CN207367944U - A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell - Google Patents

A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell Download PDF

Info

Publication number
CN207367944U
CN207367944U CN201720878185.5U CN201720878185U CN207367944U CN 207367944 U CN207367944 U CN 207367944U CN 201720878185 U CN201720878185 U CN 201720878185U CN 207367944 U CN207367944 U CN 207367944U
Authority
CN
China
Prior art keywords
wheel
corner
rewinding
transmission system
blowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201720878185.5U
Other languages
Chinese (zh)
Inventor
张啸潮
张卫卫
王孟孟
张情情
朱家宽
刘杰鹏
高锦龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi New Energy Ltd By Share Ltd
Original Assignee
Asahi New Energy Ltd By Share Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi New Energy Ltd By Share Ltd filed Critical Asahi New Energy Ltd By Share Ltd
Priority to CN201720878185.5U priority Critical patent/CN207367944U/en
Application granted granted Critical
Publication of CN207367944U publication Critical patent/CN207367944U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell, including vertically-mounted multiple wheel shafts, motor, seek edge equipment and tensometer, the wheel shaft includes rewinding wheel and blowing wheel, the driven wheel of corner, driving wheel, process cavity cooling wheel and main cooling wheel;Multiple wheel shafts form one by the arrangement no less than six corner driven wheels and level off to circular or ellipse annular delivery track, and are provided with rewinding wheel and blowing wheel at or near two neighbouring endpoints;PI films on blowing wheel are connected to rewinding wheel after circular or ellipse annular delivery track close to the outside of multiple wheel shafts, i.e. by leveling off to;Whole volume to volume transmission system uses vertical ring structure, avoids technical face and roller contact problems, while ensure that the support force to Kapton processing procedure process;Since the needs of technique are also provided with cooling wheel in process cavity, be effectively controlled evaporation during film surface temperature.

Description

A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell
Technical field
The utility model relates to a kind of transmission system of copper indium gallium selenide flexible thin-film solar cell, belong to solar energy Battery production manufacture technology field.
Background technology
Copper indium gallium selenide (Cu (In, Ga) Se2, abbreviation CIGS) thin-film solar cells has low cost, high efficiency, stabilization Property it is good the advantages that, be the generally acknowledged most second generation solar cell of development and market potential.People it is studied rise in Eighties of last century early eighties, by the development of nearly 30 years, the theoretical research of copper-indium-galliun-selenium film solar cell and system Standby technique achieves gratifying achievement, its highest laboratory electricity conversion reaches 22.6% at present, is current transformation efficiency Highest flexible thin film photovoltaic's battery.
The substrate of copper indium gallium selenide film battery can select different materials, common to have soda-lime glass, stainless steel foil, titanium Paper tinsel and polyimides(PI)Paper tinsel etc..The preparation of copper indium gallium selenide light-absorption layer has kinds of schemes, and common preparation method has:Coevaporation Method, sputtering/selenizing method, plating/selenizing method, sodium crystalline substance print/selenizing method etc..
When selection coevaporation method is in polyimides(PI)When copper-indium-galliun-selenium film solar cell is prepared in flexible substrate, greatly Need to use the winding transmission equipment of volume to volume in the industrialized production of scale.
The reel system of horizontal type level certainly simple realization the most, but have several drawbacks in that.Due to evaporation technology Particularity, it is desirable to which evaporation source spout must be that upward, and technique is face-down.Since evaporation rate is affected by temperature, temperature is got over High evaporation rate is faster, but polyimides(PI)The heat-resistant limit of substrate only has 450 degrees Celsius, so cannot unrestrictedly add High-temperature improves evaporation rate.The CIGS thin film of ideal thickness only has two kinds of methods in order to obtain, first, slow down transfer rate, Increase sedimentation time;Second, extending production line, increase the stove of linear sources.The first method is since production efficiency is too low, big It is unacceptable in technical scale production.Second of method, since film surface length is too long in horizontal reel system, following table Face cannot be supported with transmission wheel again, and film surface can be past sagging because of the gravity of itself, can not the accurate tensioning for controlling film surface Degree.Particularly in heating process, due to PI film expanded by heating, tension force reduces, and whole film is slack and undisciplined sagging, be unable to control film surface with The distance of evaporation source, seriously affects the sedimentation rate of the CIGS of different zones on film surface so that the lack of homogeneity of CIGS thin film, It is final to influence battery efficiency;In addition evaporation source has the problems such as scaling-off and produces upward, due to the particularity of coevaporation method, in technique During it is stringent to the requirement of the clean level of film surface, the final transfer efficiency of battery otherwise can be seriously affected, one in technical process Denier pollutes film surface by residue, and the photoelectric conversion efficiency of battery at least reduces by more than 20%, even results in whole hull cell and scraps.
The content of the invention
The purpose of the utility model is to overcome the shortcomings of the prior art, and it is reasonable to provide a kind of structure composition, makes With convenient and reliable, by using vertical ring structure, technical face and the contact problems of roller are avoided, while ensure that to polyamides The support force of imines thin film manufacture process process, the film surface temperature being in addition also effectively controlled during evaporation, is provided with pre- hot merit Can, Kapton is eliminated because thermal coefficient of expansion brings the copper indium gallium selenide of deformation problems flexible in heating or temperature-fall period The vertical volume to volume transmission system of thin-film solar cells.
The purpose of this utility model is completed by following technical solution, and one kind is used for copper indium gallium selenide fexible film too The transmission system of positive energy battery manufacture, the transmission system include vertically-mounted multiple wheel shafts, motor, seek edge equipment and tension force Meter, the wheel shaft include rewinding wheel and blowing wheel, the driven wheel of corner, driving wheel, process cavity cooling wheel and main cooling Wheel;Multiple wheel shafts form one by the arrangement no less than six corner driven wheels and level off to circular or ellipse ring Shape transmission rail, and rewinding wheel and blowing wheel are installed at or near two neighbouring endpoints;PI on blowing wheel Film is connected to rewinding wheel after circular or ellipse annular delivery track close to the outside of multiple wheel shafts, i.e. by leveling off to.
As preferred:The annular delivery track has 8-20 corners, and is provided with a corner in each corner Driven wheel, be provided between corner driven wheel two-by-two at least one with function of temperature control, cooling water flow controlled by butterfly valve Then the process cavity cooling wheel of wheel face temperature is controlled;Among two neighbouring endpoints and adjacent respective corner driven wheel Transmission rail on an at least driving wheel is installed;Respectively by installing the corner of end point at two neighbouring endpoints Driven wheel and a main cooling wheel, and the blowing wheel is installed near the corner driven wheel of the endpoint, and described The rewinding wheel is installed near main cooling wheel, is separately provided with the rewinding wheel side and seeks edge equipment.
As preferred:The corner driven wheel is configured with ceramic wheel for rotating wheel or both ends made of ceramic material Face, main purpose are to increase the friction coefficient of driven wheel, increase the frictional force between film surface and wheel, under preventing that film surface from skidding Hang down;The diameter of the main cooling wheel is more than at least one times of the driven wheel diameter in corner;The rewinding wheel is installed on rack Above and can be up and down with respect to rack;The corner driven wheel is each equipped with detecting driven wheel to film surface support force Tensometer, the tensometer are all connected to a regulation motor rotating speed, to adjust the PLC controller of tension force.
As preferred:Process cavity cooling wheel, driving wheel and the main cooling wheel is respectively configured with drive its turn Dynamic, to be connected to PLC controller servomotor, and make the PI films transmission speed that is moved on transmission rail control 0.05 ~ 2m/min。
The utility model has the features such as structure composition is reasonable, easy to use and reliable, by using vertical ring structure, keeps away Technical face and the contact problems of roller are exempted from, while ensure that the support force to Kapton processing procedure process, in addition also had The film surface temperature controlled during evaporation of effect, is provided with pre- hot function, eliminates Kapton because of thermal coefficient of expansion Deformation problems are brought in heating or temperature-fall period.
Brief description of the drawings
Fig. 1 is the top view of the vertical transmission system of the utility model copper indium gallium selenide flexible solar battery.
Fig. 2 is the vertical transmission system side view of the utility model copper indium gallium selenide flexible solar battery.
Embodiment
To become apparent the utility model, in conjunction with the embodiments, and attached drawing is coordinated to be described in detail below.Fig. 1,2 institutes Show, a kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell described in the utility model, in order to solve Film sagging problem, it is necessary to the support certain to film surface in pilot process, therefore the volume to volume transmission system of the utility model is adopted With vertical structure, i.e. the volume to volume transmission system includes vertically-mounted multiple wheel shafts, motor 9, seeks edge equipment 10 and tensometer 6, the wheel shaft includes rewinding wheel 5 and blowing wheel 4, the driven wheel 1 of corner, driving wheel 3, process cavity cooling wheel 2 and master Cooling wheel 7;Multiple wheel shafts are leveled off to circular or oval by the arrangement formation one no less than six corner driven wheels 1 The annular delivery track of shape, and rewinding wheel 5 and blowing wheel 4 are installed at or near two neighbouring endpoints;Wound on blowing PI films on wheel 4 are connected to after circular or oval annular delivery track close to the outside of multiple wheel shafts, i.e. by leveling off to Rewinding wheel, PI films lean against the wheel of transmission system, and such front coated surface would not touch disk roller in whole transmission process, Solving the problems, such as that PI films are coated with the film surface of copper indium gallium selenide cannot be with abnormal contact.
Annular delivery track described in the utility model has 8-20 corners, shown in figure for 8 corner structure cloth Put.One corner driven wheel 1 is installed in each corner, which can be anti-skidding ceramic driven wheel, make Film surface has obtained good support, so as to solve the problems, such as that film is sagging.
Be provided between corner driven wheel 1 two-by-two at least one with function of temperature control, cooling water controlled by butterfly valve 11 Flow then controls the process cavity cooling wheel 2 of wheel face temperature, and the thickness of the process cavity cooling wheel 2 is particular design, makes wheel There is a suitable temperature difference between the inner wall and outer wall of son, the temperature for the control film surface that can stablize, accurate temperature control helps In CIGS film deposition rates and into phase control, so as to solve film surface temperature control problem;
It is provided with least on transmission rail among two neighbouring endpoints and adjacent respective corner driven wheel 1 One driving wheel 3;Respectively by installing the 1 and one main cooling wheel 7 of corner driven wheel of end point at two neighbouring endpoints, And the blowing wheel 4 is installed near the corner driven wheel 1 of the endpoint, and pacify near the main cooling wheel 7 Equipped with the rewinding wheel 5, separately it is provided with the rewinding wheel side and seeks edge equipment.
Corner driven wheel 1 described in the utility model is configured with ceramic wheel for rotating wheel or both ends made of ceramic material Face;The diameter of the main cooling wheel 7 is more than at least one times of 1 diameter of corner driven wheel, and the diameter 300 of main cooling wheel 7 ~ 1000mm, many bigger than general drive, is because cooling rapidly can destroy CIGS film layers, needs enough contact surfaces Film surface temperature is set slowly to drop to room temperature from 300 DEG C with time of contact;
The rewinding wheel 5 is installed in rack 13 and up and down with respect to rack 13 can patrol edge equipment, it is necessary to coordinate Up and down adjustment is done, film edge is always held at sustained height.The corner driven wheel 1 is each equipped with that driven wheel can be detected To the tensometer 6 of film surface support force, the tensometer is all connected to a regulation motor rotating speed, is controlled to adjust the PLC of tension force Device processed.
Process cavity cooling wheel 2, driving wheel 3 and the main cooling wheel 7 be respectively configured with a drive its rotate, even The servomotor of PLC controller is connected to, and the PI films transmission speed for making to move on transmission rail is controlled in 0.05 ~ 2m/min.
In order to solve the problems, such as that PI films 8 expand with heat and contract with cold, transmission system is provided with pre- hot function;PI films 8 are in pre-heating temperature elevation process In can slowly expand, film can be elongated.If transmission system is static, sliver can be because PI film expanded by heating be elongated and slack and undisciplined Get off, tension force can slowly decline, to certain temperature after corner chamber driven wheel 1 it is inadequate to film surface support force, by tension force provide When frictional force between wheel face and PI films is not enough to offset the gravity of PI films itself, PI films start to slide down, entirely on end Film surface will cave in.And when cooling, PI films 8 can slowly be shunk as temperature reduces to shorten, if transmission system is static, The power that PI films are shunk is too big, and some components of transmission system can be caused to damage, also PI films are broken can in itself.If heating up Or operating is kept in temperature-fall period, it will waste a large amount of PI films, PI films are a kind of expensive materials.Pre- hot function be exactly in order to The film surface tension force of heating or temperature-fall period is kept, and the waste of PI films can be reduced.
The utility model is characterized in that whole transmission system energy bidirectional rotation, i.e., can rotate forward can also reverse, warm Concussion movement is transferred back by first rotating forward another mistake, allows PI films to keep motion state all the time, advantage is during the motion can be by PI The tension force at rewinding end and blowing end is delivered to intermediate process by film since deformation caused by temperature is delivered to rewinding wheel or blowing wheel Section, by the tension force of the PI films in whole production line in a reliable scope.
The speed of whole transmission system be the linear velocity by main cooling wheel as basis for estimation, the speed of rewinding wheel and blowing wheel Degree is due to wanting tension of engagement control to do certain adjustment.PI films rotate counterclockwise releasing by blowing wheel 4 first, by first Enter preheating cavity after corner to preheat, then pass sequentially through 5 process cavities, be deposited in process cavity, the cooling wheel of process cavity A mouthful focal position is touched in position installed in evaporation source, this position is main plated film area temperature highest.Enter cooling chamber after the completion of plated film, Then cooled down by main cooling wheel, the temperature of PI films drops to room temperature.Then finally film roll is entered by rewinding wheel 5 by seeking border 10 Rewinding tube core.
The utility model has preferably solved the problems, such as:
1st, polyimides(PI)The problem of film surface that film 8 is coated with copper indium gallium selenide cannot be with abnormal contact;
2nd, in longer production line situation lower film sagging problem;
3rd, film surface temperature control problem;
4th, PI films expand with heat and contract with cold problem.
The implementation process of the utility model is:
Implementation process 1:Step 1:A roll of Kapton is taken to be attached on blowing wheel 4, it is clockwise to manually boot blowing wheel, Speed sets 1m/min, and PI films are worn film by route of travel, control the height of film, by PI films through being fixed on after rewinding wheel 5 On rewinding tube core;
Step 2:Operation rewinding wheel 4 or blowing wheel 5 manually, film surface is tensed, and is kept film surface smooth and is not declined.
Step 3:Evaporation line starts heating mode and polyimide substrate 8 is heated.Reel system opens preheating at this time Pattern, first clockwise walking 0.5m and then reverse walking 0.5m, the speed of travel set 0.5m/min to Kapton.Whole preheating Process continued half an hour by one hour, untill film surface temperature reaches technological requirement.
Step 4:Evaporation line opens technology pattern, starts automatic running, transfer rate setting 0.2m/min, tension force at this time Set 300N;System can adjust rewinding wheel 5 and the speed of blowing wheel 4 according to the feedback signal of tensometer 6, and tension stability is being set In limits;The water cooling butterfly valve 11 of process cavity cooling wheel 2 is opened at this time carries out temperature control to film surface 8.Patrol edge equipment 10 certainly The dynamic edge for finding Kapton, when height tolerance occurs in Kapton edge, rewinding wheel rack 13 can be electronic Height is adjusted under the drive of cylinder 14, is consistent film edge position.
Step 5:Production is completed rear chamber and is begun to cool down, and rests on the Kapton temperature in transmission system at this time Begin to decline, in order to avoid overtension caused by Kapton contraction produces damaging influence in cooling procedure;Drop It is also required to start preheating mode during temperature, allows tension force to be released.
Step 6:After the completion of cooling, the film at 4 end of blowing wheel is removed, manually opened rewinding wheel 5 is clockwise, by processing procedure section Film takes in rewinding tube core;Finally the flexible thin-film battery after the completion of plated film is removed from rewinding wheel.
Implementation process 2:Step 1:A roll of Kapton is taken to be attached on blowing wheel 4;It is clockwise to manually boot blowing wheel, Speed sets 1m/min, and PI films are worn film by route of travel, control the height of film, by PI films through being fixed on after rewinding wheel 5 On rewinding tube core;
Step 2:Operation rewinding wheel 4 or blowing wheel 5 manually, film surface is tensed, and is kept film surface smooth and is not declined.
Step 3:Evaporation line starts heating mode and polyimide substrate 8 is heated.Reel system opens preheating at this time Pattern, first clockwise walking 1m and then reverse walking 1m, the speed of travel set 0.5m/min to Kapton.Whole warm Continue half an hour by one hour, untill film surface temperature reaches technological requirement.
Step 4:Evaporation line opens technology pattern.Start automatic running, transfer rate setting 0.1m/min, tension force at this time Set 250N.System can adjust rewinding wheel 5 and the speed of blowing wheel 4 according to the feedback signal of tensometer 6, and tension stability is being set In limits.The water cooling butterfly valve 11 of process cavity cooling wheel 2 is opened at this time carries out temperature control to film surface 8.Patrol edge equipment 10 certainly The dynamic edge for finding Kapton, when height tolerance occurs in Kapton edge, rewinding wheel rack 13 can be electronic Height is adjusted under the drive of cylinder 14, is consistent film edge position.
Step 5:Production is completed rear chamber and is begun to cool down, and rests on the Kapton temperature in transmission system at this time Begin to decline, in order to avoid overtension caused by Kapton contraction produces damaging influence in cooling procedure.Drop It is also required to start preheating mode during temperature, allows tension force to be released.
Step 6:After the completion of cooling, the film at 4 end of blowing wheel is removed, manually opened rewinding wheel 5 is clockwise, by processing procedure section Film takes in rewinding tube core;Finally the flexible thin-film battery after the completion of plated film is removed from rewinding wheel.
Example described above only expresses the several embodiments of the utility model, its description is more specific and detailed, but Therefore the limitation to the scope of the utility model patent can not be interpreted as;The protection domain of the utility model patent should be with institute Subject to attached claim.

Claims (4)

1. a kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell, which includes vertically-mounted Multiple wheel shafts, motor(9), seek edge equipment(10)And tensometer(6), it is characterised in that the wheel shaft includes rewinding wheel(5) With blowing wheel(4), the driven wheel of corner(1), driving wheel(3), process cavity cooling wheel(2)And main cooling wheel(7);Described Multiple wheel shafts pass through no less than six corner driven wheels(1)Arrangement form one and level off to circular or ellipse annular delivery Track, and rewinding wheel is installed at or near two neighbouring endpoints(5)With blowing wheel(4);Wound on blowing wheel(4)On PI films are connected to rewinding wheel after circular or ellipse annular delivery track close to the outside of multiple wheel shafts, i.e. by leveling off to.
2. the transmission system according to claim 1 for the manufacture of copper indium gallium selenide flexible thin-film solar cell, its feature It is that the annular delivery track there are 8-20 corners, and a corner driven wheel is installed in each corner(1), Corner driven wheel two-by-two(1)Between be provided with least one with function of temperature control, by butterfly valve(11)Control cooling water flow after And control the process cavity cooling wheel of wheel face temperature(2);In two neighbouring endpoints and adjacent respective corner driven wheel Between transmission rail on an at least driving wheel is installed(3);Respectively by installing end point at two neighbouring endpoints Corner driven wheel(1)With a main cooling wheel(7), and in the corner driven wheel of the endpoint(1)Described in being nearby provided with Blowing wheel(4), and in the main cooling wheel(7)Near the rewinding wheel is installed(5), separately on the rewinding wheel side It is provided with and seeks edge equipment.
3. the transmission system according to claim 1 or 2 for the manufacture of copper indium gallium selenide flexible thin-film solar cell, it is special Sign is the corner driven wheel(1)Ceramic wheel face is configured with for rotating wheel made of ceramic material or both ends;Described Main cooling wheel(7)Diameter be more than corner driven wheel(1)At least one times of diameter;The rewinding wheel(5)Installed in rack (13)Above and can be with respect to rack(13)It is up and down;The corner driven wheel(1)It is each equipped with that driven wheel pair can be detected The tensometer of film surface support force(6), the tensometer be all connected to a regulation motor rotating speed, so as to adjust the PLC of tension force control Device processed.
4. the transmission system according to claim 1 or 2 for the manufacture of copper indium gallium selenide flexible thin-film solar cell, it is special Sign is the process cavity cooling wheel(2), driving wheel(3)And main cooling wheel(7)Respectively being configured with a drive, it is rotated , the servomotor for being connected to PLC controller, and the PI films transmission speed that is moved on transmission rail is controlled in 0.05 ~ 2m/ min。
CN201720878185.5U 2017-07-19 2017-07-19 A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell Active CN207367944U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720878185.5U CN207367944U (en) 2017-07-19 2017-07-19 A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720878185.5U CN207367944U (en) 2017-07-19 2017-07-19 A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell

Publications (1)

Publication Number Publication Date
CN207367944U true CN207367944U (en) 2018-05-15

Family

ID=62422715

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720878185.5U Active CN207367944U (en) 2017-07-19 2017-07-19 A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell

Country Status (1)

Country Link
CN (1) CN207367944U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111272798A (en) * 2020-02-26 2020-06-12 旭科新能源股份有限公司 Flexible film testing device and flexible film production line

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111272798A (en) * 2020-02-26 2020-06-12 旭科新能源股份有限公司 Flexible film testing device and flexible film production line

Similar Documents

Publication Publication Date Title
CN102943241B (en) Method for manufacturing sodium-doped absorbing layer on reel-to-reel flexible polyimide (PI) substrate
CN202390535U (en) Continuous vacuum plating facility with heating device
JP6117116B2 (en) Method and apparatus for substrate coating
CN105428457A (en) Method of industrialized production of CIGS solar cell absorption layer by deposition and equipment thereof
WO2011130888A1 (en) System and method for manufacturing semiconductor thin film solar cell
CN207367944U (en) A kind of transmission system for the manufacture of copper indium gallium selenide flexible thin-film solar cell
CN210866132U (en) Sealing structure of heat treatment annealing furnace
CN106783667A (en) Ensure the production system and its manufacture method of uniformity and the alkali doped of stability in flexible copper indium gallium selenide thin-film solar cell
CN105355706A (en) Roll-to-roll dipping coating system and preparation method of flexible transparent conductive material
CN106340591A (en) Powder covering substrate heating CH3NH3PbI3 perovskite film preparation method
CN102983216B (en) Manufacture reaction unit and the method for the absorbed layer of CIGS thin film solar cell
CN205044039U (en) A volume to volume dip plating membrane system for flexible film
CN102249549A (en) Copper-indium-selenium photovoltaic film, powder and coating material for solar batteries and preparation method thereof
CN105470113A (en) Preparation method for absorption layer of CZTSSe thin-film solar cell
CN210380735U (en) Guide rail type angle-adjustable support for solar photovoltaic panel
CN205044040U (en) Volume to volume dip plating membrane system
CN208649462U (en) A kind of coating system
CN110444666A (en) Perovskite thin film one-step method roll-to-roll continuous preparation device and preparation method
CN105977318A (en) Sodium-doped CIGS (copper indium gallium selenide) film based on composite substrate and preparation method thereof
CN102978697B (en) A kind of crystal silicon ingot furnace moves act door gear and control method thereof
CN202246385U (en) Synchronous calendering and forming machine of cinder microcrystalline glass
CN105633212B (en) It is a kind of to be based on the method and apparatus that a step coevaporation technique prepares gradient band gap light absorbing zone
CN102842636B (en) For the base plate heating pedestal of chemical gas-phase deposition system
CN108831956A (en) Flexible solar battery copper indium gallium selenide manufacturing equipment
CN209636307U (en) A kind of large scale cadmium telluride solar battery coating apparatus

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant