CN207300489U

CN207300489U - Composite evacuated transmitter

Info

Publication number: CN207300489U
Application number: CN201721257311.1U
Authority: CN
Inventors: 王磊; 贺良武; 柳灵
Original assignee: CHENGDU XINGRUIBAO ELECTRONIC TECHNOLOGY Co Ltd
Current assignee: CHENGDU XINGRUIBAO ELECTRONIC TECHNOLOGY Co Ltd
Priority date: 2017-09-27
Filing date: 2017-09-27
Publication date: 2018-05-01
Anticipated expiration: 2027-09-27

Abstract

The utility model discloses composite evacuated transmitter, including shell, the master control borad being arranged in parallel successively, hardboard, resistance ionization driving plate and pinboard in shell, shell end face is sealed by magnet steel, other end is bolted film, connection cable between the master control borad and pinboard, is attached by axis between hardboard and resistance ionization driving plate, connector between installing plate is gone back in resistance ionization driving plate and hardboard adjacent surface；Pirani gauge and Penning gauge are also set up on the end face adjacent with pinboard on the magnetic cylinder, connector between installing plate is gone back on pinboard.The utility model is small by said structure, easy to carry, convenient to install and maintain.

Description

Composite evacuated transmitter

Technical field

It the utility model is related to Pirani gauge and Penning gauge field, and in particular to composite evacuated transmitter.

Background technology

Pirani gauge and a kind of compound vacuum transducer of Penning gauge, in low vacuum section ohmer measurement of vacuum, Start Penning gauge when vacuum is higher than 1 pa, Penning gauge measurement of vacuum, realizes that wide scope measures, it has Have that measurement range is wide, the advantages that response is fast, reproducible, and measurement is reliable and stable, strong antijamming capability, particularly suitable for it is low, in, Its own biggest advantage of the measurement of high vacuum is：1st, it is small, it is easy to carry.2nd, measurement range is wide, and impact resistance, uses the longevity Life length.

Many occasions can use transmitter in actual vacuum measurement, its installation the space occupied is small, true in wide scope Pirani gauge and the compound transmitter of Penning gauge are to select well in sky measurement, and the operation principle of Pirani gauge is hot biography Lead, Penning gauge is high-voltage air ionizing, they are not interfered with mutually in the measurements, this resistance of point just than hot cathode is answered It is much better (caloric value is big when hot cathode ioization gauge works, and can influence Pirani gauge work) to close transmitter, in addition will not be unexpected Sudden and violent air and burn out and regulate.Existing instrument is big there are volume and vacuum measurement ranges are narrow, power supply be mostly 220VAC, space and away from It is just often worried because moving instrument connection power supply without the with the obvious advantage of transmitter, staff from upper.

Utility model content

Technical problem to be solved in the utility model is to reduce composite evacuated transmitter volume, and easy to carry, purpose exists It is small in the composite evacuated transmitter of offer, it is easy to carry, it is convenient to install and maintain.

The utility model is achieved through the following technical solutions：

Composite evacuated transmitter, including shell, the master control borad being arranged in parallel successively, hardboard, resistance in shell Ionization driving plate and pinboard, shell end face are sealed by magnetic cylinder, and other end is bolted film, the master control borad The connection cable between pinboard, is attached by axis between hardboard and resistance ionization driving plate, ionizes and drive in resistance Connector between installing plate is gone back on plate and hardboard adjacent surface；On the magnetic cylinder Pirani gauge is also set up on the end face adjacent with pinboard And Penning gauge, connector between installing plate is gone back on pinboard.

Master control borad, hardboard, resistance ionization driving plate and pinboard are arranged in parallel installation inside the shell by this programme, master control It is attached between plate and pinboard by winding displacement, Pirani gauge and Penning gauge are arranged on pinboard end face so that each Connection between a part is more close, be laid out more reasonable, occupied space smaller, moreover it is possible to while realize Pirani gauge measurement and Cold cathode measures, and measurement will not also influence each other, easy to use, the volume of composite evacuated transmitter be greatly reduced, easy to take Band.Sheathing material is aluminium section bar, strong antijamming capability.The setting of pinboard in this programme, realizes the compound company regulated with circuit Connect, be easy for installation and maintenance.

Preferably, the MCU control circuit of model STM32F103RCT6,24V is set to turn 12V power supplys on the master control borad Circuit ,+12V turn -12V power circuits, 12V turns 5V power circuits and 5V turns 3.3V power circuits.Various power-switching circuits Set, when master control borad needs corresponding power supply, only need to call corresponding power circuit, ensureing can for various pieces Reliable and stable power supply is enough provided.

Preferably, Penning gauge high-tension circuit is set on the hardboard.

Preferably, the Penning gauge high-tension circuit includes SG3525 chips and transformer PT1, the SG3525 cores Resistance R4, CT ports are connected between the CT ports and Dircharge ports of piece to connect with being also connected with the connection of ground capacity C3, RT ports Resistance R6, IN+ ports connect series resistance R1, Vref ports between ground resistance R3, Vref port and IN+ ports and are also connected with 5.1V power supplys, are sequentially connected in series capacitance C1 and capacitance C3, capacitance C3 both ends shunt capacitance C4, VCC between Vref ports and VCC ports Port and VC ports connect+12V power supplys, and capacitance C4 one end ground connection, OutputB ports are sequentially connected resistance R2 and field-effect tube Q1 Port 1, the port 2 of field-effect tube Q1 connects the port 1 of transformer PT1, and the port 3 of field-effect tube Q1 connects field-effect tube Q2 Port 3 and ground resistance R13, field-effect tube Q2 1 connecting resistance R5 one end of port, the resistance R5 other ends connection SG3525 chips OutputA ports, the port 2 of field-effect tube Q2 connects the port 7 of transformer PT1, and the port 10 of SG3525 chips is grounded Capacitance C15 and resistance R14 one end, the port 3 of resistance R14 other ends connection field-effect tube Q1, the port Comp of SG3525 chips It is connected with port IN-, the port Ground ground connection of SG3525 chips, the port Soft-Start of SG3525 chips is sequentially connected in series electricity Hinder the collector of R15 and triode Q3, the emitter ground connection of triode Q3, base stage connection signal port Gauge-EN and resistance R16 One end, another termination 5.1V power supplys of resistance R16；The port 3 and port 5 of transformer PT1 connects power supply VCC, the port of transformer PT1 Diode D1 and capacitance C9, the anode connection terminal mouth 11 of diode D1, the two of diode D1 are sequentially connected in series between 11 and port s End is sequentially connected in series the anode of capacitance C5, the cathode of diode D6 and diode D6, is sequentially connected in series at the both ends of diode D6 The cathode of diode D2, the anode of diode D2 and capacitance C10, capacitance C6 and diode are sequentially connected in series at the both ends of diode D2 Anode, the cathode of diode D4 of D4, cathode, the anode of triode D3 of triode D3 are sequentially connected in series at the both ends of diode D4 With capacitance C11, the anode of capacitance C7 and diode D5 and the cathode of diode D5, two poles are sequentially connected in series at the both ends of triode D3 The cathode of pipe D5 also connects one end of the port P2 and resistance R11 of the MCU of model STM32F103RCT6 at the same time, resistance R11's The port P1 of the MCU of the port s and model STM32F103RCT6 of other end connection transformer PT1.

Preferably, setting signal process circuit, signal processing circuit include cold cathode electricity in the resistance ionization driving plate From rule signal acquisition circuit and Pirani gauge drive circuit.

Preferably, Penning gauge signal acquisition circuit includes operational amplifier U8, and the port 1 of operational amplifier U8 connects The port 3 of potentiometer VR2, the port 1 of potentiometer VR2 connect the port 5 of operational amplifier U8, and the port 4 of operational amplifier U8 is same When connect the port 2 and capacitance C35 one end of potentiometer VR2, capacitance C35 other ends ground connection, the port 7 of operational amplifier U8 connects down Capacitance C28, drop-down capacitance C28 is drawn to be also connected with+12V power supplys；Operational amplifier U8 in-phase input end ground connection, inverting input and Capacitance C37 is connected in series between output terminal, in the both ends parallel resistance R28 of capacitance C37, in the both ends shunt capacitance of resistance R28 C40；The inverting input of operational amplifier U8 also connects resistance R22 one end, resistance R22 other ends connection MCU control electricity at the same time The port P1 of model STM32F103RCT6 chips on road, port P1 are also connected with drop-down capacitance C39, the leakage of field-effect tube T1 Pole and source electrode, the grid of field-effect tube T2, the inverting input of operational amplifier U8 are also connected with drop-down capacitance C41；Field-effect tube The drain electrode of T2 and source electrode, the grid of field-effect tube T1 are grounded.

Penning gauge high-tension circuit is broadly divided into main control chip SG3525 and accompanies volt circuit and lm2596 transformers PT1 defeated Go out voltage adjustment section.Main control chip SG3525 accompanies volt circuit by the base input signal to triode Q3, to control three poles The signal of pipe Q3 is high level or low level, the break-make of field-effect tube Q1 and Q2 is then controlled by main control chip, so as to control Whether lm2596 transformers PT1 output voltages adjustment member processed carries out voltage adjustment operation.When lm2596 transformers PT1 exports electricity When pressing adjustment member connection progress voltage adjustment, by setting the combination of 6 groups of capacitances and diode on lm2596 transformers PT1, Realize that 6 accompany boosting, be then passed to interface P1, realize that 2800VDC to 3300VDC is adjustable.LM2596 output voltage adjustment members Output voltage excursion 18 --- it is adjustable between 23v, so as to fulfill the adjustable of High voltage output.SG3525 accompanies piezoelectricity Road, input voltage become 26 by high-frequency pulse transformer for the output voltage of LM2596 and accompany input voltage.

Preferably, the Pirani gauge drive circuit includes operational amplifier U6,4 He of inverting input of operational amplifier U6 Resistance R5 and capacitance C10 are sequentially connected in series between output terminal 1, the shunt capacitance C12 between the resistance R5 and capacitance C10 of series connection, Resistance R14, resistance R11, capacitance C14 and capacitance C13 are sequentially connected in series between the inverting input 4 of operational amplifier U6 and port 5, The port 5 of operational amplifier U6 is also connected with+5V power supplys, and capacitance C14 one end is also connected with the emitter of triode Q2；Operational amplifier Resistance R12 and resistance R7, the current collection of triode Q2 are also sequentially connected in series between the in-phase input end of U6 and the collector of triode Q2 Pole connects+5V power supplys and drop-down capacitance C11 at the same time, and resistance R10 and resistance are also sequentially connected in series on the emitter of triode Q2 R13, resistance R13 are grounded, and base stage connection resistance R6 one end of triode Q2, resistance R6 other end concatenation operation amplifiers U6's is defeated Outlet.Pirani gauge drive circuit is constant-temperature circuit, can be holding in 1.0 × 105 to 1.0 × 10-6PA wide scopes in atmospheric pressure Temperature constant state measures, and vacuum measurement ranges are wider.When atmospheric pressure is 0.1Pa, Pirani gauge collection signal first passes through three poles The analog signal of effect output 6V to the 0.7V of pipe Q2, then enters operational amplifier U6 structures after the partial pressure effect of resistance R6 Into voltage follower partial pressure effect after, obtain the collection signal of 2v--0.27v.

Preferably, the communication mode on the master control borad communicates for RS485MODBUS.

The utility model compared with prior art, has the following advantages and advantages：

1st, master control borad, hardboard, resistance ionization driving plate and pinboard are arranged in parallel installed in shell by the utility model It is interior, it is attached between master control borad and pinboard by winding displacement, Pirani gauge and Penning gauge are arranged on pinboard end face, So that the connection between various pieces is more close, more reasonable, occupied space smaller is laid out, moreover it is possible to while realize Pirani gauge Measurement and cold cathode measurement, measurement will not also influence each other, easy to use, greatly reduce the volume of composite evacuated transmitter, It is easy to carry.

2nd, the setting of the utility model pinboard, realizes the compound connection regulated with circuit, is easy for installation and maintenance.

3rd, the setting of the utility model Penning gauge high-tension circuit, so as to fulfill the adjustable of High voltage output, Pirani gauge The setting of drive circuit, can be surveyed in atmospheric pressure for holding temperature constant state in 1.0 × 105 to 1.0 × 10-6PA wide scopes Amount, vacuum measurement ranges are wider.

Brief description of the drawings

Attached drawing described herein is used for providing further understanding the utility model embodiment, forms the one of the application Part, does not form the restriction to the utility model embodiment.In the accompanying drawings：

Fig. 1 is the utility model structure diagram；

Fig. 2 is Pirani gauge drive circuit；

Fig. 3 is Penning gauge signal acquisition circuit；

Fig. 4 is Penning gauge high-tension circuit.

Mark and corresponding parts title in attached drawing：

1st, film；2nd, shell；3rd, master control borad；4th, hardboard；5th, winding displacement；6th, resistance ionization driving plate；7th, connector between plate； 8th, Pirani gauge；9th, Penning gauge；10th, pinboard；11st, magnetic cylinder.

Embodiment

For the purpose of this utility model, technical solution and advantage is more clearly understood, with reference to embodiment and attached drawing, The utility model is described in further detail, and the exemplary embodiment and its explanation of the utility model are only used for explaining this Utility model, is not intended to limit the scope of the present invention.

Embodiment 1：

As shown in Figs 1-4, the utility model includes composite evacuated transmitter, including shell 2, in shell 2 successively Master control borad 3, hardboard 4, resistance ionization driving plate 6 and pinboard 10,2 end face of shell being arranged in parallel are close by magnetic cylinder 11 Envelope, other end is bolted film 1, connection cable 5, hardboard 4 and resistance between the master control borad 3 and pinboard 10 It is attached between ionization driving plate 6 by axis, it is indirect with going back installing plate on 4 adjacent surface of hardboard in resistance ionization driving plate 6 Plug-in unit 7；Pirani gauge 8 and Penning gauge 9 are also set up on the end face adjacent with pinboard 10 on the magnetic cylinder 11, in pinboard Connector 7 between installing plate is gone back on 10.

Embodiment 2：

The present embodiment is preferably as follows on the basis of embodiment 1：Set model STM32F103RCT6's on master control borad 3 MCU control circuit, 24V turn 12V power circuits ,+12V turns -12V power circuits, 12V turns 5V power circuits and 5V turns 3.3V electricity Source circuit.The setting of various power-switching circuits, when master control borad needs corresponding power supply, only need to call corresponding power circuit , ensure that reliable and stable power supply can be provided for various pieces.Various fulgurite conversion circuits herein use existing electricity Power can also be realized.

Penning gauge high-tension circuit is set on hardboard 4.Penning gauge high-tension circuit includes SG3525 chips With transformer PT1, the resistance R4, CT of connection resistance value 100R between the CT ports and Dircharge ports of the SG3525 chips The ground connecting resistance R6 that ground capacity C3, the RT ports connection resistance value that port is also connected with 4.7nF is 3K, IN+ ports connection 2k's connects Resistance R1, the Vref ports of series connection 3k are also connected with 5.1V power supplys, Vref ports between ground resistance R3, Vref port and IN+ ports The capacitance C3 of the capacitance C1 and 0.1uF of 0.1uF, the capacitance of capacitance C3 both ends parallel connections 0.1uF are sequentially connected in series between VCC ports C4, VCC port and VC ports connect+12V power supplys, and capacitance C4 one end ground connection, OutputB ports are sequentially connected the electricity of resistance value 10R The port 1 of R2 and model IRF640 field-effect tube Q1 is hindered, the port 2 of field-effect tube Q1 connects the transformation of model EFD20/23 The port 1 of device PT1, the port 3 of field-effect tube Q1 connect the port 3 of field-effect tube Q2 and the ground resistance R13 of 0.5R/2W, field The port 1 of effect pipe Q2 connects resistance R5 one end that resistance value is 10R, and the resistance R5 other ends connect the OutputA ends of SG3525 chips Mouthful, the port 2 of field-effect tube Q2 connects the port 7 of transformer PT1, and the port 10 of SG3525 chips meets ground capacity C15 and 1K Resistance R14 one end, the port 3 of resistance R14 other ends connection field-effect tube Q1, the port Comp of SG3525 chips and port IN- is connected, and the port Ground ground connection of SG3525 chips, the port Soft-Start of SG3525 chips is sequentially connected in series the electricity of 10R Hinder the collector of the triode Q3 of R15 and model S5050, the emitter ground connection of triode Q3, base stage connection signal port Resistance R16 one end of Gauge-EN and 10K, another termination 5.1V power supplys of resistance R16；The port 3 and port 5 of transformer PT1 connects Diode D1 and capacitance C9 are sequentially connected in series between the port 11 of power supply VCC, transformer PT1 and port s, the cathode of diode D1 connects Port 11 is connect, the capacitance C5 of 103/2kv, the cathode of diode D6 and diode D6 are sequentially connected in series at the both ends of diode D1 Anode, cathode, the anode and capacitance of diode D2 of the diode D2 of 2LCL69A are sequentially connected in series at the both ends of diode D6 C10, anode, the cathode of diode D4 of capacitance C6 and diode D4 is sequentially connected in series at the both ends of diode D2, in diode D4 Both ends be sequentially connected in series the cathode of triode D3, the anode of triode D3 and capacitance C11, be sequentially connected in series at the both ends of triode D3 The anode of capacitance C7 and diode D5 and the cathode of diode D5, the cathode of diode D5 also connect model at the same time One end of the port P2 and resistance R11 of the MCU of STM32F103RCT6, the other end connection transformer of the resistance R11 of 50M/0.5W The port P1 of the MCU of the port s and model STM32F103RCT6 of PT1.

Setting signal process circuit in resistance ionization driving plate 6, signal processing circuit are adopted including Penning gauge signal Collector and Pirani gauge drive circuit.

Penning gauge signal acquisition circuit includes the operational amplifier U8 of model CA3140, operational amplifier U8's Port 1 connects the port 3 of potentiometer VR2, and the port 1 of potentiometer VR2 connects the port 5 of operational amplifier U8, operational amplifier U8's Port 4 connects the port 2 of the potentiometer VR2 of 20K and capacitance C35 one end of 0.1uF, capacitance C35 other ends ground connection, computing at the same time The port 7 of amplifier U8 meets the drop-down capacitance C28 of 0.1uF, and drop-down capacitance C28 is also connected with+12V power supplys；Operational amplifier U8's In-phase input end is grounded, and the capacitance C37 of 4700pF is connected in series between inverting input and output terminal, at the both ends of capacitance C37 The resistance R28 of 10K in parallel, in the capacitance C40 of the both ends parallel connection 0.1uF of resistance R28；The inverting input of operational amplifier U8 is also Resistance R22 one end of 10K is connected at the same time, and the resistance R22 other ends connect the model STM32F103RCT6 in MCU control circuit The port P1 of chip, port P1 are also connected with drain electrode and the source of the field-effect tube T1 of drop-down the capacitance C39, model PN4117A of 1uF Pole, the grid of field-effect tube T2, the inverting input of operational amplifier U8 are also connected with the drop-down capacitance C41 of 0.1uF；Field-effect tube The drain electrode of T2 and source electrode, the grid of field-effect tube T1 are grounded.

Penning gauge signal acquisition circuit forms the free electron signal of ionized air by operational amplifier U8 Electric current turn voltage after, after the effect of resistance R28 is by voltage amplification, by resistance R22, capacitance C39 and capacitance C41 form The voltage signal 0---3V of our processing is obtained after the filtering process of filter circuit, exports the interface P1 to master control chip on board. Field-effect tube T1 and T2 in the circuit are used for overvoltage protection.The circuit is stable and reliable in work.

Pirani gauge drive circuit includes operational amplifier U6, between the inverting input 4 and output terminal 1 of operational amplifier U6 The capacitance C10 of the resistance R5 and 0.68uF of 56K are sequentially connected in series, the electricity of parallel connection 0.1uF between the resistance R5 and capacitance C10 of series connection Hold C12, resistance R14, the resistance in 10 Europe of 1K are sequentially connected in series between the inverting input 4 of operational amplifier U6 and port 5 The port 5 of the capacitance C13 of the capacitance C14 and 0.1uF of R11,0.1uF, operational amplifier U6 are also connected with+5V power supplys, capacitance C14 mono- End is also connected with the emitter of the triode Q2 of MMBT3904；The in-phase input end of operational amplifier U6 and the collector of triode Q2 Between be also sequentially connected in series 1K resistance R12 and 510K resistance R7, the collector of triode Q2 connects+5V power supplys and 10uF at the same time Drop-down capacitance C11, the resistance R13 of the resistance R10 and 5.6K of 1K, resistance are also sequentially connected in series on the emitter of triode Q2 R13 is grounded, resistance R6 one end of the base stage connection 1K of triode Q2, the output of resistance R6 other end concatenation operation amplifiers U6 End.

Pirani gauge drive circuit is constant-temperature circuit, can be in atmospheric pressure in 1.0 × 105 to 1.0 × 10-6PA wide scopes Temperature constant state is kept to measure, vacuum measurement ranges are wider.When atmospheric pressure is 0.1Pa, Pirani gauge collection signal first passes through The analog signal of effect output 6V to the 0.7V of triode Q2, then enters operational amplifier after the partial pressure effect of resistance R6 After the partial pressure effect for the voltage follower that U6 is formed, the collection signal of 2v--0.27v is obtained.

Communication mode on the master control borad 3 communicates for RS485MODBUS.Communication security is reliable.

Above-described embodiment, the purpose of this utility model, technical solution and beneficial effect have been carried out into One step describes in detail, it should be understood that the foregoing is merely specific embodiment of the present utility model, is not used to limit Determine the scope of protection of the utility model, where within the spirit and principles of the present invention, any modification for being made, equally replace Change, improve, should be included within the scope of protection of this utility model.

Claims

1. composite evacuated transmitter, it is characterised in that including shell (2), the master control being arranged in parallel successively in shell (2) Plate (3), hardboard (4), resistance ionization driving plate (6) and pinboard (10), shell (2) end face are sealed by magnetic cylinder (11), Other end is bolted film (1), connection cable (5) between the master control borad (3) and pinboard (10), hardboard (4) it is attached between resistance ionization driving plate (6) by axis, in resistance ionization driving plate (6) and hardboard (4) adjacent surface On go back connector (7) between installing plate；Pirani gauge (8) and cold the moon are also set up on magnetic cylinder (11) on the end face adjacent with pinboard (10) Pole ionization gauge (9), goes back connector (7) between installing plate on pinboard (10).

2. composite evacuated transmitter according to claim 1, it is characterised in that model is set on the master control borad (3) The MCU control circuit of STM32F103RCT6,24V turn 12V power circuits ,+12V turns -12V power circuits, 12V turns 5V power supplys electricity Road and 5V turn 3.3V power circuits.

3. composite evacuated transmitter according to claim 2, it is characterised in that cold cathode is set on the hardboard (4) Ionization gauge high-tension circuit.

4. composite evacuated transmitter according to claim 3, it is characterised in that the Penning gauge high-tension circuit bag SG3525 chips and transformer PT1 are included, resistance R4 is connected between the CT ports and Dircharge ports of the SG3525 chips, CT ports be also connected with ground capacity C3, RT ports connection ground connecting resistance R6, IN+ ports connection ground resistance R3, Vref port and Series resistance R1 between IN+ ports, Vref ports are also connected with 5.1V power supplys, electricity are sequentially connected in series between Vref ports and VCC ports Holding C1 and capacitance C3, capacitance C3 both ends shunt capacitance C4, VCC ports and VC ports connect+12V power supplys, and capacitance C4 one end is grounded, OutputB ports are sequentially connected the port 1 of resistance R2 and field-effect tube Q1, and the port 2 of field-effect tube Q1 connects transformer PT1's Port 1, the port 3 of field-effect tube Q1 connect the port 3 of field-effect tube Q2 and the port 1 of ground resistance R13, field-effect tube Q2 and connect Resistance R5 one end, the resistance R5 other ends connect the OutputA ports of SG3525 chips, and the port 2 of field-effect tube Q2 connects transformation The port 7 of device PT1, the port 10 of SG3525 chips connect ground capacity C15 and resistance R14 one end, resistance R14 other ends connection field The port 3 of effect pipe Q1, the port Comp of SG3525 chips are connected with port IN-, the port Ground ground connection of SG3525 chips, The port Soft-Start of SG3525 chips is sequentially connected in series the collector of resistance R15 and triode Q3, the emitter of triode Q3 Ground connection, base stage connection signal port Gauge-EN and resistance R16 one end, another termination 5.1V power supplys of resistance R16；Transformer PT1's Port 3 and port 5 meet power supply VCC, are sequentially connected in series diode D1 and capacitance C9 between the port 11 of transformer PT1 and port s, and two The anode connection terminal mouth 11 of pole pipe D1, capacitance C5, the cathode of diode D6 and two are sequentially connected in series at the both ends of diode D1 The anode of pole pipe D6, the cathode of diode D2, the anode of diode D2 and capacitance C10 are sequentially connected in series at the both ends of diode D6, Anode, the cathode of diode D4 of capacitance C6 and diode D4 are sequentially connected in series at the both ends of diode D2, the two of diode D4 End is sequentially connected in series the cathode of triode D3, the anode of triode D3 and capacitance C11, and capacitance is sequentially connected in series at the both ends of triode D3 The anode of C7 and diode D5 and the cathode of diode D5, the cathode of diode D5 also connect model at the same time One end of the port P2 and resistance R11 of the MCU of STM32F103RCT6, the port s of the other end connection transformer PT1 of resistance R11 With the port P1 of the MCU of model STM32F103RCT6.

5. composite evacuated transmitter according to claim 2, it is characterised in that set on the resistance ionization driving plate (6) Signal processing circuit is put, signal processing circuit includes Penning gauge signal acquisition circuit and Pirani gauge drive circuit.

6. composite evacuated transmitter according to claim 5, it is characterised in that Penning gauge signal acquisition circuit bag Operational amplifier U8 is included, the port 1 of operational amplifier U8 connects the port 3 of potentiometer VR2, and the port 1 of potentiometer VR2 connects computing and puts The port 5 of big device U8, the port 4 of operational amplifier U8 connect the port 2 and capacitance C35 one end of potentiometer VR2, capacitance at the same time The C35 other ends are grounded, and the port 7 of operational amplifier U8 meets drop-down capacitance C28, and drop-down capacitance C28 is also connected with+12V power supplys；Computing The in-phase input end ground connection of amplifier U8, is connected in series capacitance C37, the two of capacitance C37 between inverting input and output terminal Parallel resistance R28 is held, in the both ends shunt capacitance C40 of resistance R28；The inverting input of operational amplifier U8 also connects electricity at the same time R22 one end is hindered, the resistance R22 other ends connect the port P1 of the model STM32F103RCT6 chips in MCU control circuit, end Mouthful P1 is also connected with drop-down capacitance C39, the drain electrode of field-effect tube T1 and source electrode, the grid of field-effect tube T2, operational amplifier U8's Inverting input is also connected with drop-down capacitance C41；The drain electrode of field-effect tube T2 and source electrode, the grid of field-effect tube T1 are grounded.

7. composite evacuated transmitter according to claim 5, it is characterised in that the Pirani gauge drive circuit includes computing Resistance R5 and capacitance C10 are sequentially connected in series between the inverting input 4 and output terminal 1 of amplifier U6, operational amplifier U6, is being connected Resistance R5 and capacitance C10 between shunt capacitance C12, gone here and there successively between the inverting input 4 of operational amplifier U6 and port 5 The port 5 for joining resistance R14, resistance R11, capacitance C14 and capacitance C13, operational amplifier U6 is also connected with+5V power supplys, capacitance C14 mono- End is also connected with the emitter of triode Q2；Between the in-phase input end of operational amplifier U6 and the collector of triode Q2 also successively The collector of series resistance R12 and resistance R7, triode Q2 connect+5V power supplys and drop-down capacitance C11 at the same time, triode Q2's Resistance R10 and resistance R13, resistance R13 ground connection are also sequentially connected in series on emitter, the base stage of triode Q2 connects resistance R6 one end, The output terminal of resistance R6 other end concatenation operation amplifiers U6.

8. composite evacuated transmitter according to claim 1, it is characterised in that the communication mode on the master control borad (3) Communicate for RS485MODBUS.