CN207035852U - A kind of taper water cooling covering device for Czochralski furnace - Google Patents
A kind of taper water cooling covering device for Czochralski furnace Download PDFInfo
- Publication number
- CN207035852U CN207035852U CN201720494460.3U CN201720494460U CN207035852U CN 207035852 U CN207035852 U CN 207035852U CN 201720494460 U CN201720494460 U CN 201720494460U CN 207035852 U CN207035852 U CN 207035852U
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- CN
- China
- Prior art keywords
- water
- taper
- water inlet
- taper water
- collar
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 137
- 238000001816 cooling Methods 0.000 title claims abstract description 27
- 238000003466 welding Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The utility model provides a kind of taper water cooling covering device for Czochralski furnace, including pipeline and taper water collar, the taper water collar is the double seal structure of inner hollow, cavity between outer wall and inwall forms a water annulus, the taper water cooling set upper side is provided with the taper water collar water inlet and taper water collar delivery port connected respectively with the water annulus, and the taper water collar water inlet and taper water collar delivery port are connected with pipeline respectively.A kind of taper water cooling covering device for Czochralski furnace described in the utility model, the current area in unit height can be increased, strengthen cooling effect, accelerate pull rate, the final production efficiency for improving product inside deep enough guide shell.
Description
Technical field
The utility model belongs to Czochralski furnace ancillary equipment technology, more particularly, to a kind of taper water for Czochralski furnace
Cooling jacket is put.
Background technology
Monocrystalline silicon is the major function material for developing computer and integrated circuit, and photovoltaic generation utilizes the master of solar energy
Want functional material；Czochralski furnace is the necessary equipment that polysilicon is converted into monocrystalline silicon technical process, and polysilicon changes into list at present
The supporting water-cooling apparatus of Czochralski furnace used in crystal silicon production process is typically all straight barrel type, due to melting in high temperature environments
Melt that the temperature of the monocrystalline silicon of state is higher, there are the limitation of conical flow guiding cylinder, common straight barrel type water cooling in the position nearer apart from liquid level
Set spatially has limitation, it is impossible to accelerates pull rate, so that influenceing production efficiency.
The content of the invention
In view of this, the utility model is directed to a kind of taper water cooling covering device for Czochralski furnace, quickly to reduce
The temperature of the monocrystalline silicon of molten condition, accelerate pull rate, reach the purpose that yield is improved in the unit interval.
To reach above-mentioned purpose, what the technical solution of the utility model was realized in：
A kind of taper water cooling covering device for Czochralski furnace, including pipeline and taper water collar, the taper water collar be
The double seal structure of inner hollow, the cavity between outer wall and inwall form a water annulus, the taper water cooling set upper side
Provided with the taper water collar water inlet and taper water collar delivery port connected respectively with the water annulus, the taper water collar
Water inlet and taper water collar delivery port are connected with pipeline respectively.
Further, the pipeline includes water inlet pipe and outlet pipe, and the water inlet pipe and outlet pipe are symmetrical arranged, water inlet pipe
The distance between upper end and outlet pipe upper end are more than the distance between water inlet pipe lower end and outlet pipe lower end.
Further, the water inlet pipe and outlet pipe are formed in one design, water inlet pipe and the outlet pipe upper end and
Lower end is vertically arranged, and is connected between top and bottom by horizontal pipeline, and the upper end of the water inlet pipe and outlet pipe passes through respectively
Screw thread is fixedly connected with vertical pulling furnace body, the lower end of the water inlet pipe and outlet pipe respectively with taper water collar water inlet and taper
Water collar delivery port connects.
Further, the taper water cooling set upper side is provided with upper end base, and lower end is provided with lower end seat, the upper end base and lower end
Seat welds with outer wall and inwall, and taper water collar water inlet and taper the water collar delivery port is on upper end base；It is described
Body of heater is provided with body of heater water inlet corresponding with water inlet pipe and outlet pipe and body of heater delivery port.
Relative to prior art, a kind of taper water cooling covering device for Czochralski furnace described in the utility model has following
Advantage：
The upper end of a kind of taper water cooling covering device for Czochralski furnace described in the utility model, water inlet pipe and outlet pipe leads to
Cross screw thread to be fixedly connected with Czochralski furnace, the lower end connection taper water collar of water inlet pipe and outlet pipe, meanwhile, water inlet pipe and outlet pipe
The distance between upper end is more than the distance between water inlet pipe and outlet pipe lower end, and so design can be deeply straight by taper water collar
Furnace interior is drawn, closer to liquid level, and also it is convenient to disassembly；
Water annulus is provided between the outer barrel and inner cylinder of taper water collar, neither influences the flowing of the water in water collar,
It turn avoid inner sleeve and the thermal deformation problem of overcoat, while the form fit of the outer barrel of taper and inner cylinder and conical flow guiding cylinder, energy
Inside deep enough guide shell, closer to liquid level, accelerate pull rate, the taper water collar energy compared with plain cylindrical form water collar
Enough increase the current area in unit height, strengthen cooling effect, accelerate pull rate, the final production efficiency for improving product.
Brief description of the drawings
Form a part of accompanying drawing of the present utility model to be used for providing further understanding to of the present utility model, this practicality is new
The schematic description and description of type is used to explain the utility model, does not form to improper restriction of the present utility model.
In accompanying drawing：
Fig. 1 is that a kind of front view structure of taper water cooling covering device for Czochralski furnace described in the utility model embodiment is shown
It is intended to；
Fig. 2 is that a kind of upper end base of taper water cooling covering device for Czochralski furnace described in the utility model embodiment is overlooked
Structural representation.
Description of reference numerals：
1- water inlet pipes；2- outlet pipes；3- taper water collars；301- outer walls；302- inwalls；303- upper end bases；304- lower ends
Seat；305- taper water collar water inlets；306- taper water collar delivery ports；307- water annulus.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the utility model can
To be mutually combined.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " on ", " under ",
The orientation or position relationship of the instruction such as "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " are
Based on orientation shown in the drawings or position relationship, it is for only for ease of description the utility model and simplifies description, rather than instruction
Or imply that signified device or element must have specific orientation, with specific azimuth configuration and operation, therefore be not understood that
For to limitation of the present utility model.In addition, term " first ", " second " etc. are only used for describing purpose, and it is not intended that instruction
Or imply relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, " first ", " second " etc. are defined
Feature can express or implicitly include one or more this feature.In description of the present utility model, unless separately
It is described, " multiple " are meant that two or more.
, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly
Connection；Can be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, on being understood by concrete condition
State concrete meaning of the term in the utility model.
Describe the utility model in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
Embodiment 1
A kind of taper water cooling covering device for Czochralski furnace described in the utility model, such as Fig. 1, shown in Fig. 2, including pipeline
With taper water collar 3, wherein, pipeline includes symmetrically arranged water inlet pipe 1 and outlet pipe 2, and water inlet pipe 1 and outlet pipe 2 are folding
Linear to be integrally formed design, top and bottom are to be vertically arranged, and are connected between top and bottom by horizontal pipeline, water inlet pipe
The distance between 1 upper end and the upper end of outlet pipe 2 are more than the distance between the lower end of water inlet pipe 1 and the lower end of outlet pipe 2, and so design can
So that water inlet pipe and outlet pipe go deep into furnace interior, the upper end of water inlet pipe 1 and outlet pipe 2 passes through screw thread and vertical pulling furnace body respectively
It is fixedly connected, easy installation and removal, meanwhile, body of heater is provided with body of heater water inlet corresponding with water inlet pipe 1 and outlet pipe 2 and body of heater
Delivery port；
The lower end of water inlet pipe 1 and outlet pipe 2 respectively with taper water collar water inlet 305 and taper water collar delivery port 306
Connect, the form fit of taper water collar and conical flow guiding cylinder, inside the deep enough guide shell of energy, the taper water collar is inside
Hollow double seal structure, cavity between outer wall and inwall form a water annulus 307, water annulus respectively with taper water
Cold set water inlet 305 connects with taper water collar delivery port 306, and cooling water passes through water inlet pipe 1 and taper water collar water inlet 305
Monocrystalline silicon is cooled down into water annulus 307, and it is cold by taper water collar delivery port 306 and the completion circulation of outlet pipe 2
But process, the design of water annulus neither influence the flowing of the water in water collar, and the thermal deformation that turn avoid inner sleeve and overcoat is asked
Topic, taper water collar can increase the current area in unit height compared with plain cylindrical form water collar, strengthen cooling effect,
Accelerate pull rate, the final production efficiency for improving product.
Embodiment 2
A kind of taper water cooling covering device for Czochralski furnace, including pipeline and taper water collar 3, pipeline include being symmetrical arranged
Water inlet pipe 1 and outlet pipe 2, water inlet pipe 1 and outlet pipe 2 be formed in one design, wherein, the upper end of water inlet pipe and outlet pipe
Tapered structure is obliquely installed, lower end is vertically arranged, and is connected between top and bottom by horizontal pipeline, other and embodiment 1
It is identical.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements made etc., the utility model should be included in
Protection domain within.
Claims (5)
- A kind of 1. taper water cooling covering device for Czochralski furnace, it is characterised in that：It is described including pipeline and taper water collar (3) Taper water collar (3) is the double seal structure of inner hollow, and the cavity between outer wall (301) and inwall (302) forms a ring Shape water channel (307), the taper water cooling set upper side are provided with the taper water collar water inlet connected respectively with the water annulus (307) Mouth (305) and taper water collar delivery port (306), the taper water collar water inlet (305) and taper water collar delivery port (306) it is connected respectively with pipeline.
- 2. the taper water cooling covering device according to claim 1 for Czochralski furnace, it is characterised in that：The pipeline include into Water pipe (1) and outlet pipe (2), the water inlet pipe (1) and outlet pipe (2) are symmetrical arranged, water inlet pipe (1) upper end and outlet pipe (2) The distance between upper end is more than the distance between water inlet pipe (1) lower end and outlet pipe (2) lower end.
- A kind of 3. taper water cooling covering device for Czochralski furnace according to claim 2, it is characterised in that：The water inlet pipe (1) it is formed in one design with outlet pipe (2), the water inlet pipe (1) and outlet pipe (2) top and bottom are vertically arranged, on Connected between end and lower end by horizontal pipeline, the upper end of the water inlet pipe (1) and outlet pipe (2) passes through screw thread and vertical pulling respectively Furnace body is fixedly connected, the lower end of the water inlet pipe (1) and outlet pipe (2) respectively with taper water collar water inlet (305) and cone Shape water collar delivery port (306) connects.
- A kind of 4. taper water cooling covering device for Czochralski furnace according to claim 1, it is characterised in that：The taper water Cold set upper side is provided with upper end base (303), and lower end is provided with lower end seat (304), the upper end base and lower end seat with outer wall and inwall Welding, the taper water collar water inlet (305) and taper water collar delivery port (306) are on upper end base.
- A kind of 5. taper water cooling covering device for Czochralski furnace according to claim 1, it is characterised in that：On the body of heater Provided with body of heater water inlet corresponding with water inlet pipe (1) and outlet pipe (2) and body of heater delivery port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720494460.3U CN207035852U (en) | 2017-05-05 | 2017-05-05 | A kind of taper water cooling covering device for Czochralski furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720494460.3U CN207035852U (en) | 2017-05-05 | 2017-05-05 | A kind of taper water cooling covering device for Czochralski furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207035852U true CN207035852U (en) | 2018-02-23 |
Family
ID=61479912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720494460.3U Active CN207035852U (en) | 2017-05-05 | 2017-05-05 | A kind of taper water cooling covering device for Czochralski furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207035852U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113755941A (en) * | 2020-06-05 | 2021-12-07 | 隆基绿能科技股份有限公司 | Heat exchange device and single crystal furnace |
-
2017
- 2017-05-05 CN CN201720494460.3U patent/CN207035852U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113755941A (en) * | 2020-06-05 | 2021-12-07 | 隆基绿能科技股份有限公司 | Heat exchange device and single crystal furnace |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee after: TCL Zhonghuan New Energy Technology Co.,Ltd. Address before: 300384 No. 12, Haitai East Road, Huayuan Industrial Zone (outside the ring), New Technology Industrial Park, Binhai New Area, Tianjin Patentee before: TIANJIN ZHONGHUAN SEMICONDUCTOR CO.,LTD. |