CN207313700U - Coating machine - Google Patents
Coating machine Download PDFInfo
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- CN207313700U CN207313700U CN201721458753.2U CN201721458753U CN207313700U CN 207313700 U CN207313700 U CN 207313700U CN 201721458753 U CN201721458753 U CN 201721458753U CN 207313700 U CN207313700 U CN 207313700U
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Abstract
The utility model provides a kind of coating machine, can reduce fragment rate during production TFT liquid crystal displays, improves TFT liquid crystal displays processing yield.
Description
Technical field
It the utility model is related to liquid crystal display processing technique field, more particularly to a kind of coating machine.
Background technology
Vacuum coating equipment is used to give liquid crystal display plated film, and multiple cavitys being sequentially connected and and chamber are equipped with coating machine
The main vacuum tube that body is connected, cavity are connected by straight tube with main vacuum tube, and straight tube is equipped with valve, first cavity with it is last
One cavity is connected with ambient atmosphere respectively, existing first cavity of coating machine volume from atmospheric pressure be evacuated to vacuum when, take out
The gas time only has 20s or so, and the speed of evacuation is very fast, and when last cavity is from vacuum deflation to atmospheric pressure, deflation time only has
10s or so, deflation speed, and the speed of evacuation, deflation excessive velocities cause coating machine to be shown when processing TFT liquid crystal displays
Display screen is larger by air-flow impact so that the fragment rates of TFT liquid crystal displays is higher, yield is low, therefore is badly in need of improving using general
The Product processing yield of logical plated film machining TFT liquid crystal displays.
Utility model content
The utility model provides a kind of coating machine, and the speed of evacuation, the deflation speed of the coating machine are relatively slow, can reduce
The impingement rate of air-flow, reduces the fragment rate of TFT liquid crystal displays, improves Product processing yield during plated film.
The technical solution adopted in the utility model is a kind of coating machine, it is characterised in that including multiple chambers being sequentially communicated
Body, the cavity include M1, M2, M3 ... M13, M14, M15 cavity, and the M1 cavitys are equipped with air outlet pipe and the first vacuum
Pipe, the M15 cavitys are equipped with air inlet pipe and the second vacuum tube, and the air outlet pipe, the end of air inlet pipe connect with air respectively
It is logical, air outlet pipe, air inlet pipe tube body on be respectively equipped with least one vacuum valve, in first vacuum tube, the second vacuum
Mechanical pump, sieve Gorgon euryale pump and butterfly valve are respectively equipped with pipe；The venthole being connected with air outlet pipe is equipped with M1 cavitys, is gone out in described
Stomata is equipped with the first filter screen, and baffle is additionally provided between first filter screen and the venthole；Described
The top of M2, M3 ... M13, M14 cavity is equipped with horizontal main vacuum tube, and machinery is respectively equipped with the both ends of the main vacuum tube
Pump and sieve Gorgon euryale pump, M2, M3 ... M13, M14 cavity are connected by least one straight tube with the main vacuum tube respectively,
Molecular pump and vacuum valve are equipped with each straight tube；Between the both sides of M1, M15 cavity, M2 and M3 cavitys and M13
Gate valve is respectively equipped between M14 cavitys.
After the above technical solution is adopted, the utility model has the following advantages compared with prior art：
By setting baffle on the venthole of M1 cavitys, air-flow is flowed out from baffle edge, hinder the air-flow rate of outflow,
Reduce since the too fast air-flow of the speed of evacuation is to the impact force of TFT liquid crystal displays, avoid fragmentation, while in the first vacuum tube, the
Mechanical pump, sieve Gorgon euryale pump and butterfly valve are respectively equipped with two vacuum tubes, pumping, deflation speed are further controlled by using butterfly valve, is increased
Add pumping, deflation time, reduce fragment rate, improve Product processing yield.
As an improvement, being equipped with two vacuum valves in the air inlet pipe, vacuum valve setting is more then to be led when opening
Deflation speed is caused, therefore is optimal with two.
As an improvement, the end of the air inlet pipe is equipped with the second filter screen, deflation speed is further reduced.
As an improvement, M2, M3, M13 and M14 cavity is connected by a straight tube and the main vacuum tube respectively
Logical, M4 ... M9 are connected by two straight tubes with the main vacuum tube respectively so that the pressure in each cavity tends to balance as far as possible.
Brief description of the drawings
Fig. 1 is coating machine structure diagram
Fig. 2 is venthole, baffle, the first filter screen assembling schematic diagram
Shown in figure, 1, M1 cavitys, 11, air outlet pipe, 111, vacuum valve, 112, venthole, the 12, first vacuum tube, 121,
Butterfly valve, 2, M15 cavitys, 21, air inlet pipe, the 22, second vacuum tube, 3, main vacuum tube, 31, mechanical pump, 32, sieve Gorgon euryale pump, 4, straight tube,
41st, molecular pump, 5, gate valve, 6, baffle, the 7, first filter screen.
Embodiment
As shown in Figure 1 and Figure 2, a kind of coating machine, including multiple cavitys being sequentially communicated, cavity include M1, M2, M3 ...
M13, M14, M15 cavity, M1, M15 cavity are low vacuum cavity, and M2, M14 cavity are transitional cavity, vacuum 10-4Pa, M3
It is high vacuum cavity to M13.11 and first vacuum tube 12 of air outlet pipe is equipped with M1 cavitys 1, M15 cavitys 2 are equipped with 21 He of air inlet pipe
Second vacuum tube 22, air outlet pipe 11, air inlet pipe 21 end respectively with atmosphere, in the tube body of air outlet pipe 11, air inlet pipe 21
On be respectively equipped with least one vacuum valve 111, be respectively equipped with mechanical pump 31, sieve on the first vacuum tube 12, the second vacuum tube 22
Gorgon euryale pump 32 and butterfly valve 121；The venthole 112 that is connected with air outlet pipe 11 is equipped with M1 cavitys 1, the is equipped with venthole 112
One filter screen 7, is additionally provided with baffle 6, baffle is stainless steel, by adjusting gear between the first filter screen 7 and venthole 112
The area for the venthole that plate is covered, can adjust the air-flow rate of outflow；In M2, M3 ..., the top of M13, M14 cavity is equipped with horizontal stroke
To main vacuum tube 3, be respectively equipped with the both ends of main vacuum tube 3 mechanical pump 31 and sieve Gorgon euryale pump 32, M2, M3 ... M13, M14 cavity
Connected respectively by least one straight tube 4 with main vacuum tube 3, molecular pump 41 and vacuum valve 111 be equipped with each straight tube 4,
Each cavity is connected by 3 straight tubes with main vacuum tube in the utility model；In the both sides of M1, M15 cavity, M2 and M3 chambers
Gate valve 5 is respectively equipped between body and between M13 and M14 cavitys.Two vacuum valves 111 are equipped with air inlet pipe 21, in air inlet pipe
21 end is equipped with the second filter screen.Preferably, M2, M3, M13 and M14 cavity pass through a straight tube 4 and main vacuum tube respectively
3 connections, M4 ... M9 are connected by two straight tubes 4 with main vacuum tube 3 respectively.First filter screen is used to filter the impurity in gas,
Second filter screen is used for the speed for reducing gas when deflating.
The film plating process of coating machine is to comprise the following steps in the utility model：
S1, vacuumize M1 cavitys 1, is evacuated down to 10Pa from atmospheric pressure, control pumpdown time is more than 3 minutes；
S2, by the enabling speed of gate valve 5 between M1 and M2, M2 and M3, M13 and M14, M14 and M15 be adjusted to most slow；
S3, opening M2, M3, M13, M14 cavity correspond to a molecular pump 41 on the straight tube 4 of connection；Open M4, M6, M8,
M9 cavitys correspond to two molecular pumps on the straight tube 4 of connection；
S4, to M2 be filled with Ar gas into M14 cavitys；
S5, by the temperature setting in M12 cavitys be 0 °, and the temperature setting of remaining cavity is 60 °.
Due to adding baffle at venthole in the utility model, air-flow outflow is hindered using baffle, reduces pumping
Speed, controls the speed of evacuation so that the pumpdown time in M1 cavitys is maintained at 3 minutes or so using butterfly valve；By M1 and M2, M2 with
The enabling speed of gate valve is adjusted to the opening of the molecular pump on most slow and each cavity of adjustment between M3, M13 and M14, M14 and M15
Quantity, the pressure between balanced neighboring chambers, avoids pressure difference excessive；Ar gas is filled with multiple cavities come balance neighboring chambers it
Between vacuum；2 vacuum valves are set only in air inlet pipe, avoid deflation speed excessive；Since M12 cavitys are ITO target chamber
Body, temperature can be produced when on target as sputter to product to be coated, and TFT is low temperature plated film, and temperature is unsuitable excessive, therefore will
Temperature setting in M12 cavitys is 0 °, and the temperature of remaining cavity is 60 °.TFT liquid crystal displays are produced by the utility model to break
Piece rate is low, and product yield is high.
Claims (4)
1. a kind of coating machine, it is characterised in that including multiple cavitys being sequentially communicated, the cavity includes M1, M2, M3 ...
M13, M14, M15 cavity, the M1 cavitys (1) are equipped with air outlet pipe (11) and the first vacuum tube (12), the M15 cavitys
(2) be equipped with air inlet pipe (21) and the second vacuum tube (22), the air outlet pipe (11), air inlet pipe (21) end respectively with air
Connection, air outlet pipe, air inlet pipe tube body on be respectively equipped with least one vacuum valve (111), in first vacuum tube
(12), mechanical pump (31), sieve Gorgon euryale pump (32) and butterfly valve (121) are respectively equipped with the second vacuum tube (22)；It is equipped with M1 cavitys (1)
The venthole (112) being connected with air outlet pipe (11), is equipped with the first filter screen (7), described on the venthole (112)
The first filter screen (7) and the venthole (112) between be additionally provided with baffle (6)；
Horizontal main vacuum tube (3) is equipped with the top of M2, M3 ... M13, M14 cavity, in the main vacuum tube (3)
Both ends be respectively equipped with mechanical pump (31) and sieve Gorgon euryale pump (32), M2, M3 ... M13, M14 cavity is respectively by least one
Straight tube (4) is connected with the main vacuum tube (3), and molecular pump (41) and vacuum valve (111) are equipped with each straight tube (4)；
Gate valve (5) is respectively equipped between the both sides of M1, M15 cavity, M2 and M3 cavitys and between M13 and M14 cavitys.
2. coating machine according to claim 1, it is characterised in that two vacuum valves are equipped with the air inlet pipe (21)
(111)。
3. coating machine according to claim 2, it is characterised in that the end of the air inlet pipe (21) is equipped with the second filtering
Net.
4. coating machine according to claim 1, it is characterised in that M2, M3, M13 and M14 cavity passes through one respectively
A straight tube (4) connects with the main vacuum tube (3), and M4 ... M9 pass through two straight tubes (4) and the main vacuum tube (3) respectively
Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721458753.2U CN207313700U (en) | 2017-11-03 | 2017-11-03 | Coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721458753.2U CN207313700U (en) | 2017-11-03 | 2017-11-03 | Coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207313700U true CN207313700U (en) | 2018-05-04 |
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ID=62379848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721458753.2U Active CN207313700U (en) | 2017-11-03 | 2017-11-03 | Coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207313700U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841724A (en) * | 2017-11-03 | 2018-03-27 | 江西合力泰科技有限公司 | Coating machine and film plating process |
-
2017
- 2017-11-03 CN CN201721458753.2U patent/CN207313700U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841724A (en) * | 2017-11-03 | 2018-03-27 | 江西合力泰科技有限公司 | Coating machine and film plating process |
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