CN207163401U - Moving component multi-parameter detecting system based on combinatorial surface type standard - Google Patents
Moving component multi-parameter detecting system based on combinatorial surface type standard Download PDFInfo
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- CN207163401U CN207163401U CN201720618823.XU CN201720618823U CN207163401U CN 207163401 U CN207163401 U CN 207163401U CN 201720618823 U CN201720618823 U CN 201720618823U CN 207163401 U CN207163401 U CN 207163401U
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- moving component
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Abstract
The utility model discloses a kind of moving component multi-parameter detecting system based on combinatorial surface type standard, including optical measuring head and combinatorial surface type standard, curved array and planar array are provided with combinatorial surface type standard, optical measuring head includes laser, aperture diaphragm, speculum, Amici prism, imaging len, CCD camera and data processing module, the collimated light beam via hole diameter diaphragm that laser is sent shortens thin collimated optical beam into, thin collimated optical beam is incided in Amici prism after speculum, the reflected beams of 1/2 energy project any point on curved array and planar array, the light beam of the point reflection is after Amici prism transmits, it is imaged on by imaging len in CCD camera, data processing module is according to the position of hot spot in CCD camera, calculate the multiple parameters for obtaining moving component.The utility model one-shot measurement can obtain the quadrinomial parameter of moving component simultaneously, and efficiency high, precision is high, simple to operate.
Description
Technical field
A kind of moving component multi-parameter detecting system is the utility model is related to, particularly one kind is based on combinatorial surface type standard
Moving component multi-parameter detecting system.
Background technology
In machine tool error detection field, there are laser interferometer and club using relatively broad machine tool error detecting instrument
Instrument, due to the factor on itself Cleaning Principle, these instruments exist respective in the error-detecting applied to multi-axis NC Machine Tools
Deficiency：Such as laser interferometer adjustment complexity, one-shot measurement can only obtain a parameter, and operation requires high, it is difficult to which realization is automatically
Change, be rapid and expensive, general enterprises do not possess；Ball bar can not random planning survey path, to rotate axis error
The measuring process design of identification and theoretical decoupling algorithm research add difficulty, and ball bar coordinates precision ball to carry out with magnet base
Contact type measurement, it is necessary to move to ensure measurement accuracy, it is difficult to adapt to rapid trend under the low speed.One dimension spherical column is adapted to each axle
Straight line demarcation, but do not have advantage to angle error-detecting, and the relative error between each axle of gang tool is to machining accuracy shadow
Sound is very big.
For the processing of complicated abnormal shape part, multiaxis NC maching technology by its it is flexible, efficient, high-precision the characteristics of obtain
Extensive use and popularization, to meet the needs of regular precision calibration, efficient machine tool error detection just turns into discrimination method
Urgent problem to be solved.
The geometric error detection project of multi-axis NC Machine Tools mainly includes the angular error, position error, straight line of kinematic axis
Error and the error of perpendicularity etc. are spent, in order to detect the above-mentioned margin of error of kinematic axis, it is desirable to provide a kind of kinematic axis multi-parameter detection
System, the system should be simple to operate, and detection efficiency is high.
The content of the invention
The utility model provides one kind for technical problem present in solution known technology and is based on combinatorial surface type standard
Moving component multi-parameter detecting system, the system operatio is simple, and detection efficiency is high.
The utility model is adopted the technical scheme that to solve technical problem present in known technology：One kind is based on group
The moving component multi-parameter detecting system of conjunction face type standard, including optical measuring head on moving component and fix flat
Combinatorial surface type standard on platform, moving component are set along Z axis, and platform is vertical with Z axis, are set on the combinatorial surface type standard
There are curved array and planar array, moving component is located at the top of the combinatorial surface type standard；The optical measuring head includes swashing
Light device, aperture diaphragm, speculum, Amici prism, imaging len, CCD camera and data processing module, the laser are sent
Collimated light beam shorten thin collimated optical beam into through the aperture diaphragm, thin collimated optical beam incides the Amici prism after the speculum
In, the reflected beams of 1/2 energy project any point on curved array and planar array, described in the light beam warp of the point reflection
After Amici prism transmission, it is imaged on by the imaging len in the CCD camera, the data processing module is according to
The position of hot spot in CCD camera, calculate the multiple parameters for obtaining moving component.
The utility model has the advantages and positive effects of：Based on optical surface manufacturing technology, using optical touchless
Curved array and planar array, one-shot measurement on gauge head measurement combinatorial surface type standard can obtain 4 parameters, be done compared to laser
Interferometer, detection efficiency is drastically increased, it is simple to operate；Combinatorial surface type standard can be spliced according to actual measurement needs,
With wider detection range；With the development of free form surface manufacturing technology, face type machining accuracy is adopted up to Nano grade
Machine tool error is detected with combinatorial surface type standard, there is higher Precision Potential, periodically carried out especially suitable for needs such as lathes
The multiple axes system of error-detecting.
Brief description of the drawings：
Fig. 1 is structural representation of the present utility model；
Fig. 2 is index path of the present utility model.
In figure：1st, optical measuring head；1-1, laser；1-2, aperture diaphragm；1-3, speculum；1-4, Amici prism；1-5、
Imaging len；1-6, CCD camera；2nd, combinatorial surface type standard, 2-1, curved surface, 2-2 planes.
Embodiment：
For invention, features and effects of the present utility model can be further appreciated that, following examples are hereby enumerated, and coordinate
Accompanying drawing describes in detail as follows：
Refer to Fig. 1 and Fig. 2, a kind of moving component multi-parameter detecting system based on combinatorial surface type standard, including peace
The combinatorial surface type standard 2 of optical measuring head 1 and fixing on platform on moving component, moving component is set along Z axis, is put down
Platform is vertical with Z axis, is provided with curved surface 2-1 arrays on the combinatorial surface type standard 2 and plane 2-2 arrays, moving component are located at
The top of the combinatorial surface type standard 2.
The optical measuring head 1 includes laser 1-1, aperture diaphragm 1-2, speculum 1-3, Amici prism 1-4, imaging len
1-5, CCD camera 1-6 and data processing module, the collimated light beam that the laser 1-1 is sent contract through the aperture diaphragm 1-2
Into thin collimated optical beam, thin collimated optical beam is incided after the speculum 1-3 in the Amici prism 1-4, the reflected beams of 1/2 energy
Any point on curved array and planar array is projected, the light beam of the point reflection leads to after Amici prism 1-4 transmissions
Cross the imaging len 1-5 to be imaged on the CCD camera 1-6, the data processing module is according in the CCD camera 1-6
The position of hot spot, calculate the multiple parameters for obtaining moving component.
Comprise the following steps that：
1) optical axis 1-6 in the CCD camera of the optical measuring head 1 position coordinates O (x are drawn by demarcation0, y0),
Adjust the light beam of the optical measuring head 1 and curved surface 2-1 center lines and plane 2-2 normals on the combinatorial surface type standard 2
It is parallel；
2) moving component drives optical measuring head 1 to move to curved surface 2-1 arrays first position A in left-right directionIPlace, it is now bent
Corresponding measurement point is A on the 2-1 arrays of face1(x1, y1, z1), the data processing module is followed the steps below at data
Reason：
2.1) imaging facula center position coordinates A in CCD camera is obtained1′(x1', y1′)；
2.2) by the spot center position coordinates A in step 2.1)1′(x1', y1') spot center is converted to apart from optical axis
Distance S1x、S1y；
2.3) measurement point A is calculated1Angle corresponding to slope：
ξx=arctan (s1x/f)/2 (1)
ξy=arctan (s1y/f)/2 (2)
Wherein：ξxRepresent measurement point A1The angle of tangent line and X-direction in XOZ planes；
ξyRepresent measurement point A1The angle of tangent line and Y direction in YOZ planes；
F represents the focal length of imaging len；
2.4) measurement point A is calculated1(x1, y1, z1) coordinate：
x1=g (ξx) (3)
y1=g (ξy) (4)
Wherein：G (x) represents function of a single variable.
3) moving component drives optical measuring head to move to second place A on curved surface 2-1 arrays in left-right directionIIPlace, now
Measurement point corresponding on curved array 2-1 is A2(x2, y2, z2), the same step 2 of data handling procedure, measurement point A2(x2, y2, z2)
Coordinate be：
x2=g (φx) (5)
y2=g (φy) (6)
Wherein：ΦxRepresent measurement point A2The angle of tangent line and X-direction in XOZ planes；
ΦyRepresent measurement point A2The angle of tangent line and Y direction in YOZ planes.
4) data processing module calculates displacement of the moving component in X, Y both direction：
M=g (φx)-g(ξx)+P (7)
N=g (φy)-g(ξy)+Q (8)
Wherein：M represents displacement of the moving component in X-direction；
N represents the displacement of moving component in the Y direction；
P represents distance of the center line in X-direction of i-th of curved surface and j-th of curved surface；
Q represents the distance of the center line of i-th of curved surface and j-th of curved surface in the Y direction.
5) moving component drives the 3rd position A that optical measuring head moves in planar array in left-right directionIIIPlace, now
Corresponding measurement point is A on plane 2-2 arrays3(x3, y3, z3), moving component is ε around the corner of X, Y both directionx、εy, it is described
Data processing module follows the steps below data processing：
5.1) the position A of imaging facula in CCD camera 1-6 is obtained3′(x3', y3′)；
5.2) by the spot center position coordinates A in step 5.1)3′(x3', y3') spot center is converted to apart from optical axis
Distance S3x、S3y；
5.3) moving component is calculated in position AIIITwo corners at place：
εx=arctan (s3x/f)/2 (9)
εy=arctan (s3y/f)/2 (10)
Wherein：εxMoving component is represented in position AIIICorner of the place around X-axis；
εyMoving component is represented in position AIIICorner of the place around Y-axis；
F represents the focal length of imaging len.
The utility model is using the optical measuring head 1 and the combinatorial surface type standard 2 measurement moving component in X, Y two
Displacement on direction and the corner around X, Y both direction.
Application example of the present utility model：
Optical measuring head 1 in demarcation state is arranged on the Z axis of lathe, combinatorial surface type standard is fixed in workbench
On, paraboloid of revolution array and planar array are set on combinatorial surface type standard, measured using following steps：
1) position coordinates O (x of the optical axis of the optical measuring head in the CCD camera is drawn by demarcation0, y0), make institute
The light beam for stating optical measuring head is parallel with machine Z-axis；
2) machine Z-axis drives optical measuring head to be moved horizontally to the first position A on paraboloid of revolution arrayI, now rotate
Corresponding measurement point is A on parabola array1(x1, y1, z1), obtain the position A of now imaging facula in CCD camera1′(x1',
y1'), and be converted to distance S of the spot center apart from optical axis1x、S1y, then calculate measurement point A1Angle corresponding to slope：
ξx=arctan (s1x/f)/2 (11)
ξy=arctan (s1y/f)/2 (12)
Wherein：ξxRepresent measurement point A1The angle of tangent line and X-direction in XOZ planes；
ξyRepresent measurement point A1The angle of tangent line and Y direction in YOZ planes；
S1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point；
S 1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point；
F represents the focal length of imaging len,
Finally calculate measurement point A1Coordinate：
The face type formula of the ∵ paraboloids of revolution is：
Wherein：a2For the characteristic parameter of the paraboloid of revolution；
First derivative is asked to (13) formula, can obtain the slope of any point on curved surface is：
∴
x1=a2tanξx (16)
y1=a2tanξy (17)
Wherein：S1xRepresent imaging facula A1' center X-direction system of distance optical axis distance；
S1yRepresent imaging facula A1' center Y direction system of distance optical axis distance；
3) machine Z-axis drives optical measuring head to be moved horizontally to second place A on paraboloid of revolution arrayII, now rotation throwing
Corresponding measurement point is A on object plane array2(x2, y2, z2), obtain the position A of now imaging facula in CCD camera2′(x2',
y2′)；
Measurement point A can be calculated with step 22Coordinate：
x2=a2tanφx (18)
y2=a2tanφy (19)
4) displacement M, the N of machine Z-axis in X, Y both direction are calculated：
M=a2tanφx-a2tanξx+P (20)
N=a2tanφy-a2tanξy+Q (21)
Wherein：M represents displacement of the Z axis in X-direction；
N represents the displacement of Z axis in the Y direction；
P represents distance of the center line in X-direction of i-th of curved surface and j-th of curved surface；
Q represents the distance of the center line of i-th of curved surface and j-th of curved surface in the Y direction.
5) machine Z-axis drives the 3rd position A that optical measuring head moves in planar array in left-right directionIIIPlace, now puts down
Corresponding measurement point is A on the array of face3(x3, y3, z3), machine Z-axis is ε around the corner of X, Y both directionx、εy, obtain now
The position A of imaging facula in CCD camera3′(x3', y3′)；Machine Z-axis is calculated in position AIIITwo corners at place：
εx=arctan (s3x/f)/2 (22)
εy=arctan (s3y/f)/2 (23)
Wherein：εxZ axis is represented in position AIIICorner of the place around X-axis；
εyZ axis is represented in position AIIICorner of the place around Y-axis；
F represents the focal length of imaging len.
Operation principle of the present utility model is：
Such as Fig. 2, when projecting any point on curved surface with the light beam of paraboloid of revolution centerline axis parallel, removed on curved surface
At vertex position there is angle in the tangent line of each point with XOY plane, and the angle value at diverse location is different, therefore different measurement points
Position in CCD camera is different, i.e., there is one-to-one relation the position of hot spot in the coordinate points and CCD camera on curved surface,
Therefore the coordinate put on the paraboloid of revolution can be obtained according to the position of hot spot, and then obtains the moving component for carrying optical measuring head
Displacement in X, Y both direction.
Similarly, for plane, it can be seen from the reflection law of light, when incidence angle changes, reflection light is relative to combination
The angle of face type standard can change, therefore the position of imaging facula can change in CCD camera, according in CCD camera
Facula position changes in coordinates can ask for corner of the moving component around X, Y both direction.
Although preferred embodiment of the present utility model is described above in conjunction with accompanying drawing, the utility model is not
Above-mentioned embodiment is confined to, above-mentioned embodiment is only schematical, is not restricted, ability
The those of ordinary skill in domain is not departing from the utility model aims and claimed under enlightenment of the present utility model
In the case of scope, many forms can also be made, these are belonged within the scope of protection of the utility model.
Claims (1)
1. a kind of moving component multi-parameter detecting system based on combinatorial surface type standard, it is characterised in that including installed in fortune
The combinatorial surface type standard of optical measuring head and fixing on platform on dynamic component, moving component are set along Z axis, platform and Z axis
Vertically, curved array and planar array are provided with the combinatorial surface type standard, moving component is located at the combinatorial surface type base
The top of quasi- part；
The optical measuring head includes laser, aperture diaphragm, speculum, Amici prism, imaging len, CCD camera and data
Processing module, the collimated light beam that the laser is sent shorten thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is through described anti-
Incided after penetrating mirror in the Amici prism, the reflected beams of 1/2 energy project any on curved array and planar array
A bit, the light beam of the point reflection is imaged in the CCD camera after Amici prism transmission by the imaging len,
The data processing module calculates the multiple parameters for obtaining moving component according to the position of hot spot in the CCD camera.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781002A (en) * | 2019-01-31 | 2019-05-21 | 浙江省计量科学研究院 | A kind of lathe holoaxial journey accurate positioning method based on machine vision |
| CN112526489A (en) * | 2020-12-21 | 2021-03-19 | 江苏亮点光电科技有限公司 | Optical axis calibration system and method of laser range finder and laser parameter measurement method |
| CN112539697A (en) * | 2020-07-14 | 2021-03-23 | 深圳中科飞测科技股份有限公司 | Light-emitting device and light spot adjusting method and detection equipment thereof |
| CN117760339A (en) * | 2024-02-22 | 2024-03-26 | 广东熠日照明科技有限公司 | Sensor array-based optical measurement equipment and method thereof |
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2017
- 2017-05-31 CN CN201720618823.XU patent/CN207163401U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781002A (en) * | 2019-01-31 | 2019-05-21 | 浙江省计量科学研究院 | A kind of lathe holoaxial journey accurate positioning method based on machine vision |
| CN112539697A (en) * | 2020-07-14 | 2021-03-23 | 深圳中科飞测科技股份有限公司 | Light-emitting device and light spot adjusting method and detection equipment thereof |
| CN112526489A (en) * | 2020-12-21 | 2021-03-19 | 江苏亮点光电科技有限公司 | Optical axis calibration system and method of laser range finder and laser parameter measurement method |
| CN112526489B (en) * | 2020-12-21 | 2023-11-21 | 江苏亮点光电科技有限公司 | Optical axis calibration system and method of laser range finder and laser parameter measurement method |
| CN117760339A (en) * | 2024-02-22 | 2024-03-26 | 广东熠日照明科技有限公司 | Sensor array-based optical measurement equipment and method thereof |
| CN117760339B (en) * | 2024-02-22 | 2024-05-07 | 广东熠日照明科技有限公司 | Method for measuring beam angle and floodlight angle |
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Granted publication date: 20180330 Termination date: 20210531 |