CN207366194U - For detecting the test platform of hot array system spring aging - Google Patents

Abstract

The utility model provides a kind of test platform for the spring aging for being used to detect hot array system, including：It is used to support the stent of hot array system to be detected；Multiple range sensors of frame bottom are arranged on, for sensing frame bottom to the distance on the surface of calorimetric array system to be checked；Multiple pressure sensors of frame bottom are arranged on, for after inner balloon is opened after calorimetric array system to be checked senses distance sensing result in multiple range sensors, sensing pressure of the inner balloon to frame bottom；And the spring ageing management mechanism being electrically connected with multiple range sensors and multiple pressure sensors, for multiple distance sensing results based on multiple range sensors and multiple pressure-sensing results of multiple pressure sensors come determine the spring of calorimetric array system to be checked whether aging.Using the test platform, can with the spring of effectively measuring hot array system whether aging.

Description

For detecting the test platform of hot array system spring aging

Technical field

The utility model is usually directed to hot array system abnormality detection field, more particularly, to for detecting hot array The test platform of system spring aging.

Background technology

In semiconductor manufacturing and testing field, it will usually check manufactured semiconductor chip using hot array system It is whether qualified.Hot array system is very important component in burn-in test platform, its major function is exactly in burn-in test When by temperature control within the temperature range of setting.The temperature range that controls of the hot array system is 85 DEG C to 135 DEG C, maximum work Rate is 200W, and the response control time<500ms.When carrying out semiconductor qualification inspection test, it may occur that due to hot array Semiconductor qualification is reported by mistake caused by component exception in system.Occur above-mentioned wrong report in order to prevent, carrying out semiconductor conjunction , it is necessary to carry out abnormal examination to hot array system before lattice inspection test.

Figure 1A shows the appearance diagram of hot array system, Figure 1B and Fig. 1 C show the internal structure of hot array system Profile.As shown in Figure 1A, Figure 1B and Fig. 1 C, it is defeated that hot array system includes control card 11, refrigerant input channel 12, refrigerant Go out pipeline 13, solenoid valve 14, evaporator 15, air bag 16 (rough air bag 16-1 and fine air bag 16-2) and the grade component of spring 17. In said modules, control card 11 is the brain of hot array system, and all parts for controlling hot array system work, according to Test cell is fed back to calculate appropriate electromagnetic valve switch amount, and the uninterrupted of control refrigerant.Refrigerant inputs Pipeline 12 and refrigerant output channel 13 are used for the input and output of refrigerant, so as to form a refrigerant flow circuit.Electromagnetism Valve 14 is used for the uninterrupted for controlling refrigerant, and the control signal of solenoid valve 14 is provided by control card 11.The appearance of evaporator 15 For a square copper billet, the pipeline of a diameter of 0.1mm is distributed with inside evaporator, its major function is engaged test list Member, exports the heat of test cell, and is taken away by the refrigerant inside evaporator, so as to play the role of temperature controlled.Hot battle array Row system is divided into two parts, top half up and down and is fixed on burn-in test platform, and the latter half can move up and down, and be suspended in The lower part of half part.Two parts are linked together for example, by 10 springs 17.This 10 springs, which play, holds up hot array The effect of the latter half of system.Air bag 16 refers to the air bag inside hot array system.When air bag 16 is opened so that hot battle array Evaporator 15 in row system fits closely test cell, in order to which evaporator 15 controls the test temperature of test cell.

In said modules, if senile abrasion occurs in spring 17, the pressure of 15 engaged test unit of evaporator can be caused Power exceeds defined pressure, or hot array system two parts above and below inactive state cannot make fit closely, so that always Test socket cannot smoothly be entered by changing test board.A kind of thus, it is desirable to mechanism for the spring aging for being used to detect hot array system.

Utility model content

In view of above-mentioned, the utility model provides a kind of test platform for being used to detect hot array system spring aging.

A kind of one side according to the present utility model, there is provided test for the spring aging for being used to detect hot array system Platform, including：Stent, is used to support hot array system to be detected；Multiple range sensors of the frame bottom are arranged on, For sensing the frame bottom to the distance on the surface of the calorimetric array system to be checked；It is arranged on the more of the frame bottom A pressure sensor, for sensing distance sensing result in the multiple range sensor in the calorimetric array system to be checked After opening inner balloon afterwards, pressure of the inner balloon to the frame bottom is sensed；And with the multiple Distance-sensing The spring ageing management mechanism that device and the multiple pressure sensor are electrically connected, for based on the more of the multiple range sensor A distance sensing result and multiple pressure-sensing results of the multiple pressure sensor determine the calorimetric array system to be checked The spring of system whether aging.

Preferably, in one example, the stent has housing, and on the upper surface of the housing or medial surface Two parallel orbits are provided with, for accommodating the calorimetric array system to be checked.

Preferably, in one example, the test platform can also include：In the calorimetric array system to be checked The feeder that portion's air bag is connected, for after the multiple range sensor senses multiple distance sensing results to described The inner balloon supply of calorimetric array system to be checked.

Preferably, in one example, the test platform can also include：Controller, with the multiple Distance-sensing Device, the multiple pressure sensor and the feeder are electrically connected, described for being sensed in the multiple range sensor Control the feeder to be supplied to the inner balloon after distance sensing result, and controlled after the inner balloon is opened The multiple pressure sensor is made to sense pressure-sensing result.

Preferably, in one example, the test platform can also include：Airbag gas stable detection mechanism, with institute Inner balloon is stated to be connected and be electrically connected with the controller, whether the gas for detecting the inner balloon is stablized, and When it is to stablize that the airbag gas stable detection mechanism, which detects the gas of the inner balloon, described in the controller control Multiple pressure sensors sense pressure-sensing result.

Preferably, in one example, the test platform can also include：The spring being arranged in the housing side Ageing management button.

Preferably, in one example, the spring ageing management mechanism can include：Data storage cell, for depositing Store up distance reference value and compression force reference value；First comparator, for by multiple distance sensing knots of the multiple range sensor Fruit and the distance reference value are compared；Computing unit, for calculating multiple pressure-sensings of the multiple pressure sensor As a result average value；Second comparator, for by the average value calculated compared with the compression force reference value；And inspection Device is surveyed, for detecting the calorimetric array system to be checked based on the first comparator and the output result of second comparator The spring of system whether aging.

Preferably, in one example, the multiple range sensor and/or the multiple pressure sensor are according to equal Evenly spaced it is arranged in the frame bottom.

Preferably, in one example, the number of the range sensor and the pressure sensor is 5, and institute State corner and center position that range sensor and the pressure sensor are all uniformly distributed in the frame bottom.

Preferably, in one example, the test platform can also include：Notification unit, is examined with the spring aging Survey mechanism to be electrically connected, for informing the user the spring aging test result of the spring ageing management mechanism.

Using the test platform of the utility model, by setting multiple range sensors and multiple pressure to pass in frame bottom Sensor come measure multiple distance sensing results and multiple pressure-sensings as a result, and by measured multiple distance sensing results with Distance reference value is compared and is compared to determine with compression force reference value by measured multiple pressure-sensing results The spring of hot array system whether aging, it is possible to achieve to the ageing management of hot array system spring.

Using the test platform of the utility model, by setting two parallel orbits on the upper surface of housing or medial surface To accommodate calorimetric array system to be checked, support of the stent to hot array system can be caused more to stablize, so that apart from biography The sensing result of sensor is more reliable and more stable.

Using the test platform of the utility model, pass through the supply and pressure that controller is set to control to inner balloon The pressure-sensing of sensor, is achieved in the automatic detection of spring aging.

Using the test platform of the utility model, by setting the gas for being connected and being electrically connected with the controller with inner balloon Capsule gas stable detection mechanism and inner balloon stabilization after just start sense pressure, can cause pressure-sensing result more Accurately.

Using the device of the utility model, by by multiple range sensors and multiple pressure sensors according to mutually equidistantly It is uniformly distributed in the frame bottom, the sensing result of range sensor and pressure sensor can be enabled more accurate Really reflect the integrated testability result of the spring in hot array system.

Brief description of the drawings

By referring to following attached drawing, it is possible to achieve for further understanding for nature and advantages in the present disclosure. In attached drawing, similar assembly or feature can have identical reference numeral.

Figure 1A shows the appearance diagram of hot array system；

Figure 1B and Fig. 1 C show the internal structure profile of hot array system；

Fig. 2A shows one of the test platform according to the present utility model for being used to detect hot array system spring aging Exemplary structure diagram；

Fig. 2 B show the schematic diagram of the circuit connecting relation of each circuit in Fig. 2A；

Fig. 3 shows an exemplary schematic diagram of the bracket shell for being provided with parallel orbit in Fig. 2A；

Fig. 4 shows the signal of an implementation example of the location arrangements of the range sensor and pressure sensor in Fig. 2A Figure；

Fig. 5 shows the signal of another implementation example of the location arrangements of the range sensor and pressure sensor in Fig. 2A Figure；

Fig. 6 shows the block diagram of an implementation example of the spring ageing management mechanism in Fig. 2A；With

Fig. 7 shows that test platform another according to the present utility model for being used to detect hot array system spring aging shows The block diagram of example.

Embodiment

Theme described herein is discussed referring now to example embodiment.It should be understood that discuss these embodiments only It is in order to enable those skilled in the art better understood when so as to fulfill theme described herein, is not to claim Protection domain, applicability or the exemplary limitation illustrated in book.Protection domain in the present disclosure can not departed from In the case of, the function of element and arrangement discussed is changed.Each example can be as needed, omit, substitute or Add various processes or component.In addition, the opposite described feature of some examples can also be combined in other examples.

As used in this article, term " comprising " and its modification represent open term, are meant that " including but not limited to ". Term "based" represents " being based at least partially on ".Term " one embodiment " and " embodiment " expression " at least one implementation Example ".Term " another embodiment " expression " at least one other embodiment ".Term " first ", " second " etc. may refer to not With or identical object.It can include other definition below, it is either clear and definite or implicit.It is unless bright in context Really indicate, otherwise the definition of a term is consistent throughout the specification.

Herein, term " connected " refers to directly mechanically connect, connect or be electrically connected between two components, or passes through Intermediate module comes direct mechanical connection, connection or is electrically connected.Term " electrical connection " refers to that between two components electric lead to can be carried out Believe to carry out data/information exchange.Equally, the electrical connection is directly electrically connected between can referring to two components, or in Between component come be electrically connected indirectly.The electrical connection can be realized using wired mode or wireless mode.

The test platform for being used to detect the spring aging of hot array system of the utility model is described presently in connection with attached drawing Embodiment.

Fig. 2A shows the one of the test platform 10 according to the present utility model for being used to detect hot array system spring aging A exemplary structure diagram, and Fig. 2 B show the schematic diagram of the circuit connecting relation of each circuit in Fig. 2A.

As shown in Figure 2 A and 2B, test platform 10 includes stent 110, multiple range sensors 120, multiple pressure sensors 130 and spring ageing management mechanism 140.Stent 110 is used to support hot array system to be detected.For example, hot array system can To be placed on the upper surface of stent 110.Preferably, stent 110 has housing, and in the upper surface of the housing or inner side Two parallel tracks are provided with face, for example, two parallel grooves, for accommodating hot array system to be detected.For example, Hot array system is received into along two parallel tracks on upper surface or the medial surface of the housing of stent 110.Fig. 3 is shown The schematic diagram of two parallel orbits is provided with the medial surface of the housing of stent 110.

Multiple range sensors 120 are arranged on the bottom of stent 110, for example, being arranged on the bottom of the housing of stent 110 On, for sensing the bottom of stent 110 to the distance on the surface of calorimetric array system to be checked.Multiple pressure sensors 130 are set On the bottom of stent 110, for example, being arranged on the bottom of the housing of stent 110, in calorimetric array system to be checked Portion's air bag after multiple range sensors sense distance sensing result after being opened, bottom of the sensing inner balloon to stent 110 The pressure in portion.

In an example of the utility model, multiple range sensors 120 and/or multiple pressure sensors 130 can be with Evenly spaced it is arranged on the bottom of stent 110 according to equal.Fig. 4 shows range sensor and pressure under this situation The schematic diagram of one implementation example of the location arrangements of sensor.As shown in figure 4, multiple range sensors 120 and multiple pressure Sensor 130 is according to being mutually equidistantly alternately arranged on the bottom of stent 110.It is more in the other examples of the utility model A range sensor 120 and multiple pressure sensors 130 can also according to other suitable modes come with it is equal evenly spaced It is arranged on the bottom of stent 110.

In an example of the utility model, multiple range sensors 120 can include 5 range sensors, and Multiple pressure sensors 130 can include 5 pressure sensors.5 range sensors and 5 pressure sensors are by equably It is arranged in corner and the center position of 110 bottom of stent.Fig. 5 shows range sensor and pressure sensing under this situation The schematic diagram of one implementation example of the location arrangements of device.As shown in figure 5,5 range sensors and 5 pressure sensors are uniform Ground is arranged in 4 jiaos and center position of 110 bottom of stent.Moreover it is preferred that for 4 jiaos and each position of center Place, range sensor and pressure sensor are adjacent.

Spring ageing management mechanism 140 is electrically connected with multiple range sensors 120 and multiple pressure sensors 130.Scheming In 2A, in order to simple, partial distance sensor and partial pressure sensor and the electricity of spring ageing management mechanism 140 illustrate only Connection.Spring ageing management mechanism 140 is used for based on multiple distance sensing results of multiple range sensors 120 and multiple pressure Multiple pressure-sensing results of sensor 130 come determine the spring of the calorimetric array system to be checked whether aging.For example, spring Ageing management mechanism 140 can be by each and distance reference value in measured multiple distance sensing results and by multiple pressures The average value of power sensing result determines calorimetric array to be checked compared with compression force reference value, and based on two comparative results The spring of system whether aging.Specifically, spring ageing management mechanism 140 will be every in measured multiple distance sensing results It is a compared with distance reference value, as long as and occur one measured by distance sensing result differ with distance reference value Cause, such as difference between the two exceedes first predetermined value (for example, 0.1cm), then it is assumed that the spring of hot array system exists always Change.Spring ageing management mechanism 140 also by the average value of multiple pressure-sensing results compared with compression force reference value, and only Want pressure mean values inconsistent with compression force reference value, such as difference between the two exceedes second predetermined value (for example, 0.1 pa), Then thinking the spring of hot array system, there are aging.Also, only in measured multiple distance sensing results and distance reference Value is all consistent and when the pressure mean values that are calculated are consistent with compression force reference value, and spring ageing management mechanism 140 just determines Aging is not present in the spring of hot array system.Here, first predetermined value and second predetermined value can be rule of thumb or real by user Border situation is set.

In an example of the utility model, spring ageing management mechanism 140 can utilize integrated circuit, processor, Field programmable gate array (FPGA) or microcontroller etc. are realized.In another example of the utility model, spring ageing management Mechanism 140 can also be realized using each physical circuit.

Fig. 6 shows the block diagram of an implementation example of the spring ageing management mechanism 140 in Fig. 2.As shown in fig. 6, bullet Spring ageing management mechanism 140 can include data storage cell 141, first comparator 143, computing unit 145, the second comparator 147 and detector 149.

Data storage cell 141 is used to store distance reference value and compression force reference value.First comparator 143 and Distance-sensing Device 120 and data storage cell 141 are electrically connected, for from multiple range sensors 120 obtain multiple distance sensing results and Obtain distance reference value from data storage cell 141, and by acquired multiple distance sensing results and distance reference value into Whether row compares, consistent with distance reference value with each in definite multiple distance sensing results.

Computing unit 145 is electrically connected with multiple pressure sensors 130, multiple for being obtained from multiple pressure sensors 130 Pressure-sensing is as a result, and calculate the average value of the multiple pressure-sensing result.In the example of the utility model, calculate single Member 145 can be realized using the various mechanisms with computing capability.

Second comparator 147 is electrically connected with computing unit 145 and data storage cell 141, for being obtained from computing unit 145 Take calculated pressure mean values and obtain compression force reference value from data storage cell 141, and it is flat by what is calculated Whether average is consistent with compression force reference value with the average value for determining calculated compared with the compression force reference value.

Detector 149 is electrically connected with 143 and second comparator 147 of first comparator, for based on 143 He of first comparator The output result of second comparator 147 come detect the spring of the calorimetric array system to be checked whether aging.Specifically, first When any one output in 143 and second comparator 147 of comparator represents inconsistent, detector 149 determines calorimetric to be checked Aging occurs for the spring of array system, and only all represents consistent in the output of first comparator 143 and the second comparator 147 When, detector 149 determines that aging does not occur for the spring of calorimetric array system to be checked.In an example of the utility model, inspection Surveying device 149 can be realized using logic sum gate circuit.

To describe herein, spring ageing management mechanism 140 shown in Fig. 6 is only the spring aging of the utility model One implementation of testing agency, it can also be realized using other suitable methods in this area.

Preferably, in the other examples of the utility model, test platform 10 can also include notification unit (not shown), It is electrically connected with spring ageing management mechanism 140, for informing the user the spring ageing management knot of spring ageing management mechanism 140 Fruit.The notification unit for example can be spring aging test result transmitting element, spring aging test result display unit etc.. The spring aging test result display unit is such as can be loudspeaker, buzzer, display, scintillator.

Preferably, in the other examples of the utility model, as shown in Figure 7, test platform 10 ' can also include with treating The feeder 150 that the inner balloon of hot array system is connected is detected, for sensing distance perspective in multiple range sensors After surveying result, supplied to the inner balloon of the calorimetric array system to be checked.Feeder 150 can utilize well known in the art Various gas supply mechanisms are realized.In another example of the utility model, feeder 150 can also be included in test platform 10 ' outside.

Preferably, in the other examples of the utility model, as shown in Figure 7, test platform 10 ' can also include control Device 160, is electrically connected with multiple range sensors 120, multiple pressure sensors 130 and feeder 150, in multiple distances Sensor 120 controls feeder 150 to be supplied to the inner balloon after sensing multiple distance sensing results, and described Inner balloon controls multiple pressure sensors 130 to sense pressure-sensing result after being opened.

Preferably, in the other examples of the utility model, as shown in Figure 7, test platform 10 ' can also include air bag Gas stable detection mechanism 170, is connected with the inner balloon and is electrically connected with controller 160, for detecting the inside Whether the gas of air bag is stablized, and detects that the gas of the inner balloon is steady in the airbag gas stable detection mechanism Periodically, controller 160 controls multiple pressure sensors 130 to sense pressure-sensing result.In an example of the utility model In, airbag gas stable detection mechanism 170 can be realized using flowmeter, and the gas flow measured in flowmeter is During predetermined value (for example, 0), determine that the gas of inner balloon is stablized.

Preferably, in the other examples of the utility model, test platform 10 can also include the shell for being arranged on stent 110 Spring ageing management button (not shown) on body side surface.When the spring ageing management button is pressed, it is flat to start test Platform carries out spring ageing management to the calorimetric array system to be checked being placed on stent 110.

The embodiment illustrated above in conjunction with attached drawing describes exemplary embodiment, it is not intended that can realize Or fall into all embodiments of the protection domain of claims." exemplary " meaning of term used in whole this specification Taste " being used as example, example or illustration ", is not meant to than other embodiments " preferably " or " having advantage ".For offer pair The purpose of the understanding of described technology, embodiment include detail.However, it is possible in these no details In the case of implement these technologies.In some instances, it is public in order to avoid causing indigestion to the concept of described embodiment The construction and device known is shown in block diagram form.

Foregoing description in the present disclosure is provided so that any those of ordinary skill in this area can realize or make Use present disclosure.To those skilled in the art, the various modifications carried out to present disclosure are apparent , also, can also be in the case where not departing from protection domain in the present disclosure, should by generic principles defined herein For other modifications.Therefore, present disclosure is not limited to examples described herein and design, but disclosed herein with meeting Principle and novel features widest scope it is consistent.

Claims (8)

1. a kind of test platform for the spring aging for being used to detect hot array system, it is characterised in that the test platform includes：

Stent；It is used to support hot array system to be detected；

Multiple range sensors of the frame bottom are arranged on, for sensing the frame bottom to the calorimetric array to be checked The distance on the surface of system；

Be arranged on multiple pressure sensors of the frame bottom, for the calorimetric array system to be checked it is the multiple away from Sensed from sensor after opening inner balloon after distance sensing result, sense pressure of the inner balloon to the frame bottom Power；And

The spring ageing management mechanism being electrically connected with the multiple range sensor and the multiple pressure sensor, for based on Multiple distance sensing results of the multiple range sensor and multiple pressure-sensing results of the multiple pressure sensor are come Determine the calorimetric array system to be checked spring whether aging.

2. test platform as claimed in claim 1, it is characterised in that the stent has housing, and in the housing Two parallel orbits are provided with upper surface or medial surface, for accommodating the calorimetric array system to be checked.

3. test platform as claimed in claim 1, it is characterised in that the test platform further includes：

The feeder being connected with the inner balloon of the calorimetric array system to be checked, in the multiple range sensor After sensing multiple distance sensing results, supplied to the inner balloon of the calorimetric array system to be checked.

4. test platform as claimed in claim 1, it is characterised in that the test platform further includes：

Controller, is electrically connected with the multiple range sensor, the multiple pressure sensor and the feeder, for The multiple range sensor controls the feeder to be supplied to the inner balloon after sensing the distance sensing result, And the multiple pressure sensor is controlled to sense pressure-sensing result after the inner balloon is opened.

5. test platform as claimed in claim 4, it is characterised in that the test platform further includes：

Airbag gas stable detection mechanism, is connected with the inner balloon and is electrically connected with the controller, for detecting Whether the gas for stating inner balloon is stablized, and

When it is to stablize that the airbag gas stable detection mechanism, which detects the gas of the inner balloon, the controller control The multiple pressure sensor senses pressure-sensing result.

6. test platform as claimed in claim 2, it is characterised in that the test platform further includes：

The spring ageing management button being arranged in the housing side.

7. test platform as claimed in claim 1, it is characterised in that the multiple range sensor and/or the multiple pressure Force snesor is evenly spaced arranged in the frame bottom according to equal.

8. test platform as claimed in claim 1, it is characterised in that of the range sensor and the pressure sensor Number be 5, and the range sensor and the pressure sensor be uniformly distributed in the frame bottom corner and Center position.