CN206628448U - Silicon chip of solar cell flexibility and angularity detection means - Google Patents

Silicon chip of solar cell flexibility and angularity detection means Download PDF

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Publication number
CN206628448U
CN206628448U CN201720395791.1U CN201720395791U CN206628448U CN 206628448 U CN206628448 U CN 206628448U CN 201720395791 U CN201720395791 U CN 201720395791U CN 206628448 U CN206628448 U CN 206628448U
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China
Prior art keywords
silicon chip
solar cell
support plate
lower support
detection case
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Withdrawn - After Issue
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CN201720395791.1U
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Chinese (zh)
Inventor
孙铁囤
姚伟忠
汤平
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Changzhou EGing Photovoltaic Technology Co Ltd
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Changzhou EGing Photovoltaic Technology Co Ltd
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Abstract

The utility model provides a kind of silicon chip of solar cell flexibility and angularity detection means, silicon chip of solar cell is placed on conveying mechanism by feed mechanism, conveying mechanism drives silicon chip of solar cell to be moved to detection case direction, when photoelectric sensor has detected that silicon chip of solar cell is reached above lower support plate, lifting cylinder drives lower support plate to move upwards, lower support plate is covered in the opening of detection case, no light conditions are in inside detection case;Start scan lamp, the light of scan lamp is irradiated on silicon chip of solar cell, it is imaged by optical system into CCD camera, and send image processing system and imaging is handled, and it is compared with the image of standard, comparison result is sent to host computer, shown by display, so as to realize the detection of flexibility and angularity.

Description

Silicon chip of solar cell flexibility and angularity detection means
Technical field
Technical field of solar batteries is the utility model is related to, after being polished more particularly to a kind of silicon chip of solar cell Flexibility and angularity detection means.
Background technology
The main raw material(s) of solar battery sheet is silicon chip, during silicon chip has suddenly as semiconductor devices its lattice surface Only characteristic, on surface, outermost each silicon atom has unsaturated dangling bonds, and corresponding electron energy state is referred to as surface state, To ambient atmosphere extreme sensitivity, surface recombination can occur with photo-generated carrier, reduce collection rate of the p-n junction to minority carrier, So as to have a strong impact on the stability of solar cell, electric current, voltage and efficiency.
Therefore, saturation silicon chip is passed through, it is necessary to the progress passivating back processing of raw material silicon chip when making solar cell The dangling bonds on surface, interface state density is reduced, meanwhile, the presence of passivating film can also avoid introducing of the impurity on top layer, reduce Surface-active, to reduce the recombination-rate surface of minority carrier, improves the service life of battery;In addition, passivating film is in silicon Piece surface forms surface knot, reduces the loss of surface recombination, improves the collection rate of surface photo-generated carrier, improves the length of battery Wave effect.
Need to carry out cleaning polishing processing to silicon chip carrying out passivating back before processing, be polished due to silicon polished It is preceding that there is certain flexibility and angularity, if flexibility and angularity have exceeded defined scope, at follow-up technique Need to overturn silicon chip during reason, because surface irregularity is using in the adsorbing mechanisms such as sucker crawl silicon chip, easily will Silicon chip is thrown away, and is caused the broken of silicon chip, is produced substantial amounts of silicon chip fragment, on the one hand cause the serious waste of raw material, the opposing party Face has a strong impact on production efficiency.
Utility model content
Technical problem to be solved in the utility model is:In order to overcome deficiency of the prior art, the utility model carries For a kind of silicon chip of solar cell flexibility and angularity detection means.
The utility model solves its technical problem technical scheme to be taken:A kind of silicon chip of solar cell flexibility With angularity detection means, including testing agency, flexibility and warpage for silicon chip of solar cell detect;Feed mechanism, Silicon chip of solar cell on gripping conveyor structure is placed on the testing agency;And cutting agency, for that will examine The silicon chip of solar cell completed is surveyed to take away from testing agency;
The testing agency includes support, and conveying mechanism, hoisting mechanism and the detection case being arranged on support, described Conveying mechanism is used for support silicon chip of solar cell to be detected and circulated from feed mechanism side by detection case to cutting agency Side, the hoisting mechanism include lower support plate and are arranged on the lifting cylinder of lower support plate bottom, described in the lifting cylinder drive Lower support plate moves up and down, and the conveying mechanism above the lower support plate is provided with photoelectric sensor, and photoelectric sensor is for detection No to have silicon chip of solar cell to move to above lower support plate, the detection case is located at the surface of the lower support plate, and the inspection Measuring tank is the cylindricality empty van of lower ending opening, and the size of the lower support plate will can at least cover the opening of the detection case lower end, Be provided with the image scanning assembly parallel with the lower support plate inside the detection case, described image scan components including upper cover plate, Scan lamp, reflection shield, reflective mirror, CCD camera, image processing system, host computer and display, install on the host computer There is the image processing software supporting with image processing system, the scan lamp is located at what the upper cover plate was formed with the detection case In imaging chamber, and connected positioned at the top of the upper cover plate, the scan lamp, reflection shield, reflective mirror with CCD camera optics, institute State CCD camera and described image processing system, host computer and display connection.Described image scan components are used for the sun Can cell silicon chip scanning imagery, upper cover plate be transparent glass material, for transmission scan lamp light by scaned surface too Positive energy cell silicon chip imaging.
Further, the feed mechanism and cutting agency use three ambulacras.
Further, in order to ensure the fluency of operation, avoid blocking, the shaft section of the lower support plate is up-small and down-big etc. Waist is trapezoidal, and the inwall of the detection case opening is and the download plate shape identical isosceles trapezoid.Under isosceles trapezoid is easy to Disengaging of the support plate in detection case.
Further, in order to ensure stability and reduce parts action process in noise, the detection case lower ending opening With on the contact surface of the lower support plate circumferentially arranged with sealing cushion.The height H1 of sealing cushion is greater than solar cell The thickness H2 of silicon chip.On the one hand sealing cushion plays sealing function prevents ambient from entering, and influences image imaging effect, keeps away Exempt from the blurring of image border, improve the precision of detection;In addition, when support plate lifts instantly, lower support plate and detection case lower end The inwall of opening can produce collision, easily cause the damage of the optical element inside detection case or cause light path transmitting accuracy to drop Low, therefore, sealing cushion can effectively reduce lower support plate and influence of the detection case shock to optical system, be further ensured that inspection The precision of survey;In order to avoid lower support plate and upper cover plate crush silicon chip of solar cell, it is necessary to ensure distance therebetween More than the thickness H1 of silicon chip of solar cell, therefore, sealing cushion also acts as the effect of spacing positioning.
A kind of silicon chip of solar cell flexibility and warpage detection method, including the bending of above-mentioned silicon chip of solar cell Degree and angularity detection means, it is further comprising the steps of:
Silicon chip of solar cell is placed on conveying mechanism by feed mechanism, and conveying mechanism drives silicon chip of solar cell to inspection Measuring tank direction is moved, when photoelectric sensor has detected that silicon chip of solar cell is reached above lower support plate, under lifting cylinder drives Support plate is moved from bottom to top, lower support plate is covered on the lower ending opening of the detection case, and no light conditions are in inside detection case; Then, start scan lamp, scan lamp is moved to opposite side from the side of detection case, the light of scan lamp is irradiated to solar-electricity On the silicon chip of pond, CCD camera imaging, CCD camera institute are reflected into successively by silicon chip of solar cell, reflection shield and reflective mirror Send image processing system into image, image processing system handled silicon chip of solar cell imaging, and with mark Accurate image is compared, and comparison result is sent to host computer, shown by display;Meanwhile installation can be passed through The image processing software supporting with image processing system on host computer carries out the adjustment of parameter and the analysis contrast of data.
The beneficial effects of the utility model are:Bending after a kind of silicon chip of solar cell polishing provided by the utility model Degree and angularity detection means and detection method, using the principle of imaging to silicon chip of solar cell scanning imagery, imaging is tied The image of fruit and standard is contrasted, so as to judge whether silicon chip of solar cell meets the requirement of flexibility and angularity, inspection Survey convenient and swift.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of the best embodiment of the utility model;
Fig. 2 is detection view;
Fig. 3 is Cleaning Principle schematic diagram.
In figure:1st, silicon chip of solar cell, 2, conveying mechanism, 3, lifting cylinder, 4, lower support plate, 5, detection case, 6, upper lid Plate, 7, image processing system, 8, host computer, 9, scan lamp, 10, sealing cushion, 11, standard silicon chip, 12, warpage silicon chip.
Embodiment
The utility model is described in detail presently in connection with accompanying drawing.This figure is simplified schematic diagram, only in a schematic way Illustrate basic structure of the present utility model, therefore it only shows the composition relevant with the utility model.
As shown in Figure 1-2, a kind of flexibility of silicon chip of solar cell 1 and angularity detection means, including testing agency, use Detected in the flexibility and warpage of silicon chip of solar cell 1;Feed mechanism, for the solar cell on gripping conveyor structure 2 Silicon chip 1 is placed in the testing agency;And cutting agency, for the silicon chip of solar cell 1 completed will to be detected from detection Taken away in mechanism;The testing agency includes support, and conveying mechanism 2, hoisting mechanism and the detection case being arranged on support 5, the conveying mechanism 2 be used for support silicon chip of solar cell 1 to be detected from feed mechanism side by detection case 5 circulate to Cutting agency side, the hoisting mechanism include lower support plate 4 and are arranged on the lifting cylinder 3 of the lower bottom of support plate 4, the lifting gas Cylinder 3 drives the lower support plate 4 to move up and down, and the conveying mechanism 2 of the lower top of support plate 4 is provided with photoelectric sensor, photoelectric transfer For sensor for detecting whether there is silicon chip of solar cell 1 to move to the lower top of support plate 4, the detection case 5 is located at the lower support plate 4 Surface, and the detection case 5 is the cylindricality empty van of lower ending opening, and the size of the lower support plate 4 will can at least cover institute The opening of the lower end of detection case 5 is stated, the inside of detection case 5 is provided with the image scanning assembly parallel with the lower support plate 4, the figure As scan components include upper cover plate 6, scan lamp 9, reflection shield, reflective mirror, CCD camera, image processing system 7, the and of host computer 8 Display, the image processing software supporting with image processing system 7 is installed on the host computer 8, the scan lamp 9 is located at It is the scan lamp 9, anti-in the imaging chamber that the upper cover plate 6 and the detection case 5 are formed, and positioned at the top of the upper cover plate 6 Light shield, reflective mirror connect with CCD camera optics, the CCD camera and described image processing system 7, host computer 8 and display Connection.Described image scan components are used for the scanning imagery of silicon chip of solar cell 1, and upper cover plate 6 is transparent glass material Matter, the silicon chip of solar cell 1 of scaned surface is imaged for the light through scan lamp 9.
Further, the feed mechanism and cutting agency use three ambulacras.
Further, in order to ensure the fluency of operation, avoid blocking, the shaft section of the lower support plate 4 is up-small and down-big Isosceles trapezoid, the inwall of the opening of detection case 5 are and the lower shape identical isosceles trapezoid of support plate 4.Isosceles trapezoid is just In disengaging of the lower support plate 4 in detection case 5.
Further, in order to ensure stability and reduce parts action process in noise, the lower ending opening of detection case 5 With on the contact surface of the lower support plate 4 circumferentially arranged with sealing cushion 10.The height H1 of sealing cushion 10 is greater than the sun The thickness H2 of energy cell silicon chip 1.The sealing one side of cushion 10 plays sealing function and prevents ambient from entering, influence image into As effect, the blurring of image border is avoided, improves the precision of detection;In addition, when support plate 4 lifts instantly, lower support plate 4 with The inwall of the lower ending opening of detection case 5 can produce collision, easily cause the damage of the optical element inside detection case 5 or cause light Road transmitting accuracy reduces, and therefore, sealing cushion 10 can effectively reduce lower support plate 4 and be hit with detection case 5 to optical system Influence, be further ensured that the precision of detection;In order to avoid lower support plate 4 and upper cover plate 6 crush silicon chip of solar cell 1, it is necessary to Ensure thickness H1 of the distance therebetween more than silicon chip of solar cell 1, therefore, it is spacing fixed that sealing cushion 10 also acts as The effect of position.
A kind of flexibility of silicon chip of solar cell 1 and warpage detection method, including above-mentioned silicon chip of solar cell 1 are curved Curvature and angularity detection means, it is further comprising the steps of:
Silicon chip of solar cell 1 is placed on conveying mechanism 2 by feed mechanism, and conveying mechanism 2 drives silicon chip of solar cell 1 Moved to the direction of detection case 5, when photoelectric sensor has detected that silicon chip of solar cell 1 reaches lower 4 top of support plate, lifting cylinder 3 drive lower support plate 4 to move from bottom to top, lower support plate 4 is covered on the lower ending opening of the detection case 5, at the inside of detection case 5 In no light conditions;Then, start scan lamp 9, scan lamp 9 is moved to opposite side, the light of scan lamp 9 from the side of detection case 5 Line is irradiated on silicon chip of solar cell 1, and CCD is reflected into successively by silicon chip of solar cell 1, reflection shield and reflective mirror Camera imaging, CCD camera institute send image processing system 7 into image, image processing system 7 to the institute of silicon chip of solar cell 1 into Picture handled, and be compared with the image of standard, comparison result sent to host computer 8, carried out by display Display;Meanwhile it can be joined by the image processing software supporting with image processing system 7 on host computer 8 Several adjustment and the analysis contrast of data.
As shown in figure 3, when silicon chip of solar cell 1 has bending and warpage, the profile chi of its warpage silicon chip 12 imaging Very little L2 is certainly less than the appearance and size L1 of standard silicon chip 11, deformation rate is calculated, if in allowed limits, need not be located Reason, if greater than the requirement of setting, then needs that warpage silicon chip 12 is corrected to or scrapped processing.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, by above-mentioned description, related work Personnel can carry out various changes and amendments in without departing from the scope of the utility model completely.This item utility model Technical scope is not limited to the content on specification, it is necessary to determines its technical scope according to right.

Claims (4)

1. a kind of silicon chip of solar cell flexibility and angularity detection means, it is characterised in that:Including testing agency, for too The flexibility of positive energy cell silicon chip and warpage detection;Feed mechanism, the detection is placed on for capturing silicon chip of solar cell In mechanism;And cutting agency, taken away for the silicon chip of solar cell completed will to be detected from testing agency;
The testing agency includes support, and conveying mechanism, hoisting mechanism and the detection case being arranged on support, the conveying Mechanism is used for support silicon chip of solar cell to be detected and circulated from feed mechanism side by detection case to cutting agency side, The hoisting mechanism includes lower support plate and is arranged on the lifting cylinder of lower support plate bottom, and the lifting cylinder drives the lower support plate Move up and down, the conveying mechanism above the lower support plate is provided with photoelectric sensor, and the detection case is located at the lower support plate Surface, and the detection case is the cylindricality empty van of lower ending opening, the size of the lower support plate will can at least cover the inspection The opening of measuring tank lower end, the detection case inside are provided with the image scanning assembly parallel with the lower support plate, described image scanning Component includes upper cover plate, scan lamp, reflection shield, reflective mirror, CCD camera, image processing system, host computer and display, institute State and the image processing software supporting with image processing system be installed on host computer, the scan lamp be located at the upper cover plate with In the imaging chamber that the detection case is formed, and positioned at the top of the upper cover plate, the scan lamp, reflection shield, reflective mirror and CCD Camera opticses connect, the CCD camera and described image processing system, host computer and display connection.
2. silicon chip of solar cell flexibility as claimed in claim 1 and angularity detection means, it is characterised in that:On described Material mechanism and cutting agency use three ambulacras.
3. silicon chip of solar cell flexibility as claimed in claim 1 and angularity detection means, it is characterised in that:Under described The shaft section of support plate is up-small and down-big isosceles trapezoid, and the inwall of the detection case opening is identical with the download plate shape Isosceles trapezoid.
4. silicon chip of solar cell flexibility and angularity detection means as described in claim any one of 1-3, its feature exist In:The detection case lower ending opening on the contact surface of the lower support plate circumferentially arranged with sealing cushion, the sealing with buffering The height H1 of layer is more than the thickness H2 of silicon chip of solar cell.
CN201720395791.1U 2017-04-14 2017-04-14 Silicon chip of solar cell flexibility and angularity detection means Withdrawn - After Issue CN206628448U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106876298A (en) * 2017-04-14 2017-06-20 常州亿晶光电科技有限公司 Silicon chip of solar cell flexibility and angularity detection means and detection method
TWI647446B (en) * 2018-04-25 2019-01-11 南韓商De&T股份有限公司 Flexible display panel inspection jig and inspection device using the same
CN112050719A (en) * 2020-08-31 2020-12-08 华虹半导体(无锡)有限公司 Wafer warping degree detection device and method
CN113532363A (en) * 2021-08-24 2021-10-22 惠州市兴利嘉科技有限公司 Earphone head-mounted steel belt bending degree detection device accurate in positioning
CN114264241A (en) * 2021-11-26 2022-04-01 翰博高新材料(合肥)股份有限公司 Measurement system and measurement method for measuring mini-LED lamp panel warping degree on line

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106876298A (en) * 2017-04-14 2017-06-20 常州亿晶光电科技有限公司 Silicon chip of solar cell flexibility and angularity detection means and detection method
WO2018188654A1 (en) * 2017-04-14 2018-10-18 常州亿晶光电科技有限公司 Device and method for detecting bending and warping of silicon wafer of solar cell
CN106876298B (en) * 2017-04-14 2023-04-25 常州亿晶光电科技有限公司 Device and method for detecting bending degree and warping degree of solar cell silicon wafer
TWI647446B (en) * 2018-04-25 2019-01-11 南韓商De&T股份有限公司 Flexible display panel inspection jig and inspection device using the same
CN110398198A (en) * 2018-04-25 2019-11-01 De&T株式会社 Flexible display panel inspection fixture and the check device for utilizing it
CN112050719A (en) * 2020-08-31 2020-12-08 华虹半导体(无锡)有限公司 Wafer warping degree detection device and method
CN113532363A (en) * 2021-08-24 2021-10-22 惠州市兴利嘉科技有限公司 Earphone head-mounted steel belt bending degree detection device accurate in positioning
CN114264241A (en) * 2021-11-26 2022-04-01 翰博高新材料(合肥)股份有限公司 Measurement system and measurement method for measuring mini-LED lamp panel warping degree on line

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