CN206622969U - Concretion abrasive refiner discs - Google Patents

Concretion abrasive refiner discs Download PDF

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Publication number
CN206622969U
CN206622969U CN201720331500.2U CN201720331500U CN206622969U CN 206622969 U CN206622969 U CN 206622969U CN 201720331500 U CN201720331500 U CN 201720331500U CN 206622969 U CN206622969 U CN 206622969U
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China
Prior art keywords
abrasive
solidified
concretion
abrasive grinding
refiner discs
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CN201720331500.2U
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Chinese (zh)
Inventor
朱联烽
田多胜
邓宏念
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Dongguan Zhongwei Lihe Semiconductor Technology Co ltd
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Dongguan Zhongwei Nano Technology Co Ltd
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Abstract

The utility model discloses a kind of concretion abrasive refiner discs, including mill pedestal and solidified abrasive grinding unit, for multiple solidified abrasive grinding cell distributions on the mill pedestal, the milling area of each solidified abrasive grinding unit is 1~9mm2, the height of the solidified abrasive grinding unit is 1~5mm, and total milling area of multiple solidified abrasive grinding units is 0.1~0.5 with the area ratio of the mill pedestal upper surface area;The utility model is ground the pressure of workpiece and mill by reducing the abradant surface area of concretion abrasive to increase, and big pressure grinding is realized under small pressure condition so as to realize.

Description

Concretion abrasive refiner discs
Technical field
Hard brittle material grinding and polishing technical field is the utility model is related to, more particularly to a kind of concretion abrasive refiner discs.
Background technology
Plane lapping technique be workpiece planarization/polishing must be through technique.By mechanical lapping can make workpiece surface cut and Spot is able to remove and obtains uniform relatively low surface roughness.Hard brittle material plane lapping method have free abrasive grinding and Two kinds of lapping modes of solidified abrasive grinding.By abrasive material be prepared into that fluid slurry is ground for free grinding;Abrasive material is used viscous Knot agent is fixed, and the mode that the raised abrasive material of abutment surface is ground is ground for consolidation.For free type grinding, consolidation grinding Mode is higher to the utilization ratio of abrasive material, not only saves a large amount of expensive abrasive materials (such as diamond), also reduces liquid waste processing Work, and the cleaning of workpiece or equipment, simplify processing technology.
Abrasive size and the proportional relation of workpiece target roughness, it is thick with the less abrasive lapping of particle diameter, the surface of acquisition Rugosity is smaller, but material removal efficiency is low, and vice versa.Therefore, plane lapping is divided into corase grind and fine grinding twice technique, first with thick The surface defect except flat work pieces is ground off, workpiece rapid batch is planarized (workpiece roughness is 1.0~0.3um after corase grind), The roughness of workpiece is further reduced with fine grinding technology again, its roughness is down to 0.05~0.02um.Work after fine grinding processing Part could enter glossing, roughness is reached 0.6~0.1nm.
For applying the solidified abrasive grinding disk in rough grinding process, comparative maturity, such mill use technology at present Abrasive size be more than 20um.And the solidified abrasive grinding mode applied to fine grinding then remains significant technology issues, this Class mill is using the particle diameter of abrasive material in 1~10um.For concretion abrasive refiner discs, it is necessary to apply very big pressure just to workpiece It can realize that material removes, such as 2~5kg/cm2.Specifically a 9B milling apparatus (grinding dish external diameter be 600~ 700mm), 2 cun of sapphire sheets of batch processing 35 piece are, it is necessary to apply 1.4~3.5 tons of pressure, high precision plane milling apparatus without Method applies so big pressure, and excessive pressure easily causes erratic star wheel to damage and be ground workpiece chipping.
To sum up, existing plane lapping equipment has the problem of can not being ground under big pressure condition to workpiece.
Utility model content
The purpose of this utility model is to provide a kind of concretion abrasive refiner discs, to solve to ask existing for above-mentioned prior art Topic, the pressure of workpiece and mill is ground to increase by reducing the abradant surface area of concretion abrasive, so as in small pressure condition Under realize the grinding of big pressure.
To achieve the above object, the utility model provides following scheme:
The utility model provides a kind of concretion abrasive refiner discs, including mill pedestal and solidified abrasive grinding unit, multiple The solidified abrasive grinding cell distribution is on the mill pedestal, and each the milling area of the solidified abrasive grinding unit is 1~9mm2, the height of the solidified abrasive grinding unit is 1~5mm, total abradant surface of multiple solidified abrasive grinding units The area ratio of product and the mill pedestal upper surface area is 0.1~0.5.
Preferably, in addition to the water soluble bulk bed of material, the water soluble bulk bed of material are filled in multiple concretion abrasives In gap between grinding unit.
Preferably, the mill pedestal is annular, and the mill pedestal is aluminum alloy material.
Preferably, the solidified abrasive grinding unit is cylinder.
Preferably, multiple solidified abrasive grinding units are evenly distributed on the whole mill pedestal by concentric circular fashion Upper surface on.
Preferably, the abrasive material in the solidified abrasive grinding unit is diamond, and the particle diameter of diamond is 0.5~10um.
The utility model achieves following technology beneficial effect relative to prior art:
1st, concretion abrasive refiner discs provided by the utility model, the area for reducing solidified abrasive grinding unit abradant surface are close Degree, make to be ground the pressure increase between workpiece and abradant surface, it is solid so as to be realized under less equipment pressure condition Knot abrasive material refines to grinding work-piece.
2nd, concretion abrasive refiner discs provided by the utility model, are filled out between solidified abrasive grinding unit filled with water solubility Charge, water lubrication assistant need to be only added to cool, during being ground to plane lapping workpiece, water soluble bulk material can be slight Dissolving is sunk, and grinding work-piece is contacted with abradant surface, makes that the actual loading area of grinding work-piece is smaller, and pressure is larger.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art In the required accompanying drawing used be briefly described, it should be apparent that, drawings in the following description are only of the present utility model Some embodiments, for those of ordinary skill in the art, without having to pay creative labor, can also basis These accompanying drawings obtain other accompanying drawings.
Fig. 1 is the cross-sectional view of concretion abrasive refiner discs in the utility model;
Fig. 2 is the overlooking the structure diagram of concretion abrasive refiner discs in the utility model;
In figure:1- mills pedestal, 2- solidified abrasive grindings unit, the 3- water soluble bulk bed of materials.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made The every other embodiment obtained, belong to the scope of the utility model protection.
The purpose of this utility model is to provide a kind of concretion abrasive refiner discs, to solve the problems, such as that prior art is present.
To enable above-mentioned purpose of the present utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings and tool Body embodiment is described in further detail to the utility model.
The utility model provides a kind of concretion abrasive refiner discs, as shown in Figure 1-2, including mill pedestal 1 and concretion abrasive Grinding unit 2, mill pedestal 1 are the annular that material is aluminum alloy material, and solidified abrasive grinding unit 2 is cylinder, multiple Solidified abrasive grinding unit 2 is evenly distributed on by concentric circular fashion on the upper surface of whole mill pedestal 1, and each concretion abrasive is ground The milling area for grinding unit 2 is 1~9mm2, the height of solidified abrasive grinding unit 2 is 1~5mm, multiple solidified abrasive grinding lists Total milling area of member 2 is 0.1~0.5 with the area ratio of the upper surface area of mill pedestal 1, in solidified abrasive grinding unit 2 Abrasive material is diamond, and the particle diameter of diamond is 0.5~10um, and reducing solidified abrasive grinding unit 2 by above-mentioned setting grinds The area density in face, make to be ground the pressure increase between workpiece and abradant surface;Between between multiple solidified abrasive grinding units 2 It is also filled with the water soluble bulk bed of material 3 in gap, water soluble bulk material is the mixture of polyvinyl alcohol and carborundum, carborundum particle diameter For 0.5~10um;During being ground to plane lapping workpiece, the water soluble bulk bed of material 3 slightly can sink in dissolving, make grinding Workpiece contacts with abradant surface, makes that the actual loading area of grinding work-piece is smaller, and pressure is larger.
Embodiment one,
Concrete structure based on above-mentioned concretion abrasive refiner discs is set, and the present embodiment is done specifically with the abrasive disk size of a 6B Illustrate, wherein the size of mill pedestal 1:External diameter 380mm, internal diameter 146mm;The abradant surface of single solidified abrasive grinding unit 2 is straight Footpath is 3mm, and the abradant surface area of cylindrical solidified abrasive grinding unit 2 is 7.07mm2, the height of solidified abrasive grinding unit 2 Spend for 2mm.
In the present embodiment, the diamond abrasive particle diameter that solidified abrasive grinding unit contains is 3um, available for sapphire plain film Fine gtinding, typical surface roughness (Ra) is 30~50nm after grinding.
Polyvinyl alcohol, silicon carbide blend in the present embodiment in water-soluble inserts, are calculated by mass percentage, carbonization The ratio of silicon is 97wt%, and carborundum particle diameter is 1.5um.
Flat work pieces are processed using the concretion abrasive refiner discs, need to only add water lubrication assistant to cool, grind During mill, the water soluble bulk bed of material 3 slightly can sink in dissolving, flat work pieces is contacted with abradant surface, make the reality of flat work pieces Border lifting surface area is smaller, specific pressure multiplication factor and the negatively correlated relation of grinding unit abundance;The detailed data such as institute of table 1 Show.
The relation of table 1. solidified abrasive grinding cell distribution amount and pressure multiplication factor in 6B grinding cards
It should be noted that arrangement mode of the solidified abrasive grinding unit on mill pedestal is not limited only to concentric circular fashion It is uniformly distributed, as long as meeting milling area and mill pedestal upper surface area ratio, also may be used using other branch's form arrangements.
The utility model applies specific case and principle of the present utility model and embodiment is set forth, and the above is real The explanation for applying example is only intended to help and understands method and its core concept of the present utility model;Meanwhile for the general of this area Technical staff, according to thought of the present utility model, there will be changes in specific embodiments and applications.To sum up, This specification content should not be construed as to limitation of the present utility model.

Claims (6)

  1. A kind of 1. concretion abrasive refiner discs, it is characterised in that:It is multiple described solid including mill pedestal and solidified abrasive grinding unit Abrasive lapping cell distribution is tied on the mill pedestal, the milling area of each solidified abrasive grinding unit for 1~ 9mm2, the height of the solidified abrasive grinding unit is 1~5mm, total milling area of multiple solidified abrasive grinding units Area ratio with the mill pedestal upper surface area is 0.1~0.5.
  2. 2. concretion abrasive refiner discs according to claim 1, it is characterised in that:Also include the water soluble bulk bed of material, it is described The water soluble bulk bed of material is filled in the gap between multiple solidified abrasive grinding units.
  3. 3. concretion abrasive refiner discs according to claim 1, it is characterised in that:The mill pedestal is annular, described Mill pedestal is aluminum alloy material.
  4. 4. concretion abrasive refiner discs according to claim 3, it is characterised in that:The solidified abrasive grinding unit is cylinder Body.
  5. 5. concretion abrasive refiner discs according to claim 4, it is characterised in that:Multiple solidified abrasive grinding units are pressed Concentric circular fashion is evenly distributed on the upper surface of the whole mill pedestal.
  6. 6. concretion abrasive refiner discs according to claim 1, it is characterised in that:Mill in the solidified abrasive grinding unit Expect that for diamond, the particle diameter of diamond is 0.5~10um.
CN201720331500.2U 2017-03-31 2017-03-31 Concretion abrasive refiner discs Active CN206622969U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720331500.2U CN206622969U (en) 2017-03-31 2017-03-31 Concretion abrasive refiner discs

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Application Number Priority Date Filing Date Title
CN201720331500.2U CN206622969U (en) 2017-03-31 2017-03-31 Concretion abrasive refiner discs

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CN206622969U true CN206622969U (en) 2017-11-10

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020007015A1 (en) * 2018-07-05 2020-01-09 东莞市中微纳米科技有限公司 Diamond composite material, preparation method therefor, and application thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020007015A1 (en) * 2018-07-05 2020-01-09 东莞市中微纳米科技有限公司 Diamond composite material, preparation method therefor, and application thereof

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Address after: 523000 Room 403, 405 and 407, building 1, No. 6, Gongye South Road, Songshanhu high tech Industrial Development Zone, Dongguan City, Guangdong Province

Patentee after: Dongguan Zhongwei Lihe Semiconductor Technology Co.,Ltd.

Address before: 523000 Room 403, 405 and 407, building 1, No. 6, Gongye South Road, Songshanhu high tech Industrial Development Zone, Dongguan City, Guangdong Province

Patentee before: DONGGUAN CITY ZONEWE NANO TECHNOLOGY Co.,Ltd.

CP01 Change in the name or title of a patent holder