CN207243991U - A kind of universal type basal plate frame - Google Patents
A kind of universal type basal plate frame Download PDFInfo
- Publication number
- CN207243991U CN207243991U CN201720986834.3U CN201720986834U CN207243991U CN 207243991 U CN207243991 U CN 207243991U CN 201720986834 U CN201720986834 U CN 201720986834U CN 207243991 U CN207243991 U CN 207243991U
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- China
- Prior art keywords
- hook
- carrier
- annular groove
- connector
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims abstract description 56
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000007888 film coating Substances 0.000 claims abstract description 8
- 238000009501 film coating Methods 0.000 claims abstract description 8
- 239000000203 mixture Substances 0.000 claims description 12
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 230000006978 adaptation Effects 0.000 claims description 5
- 230000011218 segmentation Effects 0.000 abstract description 6
- 230000009466 transformation Effects 0.000 abstract description 3
- 230000001568 sexual effect Effects 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 abstract description 2
- 230000000875 corresponding effect Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Vacuum coating equipment technical field is the utility model is related to, especially a kind of universal type basal plate frame, it is characterised in that：Offer annular groove respectively on the surface of the upper and lower substrate disc, the hook pedestal is connected with the annular groove by connector and can slided or fix in the annular groove by the connector.The utility model has the advantages that：The carrier of compatible various sizes of film-coating workpiece, compatible sexual clorminance are very big；Substrate disc segmentation transformation operation is very convenient, time saving and energy saving.
Description
Technical field
Vacuum coating equipment technical field is the utility model is related to, especially a kind of universal type basal plate frame.
Background technology
In sputter coating process, the film-coating workpiece such as substrate, substrate needs to be placed on a carrier, and carrier then passes through connection
Part fixed frame is set on cylinder drum type frame substrate.With the rotation of frame substrate, sputtering source is to the film-coating workpiece that is carried on carrier
Carry out sputter coating.
At present, since the diversity of substrate, the size of carrier are also different, it is therefore desirable to according to the specific size of carrier
Corresponding frame substrate is adapted to complete to load.But during actual use, there are problems with：1）Existing cylinder drum type
Frame substrate fixes segmentation, can only fill a kind of carrier of width, and the substrate size of adaptation has limitation, is frequently replacing carrier
When, it is necessary to replace corresponding frame substrate, it is longer to replace the spent time, and process is also more troublesome；2）Existing substrate disc
Excessive location hole, and split it is of different sizes, without versatility, during installation fee；3）Existing cylinder drum type frame substrate is fixed point
Cut, the frame substrate structure such as substrate disc is needed replacing when changing segmentation number, manually and material consuming is larger.
The content of the invention
The purpose of this utility model is according to above-mentioned the deficiencies in the prior art, there is provided a kind of universal type basal plate frame, passes through
Annular groove is set on upper and lower substrate disc and coordinates corresponding connector hook pedestal is slided on upper and lower substrate disc to adjust
Whole position, so as to adapt to different carrier widths, makes upper and lower substrate disc to have different segmentation numbers.
The utility model aim is realized and completed by following technical scheme：
A kind of universal type basal plate frame, including at least upper and lower substrate disc, carrier and some hook pedestals, wherein described upper and lower
Substrate disc is integrally formed by connecting rod connection fixation, and the carrier is used to carry film-coating workpiece, on the upper and lower substrate disc
It is respectively arranged with the hook pedestal, and the hook pedestal on upper substrate disk and the hook pedestal one on infrabasal plate disk
One correspond to and it is corresponding two hook pedestal be in same level, the carrier passes through its both ends and the upper and lower base
The fixed outer rim for being suspended on the upper and lower substrate disc of connection between the hook pedestal in plate disc, it is characterised in that：Institute
The surface for stating upper and lower substrate disc offers annular groove respectively, and the hook pedestal is connected with the annular groove by connector and can led to
The connector is crossed to slide or fix in the annular groove.
The annular groove is annular dovetail slot.
Some leakproof film blend stops, the leakproof film blend stop cloth are provided between the upper substrate disk and the infrabasal plate disk
Put between the adjacent carrier, the hold-down bars of the leakage film blend stop is connected with the annular groove by the connector and can led to
The connector is crossed to slide or fix in the annular groove.
The connector is bolt, and the head of the bolt assumes diamond in shape and is arranged in the annular groove, the spiral shell of the bolt
Bar passes through the link slot being opened on the hook pedestal and is fastened by nut.
There are at least two hooks for being used to connect the fixed carrier on the hook pedestal, between the hook between
Match and be adapted to away from the spacing between the hook hole on the carrier.
The utility model has the advantages that：The carrier of compatible various sizes of film-coating workpiece, compatible sexual clorminance are very big；Base
Plate disc segmentation transformation operation is very convenient, time saving and energy saving.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the side view of Fig. 1；
Fig. 3 is the top view of Fig. 1；
Fig. 4 is the thin portion structure diagram of the utility model.
Embodiment
The utility model feature and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing,
In order to the understanding of technical staff of the same trade：
As shown in Figs 1-4, figure label 1-14 is expressed as：Infrabasal plate disk 1, link up with pedestal 2, carrier 3, link up with 4, connect
Fitting 5, hook pedestal 6, upper substrate disk 7, hold-down bars 8, leakproof film blend stop 9, connecting rod 10, centre bore 11, dovetail groove 12, hook
13rd, link slot 14.
Embodiment：As shown in Figure 1, universal type basal plate frame body in the present embodiment by infrabasal plate disk 1, upper substrate disk 7 and
The connecting rod 10 being arranged between upper and lower substrate disc 7,1 is formed, wherein the both ends of connecting rod 10 respectively with upper and lower substrate disc 7,1
It is fixedly connected, so that upper and lower substrate disc 7,1 can be connected by connecting rod 10.As shown in figure 3, in upper substrate disk 7
Center offers centre bore 11, by setting rotating mechanism that upper substrate disk 7 can be driven to rotate at the position of centre bore 11；
Also the centre bore coaxial with centre bore 11 is offered on infrabasal plate disk 1.
With reference to shown in Fig. 1, Fig. 2 and Fig. 3, hook pedestal 2 is provided with infrabasal plate disk 1, is provided with upper substrate disk 7
Pedestal 6 is linked up with, pedestal 2 is linked up with and hook pedestal 6 is connected by connector 5 with corresponding substrate disc respectively.In hook pedestal 2
Hook 13 is both provided with hook pedestal 6,13 is linked up with and is used to hang installation carrier 3, carrier 3 is used for carrying and is used as film-coating workpiece
Substrate or substrate.Since carrier 3 is generally tabular, hook pedestal 2 and upper substrate disk 7 on infrabasal plate disk 1
On hook pedestal 6 it is corresponding and in the same level；By one group of hook pedestal 2 and hook pedestal 6, carrier 3 can hang
Extension is fixed on the outer rim of upper and lower substrate disc 7 and in plated film with substrate disc spins.
The thin portion structure diagram of upper substrate disk 7 as shown in Figure 4, the swallow of annular is offered on the surface of upper substrate disk 7
Stern notch 12.Hook pedestal 6 is L-shaped, its horizontal plane is connected by connector 5 with dovetail groove 12, and two are set on its vertical plane
Hook 13.Connector 5 includes the bolt that a head assumes diamond in shape, and the diamond shape head of the bolt is connected in dovetail groove 12 and can be along swallow
Stern notch 12 slides, and the screw rod of the bolt passes through the link slot 14 being opened on hook 6 horizontal plane of pedestal to stretch out and can pass through adaptation
Nut fasten fixation.Therefore, link up with pedestal 6 to slide in dovetail groove 12 by connector 5, to adjust it in upper substrate disk
Position on 7, so as to change the adjacent spacing linked up between pedestal 6 with compatible various sizes of carrier 3, realizes that frame substrate is split
Several transformations.Similarly, hook pedestal 2 set on infrabasal plate disk 1 is also arranged as hook pedestal 6, i.e., by identical
Connector 5 is connected among the annular dovetail groove 12 opened up on infrabasal plate disk 1 so that hook pedestal 2 can pass through connector 5
Adjust its position on infrabasal plate disk 1.
It is shown as shown in Figure 2, Figure 3 and Figure 4, leakproof film blend stop 9 is provided between adjacent carrier 3, leakproof film blend stop 9 is used for
Prevent coating materials from entering film-coating workpiece in non-coating film area, and adjacent carrier 3 and being subject to the plated film caused by the interference effect of coating materials
Quality reduces.Leakproof film blend stop 9 is installed on the outer rim of upper and lower substrate disc 7,1 by hold-down bars 8.The both ends of hold-down bars 8 lead to respectively
Cross connector 5 to be connected among the dovetail groove 12 of upper and lower substrate disc 7,1 so that hold-down bars 8 also can adjust it in upper and lower substrate
Position on disk 7 is to adapt to the size of carrier 3.
The present embodiment in specific application, including：
According to the size needs of different carriers 3, the hook pedestal 6,2 on upper and lower substrate disc 7,1 is moved by connector 5,
Position of the adjustment hook pedestal on substrate disc, so as to avoid adjacent carrier 3 from colliding.After being moved into place, ensure hook
Pedestal 6 and hook pedestal 2 are in same level.Screw on nut makes hook pedestal 6 and links up with pedestal 2 on connector 5
Position is fixed.After hook pedestal 6 and 2 position of hook pedestal are fixed, carrier 3 can be hung and be fixed on hook 13.Such one
Come, the segmentation number of upper and lower substrate disc 7 is transformed, so that compatible various sizes of carrier 3.In order to adapt to various sizes of load
Body 3, the position of hold-down bars 8 is adjusted by connector 5, leakproof film blend stop 9 is between adjacent carrier 3, ensures adjacent
Leakproof film blend stop 9 is always provided between carrier 3.
The present embodiment is in the specific implementation：As shown in figure 4, two hook 13 between spacing can be satisfied with carrier 3
Hook hole between spacing match adaptation.In general, the hook hole site on various sizes of carrier 3 is fixed, therefore
The spacing of hook pedestal 2 and the hook 13 on hook 6 can also fix, it is only necessary to ensure the spacing of hook 13 and the extension on carrier 3
Spacing adaptation between dog hole.
Connector 5 except can be integral type diamond shape head bolt, can also be fixed using one section of screw rod with a diamond shape
The combination of block, as long as hook pedestal 6 and hook pedestal 2 can be made to slide and fix in respective dovetail groove 12 by it.
Although the design to the utility model aim and embodiment elaborate above example referring to the drawings,
But those skilled in the art will realize that in the case where limiting the precondition of scope without departing from claim, still may be used
To make various modifications and variations to the utility model, therefore do not repeat one by one herein.
Claims (5)
- A kind of 1. universal type basal plate frame, including at least upper and lower substrate disc, carrier and some hook pedestals, wherein the upper and lower base Plate disc is integrally formed by connecting rod connection fixation, and the carrier is used to carry film-coating workpiece, divides on the upper and lower substrate disc The hook pedestal is not provided with, and the hook pedestal on upper substrate disk and the hook pedestal on infrabasal plate disk are one by one Corresponding and corresponding two hooks pedestal is in same level, and the carrier passes through its both ends and the upper and lower substrate The fixed outer rim for being suspended on the upper and lower substrate disc of connection between the hook pedestal on disk, it is characterised in that：Described The surface of upper and lower substrate disc offers annular groove respectively, and the hook pedestal is connected with the annular groove by connector and can passed through The connector is slided or fixed in the annular groove.
- A kind of 2. universal type basal plate frame according to claim 1, it is characterised in that：The annular groove is annular dovetail slot.
- A kind of 3. universal type basal plate frame according to claim 1, it is characterised in that：In the upper substrate disk and the lower base Some leakproof film blend stops are provided between plate disc, the leakproof film blend stop is arranged between the adjacent carrier, the leakage film The hold-down bars of blend stop be connected by the connector with the annular groove and can be slided by the connector in the annular groove or It is fixed.
- A kind of 4. universal type basal plate frame according to claim 1 or 3, it is characterised in that：The connector is bolt, described The head of bolt assumes diamond in shape and is arranged in the annular groove, and the screw rod of the bolt passes through the company being opened on the hook pedestal Access slot is simultaneously fastened by nut.
- A kind of 5. universal type basal plate frame according to claim 1, it is characterised in that：Have at least two on the hook pedestal A hook for being used to connect the fixed carrier, the spacing between the hook hole in spacing and the carrier between the hook Match adaptation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720986834.3U CN207243991U (en) | 2017-08-09 | 2017-08-09 | A kind of universal type basal plate frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720986834.3U CN207243991U (en) | 2017-08-09 | 2017-08-09 | A kind of universal type basal plate frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207243991U true CN207243991U (en) | 2018-04-17 |
Family
ID=61879237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720986834.3U Expired - Fee Related CN207243991U (en) | 2017-08-09 | 2017-08-09 | A kind of universal type basal plate frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207243991U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107287574A (en) * | 2017-08-09 | 2017-10-24 | 光驰科技(上海)有限公司 | A kind of universal type basal plate frame and its application process |
-
2017
- 2017-08-09 CN CN201720986834.3U patent/CN207243991U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107287574A (en) * | 2017-08-09 | 2017-10-24 | 光驰科技(上海)有限公司 | A kind of universal type basal plate frame and its application process |
| CN107287574B (en) * | 2017-08-09 | 2023-03-28 | 光驰科技(上海)有限公司 | Universal substrate frame and application method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180417 |