Optical detection conversion is single
For member for detecting and acquiring optical signal, and be converted into microwave signal, low noise amplification unit is used to implement microwave signal
Amplification, microwave amplitude balanced unit are used to implement the equilibrium of microwave signal.Each unit individually can be tested and be debugged, and be made
Obtaining entire probe access has very good measurability and adjustability.
Wherein, as shown in Fig. 2, optical detection converting unit includes input optical fibre connected in sequence, APD (Avalanche
Photodetector) detector module, trans-impedance amplifier (Transimpedance Amplifier, TIA) module, amplitude limit are put
Big device (Limiting Amplifier, LA) module, clock and data recovery circuit (Clock and Data Recovery,
CDR) module and data selector (Multiplexer, MUX) module.Input optical fibre is the input terminal of optical detection converting unit,
The output terminal of data selector module is the output terminal of optical detection converting unit.
APD detector modules are also known as avalanche photodetector, and inside has photomultiplier transit (or snowslide) photodiode,
For detecting and acquiring optical signal, and collected optical signal is converted into current signal.Trans-impedance amplifier module is used for APD
The current signal of detector module output is amplified, while filter out interference signal therein.Limiting amplifier module for pair
The current signal of trans-impedance amplifier module output is further amplified, while play the role of signal shaping and overvoltage protection.When
Clock and data recovery circuit module are used to extract clock signal according to the current data signal that limiting amplifier module exports, and obtain
To current data signal and the phase relation of clock signal, multidiameter delay data-signal is formed.Data selector module for pair
The multichannel data signal of clock and data recovery circuit module output carries out parallel-serial conversion, obtains microwave signal and exports.
In the utility model embodiment, input optical fibre is 5 road metallized optical fibres, realizes multichannel (Five-channel) photoelectricity and turns
It changes.
In the utility model embodiment, the photosurface diameter of APD detector modulesAPD detector modules
Photosurface size is much smaller than Low speed photo detector photosurface sizeConvenient for entire ultra wide band multichannel photoelectricity one
The Miniaturization Design of body detector.
In the utility model embodiment, automatic gain control amplifier (Automatic can be used in limiting amplifier module
Gain Control Amplifier, AGC) module replacement.Automatic gain control amplifier module utilizes the principle of negative-feedback, right
The amplitude of output signal is sampled, and obtains a control voltage, and then reversely adjust amplification factor, equally can be to being put across resistance
The current signal of big device module output is further amplified, while play the role of signal shaping and overvoltage protection.
In the utility model embodiment, the output terminal of clock and data recovery circuit module forms 16 channel parallel datas letter
Number, data selector module selects 1 data selector (connecting composition using 74151 data selector of two panels) using 16.
As shown in figure 3, low noise amplification unit include input matching network module connected in sequence, transistor modular and
Output matching network module.The input terminal of input matching network module is the input terminal of low noise amplification unit, exports pair net
The output terminal of network module is the output terminal of low noise amplification unit.Input matching network module and output matching network module are adopted
With T shapes (as shown in Figure 4) or π shapes (as shown in Figure 5) LC match circuits.
Input matching network module and output matching network module are using conventional T shapes or π shape LC match circuits, for reality
The best source matching of existing low noise amplification unit and conjugate impedance match, core of the transistor modular as low noise amplification unit are real
Low noise, suitable gain and the stability of existing low noise amplification unit.
As shown in fig. 6, microwave amplitude balanced unit includes input matching circuit module connected in sequence, minor matters resonator mode
Block and output matching circuit module.Input matching circuit module includes four sections of transmission line l being sequentially connected in series1、l2、l3And l4, l2
And l3Connecting node be also parallel with 1/4 wavelength transmission line l of open-end5, l1Input as microwave amplitude balanced unit
End.Output matching circuit module includes four sections of transmission line l being sequentially connected in series18、l19、l20And l21, l19And l20Connecting node also
It is parallel with 1/4 wavelength transmission line l of open-end22, l21Output terminal as microwave amplitude balanced unit.Minor matters resonator mode
Block includes the transmission line l being sequentially connected in series6, transmission line l7, resistance R0, transmission line l8With transmission line l9, l6With l4Connection, l9With l18Even
It connects.l6On be also associated with the first minor matters circuit and the second minor matters circuit, l9On be also associated with third minor matters circuit and the 4th minor matters electricity
Road;First minor matters circuit includes the resistance R being sequentially connected in series1, transmission line l10And 1/4 wavelength transmission line l of open-end11, R1
With l6Connection;Second minor matters circuit includes the resistance R being sequentially connected in series2, transmission line l12And 1/4 wavelength transmission line of open-end
l13, R2With l6Connection;Third minor matters circuit includes the resistance R being sequentially connected in series3, transmission line l14And 1/4 wavelength of open-end
Transmission line l15, R3With l9Connection;4th minor matters circuit includes the resistance R being sequentially connected in series4, transmission line l16And the 1/ of open-end
4 wavelength transmission line l17, R4With l9Connection.
Using 1/4 wavelength transmission line of open-end instead of lamped element L, C in the utility model embodiment, with biography
The variation of defeated line length, open circuit cutting back transmission line shows as the characteristics such as perception, parallel resonance, capacitive and series resonance, therefore selects
Select appropriate resonant frequency, Q values and cascade number, it is possible to approach the equalizer response of arbitrary needs.
Three dB bandwidth is to weigh the most important parameters of detector high frequency characteristics, is defined as:When high frequency optical signal is incident on detection
In device, detector output electric signal power decays to frequency corresponding during DC response power half.The utility model is implemented
In example, the three dB bandwidth f of optoelectronic integration detector3dBMeet:
Wherein fRCRepresent RC bandwidth restricteds, calculation formula is:
Wherein εrFor the relative dielectric constant of semiconductor, ε0For the permittivity of vacuum of semiconductor, L is entirely exhausts thickness
Degree, RTFor the all-in resistance of optoelectronic integration detector, A is the part table area of optoelectronic integration detector.
ftRepresent transition time bandwidth restricted, calculation formula is:
Wherein vhFor cavity speed, L is entirely exhausts layer thickness.
For optoelectronic integration detector, the photosurface that the A of bigger can obtain bigger facilitates coupling, but can limit
Bandwidth of operation processed.RTThe larger output voltage that can obtain bigger can reduce heat and make an uproar and improve receiving sensitivity, but similary meeting
Limit bandwidth of operation.For ROF system, high bandwidth, high-gain, low noise and Larger Dynamic are all extremely important, need to integrate
Consider.Optoelectronic integration detector is usually operated at reverse-biased, and big voltage and small dark current cause optoelectronic integration to be visited
The output impedance for surveying device is very big, generally more than ten or even tens kilo-ohms, it is therefore desirable to study rational impedance matching to reduce
Output reflection, while ensure the bandwidth of operation of optoelectronic integration detector as possible, to obtain the efficient output of enough operating bandwidths.
Those of ordinary skill in the art will understand that the embodiments described herein, which is to help reader, understands this reality
With novel principle, it should be understood that the scope of protection of the utility model is not limited to such specific embodiments and embodiments.
Those of ordinary skill in the art can these technical inspirations according to disclosed in the utility model make and various do not depart from this practicality
Novel substantive other various specific deformations and combination, these deformations and combination are still within the protection scope of the present utility model.
Claims (9)
1. a kind of ultra wide band multichannel optoelectronic integration detector for microwave photon system, which is characterized in that including sequentially
Optical detection converting unit, low noise amplification unit and the microwave amplitude balanced unit of connection;
Input terminal of the input terminal of the optical detection converting unit for optoelectronic integration detector, the microwave amplitude balanced unit
Output terminal be optoelectronic integration detector output terminal;
The optical detection converting unit, low noise amplification unit and microwave amplitude balanced unit use sintering and gold wire bonding
Mode is integrally attached to aluminium housing surface;
The optical detection converting unit is used to detect and acquire optical signal, and be converted into microwave signal;
The low noise amplification unit is used to implement the amplification of microwave signal;
The microwave amplitude balanced unit is used to implement the equilibrium of microwave signal.
2. ultra wide band multichannel optoelectronic integration detector according to claim 1, which is characterized in that the optical detection turns
It changes unit and includes input optical fibre connected in sequence, APD detector modules, trans-impedance amplifier module, limiting amplifier module, clock
With data recovery circuit module and data selector module;
The input optical fibre is the input terminal of optical detection converting unit, and the output terminal of the data selector module turns for optical detection
Change the output terminal of unit;
The APD detector modules are used to detect and acquire optical signal, and collected optical signal is converted to current signal;
The current signal that the trans-impedance amplifier module is used to export APD detector modules is amplified, while filter out wherein
Interference signal;
The current signal that the limiting amplifier module is used to export trans-impedance amplifier module is further amplified, and rises simultaneously
It is acted on to signal shaping and overvoltage protection;
When the clock and data recovery circuit module is used to be extracted according to the current data signal that limiting amplifier module exports
Clock signal, and the phase relation of current data signal and clock signal is obtained, form multidiameter delay data-signal;
The data selector module is used to that the multichannel data signal that clock and data recovery circuit module exports to be carried out and gone here and there
Conversion, obtains microwave signal and exports.
3. ultra wide band multichannel optoelectronic integration detector according to claim 2, which is characterized in that the input optical fibre
For 5 road metallized optical fibres.
4. ultra wide band multichannel optoelectronic integration detector according to claim 2, which is characterized in that the APD detections
The photosurface diameter of device module。
5. ultra wide band multichannel optoelectronic integration detector according to claim 2, which is characterized in that the limited range enlargement
The replacement of automatic gain control amplifier module can be used in device module.
6. ultra wide band multichannel optoelectronic integration detector according to claim 2, which is characterized in that the clock sum number
16 channel parallel data signals are formed according to the output terminal of restoring circuit module, the data selector module selects 1 data to select using 16
Select device.
7. ultra wide band multichannel optoelectronic integration detector according to claim 1, which is characterized in that the low noise is put
Big unit includes input matching network module connected in sequence, transistor modular and output matching network module;
Input terminal of the input terminal of the input matching network module for low noise amplification unit, the output matching network module
Output terminal be low noise amplification unit output terminal;
The input matching network module and output matching network module use T shapes or π shape LC match circuits.
8. ultra wide band multichannel optoelectronic integration detector according to claim 1, which is characterized in that the microwave amplitude
Balanced unit includes input matching circuit module connected in sequence, minor matters resonator module and output matching circuit module;
The input matching circuit module includes four sections of transmission line l being sequentially connected in series1、l2、l3And l4, the l2And l3Connection section
Point is also parallel with 1/4 wavelength transmission line l of open-end5, the l1Input terminal as microwave amplitude balanced unit;
The output matching circuit module includes four sections of transmission line l being sequentially connected in series18、l19、l20And l21, the l19And l20Company
Meet the 1/4 wavelength transmission line l that node is also parallel with open-end22, the l21Output terminal as microwave amplitude balanced unit;
The minor matters resonator module includes the transmission line l being sequentially connected in series6, transmission line l7, resistance R0, transmission line l8And transmission line
l9, the l6With l4Connection, the l9With l18Connection;The l6On be also associated with the first minor matters circuit and the second minor matters circuit, institute
State l9On be also associated with third minor matters circuit and the 4th minor matters circuit;
The first minor matters circuit includes the resistance R being sequentially connected in series1, transmission line l10And 1/4 wavelength transmission line of open-end
l11, the R1With l6Connection;The second minor matters circuit includes the resistance R being sequentially connected in series2, transmission line l12And open-end
1/4 wavelength transmission line l13, the R2With l6Connection;The third minor matters circuit includes the resistance R being sequentially connected in series3, transmission line l14
And 1/4 wavelength transmission line l of open-end15, the R3With l9Connection;The 4th minor matters circuit includes the electricity being sequentially connected in series
Hinder R4, transmission line l16And 1/4 wavelength transmission line l of open-end17, the R4With l9Connection.
9. according to any ultra wide band multichannel optoelectronic integration detectors of claim 1-8, which is characterized in that the light
The three dB bandwidth f of electrical integrated detector3dBMeet:
Wherein fRCRepresent RC bandwidth restricteds, calculation formula is:
Wherein εrFor the relative dielectric constant of semiconductor, ε0For the permittivity of vacuum of semiconductor, L is entirely exhausts layer thickness, RT
For the all-in resistance of optoelectronic integration detector, A is the part table area of optoelectronic integration detector;
ftRepresent transition time bandwidth restricted, calculation formula is:
Wherein vhFor cavity speed, L is entirely exhausts layer thickness.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107846248A (en) * | 2017-10-18 | 2018-03-27 | 成都嘉纳海威科技有限责任公司 | A kind of ultra wide band multichannel optoelectronic integration detector for microwave photon system |
CN112929016A (en) * | 2021-01-28 | 2021-06-08 | 北京科技大学 | Photoelectric logic switch with vertical structure |
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2017
- 2017-10-18 CN CN201721341114.8U patent/CN207475555U/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107846248A (en) * | 2017-10-18 | 2018-03-27 | 成都嘉纳海威科技有限责任公司 | A kind of ultra wide band multichannel optoelectronic integration detector for microwave photon system |
CN107846248B (en) * | 2017-10-18 | 2023-12-26 | 成都嘉纳海威科技有限责任公司 | Ultra-wideband multichannel photoelectric integrated detector for microwave photon system |
CN112929016A (en) * | 2021-01-28 | 2021-06-08 | 北京科技大学 | Photoelectric logic switch with vertical structure |
CN112929016B (en) * | 2021-01-28 | 2024-02-20 | 北京科技大学 | Photoelectric logic switch with vertical structure |
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