CN207108505U - A kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace - Google Patents
A kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace Download PDFInfo
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- CN207108505U CN207108505U CN201621229371.8U CN201621229371U CN207108505U CN 207108505 U CN207108505 U CN 207108505U CN 201621229371 U CN201621229371 U CN 201621229371U CN 207108505 U CN207108505 U CN 207108505U
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Abstract
The utility model discloses a kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace, including connected bubble-cap nozzle component and adapter, the bubble-cap nozzle component includes shower nozzle base and bubble-cap type shower nozzle, described shower nozzle base one end is connected with the adapter, the other end is connected with described bubble-cap type shower nozzle one end, and the bubble-cap type shower nozzle other end center and side are provided with through hole；The opening diameter and percent opening of through hole are adjustable according to body of heater and chassis structure, height of nozzle is adjustable according to the arrangement orientation of chassis nozzle, it can realize that axial gas effluxvelocity meets the uniform deposition of cycling condition and top silicon, and circumferential gas can realize bottom gas flowing and even concentration, but not to bottom silicon rod into gas shock.Meanwhile nozzle can realize that height and flow velocity are adjustable.
Description
Technical field
Technical field of polysilicon production is the utility model is related to, more particularly to a kind of bubble-cap type can adjust polycrystalline silicon reducing furnace
Nozzle.
Background technology
The production procedure of improved Siemens is to utilize chlorine and hydrogen synthesising hydrogen (or outsourcing hydrogen chloride), hydrogen chloride
With silica flour synthesizing trichlorosilane at a certain temperature, then purify after being mixed by a certain percentage with hydrogen after trichlorosilane, one
Enter under fixed temperature, pressure from the air inlet on the chassis of reduction furnace in body of heater, deposition generation is more on the high temperature silicon rod of energization
Crystal silicon, reaction end gas are discharged through the gas outlet on chassis.In the process of running, the nozzle of air supply being fixed on chassis will for reduction furnace
The process gas such as trichlorosilane and hydrogen is ejected into furnace inner space and reduction reaction occurs, and silicon core diameter is typically grown to from 8~10mm
150~180mm.Gas in reduction furnace is distributed after flowing by silicon rod, outlet mouth structure is influenceed, when gas raw material passes through air inlet
When nozzle is ejected into reduction furnace, nozzle center's jet velocity is higher, but the flow rate of gas near nozzle is low, unfavorable
In the progress of reduction reaction, while gas flowing causes bottom process gas concentration in reduction furnace relatively low, and causes also to originate in
Raw Si has the trend moved upwards, so as to cause silicon rod thin in the thick bottom in growth course middle and upper part, if silicon rod is thick up and down
Carefully differ greatly, the phenomenon of falling rod easily occurs.
The nozzle of air supply used at present is mostly direct-injection, that is, the circulation passage for being used to provide air-flow is in straight-tube shape, is also used
Air inlet pipe bore increase central gas stream speed is reduced, forms gas flowing systemic circulation, the method makes process gas largely be rushed to top
Portion, make top gas excessive concentration, cause silicon rod upper coarse and lower fine, easily silicon rod top clearance in way is small in the reaction, it is impossible to continues
Growth.
Therefore, oneself has many patents to improve nozzle of air supply structure, such as China Patent Publication No.
CN201678459U, discloses a kind of integral nozzle for having special flow passage, and nozzle center's necking down improves the entirety of gas
Flow velocity, there is spiral part gas again to external diffusion, meet the gas demand of silicon rod lower end, but due to the office of monolithic construction
It is sex-limited that diffusion gas speed can be caused big, so as to produce larger impulsive force to silicon rod lower end, in producing initial stage by flow perturbation
It is larger, rod can still occur down during driving.
In view of this, the gas flowing control in polycrystalline silicon reducing furnace is particularly significant, in order to generate high-quality polycrystalline
Silicon material, the uniformity of gas field in reduction furnace should be kept.One kind is needed to keep central jet speed, and can avoids silicon core
Resonance rod, while the equally distributed nozzle of gas field in stove can also be made.
Utility model content
In view of the above-mentioned deficiency that presently, there are, the utility model provides a kind of bubble-cap type and can adjust polycrystalline silicon reducing furnace spray
Mouth, realize that axial gas effluxvelocity meets the uniform deposition of cycling condition and top silicon, and circumferential gas can realize bottom
Gas flows and even concentration, but not to bottom silicon rod into gas shock.
To reach above-mentioned purpose, embodiment of the present utility model adopts the following technical scheme that：
A kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace, and the bubble-cap type, which can adjust nozzle of polycrystalline silicon reduction furnace, to be included
Connected bubble-cap nozzle component and adapter, the bubble-cap nozzle component include shower nozzle base and bubble-cap type shower nozzle, the shower nozzle bottom
Seat one end is connected with the adapter, and the other end is connected with described bubble-cap type shower nozzle one end, in the bubble-cap type shower nozzle other end
The heart and side are provided with through hole.
According to one side of the present utility model, the shower nozzle base is provided with screw thread, institute with taking on the outside of the one end being connected
State one end that adapter is connected with the shower nozzle base and be provided with inner hole thread.
According to one side of the present utility model, the other end of the adapter is connected with polycrystalline silicon reducing furnace.
According to one side of the present utility model, the adapter other end is provided with inner hole thread.
According to one side of the present utility model, the through hole is multiple.
According to one side of the present utility model, the diameter and quantity of the through hole enter according to the demand of polycrystalline silicon reducing furnace
Row regulation.
According to one side of the present utility model, one end diameter that the bubble-cap type shower nozzle is provided with through hole is more than and shower nozzle bottom
The connected one end of seat.
According to one side of the present utility model, spiral shell is provided with the outside of one end that the bubble-cap type shower nozzle is connected with shower nozzle base
Line, one end that the shower nozzle base is connected with the bubble-cap type shower nozzle are provided with inner hole thread.
The advantages of the utility model is implemented：Bubble-cap type described in the utility model can adjust nozzle of polycrystalline silicon reduction furnace, bag
Connected bubble-cap nozzle component and adapter are included, the bubble-cap nozzle component includes shower nozzle base and bubble-cap type shower nozzle, the shower nozzle
Base one end is connected with the adapter, and the other end is connected with described bubble-cap type shower nozzle one end, in the bubble-cap type shower nozzle other end
The heart and side are provided with through hole；The opening diameter and percent opening of through hole are adjustable according to body of heater and chassis structure, height of nozzle according to
The arrangement orientation of chassis nozzle is adjustable, it is possible to achieve axial gas effluxvelocity meets that cycling condition and the uniform of top silicon sink
Product, and circumferential gas can realize bottom gas flowing and even concentration, but not to bottom silicon rod into gas shock.Meanwhile
Nozzle can realize that height and flow velocity are adjustable.Because the different type of furnaces require different to nozzle height, taken over by setting, Ke Yishi
The regulation of existing nozzle height, need to only change the adapter of different length, you can meet the needs of various type of furnaces.With the type of furnace according to nozzle
With the relation in chassis electrode hole orientation, different is required to nozzle height, is taken over by setting, it is possible to achieve the tune of nozzle height
Section, it need to only change the adapter of different length, you can meet the needs of various type of furnaces., can arbitrarily more by setting top showerhead
The shower nozzle of different center-hole diameter sizes and percent opening is changed, and then controls feed flow rate.The regulation to nozzle flow velocity is realized, is met
The requirement of the different type of furnaces.For straight pass nozzle charge jet excessive velocities or it is excessively slow the drawbacks of, using the shower nozzle of bubble-cap type,
Straight hole is opened at bubble-cap center, is opened in bubble-cap side porous, and primary air rises to through center nozzle meets growth up to being formed at the top of body of heater
Systemic circulation, secondary air is dispersed in bottom through porous, increases the flow strength of bottom gas and the concentration of reacting gas, favorably
In the deposition of silicon rod.Adjusted by above-mentioned bubble-cap nozzle arrangements, the difference of different model reduction furnace can be met to greatest extent
Feed needs, the uniform fast-growth of silicon rod of reduction furnace is realized, reduce " coral material " ratio of polysilicon, improve the production of polysilicon
Quality.
Brief description of the drawings
In order to illustrate more clearly of the technical scheme in the embodiment of the utility model, will make below to required in embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the utility model,
For those of ordinary skill in the art, on the premise of not paying creative work, can also be obtained according to these accompanying drawings
Other accompanying drawings.
Fig. 1 is the structural representation that a kind of bubble-cap type described in the utility model can adjust nozzle of polycrystalline silicon reduction furnace；
Fig. 2 is the top view that a kind of bubble-cap type described in the utility model can adjust nozzle of polycrystalline silicon reduction furnace；
Fig. 3 is the three-dimensional view that a kind of bubble-cap type described in the utility model can adjust nozzle of polycrystalline silicon reduction furnace.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
As shown in Figure 1, Figure 2 and Figure 3, a kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace, and the bubble-cap type can adjust
Nozzle of polycrystalline silicon reduction furnace includes connected bubble-cap nozzle component 1 and adapter 2, and the bubble-cap nozzle component 1 includes shower nozzle base
11 and bubble-cap type shower nozzle 12, described one end of shower nozzle base 11 be connected with the adapter 2, the other end and the bubble-cap type shower nozzle 12 1
End is connected, and the center and side of the other end of bubble-cap type shower nozzle 12 are provided with through hole 13.
In actual applications, screw thread, the adapter 2 can be provided with the outside of one end that the shower nozzle base 11 is connected with adapter 2
The one end being connected with the shower nozzle base 11 is provided with inner hole thread.
In actual applications, the other end of the adapter 2 is connected with polycrystalline silicon reducing furnace.
In actual applications, the other end of adapter 2 is provided with inner hole thread.
In actual applications, the through hole 13 is multiple.
In actual applications, the diameter of the through hole 13 and quantity are adjusted according to the demand of polycrystalline silicon reducing furnace.
In actual applications, the bubble-cap type shower nozzle 12 is provided with one end diameter of through hole more than one to be connected with shower nozzle base
End.
In actual applications, screw thread is provided with the outside of one end that the bubble-cap type shower nozzle 12 is connected with shower nozzle base 11, it is described
One end that shower nozzle base 11 is connected with the bubble-cap type shower nozzle 12 is provided with inner hole thread.
The advantages of the utility model is implemented：Bubble-cap type described in the utility model can adjust nozzle of polycrystalline silicon reduction furnace, bag
Connected bubble-cap nozzle component and adapter are included, the bubble-cap nozzle component includes shower nozzle base and bubble-cap type shower nozzle, the shower nozzle
Base one end is connected with the adapter, and the other end is connected with described bubble-cap type shower nozzle one end, in the bubble-cap type shower nozzle other end
The heart and side are provided with through hole；The opening diameter and percent opening of through hole are adjustable according to body of heater and chassis structure, height of nozzle according to
The arrangement orientation of chassis nozzle is adjustable, it is possible to achieve axial gas effluxvelocity meets that cycling condition and the uniform of top silicon sink
Product, and circumferential gas can realize bottom gas flowing and even concentration, but not to bottom silicon rod into gas shock.Meanwhile
Nozzle can realize that height and flow velocity are adjustable.Because the different type of furnaces require different to nozzle height, taken over by setting, Ke Yishi
The regulation of existing nozzle height, need to only change the adapter of different length, you can meet the needs of various type of furnaces.With the type of furnace according to nozzle
With the relation in chassis electrode hole orientation, different is required to nozzle height, is taken over by setting, it is possible to achieve the tune of nozzle height
Section, it need to only change the adapter of different length, you can meet the needs of various type of furnaces., can arbitrarily more by setting top showerhead
The shower nozzle of different center-hole diameter sizes and percent opening is changed, and then controls feed flow rate.The regulation to nozzle flow velocity is realized, is met
The requirement of the different type of furnaces.For straight pass nozzle charge jet excessive velocities or it is excessively slow the drawbacks of, using the shower nozzle of bubble-cap type,
Straight hole is opened at bubble-cap center, is opened in bubble-cap side porous, and primary air rises to through center nozzle meets growth up to being formed at the top of body of heater
Systemic circulation, secondary air is dispersed in bottom through porous, increases the flow strength of bottom gas and the concentration of reacting gas, favorably
In the deposition of silicon rod.Adjusted by above-mentioned bubble-cap nozzle arrangements, the difference of different model reduction furnace can be met to greatest extent
Feed needs, the uniform fast-growth of silicon rod of reduction furnace is realized, reduce " coral material " ratio of polysilicon, improve the production of polysilicon
Quality.
It is described above, only specific embodiment of the present utility model, but the scope of protection of the utility model is not limited to
In this, any those skilled in the art is in the change that in technical scope, can be readily occurred in disclosed in the utility model
Change or replace, should all cover within the scope of protection of the utility model.Therefore, the scope of protection of the utility model should be with described
Scope of the claims is defined.
Claims (7)
1. a kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that the bubble-cap type can adjust polycrystalline reduction
Stove nozzle, which includes connected bubble-cap nozzle component and adapter, the bubble-cap nozzle component, includes shower nozzle base and bubble-cap type shower nozzle,
Described shower nozzle base one end is connected with the adapter, and the other end is connected with described bubble-cap type shower nozzle one end, the bubble-cap type shower nozzle
The center and side of the other end are provided with through hole.
2. bubble-cap type according to claim 1 can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that the shower nozzle base
Screw thread is provided with taking on the outside of the one end being connected, described one end being connected with the shower nozzle base of taking over is provided with inner hole thread.
3. bubble-cap type according to claim 1 can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that the adapter it is another
One end is connected with polycrystalline silicon reducing furnace.
4. bubble-cap type according to claim 3 can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that the adapter is another
End is provided with inner hole thread.
5. bubble-cap type according to claim 1 can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that the through hole is more
It is individual.
6. bubble-cap type according to claim 1 can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that the bubble-cap type spray
One end diameter that head is provided with through hole is more than the one end being connected with shower nozzle base.
7. the bubble-cap type according to one of claim 1 to 6 can adjust nozzle of polycrystalline silicon reduction furnace, it is characterised in that described
Screw thread is provided with the outside of one end that bubble-cap type shower nozzle is connected with shower nozzle base, the shower nozzle base is connected with the bubble-cap type shower nozzle
One end is provided with inner hole thread.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621229371.8U CN207108505U (en) | 2016-11-16 | 2016-11-16 | A kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621229371.8U CN207108505U (en) | 2016-11-16 | 2016-11-16 | A kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207108505U true CN207108505U (en) | 2018-03-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201621229371.8U Active CN207108505U (en) | 2016-11-16 | 2016-11-16 | A kind of bubble-cap type can adjust nozzle of polycrystalline silicon reduction furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114105147A (en) * | 2021-12-17 | 2022-03-01 | 亚洲硅业(青海)股份有限公司 | Polycrystalline silicon reduction furnace |
| CN116621180A (en) * | 2023-05-23 | 2023-08-22 | 河南硅烷科技发展股份有限公司 | System for preparing electronic grade polycrystalline silicon wettability regulation and control for low internal stress zone melting |
-
2016
- 2016-11-16 CN CN201621229371.8U patent/CN207108505U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114105147A (en) * | 2021-12-17 | 2022-03-01 | 亚洲硅业(青海)股份有限公司 | Polycrystalline silicon reduction furnace |
| CN116621180A (en) * | 2023-05-23 | 2023-08-22 | 河南硅烷科技发展股份有限公司 | System for preparing electronic grade polycrystalline silicon wettability regulation and control for low internal stress zone melting |
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