CN207181558U - Full-automatic probe station - Google Patents
Full-automatic probe station Download PDFInfo
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- CN207181558U CN207181558U CN201721179811.8U CN201721179811U CN207181558U CN 207181558 U CN207181558 U CN 207181558U CN 201721179811 U CN201721179811 U CN 201721179811U CN 207181558 U CN207181558 U CN 207181558U
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Abstract
The utility model discloses a kind of full-automatic probe station, including：Frame；In frame, for carrying and adjusting workbench of the part to be measured relative to the position of frame；In frame, for carrying out the test device of continuity test to the component on part to be measured；In frame, the camera device of the real time picture information for shooting part to be measured；In frame, the identity device of identification point is beaten on underproof component by being moistened with the line of ink marker of ink；And, be electrically connected to workbench, test device, camera device and identity device, according to the result of continuity test judge whether component qualified, the location coordinate information of underproof component is generated according to real time picture information, stage motion is controlled according to location coordinate information to adjust the position of underproof component until corresponding with identity device, control identity device to carry out the control processor that point action is known in mark, reach the purpose for beating identification point on underproof component automatically.
Description
Technical field
Electronic component detection technique field is the utility model is related to, more particularly to a kind of full-automatic probe station.
Background technology
Probe station is mainly used in the quality test of semicon industry, photovoltaic industry, integrated circuit and component.With
The development of science and technology, the volume of component is less and less, and generally multiple components are integrated on a sheet of bottom plate and treated with being formed
Part is surveyed, it is convenient subsequently to be detected.Detection mode is usually：The both positive and negative polarity of component to be detected is turned on powered probe,
Judge whether detected component is qualified further according to the working condition of component.
But after probe station detection of the prior art finishes a part to be measured, because all multicomponent devices are very tiny, manually
Not easy to identify, therefore be difficult to quickly mark on underproof component, so as to subsequently delete, to select these underproof
Component is a technical barrier.
Utility model content
The purpose of the utility model embodiment is to provide a kind of full-automatic probe station, solves and is manually difficult to underproof
The problem of being marked on component.
The utility model first aspect provides a kind of full-automatic probe station, including：
Frame；
In frame, for carrying part to be measured and adjusting work of the part to be measured relative to the position of the frame
Platform；
In the frame, for carrying out the test device of continuity test to the component on the part to be measured；
In the frame and positioned at the test device side, the real time picture for shooting the part to be measured is believed
The camera device of breath；
In the frame and positioned at the test device opposite side, by be moistened with the line of ink marker of ink with it is described not
The identity device of identification point is beaten on the qualified component；And
It is electrically connected to described in the workbench, the test device, the camera device and the identity device, basis
The result of continuity test judges whether the component is qualified, and the underproof institute is generated according to the real time picture information
The location coordinate information of component is stated, the stage motion is controlled according to the location coordinate information not conform to described in adjusting
The position of the component of lattice until corresponding with the identity device, control the identity device carry out described in beat identification point
The control processor of action.
The full-automatic probe station of such scheme is realized, after part to be measured is positioned on workbench, control processor control work
Position corresponding with test device is moved to as platform, and the part to be measured on workbench is detected by test device, is being controlled
After processor processed judges whether the part to be measured is qualified, camera device shoots the real time picture information of part to be measured for control process
Device generates coordinate information corresponding with unqualified part to be measured, and then control processor controls workbench shifting according to the coordinate information
It is dynamic, unqualified part to be measured and identity device to it is corresponding when identity device by being moistened with the line of ink marker of ink with underproof described
Identification point is beaten on component, and then the purpose for beating identification point on underproof component automatically can be realized, without artificial behaviour
Make, improve operating efficiency.
With reference in a first aspect, in the first possible implementation of first aspect, the identity device includes：
For loading the ink fountain of the ink, the line of ink marker is arranged in the ink and the ink is stretched out at the line of ink marker both ends
Bucket；
Syringe needle side, being stretched out when beating identification point for the line of ink marker of the component is closed on located at the ink fountain；
Be fixed on the line of ink marker relative to described syringe needle one end, drive the line of ink marker relative to the ink fountain movement with logical
Cross the line of ink marker stretch out the syringe needle end beaten on the underproof component identification point and at the control
Manage the actuator of device electrical connection；And
Mounting seat being installed on the frame, being installed for the ink fountain and the actuator.
The full-automatic probe station of such scheme is realized, it is necessary to when beating identification point on underproof component, actuator band
The dynamic line of ink marker dips in ink during being slid in ink fountain, be moistened with ink line of ink marker one end extended needle and with underproof first device
Part contacts, to realize the function of beating identification point.
With reference in a first aspect, in second of possible implementation of first aspect, the test device includes：
Some probes, the probe include：Shank, located at described shank one end, contact to be examined with part to be detected
The probe portion of survey, and, bend and set between one end the and described shank relative to the probe portion of the shank
Bending section；
It is being abutted against provided with jack the, lateral surface for bending section insertion with the shank, be connected with test power supply
Conducting rod；And
With the conducting rod slidingtype assembling, medial surface can abut against with the shank, for the conducting rod
Grip the sliding component of the shank.
The full-automatic probe station of such scheme is realized, when changing probe, is first slid onto sliding component along conducting rod slotting
Hole is relative to the side of probe, the probe that extraction needs are changed from jack, then the bending section of new probe is injected in jack,
Jack has restriction effect to new probe, then sliding component is slid along conducting rod towards probe, until sliding component and conduction
Bar together grips the shank of new probe, you can realizes and conveniently probe is changed.
With reference in a first aspect, in the third possible implementation of first aspect, the full-automatic probe station also wraps
Include：
Two components are located at the frame both sides, handling equipment for conveying the part to be measured one by one；And
To be led described in progress between handling equipment described in two groups, the conveying part to be measured to the workbench
Logical test processes and it is described beat identification point processing, by the part output to be measured on the workbench to collect the part to be measured
Material transfering device.
The full-automatic probe station of such scheme is realized, can by the mating reaction of two groups of handling equipments and material transfering device
The part to be measured not being detected to realize automation to add and collection detection, the part to be measured that identification point finishes is beaten, grasped without artificial
Make, more automate.
With reference to the third possible implementation of first aspect, in the 4th kind of possible implementation of first aspect
In, the handling equipment includes：
Placement platform in the frame, when being acted on by external force to be lifted relative to the frame；
For stacking the part to be measured and the detachable assembling of the placement platform magazine；
Driving group being electrically connected with the control processor, driving the placement platform to be lifted relative to the frame
Part；And
It is on the placement platform, when the magazine is assemblied in the placement platform by the magazine extrude with to
The control processor feeds back the inductive component that the magazine assembling finishes information.
The full-automatic probe station of such scheme is realized, when magazine does not assemble mutually with placement platform, inductive component is difficult to examine
Measure the position of magazine；When magazine mutually assembles with placement platform, inductive component is extruded by magazine, and then confirms that magazine has assembled
Finish, it is and common so as to which to control processor, this feedback of the information is automatically turned on into full-automatic probe station so as to can easily realize
The handling equipment of full-automatic probe station compare, after magazine mutually assembles with placement platform, without operator's manual confirmation magazine
Whether assembling finishes, so that full-automatic probe station is more intelligent, substantially increases the operating efficiency of full-automatic probe station.
With reference to the third possible implementation of first aspect, in the 5th kind of possible implementation of first aspect
In, the material transfering device includes：
It is fixed in the frame and turns material guide rail；
Slidingtype be assemblied in it is described turn material guide rail, travel to and fro between each station of the full-automatic probe station between treated with transfer
The manipulator of part is surveyed, the manipulator includes：Some supporting plates for part to be measured described in support, and, some protrusions are set
In it is on the supporting plate, held with limiting the part to be measured relative to described when the part to be measured is positioned on the supporting plate
The spacing pin bank of supporting plate movement；And
It is in the frame, drive the manipulator relative to the described turn of reciprocating Power Component of material guide rail.
The full-automatic probe station of such scheme is realized, when part to be measured is positioned on supporting plate, spacing pin bank treats survey part
With certain barrier effect, when then Power Component drives manipulator relative to the reciprocating motion of material guide rail is turned, limit can be passed through
Part to be measured is released original station by position pin bank, and part to be measured is shifted to next station to realize；It is this by supporting plate carrying and
The mode of the spacing spacing part to be measured of pin bank, compared with common sucker structure, supporting plate and the equal indefatigability damage of spacing pin bank
Wound, so as to which during part to be measured is shifted repeatedly, part to be measured is more stable and is not easy to drop, effectively lift full-automatic probe station
Operating efficiency.
With reference in a first aspect, in the 6th kind of possible implementation of first aspect, the frame includes：First table top
And with spaced apart second table top of first table top；The workbench slidingtype is assemblied in first table top and is located at
Between first table top and second table top, the part to be measured on the workbench is positioned over by the workbench
Absorption is fixed.
The full-automatic probe station of such scheme is realized, when being detected to part to be measured, part to be measured is adsorbed solid by workbench
It is fixed, and then part to be measured is more stable, is advantageous to smoothly realize to part to be measured progress detection process and plays identification point processing.
With reference to the 6th kind of possible implementation of first aspect, in the 7th kind of possible implementation of first aspect
In, the full-automatic probe station also includes：Be arranged at it is in the frame, when be placed with the part to be measured the workbench move
Move to being controlled the material pressing device that is pressed in the part to be measured on the workbench during specified location by the control processor.
The full-automatic probe station of such scheme is realized, after part to be measured is positioned on workbench, workbench absorption is fixed
Before part to be measured, control processor control workbench drives part to be measured to be moved to a specified location, and then control processor controls
Material pressing device action reduces the gap between part and workbench to be measured, and then part to be measured so that part to be measured is pressed on workbench
It is easy to be adsorbed by workbench and fixes, adds the stability of part to be measured, be advantageous to subsequent detection part to be measured.
With reference to the 7th kind of possible implementation of first aspect, in the 8th kind of possible implementation of first aspect
In, the material pressing device includes：
Fixing assembling is in the installed part of the frame side；
With the installed part fixing assembling, by the control processor control power source component；And
By the power source Component driver and the part to be measured is pressed on so that the part to be measured is pressed in into the workbench
On elastic press part.
The full-automatic probe station of such scheme is realized, power source component is fixed on frame by installed part, and elastic press part exists
Part to be measured is compressed under the drive of power source component, so as to material pressing device not only Stability Analysis of Structures, it is easy to accomplish, and it is easily controllable and
Maintenance；And on the premise of elastic press part is flexible, when elastic press part compresses part to be measured, because cushioning effect will will not be treated
The component surveyed on part weighs wounded, while can adaptively adjust when elastic press part and part to be measured do not reach, further favorably
In subsequent detection part to be measured.
With reference in a first aspect, in the 9th kind of possible implementation of first aspect, the workbench is provided with institute
State the line of ink marker be used for beat identification point end remain product it is black when with close to the identity device to it is described product ink carry out automatically it is clear
Clean cleaning device.
The full-automatic probe station of such scheme is realized, more product ink is remained in the end for being used to beat identification point of the line of ink marker
When, it can be unfavorable for beating identification point on tiny component, cleaning device can enter product ink under the control of control processor
Row periodically cleaning, it is more beneficial for improving the accuracy that the probe station automatic marking knows point.
In summary, the utility model embodiment has the advantages that：
One, it is possible to achieve the purpose of identification point is beaten on underproof component automatically, without manual operation, more intelligence
Energyization；
Secondly, it is possible to achieve the not detected part to be measured of automation addition and collect detection, treating of beating that identification point finishes
Part is surveyed, it is more intelligent without manual operation；
Third, structure is more stable, it is easy to make and repairs.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model embodiment；
Fig. 2 is the structural representation of identity device in the utility model embodiment；
Fig. 3 is the structural representation of test device in the utility model embodiment；
Fig. 4 is the structural representation of handling equipment in the utility model embodiment；
Fig. 5 is the structural representation of material transfering device in the utility model embodiment；
Fig. 6 is the structural representation of material pressing device in the utility model embodiment；
Fig. 7 is the connection relationship diagram of cleaning device and workbench in the utility model embodiment.
Reference：1st, frame；11st, the first table top；12nd, the second table top；2nd, workbench；3rd, test device；31st, probe；
311st, shank；312nd, probe portion；313rd, bending section；32nd, conducting rod；33rd, sliding component；4th, camera device；5th, identity device；51、
Ink fountain；52nd, syringe needle；53rd, actuator；54th, mounting seat；6th, handling equipment；61st, placement platform；62nd, magazine；63rd, sense group
Part；64th, drive component；7th, material transfering device；71st, material guide rail is turned；72nd, manipulator；721st, supporting plate；722nd, spacing pin bank；73rd, move
Power component；8th, material pressing device；81st, installed part；82nd, power source component；83rd, elastic press part；9th, cleaning device.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Embodiment：A kind of full-automatic probe station, as shown in figure 1, including：Frame 1, workbench 2, test device 3, shooting dress
Put 4, identity device 5, handling equipment 6, material transfering device 7, material pressing device 8 and control processor（In the accompanying drawing of the present embodiment
Blocked due to visual angle and the structure of control processor is not specifically shown）.
Frame 1 includes：First table top 11 and with 11 spaced apart second table top 12 of the first table top, the He of the first table top 11
The column for supporting is provided between second table top 12.The slidingtype of workbench 2 is assemblied in the first table top 11 and is located at the first table top
11 and second between table top 12, and the part to be measured being positioned on workbench 2 adsorbs fixation by workbench 2, and the upper surface of workbench 2 is set
There are multiple negative pressure holes, and negative pressure hole is communicated in an air exhauster.When being detected to part to be measured, part to be measured is adsorbed by workbench 2
It is fixed, and then part to be measured is more stable, is advantageous to smoothly realize to part to be measured progress detection process and plays identification point processing, it is to be measured
Part is specially the wafer with multiple luminescence chips.
Test device 3 is installed on the second table top 12, and for carrying out the survey of continuity test to the component on part to be measured
Trial assembly puts 3；Camera device 4 is installed on the second table top 12 and is located at the side of test device 3, and for shooting the real-time of part to be measured
The camera device 4 of pictorial information；Identity device 5 is installed on the second table top 12 and is located at the opposite side of test device 3, identity device
5 beat identification point by being moistened with the line of ink marker of ink on underproof component；Control processor is electrically connected to workbench 2, surveyed
Trial assembly puts 3, camera device 4 and identity device 5 and according to the result of continuity test（Whether the luminescence chip on part i.e. to be measured is sent out
Light）Judge whether component is qualified, control processor generates the position coordinates of underproof component according to real time picture information
Information and according to location coordinate information control workbench 2 act with adjust the position of underproof component until and identity device
5 correspondences, while control processor control identity device 5 carries out mark and knows point action.
Two groups of handling equipments 6 are respectively arranged in the both sides of frame 1 and for conveying part to be measured one by one；Material transfering device 7 is located at
To carry out continuity test processing and play identification point processing between two groups of handling equipments 6 and on conveying part to be measured to workbench 2, together
When material transfering device 7 part to be measured on workbench 2 is transferred out to collect part to be measured.By two groups of handling equipments 6 and turn material dress
Put 7 mating reaction, it is possible to achieve the not detected part to be measured of automation addition and collect detection, treating of beating that identification point finishes
Part is surveyed, without manual operation, is more automated.
Material pressing device 8 is installed on the second table top 12 and when the workbench 2 for being placed with part to be measured is moved to a specified location
When the control of controlled processor part to be measured is pressed on workbench 2.
After part to be measured is positioned on workbench 2, before the fixed part to be measured of the absorption of workbench 2, control processor control
Workbench 2 drives part to be measured to be moved to a specified location, and then control processor control material pressing device 8 is acted with by part pressure to be measured
Tightly on workbench 2, reducing the gap between part and workbench 2 to be measured, and then part to be measured is easy to adsorb fixation by workbench 2,
The stability of part to be measured is added, is advantageous to subsequent detection part to be measured.
With reference to shown in Fig. 1 and Fig. 2, identity device 5 includes：Ink fountain 51, the line of ink marker, syringe needle 52, actuator 53 and mounting seat
54.Ink fountain 51 is used to load ink, and the line of ink marker is arranged in ink and line of ink marker both ends are stretched out from the both ends of ink fountain 51, and the line of ink marker is specially straight
Hairbrush line；Syringe needle 52 closes on the side of component located at ink fountain 51 and ink supply line stretches out when beating identification point；With control processor
The actuator 53 of electrical connection is fixed on the line of ink marker relative to the one end of syringe needle 52 and drives the line of ink marker to be moved relative to ink fountain 51 to pass through ink
Identification point is beaten in the end of line extended needle 52 on underproof component, and actuator 53 can be cylinder or electromagnet；Peace
Dress seat 54 is installed on the second table top 12 and ink supply bucket 51 and actuator 53 are installed.
With reference to shown in Fig. 1 and Fig. 3, test device 3 includes：One probe 31, probe 31 include：Shank 311, located at shank
311 one end, contact with part to be detected probe portion 312 to be detected, probe portion 312 is pointed, and, located at shank
The bending section 313 of setting, probe portion 312, shank are bent between the 311 one end and shank 311 relative to probe portion 312
It is integrally formed and is made of stainless steel between 311 and the three of bending section 313；Provided with jack, the outside inserted for bending section 313
Face with shank 311 is abutting against, is connected with the conducting rod 32 of test power supply, conducting rod 32 is specifically made up of aluminium alloy；And with
The slidingtype of conducting rod 32 assembling, medial surface can it is abutting against with shank 311, for gripping shank 311 with conducting rod 32
Sliding component 33.
When changing probe 31, sliding component 33 is first slid onto into side of the jack relative to probe 31 along conducting rod 32,
The probe 31 for needing to change is extracted from jack, then the bending section 313 of new probe 31 is injected in jack, jack is to new spy
Pin 31 has restriction effect, then sliding component 3 is slid along conducting rod 32 towards probe 31, until sliding component 33 and conducting rod 32
The shank 311 of new probe 31 is gripped together, you can realize and conveniently probe 31 is changed.
With reference to shown in Fig. 1 and Fig. 4, handling equipment 6 includes：Placement platform 61, magazine 62, drive component 64 and sensing
Component 63.Placement platform 61 is located at the side of the second table top 12 and when being acted on by external force to be lifted relative to frame 1；Magazine 62 is used
In stack part to be measured and with 61 detachable assembling of placement platform；Drive component 64 electrically connects with control processor and drives placement
Platform 61 lifts relative to frame 1；Inductive component 63 is on placement platform 61 and when magazine 62 is assemblied in placement platform 61
Extruded by magazine 62 to finish information to the control processor feedback assembling of magazine 62, inductive component 63 is specially to pacify in the present embodiment
Loaded on pressure sensor that is on placement platform 61 and being electrically connected with control processor.
When magazine 62 does not assemble with the phase of placement platform 61, inductive component 63 is difficult to detect magazine 62；When magazine 62 with
When the phase of placement platform 61 is assembled, inductive component 63 is extruded by magazine 62, and then confirms that the assembling of magazine 62 finishes, so as to which this be believed
Breath feeds back to control processor, full-automatic probe station is automatically turned on so as to can easily realize, with common full-automatic probe station
Handling equipment 6 compare, after magazine 62 and the phase of placement platform 61 are assembled, without operator's manual confirmation magazine 62 assemble whether
Finish, so that full-automatic probe station is more intelligent, substantially increase the operating efficiency of full-automatic probe station.
With reference to shown in Fig. 1 and Fig. 5, material transfering device 7 includes：It is fixed in frame 1 and turns material guide rail 71；Slidingtype is assemblied in
To shift the manipulator 72 of part to be measured between each station turning material guide rail 71, travelling to and fro between full-automatic probe station, manipulator 72 wraps
Include：Some supporting plates 721 for support part to be measured, and, it is some protrusion be arranged at it is on supporting plate 721, when part to be measured is put
It is placed in when on supporting plate 721 to limit the spacing pin bank 722 that part to be measured moves relative to supporting plate 721；And located at frame 1
On, drive manipulator 72 relative to turning the reciprocating Power Component 73 of material guide rail 71.
When part to be measured is positioned on supporting plate 721, spacing pin bank 722 has certain barrier effect to part to be measured, after
And Power Component 73 drive manipulator 72 relative to turn material guide rail 71 move back and forth when, the barrier of spacing pin bank 722 can be passed through
Part to be measured is released original station by effect, and part to be measured is shifted to next station to realize；It is this carried by supporting plate 721 and
The mode of the spacing spacing part to be measured of pin bank 722, compared with common sucker structure, supporting plate 721 and spacing pin bank 722 are not
Fatiguability damages, so that during part to be measured is shifted repeatedly, part to be measured is more stable and is not easy to drop, and is effectively lifted entirely certainly
The operating efficiency of dynamic probe station.
With reference to shown in Fig. 1 and Fig. 6, material pressing device 8 includes：Fixing assembling is in the installed part 81 of the side of frame 1；With installed part
The power source component 82 of 81 fixing assemblings, controlled processor control；And driven and pressed on by power source component 82 and treat
Part is surveyed so that part to be measured to be pressed in the elastic press part 83 on workbench 2.Power source component 82 is fixed on frame by installed part 81
1, elastic press part 83 compresses part to be measured under the drive of power source component 82, so as to the not only Stability Analysis of Structures of material pressing device 8, is easy to
Realize, and easily controllable and maintenance；And on the premise of elastic press part 83 is flexible, elastic press part 83 compresses part to be measured
When, because cushioning effect will not weigh the component on part to be measured wounded, while elastic press part 83 does not reach position with part to be measured
When can adaptively adjust, be further advantageous to subsequent detection part to be measured.
With reference to shown in Fig. 1 and Fig. 7, when workbench 2 in the end for being used to beat identification point of the line of ink marker provided with remaining long-pending black
With the cleaning device 9 close to identity device 5 to product ink progress automated cleaning, cleaning device 9 is specially by cylinder in the present embodiment
Drive the cleaning cotton roller of lifting.The line of ink marker be used for beat identification point end remain more product it is black when, can be unfavorable for thin
Identification point is beaten on small component, cleaning device 9 can move under the control of control processor with workbench 2, Jin Ershi
Now product ink is periodically cleaned, is more beneficial for improving the accuracy that the probe station automatic marking knows point.
The course of work and principle：After part to be measured is positioned on workbench 2, control processor control workbench 2 is moved to
With 3 corresponding position of test device, and the part to be measured on workbench 2 is detected by test device 3, in control processor
After judging whether the part to be measured is qualified, camera device 4 shoots the real time picture information of part to be measured so that control processor generates
Coordinate information corresponding with unqualified part to be measured, then control processor control workbench 2 to move according to the coordinate information, not
Qualified part to be measured and identity device 5 to it is corresponding when when beating identification point on underproof component, actuator 53 drives the line of ink marker
Dip in ink during sliding in the ink fountain 51, be moistened with ink line of ink marker one end extended needle 52 and with underproof component
Contact, and then the purpose for beating identification point on underproof component automatically can be realized, without manual operation, improve work
Efficiency.
Embodiments described above, the restriction to the technical scheme protection domain is not formed.It is any in above-mentioned implementation
Modifications, equivalent substitutions and improvements made within the spirit and principle of mode etc., should be included in the protection model of the technical scheme
Within enclosing.
Claims (10)
- A kind of 1. full-automatic probe station, it is characterised in that including：Frame (1)；In frame (1), for carrying part to be measured and adjusting work of the part to be measured relative to the position of the frame (1) Make platform (2)；In the frame (1), for carrying out the test device (3) of continuity test to the component on the part to be measured；In the frame (1) and positioned at the test device (3) side, for shooting the real time picture of the part to be measured The camera device (4) of information；In the frame (1) and positioned at the test device (3) opposite side, do not conformed to by being moistened with the line of ink marker of ink The identity device (5) of identification point is beaten on the component of lattice；AndBe electrically connected to the workbench (2), the test device (3), the camera device (4) and the identity device (5), Judge whether the component is qualified according to the result of the continuity test, according to real time picture information generation not The location coordinate information of the qualified component, according to the location coordinate information control the workbench (2) action with The position of the underproof component is adjusted until corresponding with the identity device (5), controls the identity device (5) control processor that point action is known in the mark is carried out.
- 2. full-automatic probe station according to claim 1, it is characterised in that the identity device (5) includes：For loading the ink fountain (51) of the ink, the line of ink marker is arranged in the ink and the ink is stretched out at the line of ink marker both ends Struggle against (51)；Syringe needle side, being stretched out when beating identification point for the line of ink marker of the component is closed on located at the ink fountain (51) (52)；Be fixed on the line of ink marker relative to the syringe needle (52) one end, drive the line of ink marker mobile relative to the ink fountain (51) To stretch out identification point is beaten in the end of the syringe needle (52) on the underproof component and institute by the line of ink marker State the actuator (53) of control processor electrical connection；AndMounting seat (54) being installed on the frame (1), being installed for the ink fountain (51) and the actuator (53).
- 3. full-automatic probe station according to claim 1, it is characterised in that the test device (3) includes：Some probes (31), the probe (31) include：Shank (311), located at the shank (311) one end, with it is to be detected Part contacts probe portion (312) to be detected, and, located at the shank (311) relative to the probe portion (312) The bending section (313) of setting is bent between one end and described shank (311)；It is being abutted against provided with jack the, lateral surface for the bending section (313) insertion with the shank (311), be connected with survey Try the conducting rod (32) of power supply；AndWith the conducting rod (32) slidingtype assembling, medial surface can abut against with the shank (311), for being led with described Electric pole (32) grips the sliding component (33) of the shank (311).
- 4. full-automatic probe station according to claim 1, it is characterised in that the full-automatic probe station also includes：Two components are located at the frame (1) both sides, handling equipment (6) for conveying the part to be measured one by one；AndWith described in progress between handling equipment (6) described in two groups, the conveying part to be measured to the workbench (2) Continuity test processing and it is described beat identification point processing, the part to be measured output on the workbench (2) is described to collect The material transfering device (7) of part to be measured.
- 5. full-automatic probe station according to claim 4, it is characterised in that the handling equipment (6) includes：Placement platform (61) in the frame (1), when being acted on by external force to be lifted relative to the frame (1)；For stacking the part to be measured and the placement platform (61) detachable assembling magazine (62)；Driving being electrically connected with the control processor, driving the placement platform (61) to be lifted relative to the frame (1) Component (64)；AndIt is on the placement platform (61), when the magazine (62) is assemblied in the placement platform (61) by the magazine (62) extrude to finish the inductive component (63) of information to magazine (62) assembling of control processor feedback.
- 6. full-automatic probe station according to claim 4, it is characterised in that the material transfering device (7) includes：It is fixed in the frame (1) and turns material guide rail (71)；Slidingtype be assemblied in it is described turn material guide rail (71), travel to and fro between each station of the full-automatic probe station between treated with transfer The manipulator (72) of part is surveyed, the manipulator (72) includes：Some supporting plates (721) for part to be measured described in support, and, Some protrusions be arranged at it is on the supporting plate (721), when the part to be measured is positioned on the supporting plate (721) to limit The part to be measured is relative to the mobile spacing pin bank (722) of the supporting plate (721)；AndIt is in the frame (1), drive the manipulator (72) reciprocating dynamic relative to described turn of material guide rail (71) Power component (73).
- 7. full-automatic probe station according to claim 1, it is characterised in that the frame (1) includes：First table top (11) And with spaced apart second table top (12) of first table top (11)；Workbench (2) slidingtype is assemblied in described One table top (11) and between first table top (11) and second table top (12), is positioned on the workbench (2) The part to be measured by the workbench (2) adsorb fix.
- 8. full-automatic probe station according to claim 7, it is characterised in that the full-automatic probe station also includes：Set In it is in the frame (1), when the workbench (2) for being placed with the part to be measured is moved to a specified location by the control The part to be measured is pressed in the material pressing device (8) on the workbench (2) by processor control processed.
- 9. full-automatic probe station according to claim 8, it is characterised in that the material pressing device (8) includes：Fixing assembling is in the installed part (81) of the frame (1) side；With the installed part (81) fixing assembling, by the control processor control power source component (82)；AndDriven by the power source component (82) and press on the part to be measured so that the part to be measured is pressed in into the workbench (2) the elastic press part (83) on.
- 10. full-automatic probe station according to claim 1, it is characterised in that the workbench (2) is provided with the ink Automated cleaning is carried out to the product ink with the close identity device (5) when the end for being used to beat identification point of line remains long-pending black Cleaning device (9).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721179811.8U CN207181558U (en) | 2017-09-13 | 2017-09-13 | Full-automatic probe station |
| TW107212353U TWM574688U (en) | 2017-09-13 | 2018-09-10 | Fully automatic probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721179811.8U CN207181558U (en) | 2017-09-13 | 2017-09-13 | Full-automatic probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207181558U true CN207181558U (en) | 2018-04-03 |
Family
ID=61747447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721179811.8U Active CN207181558U (en) | 2017-09-13 | 2017-09-13 | Full-automatic probe station |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN207181558U (en) |
| TW (1) | TWM574688U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109782103A (en) * | 2019-03-11 | 2019-05-21 | 潘元志 | The alignment methods and system of probe and pin of electronic device |
| CN112630269A (en) * | 2020-12-29 | 2021-04-09 | 国家烟草质量监督检验中心 | Device for comprehensively detecting bead blasting defects and compression strength of bead blasting filter stick or bead blasting cigarette |
| WO2021088329A1 (en) * | 2019-11-06 | 2021-05-14 | 南京协辰电子科技有限公司 | Test marking apparatus and test device |
| CN112903022A (en) * | 2021-02-04 | 2021-06-04 | 上海泽丰半导体科技有限公司 | Probe test system, operation method and detection method thereof |
| CN113267656A (en) * | 2021-06-28 | 2021-08-17 | 歌尔科技有限公司 | Test equipment |
| CN113970690A (en) * | 2020-07-23 | 2022-01-25 | 无锡新微阳科技有限公司 | Probe station for wafer test |
| CN117699432A (en) * | 2024-02-06 | 2024-03-15 | 深圳市标谱半导体股份有限公司 | Probe station and feeding and discharging method of probe station |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11940486B2 (en) | 2022-06-01 | 2024-03-26 | Nanya Technology Corporation | Probe station capable of maintaining stable and accurate contact to device under test |
-
2017
- 2017-09-13 CN CN201721179811.8U patent/CN207181558U/en active Active
-
2018
- 2018-09-10 TW TW107212353U patent/TWM574688U/en unknown
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109782103A (en) * | 2019-03-11 | 2019-05-21 | 潘元志 | The alignment methods and system of probe and pin of electronic device |
| CN109782103B (en) * | 2019-03-11 | 2021-07-30 | 镇江宏祥自动化科技有限公司 | Alignment method and system for probe and electronic device pin |
| WO2021088329A1 (en) * | 2019-11-06 | 2021-05-14 | 南京协辰电子科技有限公司 | Test marking apparatus and test device |
| CN113970690A (en) * | 2020-07-23 | 2022-01-25 | 无锡新微阳科技有限公司 | Probe station for wafer test |
| CN112630269A (en) * | 2020-12-29 | 2021-04-09 | 国家烟草质量监督检验中心 | Device for comprehensively detecting bead blasting defects and compression strength of bead blasting filter stick or bead blasting cigarette |
| CN112903022A (en) * | 2021-02-04 | 2021-06-04 | 上海泽丰半导体科技有限公司 | Probe test system, operation method and detection method thereof |
| CN113267656A (en) * | 2021-06-28 | 2021-08-17 | 歌尔科技有限公司 | Test equipment |
| CN117699432A (en) * | 2024-02-06 | 2024-03-15 | 深圳市标谱半导体股份有限公司 | Probe station and feeding and discharging method of probe station |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM574688U (en) | 2019-02-21 |
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Address after: Longgang District of Shenzhen City, Guangdong province 518172 city street in the center city City Industrial Park Road No. 3 building E Tefalongfei business building two floor Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd Address before: Longgang District of Shenzhen City, Guangdong province 518172 city street in the center city City Industrial Park Road No. 3 building E Tefalongfei business building two floor Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |