CN207158703U - Cantilevered silicon chip carbon frame support plate jacking system - Google Patents
Cantilevered silicon chip carbon frame support plate jacking system Download PDFInfo
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- CN207158703U CN207158703U CN201721142228.XU CN201721142228U CN207158703U CN 207158703 U CN207158703 U CN 207158703U CN 201721142228 U CN201721142228 U CN 201721142228U CN 207158703 U CN207158703 U CN 207158703U
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- support plate
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- lifting
- silicon chip
- carbon frame
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
A kind of cantilevered silicon chip carbon frame support plate jacking system is the utility model is related to, hoistable platform includes carrying platform and lifting support frame, and lifting support frame is arranged at below the carrying platform；Carrying platform is made up of the connection of some light type aluminium section assemblings；Lifting support frame is welded to connect by some rectangular tubes and formed, including cross reinforcing rib framework and support inclined tube；Y-axis lifting module includes leading screw, vertical driving servomotor and lifting sliding table, hoistable platform and is slidedly arranged on along the side of X-axis by leading screw in lifting sliding table；X-axis horizontal transport module includes horizontal conveying belt and horizontal drive servomotor, is provided with sensors in place by the horizontal conveying belt of one or both sides, carbon frame support plate output is provided with stop cylinder.The utility model can realize the steady automation high-low-position transition of carbon frame support plate, and silicon chip can be effectively protected in transfer process, ensure the continuity of integrated artistic, shorten technological process, improve operating efficiency.
Description
Technical field
It the utility model is related to a kind of jacking system, and in particular to a kind of cantilevered silicon chip for board-like PECVD device
Carbon frame support plate jacking system, belongs to silicon chip production automation equipment technical field.
Background technology
In order to improve the efficiency of crystal-silicon solar cell, it usually needs reduce the reflection of solar battery surface, it is also necessary to right
Silicon chip surface is passivated processing, to reduce compound action of the surface defect for minority carrier.Board-like PECVD system will
Multi-disc silicon chip is placed in a graphite or carbon fiber support (carbon frame support plate), is put into SiNx in the main technique machines of board-like PECVD
Molecule deposition is to silicon chip surface, and SiNx films are prepared in starting upper silicon surface to passivation, to reduce surface to the anti-of visible ray
Penetrate.
The carbon frame support plate of fully loaded silicon chip by pecvd process processing need to shift after main technique machine transfers out from low level
To the sucker handling arm automatic upper and lower film station of a high position, the silicon chip after processing is picked up by manipulator, then unprocessed wafer is turned
Move to unloaded carbon frame support plate.Existing way is artificial transfer carbon frame, is wasted time and energy, speed is slow, and operating efficiency is low, and is manually removing
Easily silicon chip damages caused by vibrations during fortune.
Utility model content
In view of the above-mentioned problems existing in the prior art, the applicant is studied and improved, there is provided a kind of cantilevered silicon chip
Carbon frame support plate jacking system, the system can realize the steady automation transition of carbon frame support plate high-low-position, can have in transfer process
Effect protection silicon chip, ensures the continuity of integrated artistic, shortens technological process, improve operating efficiency.
In order to solve the above problems, the utility model uses following scheme：
Cantilevered silicon chip carbon frame support plate jacking system, including hoistable platform, Y-axis lifting module and X-axis horizontal transport module；
The hoistable platform includes carrying platform and lifting support frame, and the lifting support frame is arranged at below the carrying platform；Institute
Carrying platform is stated to be made up of the connection of some light type aluminium section assemblings；The lifting support frame is welded to connect group by some rectangular tubes
Into, including cross reinforcing rib framework and be arranged at below the cross reinforcing rib framework a pair of support inclined tubes；
Y-axis lifting module includes leading screw, vertical driving servomotor and lifting sliding table, and the hoistable platform is along X-axis
Side be slidedly arranged on by the leading screw in the lifting sliding table, the vertical driving servomotor drives the leading screw and driven
The hoistable platform carries out lifting action in the lifting sliding table along Y-axis；
The X-axis horizontal transport module includes horizontal conveying belt and horizontal drive servomotor, the horizontal conveying belt point
Not Wei Yu both sides of the carrying platform along X-axis, be provided with sensors in place, carbon frame load described in one or both sides by horizontal conveying belt
Plate output is provided with stop cylinder along Z-direction, for limiting carbon frame support plate position.
Preferably, the rectangular tube material is q235 steel, specification is：40mm × 40mm, thickness 4mm.
Preferably, the carrying platform is set by three along Z axis and two light-duty aluminium section bars set along X-axis
Assembly connection composition.
Specifically, the system also includes PLC, itself and the vertical driving servomotor, the horizontal drive
Servomotor, the stop cylinder and sensors in place interlocking.
Specifically, in low level, the horizontal conveying belt conveyor surface is concordant with the conveyer belt before input, in a high position,
The horizontal conveying belt conveyor surface is concordant with the conveyer belt after output end.
It is of the present utility model to have technical effect that：
The utility model is turned specifically for the high-low-position transfering process of carbon frame support plate in board-like PECVD system with automation
Move and substitute artificial mode of transport, module is lifted with Y-axis using carbon frame hoistable platform and X-axis horizontal transport module is engaged, very well
Ground, which has been connected from main technique machine, to be output into sucker handling arm fluctuating plate two stages of station, one-in-and-one-out, ensure that entirety
The continuity of technique, shortens technological process, and operating efficiency greatly improved；Carrying platform uses light-duty aluminium profiles tubing matter, weight
Amount is light and handy, and rigidity is good, and lifting support frame (including cross reinforcing rib framework and a pair of support inclined tubes) is using some rectangular tubes through weldering
Connect and form, intensity is big, is unlikely to deform, and effectively reduces the caused vibrations in lifting process of carbon frame, stability is good, avoids silicon
Piece is damaged, and makes silicon chip smooth transfer；Gather, occupy little space using the support of unilateral cantilevered and lifting structure, structure section.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the present embodiment cantilevered silicon chip carbon frame support plate jacking system.
Fig. 2 is the positive structure diagram of the present embodiment cantilevered silicon chip carbon frame support plate jacking system.
Fig. 3 is the side structure schematic view of the present embodiment cantilevered silicon chip carbon frame support plate jacking system.
Fig. 4 is the overlooking the structure diagram of the present embodiment cantilevered silicon chip carbon frame support plate jacking system.
Fig. 5 is stop cylinder schematic diagram in the present embodiment cantilevered silicon chip carbon frame support plate jacking system.
In figure：1st, carrying platform；2nd, lifting support frame；3rd, cross reinforcing rib framework；4th, inclined tube is supported；5th, leading screw；6th, erect
Straight driving servomotor；7th, lifting sliding table；8th, horizontal conveying belt；9th, horizontal drive servomotor；10th, stop cylinder；11st, in place
Sensor；12nd, carbon frame support plate；A, carbon frame input；B, carbon frame output end.
Embodiment
Specific embodiment of the present utility model is described further below in conjunction with the accompanying drawings.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4 and Fig. 5, the present embodiment cantilevered silicon chip carbon frame support plate jacking system includes lifting
Platform, Y-axis lifting module and X-axis horizontal transport module, hoistable platform include carrying platform 1 and lifting support frame 2, lifting support
Frame 2 is fixedly installed on the lower section of carrying platform 1；Carrying platform 1 is set by three along Z axis and two light type aluminiums set along X-axis
Section assembling connection composition；Lifting support frame 2 is by some rectangular tubes (q235 steel, specification：40mm × 40mm, thickness 4mm) welding
Connection composition, including a cross reinforcing rib framework 3 and a pair of support inclined tubes 4 for being fixedly arranged on the lower section of cross reinforcing rib framework 3；
Y-axis lifting module includes leading screw 5, vertical driving servomotor 6 and lifting sliding table 7, hoistable platform and passes through leading screw along the side of X-axis
5 are slidedly arranged in lifting sliding table 7, vertical to drive servomotor 6 to drive leading screw 5 and drive hoistable platform 7 in lifting sliding table 7 along Y
Axle carries out lifting action；X-axis horizontal transport module includes two groups of horizontal conveying belts 8 and horizontal drive servomotor 9, horizontal feed
It is located at both sides of the carrying platform 1 along X-axis respectively with 8, the wherein side of side horizontal conveying belt 8 is provided with sensors in place 11, carbon frame
Stop cylinder 10 is provided with along Z-direction at output end B, for limiting carbon frame support plate position.In low level, horizontal conveying belt 8
Conveyor surface is concordant with the conveyer belt before carbon frame input A, in a high position, after the conveyor surface of horizontal conveying belt 8 and carbon frame output end B
Conveyer belt is concordant.
The present embodiment system also includes PLC, it is with vertical driving servomotor 6, horizontal drive servomotor 9,
Stop cylinder 10 and sensors in place 11 interlock, to realize Automated condtrol.
The specific work process of the present embodiment cantilevered silicon chip carbon frame support plate jacking system is as follows：
The carbon frame support plate 12 of the fully loaded silicon chip exported from pecvd process processor is delivered to carbon frame input through conveyer belt
At A, in smooth transition to horizontal conveying belt 8, continue to be sent to certain distance, sensors in place 11 detects carbon frame support plate 12 and arrived
Position, instruction horizontal drive servomotor 9 are closed, and horizontal conveying belt 8 is out of service, while indicates that stop cylinder 10 carries out stop limit
Position, then indicate to drive servomotor 6 to drive leading screw 5 to drive hoistable platform in lifting sliding table 7 along Y-axis to rise vertically, pass in place
Sensor 11 detect in place (to at the conveyer belt flush position after carbon frame output end B), indicate that vertical driving servomotor 6 closes
Close, while indicate that horizontal drive servomotor 9 reopens, horizontal conveying belt 8 brings into operation and by carbon frame support plate 12 by carbon frame
Output end B is exported, and on the conveyer belt after smooth transition to carbon frame output end B, into sucker handling arm upper piece bottom sheet station, sheet
Embodiment system reset.
The utility model is turned specifically for the high-low-position transfering process of carbon frame support plate in board-like PECVD system with automation
Move and substitute artificial mode of transport, module is lifted with Y-axis using carbon frame hoistable platform and X-axis horizontal transport module is engaged, very well
Ground, which has been connected from main technique machine, to be output into sucker handling arm fluctuating plate two stages of station, one-in-and-one-out, ensure that entirety
The continuity of technique, shortens technological process, and operating efficiency greatly improved；Carrying platform uses light-duty aluminium profiles tubing matter, weight
Amount is light and handy, and rigidity is good, and lifting support frame (including cross reinforcing rib framework and a pair of support inclined tubes) is using some rectangular tubes through weldering
Connect and form, intensity is big, is unlikely to deform, and effectively reduces the caused vibrations in lifting process of carbon frame, stability is good, avoids silicon
Piece is damaged, and makes silicon chip smooth transfer；Gather, occupy little space using the support of unilateral cantilevered and lifting structure, structure section.
Embodiment provided above is better embodiment of the present utility model, is only used for convenient explanation the utility model, and
It is non-to make any formal limitation, any those of ordinary skill in the art to the utility model, if not departing from
In the range of the utility model carries technical characteristic, locally change or repair using made by the utility model disclosed technology content
The equivalent embodiment of decorations, and without departing from the technical characteristics of the utility model content, still fall within the utility model technical characteristic
In the range of.
Claims (5)
1. cantilevered silicon chip carbon frame support plate jacking system, including hoistable platform, Y-axis lifting module and X-axis horizontal transport module, its
It is characterised by：
The hoistable platform includes carrying platform and lifting support frame, and the lifting support frame is arranged under the carrying platform
Side；The carrying platform is made up of the connection of some light type aluminium section assemblings；The lifting support frame is welded by some rectangular tubes to be connected
Connect composition, including cross reinforcing rib framework and a pair of support inclined tubes being arranged at below the cross reinforcing rib framework；
Y-axis lifting module includes leading screw, vertical driving servomotor and lifting sliding table, and the hoistable platform is along the one of X-axis
Side is slidedly arranged in the lifting sliding table by the leading screw, and the vertical driving servomotor is driven described in the leading screw and drive
Hoistable platform carries out lifting action in the lifting sliding table along Y-axis；
The X-axis horizontal transport module includes horizontal conveying belt and horizontal drive servomotor, and the horizontal conveying belt distinguishes position
Sensors in place is provided with by both sides of the carrying platform along X-axis, horizontal conveying belt described in one or both sides, carbon frame support plate is defeated
Go out at end and be provided with stop cylinder along Z-direction, for limiting carbon frame support plate position.
2. cantilevered silicon chip carbon frame support plate jacking system as claimed in claim 1, it is characterised in that：The rectangular tube material is
Q235 steel, specification are：40mm × 40mm, thickness 4mm.
3. cantilevered silicon chip carbon frame support plate jacking system as claimed in claim 1, it is characterised in that：The carrying platform is by three
Root is set along Z axis and two light type aluminium section assemblings set along X-axis connect composition.
4. cantilevered silicon chip carbon frame support plate jacking system as claimed in claim 1, it is characterised in that：The system also includes
PLC, it is with the vertical driving servomotor, the horizontal drive servomotor, the stop cylinder and described arrives
Level sensor interlocks.
5. cantilevered silicon chip carbon frame support plate jacking system as claimed in claim 1, it is characterised in that：In low level, the water
Flat conveyer belt conveyor surface is concordant with the conveyer belt before input, in a high position, after the horizontal conveying belt conveyor surface and output end
Conveyer belt it is concordant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721142228.XU CN207158703U (en) | 2017-09-06 | 2017-09-06 | Cantilevered silicon chip carbon frame support plate jacking system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721142228.XU CN207158703U (en) | 2017-09-06 | 2017-09-06 | Cantilevered silicon chip carbon frame support plate jacking system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207158703U true CN207158703U (en) | 2018-03-30 |
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ID=61720764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721142228.XU Active CN207158703U (en) | 2017-09-06 | 2017-09-06 | Cantilevered silicon chip carbon frame support plate jacking system |
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| Country | Link |
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| CN (1) | CN207158703U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108910758A (en) * | 2018-06-25 | 2018-11-30 | 肇庆市高新区晓靖科技有限公司 | It is a kind of for PCB into the lifting device of trigger |
| CN108942010A (en) * | 2018-10-12 | 2018-12-07 | 无锡先导智能装备股份有限公司 | Support plate circulator and welding equipment |
| CN109985823A (en) * | 2019-05-06 | 2019-07-09 | 山东泓瑞光电科技有限公司 | A kind of LED wafer automatic fraction collector buffering transition platform |
-
2017
- 2017-09-06 CN CN201721142228.XU patent/CN207158703U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108910758A (en) * | 2018-06-25 | 2018-11-30 | 肇庆市高新区晓靖科技有限公司 | It is a kind of for PCB into the lifting device of trigger |
| CN108942010A (en) * | 2018-10-12 | 2018-12-07 | 无锡先导智能装备股份有限公司 | Support plate circulator and welding equipment |
| CN109985823A (en) * | 2019-05-06 | 2019-07-09 | 山东泓瑞光电科技有限公司 | A kind of LED wafer automatic fraction collector buffering transition platform |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.208 Changjiang East Road, Shuofang, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Jiangsong Technology Co.,Ltd. Address before: 214028 plot c20-2, phase V, Shuofang industrial concentration zone, Wuxi New Area, Jiangsu Province, Wuxi City, Jiangsu Province Patentee before: WUXI JIANGSONG SCIENCE AND TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address |