CN206970228U - A kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon - Google Patents
A kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon Download PDFInfo
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- CN206970228U CN206970228U CN201720796358.9U CN201720796358U CN206970228U CN 206970228 U CN206970228 U CN 206970228U CN 201720796358 U CN201720796358 U CN 201720796358U CN 206970228 U CN206970228 U CN 206970228U
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Abstract
A kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon, the utility model is related to silicon monoxide production equipment technology；Furnace wall is provided with burner and matched heat storage；Airduct is connected with burner, airduct is connected with air blower and air-introduced machine, and the connection airduct between air blower and air-introduced machine is provided with reversal valve；Described deposition reactor is plugged in stove cellar for storing things；Deposition reactor is made up of deposition reactor material reaction section and deposition reactor product deposition section；Deposition reactor material reaction section is welded to connect with deposition reactor product deposition section, and material is arranged in deposition reactor material reaction section.Monomer production plant per unit area yield can reach 500 600 kilograms, and SiO production cost is greatly lowered, more current similar products at home and abroad establishes solid original material basis in the large-scale application of silicon substrate composite negative pole material compared to having the extremely strong market competitiveness, for SiO.
Description
Technical field
It the utility model is related to silicon monoxide production equipment technology, and in particular to a kind of big yield low cost production oxygen
Change the evaporation deposition equipment of sub- silicon.
Background technology
Aoxidize sub- silicon, also known as silicon monoxide, be it is dark brown arrive loess color amorphous powder, white cubic crystal, structure is
Spatial networks, will not spontaneous combustion, it is not soluble in water, fusing point be more than 1702 degrees Celsius, boiling point is 1880 degrees Celsius, and density is that 2.13g/ is stood
Square centimetre.SiO is a kind of unstable Si oxide, and the SiO 2 powder of white can be formed when heating in atmosphere. SiO
It is not a pure compound in fact, it is actually that amorphous nano Si particle is equably divided by special synthetic method
A kind of nano composite material formed in unbodied SiO2 body phases is scattered to, SiO lithium storage content, which comes from, to be dispersed in SiO2
The nano Si particle in face.Aoxidize the main application of sub- silicon：For optical glass and semi-conducting material；Synthesized as fine ceramics former
Material, such as silicon nitride, carborundum Fine Ceramic Powder raw material；Evaporation is protected on the metallic reflection minute surface coated in optical instrument
Film；The high-capacity cathode material of lithium ion battery.
In recent years, due to the quick popularization of smart mobile phone, tablet personal computer, especially New energy electric is greatly developed in country
Under the policy of automobile is inspired, the fast-developing passage of the market access of lithium ion battery, meanwhile, it is at full speed with new-energy automobile
Development, it is necessary to increase substantially the energy density of power lithium-ion battery.The leading formulation of Ministry of Industry and Information《Energy-conservation and new energy vapour
Car industrial development planning（2012-2020）》In clearly propose, the year two thousand twenty power battery module will reach 300Wh/ than energy
kg.This means battery core energy density at least will be in more than 350Wh/kg, while cost reduces half, reaches 1 yuan/below Wh
（Refer to battery core）.Therefore, with the new-energy automobile continuous improvement to course continuation mileage requirement in actual applications, current material bodies
System substantially can not realize these targets, it is difficult to meet current demand, extensive research and development and the high property of popularization and application novel high-energy
Energy material is extremely urgent.
Specifically, the problem of lifting the energy density of power lithium-ion battery just becomes abnormal urgent.Negative material is
The important component of lithium ion battery, it directly affects the keys such as the energy density, cycle life and security performance of battery
Index.Sub- silicon is aoxidized at present（SiO）Negative material is that industry thinks most to be hopeful the high power capacity silicon-based anode of new generation of industrialization
Material.The specific capacity of SiO negative materials is 2400 mAh/g, and actual reversible capacity is in more than 1500mAh/g, and the reason of graphite
It is only 372mAh/g by specific capacity.Compared with graphite cathode material, the energy density of silicon based anode material is with the obvious advantage.Graphite
Theoretical energy density is 372 mAh/g, and the theoretical energy density of silicium cathode surpasses its 10 times, up to 4200mAh/g.Silicon-carbon is compound
Material can greatly promote the capacity of single battery core, effectively alleviate in the industry to the worry of electric automobile course continuation mileage.
Data shows that the electric automobiles of Model 3 of tesla of U.S. Tesla issues just employ silicon-carbon cathode as power
Battery new material, the i.e. battery of PANASONIC a new generation high power capacity 18650, negative pole employ a small amount of SiO（~10%）Mix artificial stone
Ink, by adding 10% silica-base material in Delanium, tesla allows battery capacity to reach more than 550mAh/g, battery
Energy density is up to 300wh/kg；Japanese GS Tang Qian companies have released the lithium battery using silicon based anode material, and are applied successfully
In Mitsubishi Motors；In addition, Mitsui metal also ambitiously pushes silicium cathode lithium battery to consumer electronics and electricity
Two big field of electrical automobile.
The production for aoxidizing sub- silicon uses chemical vapor deposition method, and its reaction equation is: SiO2+Si=2SiO .Due to aoxidizing sub- silicon
Working condition is very harsh, and the industrialized production of current domestic SiO powders is mainly prolonged on the basis of the laboratory of the eighties
With the high temperature evaporation technique of semi-conductor industry, production equipment yield is small, and monomer production plant per unit area yield is only 5-10 kilograms, and production makes
With Electric heating, power consumption is high, causes production cost very high.Japanese enterprises improve SiO production methods, pass through high-energy ball milling
The Si powder and SiO2 particles of Nano/micron level are subsequently heat-treated to obtain SiO powders, then carries out extra carbon coating（Organic carbon source
Pyrolysis or CVD claddings）To improve the electric conductivity of material.Traditional production process equipment determines that SiO cost will be far above
Graphite negative electrodes material, such as the sample price that provides of certain Japanese company are up to 100 $/Kg, domestic price also in 100RMB/Kg,
Although cost can decline after volume production, price is still battery producer subject matter of interest, occupy it is high-leveled and difficult under make
Large-scale applications of the SiO in silicon substrate composite negative pole material is seriously hindered with cost.
Utility model content
The defects of the purpose of this utility model is to be directed to prior art and deficiency, there is provided a kind of simple in construction, design is closed
Reason, big yield easy to use low cost production aoxidize the evaporation deposition equipment of sub- silicon, and monomer production plant per unit area yield can reach
500-600 kilograms, and SiO production cost is greatly lowered, more current similar products at home and abroad, which is compared, has extremely strong market
Competitiveness, solid original material basis is established in the large-scale application of silicon substrate composite negative pole material for SiO.
To achieve the above object, the technical solution adopted in the utility model is：It is stored by stove, deposition reactor, heat storage,
Burner, airduct, air blower, reversal valve and draft mechanism into；Described stove cellar for storing things is made up of furnace wall and furnace roof；Surrounding stove coping
Provided with furnace roof；Furnace wall is provided with burner and matched heat storage；Airduct, airduct and air blower are connected with described burner
Connected with air-introduced machine, the connection airduct between air blower and air-introduced machine is provided with reversal valve；Described deposition reactor is plugged in
In stove cellar for storing things；Described deposition reactor is made up of deposition reactor material reaction section and deposition reactor product deposition section；Deposition
Reactor content conversion zone is welded to connect with deposition reactor product deposition section, and the outer cover of deposition reactor product deposition section
Provided with cooling jacket, material is arranged in deposition reactor material reaction section；Described deposition reactor material reaction section is set
In the inside at stove cellar for storing things, described deposition reactor product deposition section is arranged on the outside at stove cellar for storing things.
Further, described furnace wall is provided with several perforates；Described deposition reactor is horizontal to be inserted in perforate, wherein heavy
Product reactor content conversion zone is arranged on the inner side of furnace wall, and is erected on furnace bottom reactor supporting brick, the furnace bottom reactor branch
Support brick is arranged on the bottom that surrounding furnace wall surrounds space, and deposition reactor product deposition Duan Lu is located at the outside of furnace wall.
Further, described deposition reactor is in one side is single, one side is double, two-sided single or two-sided double shape
Formula is horizontal to be inserted on furnace wall.
Further, described furnace roof is provided with several perforates；Described deposition reactor is perpendicular to be inserted in perforate, wherein heavy
Product reactor content conversion zone is arranged on the inner side of furnace roof, and deposition reactor product deposition Duan Lu is located at the outside of furnace roof.
Further, the inside of described deposition reactor material reaction section is provided with high temperature resistant handbag；Material is arranged at resistance to
In high temperature handbag.
Further, the barrel of described high temperature resistant handbag offers hole, and the hole is circular hole, square hole or irregular hole.
Further, the inside of described deposition reactor material reaction section is provided with high temperature resistant central tube, and material is arranged on
In interlayer between high temperature resistant central tube and deposition reactor material reaction section；Under described deposition reactor material reaction section
End dew is located at outside furnace bottom, and its outside is provided with lower cooling jacket, and bottom is provided with lower outlet(discharge) flange.
Further, the barrel of described high temperature resistant central tube offers hole, and the hole is circular hole, square hole or irregular
Hole.
After said structure, the utility model has the beneficial effect that：A kind of big yield low cost described in the utility model
Production aoxidizes the evaporation deposition equipment of sub- silicon, and monomer production plant per unit area yield can reach 500-600 kilograms, and be greatly lowered
SiO production cost, more current similar products at home and abroad are SiO in silicon substrate Compound Negative compared to having the extremely strong market competitiveness
The large-scale application of pole material establishes solid original material basis, and the utility model has simple in construction, and it is reasonable to set, and makes
Low cost and other advantages.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, before creative labor is not paid
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of embodiment one.
Fig. 2 is the side view of embodiment one.
Fig. 3 is the structural representation of embodiment two.
Fig. 4 is the side view of embodiment two.
Fig. 5 is the structural representation of embodiment three.
Fig. 6 is the side view of embodiment three.
Fig. 7 is the structural representation of embodiment four.
Fig. 8 is the side view of embodiment four.
Fig. 9 is the structural representation of embodiment five.
Figure 10 is the side view of embodiment five.
Figure 11 is the structural representation of embodiment six.
Figure 12 is the side view of embodiment six.
Figure 13 is the structural representation of embodiment seven.
Figure 14 is the side view of embodiment seven.
Figure 15 is the structural representation of embodiment eight.
Figure 16 is the side view of embodiment eight.
Description of reference numerals：
Stove cellar for storing things 1, furnace wall 1-1, furnace roof 1-2, furnace bottom reactor supporting brick 1-3, furnace bottom 1-4, deposition reactor material reaction
Section 2, deposition reactor product deposition section 3, lower outlet(discharge) flange 2-1, lower cooling jacket 2-2, cooling jacket 4, heat storage 5, burner
6th, airduct 7, air blower 8, reversal valve 9, air-introduced machine 10, material 11, high temperature resistant handbag 12, high temperature resistant central tube 13.
Embodiment
The utility model is further described below in conjunction with the accompanying drawings.
Embodiment one：
Referring to as depicted in figs. 1 and 2, the technical scheme that present embodiment uses is：It is by stove cellar for storing things 1, deposition reaction
Device, heat storage 5, burner 6, airduct 7, air blower 8, reversal valve 9 and air-introduced machine 10 are formed；Described stove cellar for storing things 1 uses refractory material
Build by laying bricks or stones and form, it is made up of furnace wall 1-1 and furnace roof 1-2；Surrounding furnace wall 1-1 top is provided with furnace roof 1-2；Furnace wall 1-1 is provided with
Burner 6 and matched heat storage 5；Airduct 7 is connected with described burner 6, airduct 7 connects with air blower 8 and air-introduced machine 10
Connect, the connection airduct between air blower 8 and air-introduced machine 10 is provided with reversal valve 9；Described deposition reactor is by deposition reactor
Material reaction section 2 and deposition reactor product deposition section 3 are formed；Deposition reactor material reaction section 2 and deposition reactor product
Deposition section 3 is welded to connect, and the outer cover of deposition reactor product deposition section 3 is provided with cooling jacket 4, and material 11 is arranged on deposition
In reactor content conversion zone 2；Described deposition reactor material reaction section 2 is arranged on the inside at stove cellar for storing things 1, and described deposition is anti-
Device product deposition section 3 is answered to be arranged on the outside at stove cellar for storing things 1.
Further, described deposition reactor is horizontal is inserted in stove cellar for storing things 1；Described furnace wall 1-1's each side opens up
There are two perforates；Described deposition reactor in it is two-sided it is double it is horizontal be inserted in perforate, wherein deposition reactor material reaction section 2 is set
Put in furnace wall 1-1 inner side, and be erected on furnace bottom reactor supporting brick 1-3, furnace bottom reactor supporting brick 1-3 is arranged on four
All furnace wall 1-1 surround the bottom in space, and deposition reactor product deposition section 3 reveals the outside for being located at furnace wall 1-1.
After said structure, present embodiment has the beneficial effect that：The big production of one kind described in present embodiment
Amount low cost production aoxidizes the evaporation deposition equipment of sub- silicon, and monomer production plant per unit area yield can reach 500-600 kilograms, and significantly
Degree reduces SiO production cost, and more current similar products at home and abroad is SiO in silicon substrate compared to having the extremely strong market competitiveness
The large-scale application of composite negative pole material establishes solid original material basis, and the utility model has simple in construction, setting conjunction
Reason, the advantages that low manufacture cost.
Embodiment two：
Referring to Fig. 3 and Fig. 4, the difference of present embodiment and embodiment one is：Described furnace wall
1-1's each side offers a perforate, and the perforate of both sides is staggered up and down；Described deposition reactor is in two-sided
It is single it is horizontal be inserted in perforate, remaining part and annexation are identical with embodiment one.
Embodiment three：
Referring to Fig. 5 and Fig. 6, the difference of present embodiment and embodiment one is：Described furnace wall
1-1 side offers two perforates；Described deposition reactor in one side it is double it is horizontal be inserted in perforate, remaining part and connection
Relation is identical with embodiment one.
Embodiment four：
Referring to Fig. 7 and Fig. 8, the difference of present embodiment and embodiment one is：Described furnace wall
1-1 side respectively offers a perforate；Described deposition reactor in one side it is single it is horizontal be inserted in perforate, remaining part and company
It is identical with embodiment one to connect relation.
Embodiment five：
Referring to Fig. 9 and Figure 10, the difference of present embodiment and embodiment one is：Deposition reactor
It is perpendicular to be inserted in stove cellar for storing things 1；Described furnace roof 1-2 is provided with several perforates；Described deposition reactor is perpendicular to be inserted in perforate, wherein heavy
Product reactor content conversion zone 2 is arranged on furnace roof 1-2 inner side, and deposition reactor product deposition section 3, which is revealed, is located at the outer of furnace roof 1-2
Portion；The inside of described deposition reactor material reaction section 2 is provided with high temperature resistant handbag 12；Material 11 is arranged at high temperature resistant handbag 12
Interior, the barrel of described high temperature resistant handbag 12 offers circular hole, and the size in hole is any, remaining part and annexation with tool
Body embodiment one is identical.
Embodiment six：
Referring to Figure 11 and Figure 12, the difference of present embodiment and embodiment one is：Deposition reaction
Device is perpendicular to be inserted in stove cellar for storing things 1；The inside of described deposition reactor material reaction section 2 is provided with high temperature resistant central tube 13, and material 11 is set
Put in the interlayer between high temperature resistant central tube 13 and deposition reactor material reaction section 2；Described deposition reactor material is anti-
The lower end of section 2 is answered to reveal the outside for being located at furnace bottom 1-4, and it is outside with being provided with lower cooling jacket 2-2, bottom is provided with lower outlet method
Blue 2-1；The barrel of described high temperature resistant central tube 13 opens up square hole, and the size in hole is any, and remaining part and annexation are equal
It is identical with embodiment one.
Embodiment seven：
Referring to Figure 13 and Figure 14, the difference of present embodiment and embodiment two is：Described stove
The hole opened up at left and right sides of wall 1-1 is staggered front to back setting, and described deposition reactor in it is two-sided it is single it is horizontal be inserted in perforate,
Remaining part and annexation are identical with embodiment two.
Embodiment eight：
Referring to Figure 15 and Figure 16, present embodiment dwelling different from embodiment two is：Described stove
The hole opened up at left and right sides of wall 1-1 is oppositely arranged, and described deposition reactor in it is two-sided it is single it is horizontal be inserted in perforate, remaining
Part and annexation are identical with embodiment two.
It is described above, only to illustrate the technical solution of the utility model and unrestricted, those of ordinary skill in the art couple
The other modifications or equivalent substitution that the technical solution of the utility model is made, without departing from technical solutions of the utility model
Spirit and scope, it all should cover among right of the present utility model.
Claims (8)
1. a kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon, it is characterised in that：It is stored by stove, deposition reaction
Device, heat storage, burner, airduct, air blower, reversal valve and draft mechanism into；Described stove cellar for storing things is made up of furnace wall and furnace roof；Surrounding
Stove coping is provided with furnace roof；Furnace wall is provided with burner and matched heat storage；Airduct, wind are connected with described burner
Pipe is connected with air blower and air-introduced machine, and the connection airduct between air blower and air-introduced machine is provided with reversal valve；Described deposition is anti-
Device is answered to be plugged in stove cellar for storing things；Described deposition reactor deposits section by deposition reactor material reaction section and deposition reactor product
Form；Deposition reactor material reaction section is welded to connect with deposition reactor product deposition section, and deposition reactor product deposits
The outer cover of section is provided with cooling jacket, and material is arranged in deposition reactor material reaction section；Described deposition reactor material
Conversion zone is arranged on the inside at stove cellar for storing things, and described deposition reactor product deposition section is arranged on the outside at stove cellar for storing things.
2. a kind of big yield low cost production according to claim 1 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：Described furnace wall is provided with several perforates；Described deposition reactor is horizontal to be inserted in perforate, and wherein deposition reactor material is anti-
Answer section to be arranged on the inner side of furnace wall, and be erected on furnace bottom reactor supporting brick, the furnace bottom reactor supporting brick is arranged on surrounding
Furnace wall surrounds the bottom in space, and deposition reactor product deposition Duan Lu is located at the outside of furnace wall.
3. a kind of big yield low cost production according to claim 2 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：Described deposition reactor in one side is single, one side is double, it is two-sided single or it is two-sided it is double in the form of horizontal be inserted in furnace wall
On.
4. a kind of big yield low cost production according to claim 1 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：Described furnace roof is provided with several perforates；Described deposition reactor is perpendicular to be inserted in perforate, and wherein deposition reactor material is anti-
Section is answered to be arranged on the inner side of furnace roof, deposition reactor product deposition Duan Lu is located at the outside of furnace roof.
5. a kind of big yield low cost production according to claim 4 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：The inside of described deposition reactor material reaction section is provided with high temperature resistant handbag；Material is arranged in high temperature resistant handbag.
6. a kind of big yield low cost production according to claim 5 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：The barrel of described high temperature resistant handbag offers hole, and the hole is circular hole, square hole or irregular hole.
7. a kind of big yield low cost production according to claim 4 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：The inside of described deposition reactor material reaction section is provided with high temperature resistant central tube, material be arranged on high temperature resistant central tube with
In interlayer between deposition reactor material reaction section；The lower end dew of described deposition reactor material reaction section is located at outside furnace bottom
Portion, and its outside is provided with lower cooling jacket, bottom is provided with lower outlet(discharge) flange.
8. a kind of big yield low cost production according to claim 7 aoxidizes the evaporation deposition equipment of sub- silicon, its feature exists
In：The barrel of described high temperature resistant central tube offers hole, and the hole is circular hole, square hole or irregular hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720796358.9U CN206970228U (en) | 2017-07-04 | 2017-07-04 | A kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720796358.9U CN206970228U (en) | 2017-07-04 | 2017-07-04 | A kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon |
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| Publication Number | Publication Date |
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| CN206970228U true CN206970228U (en) | 2018-02-06 |
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ID=61407151
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720796358.9U Expired - Fee Related CN206970228U (en) | 2017-07-04 | 2017-07-04 | A kind of big yield low cost production aoxidizes the evaporation deposition equipment of sub- silicon |
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| CN (1) | CN206970228U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107176609A (en) * | 2017-07-04 | 2017-09-19 | 山西科德技术陶瓷有限公司 | A kind of evaporation deposition equipment of the sub- silicon of big yield low cost production oxidation |
-
2017
- 2017-07-04 CN CN201720796358.9U patent/CN206970228U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107176609A (en) * | 2017-07-04 | 2017-09-19 | 山西科德技术陶瓷有限公司 | A kind of evaporation deposition equipment of the sub- silicon of big yield low cost production oxidation |
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