CN206618382U - Interferometer measuring system positions gauge head - Google Patents
Interferometer measuring system positions gauge head Download PDFInfo
- Publication number
- CN206618382U CN206618382U CN201720248088.8U CN201720248088U CN206618382U CN 206618382 U CN206618382 U CN 206618382U CN 201720248088 U CN201720248088 U CN 201720248088U CN 206618382 U CN206618382 U CN 206618382U
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- dial framework
- measuring system
- interferometer
- adjusting support
- dimensional adjusting
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Interferometer measuring system positions gauge head, belong to optical processing technology field, in order to solve the problem of existing interferometer measuring system measurement is complex and high cost, it includes double contact measurement tables, dial framework and six-dimensional adjusting support, dial framework upper surface sets groove, double contact measurement tables are arranged in the groove of dial framework, and the lower end of dial framework is threadedly coupled with six-dimensional adjusting support, and six-dimensional adjusting support can adjust the exact position of dial framework；Six-dimensional adjusting support is threadedly coupled with the grating scale objective table on interferometer guide rail；Interferometer measuring system positioning gauge head in the utility model, simple in construction, cost of manufacture is cheap, and ensure that the positioning precision required for measuring system；There is extensive adaptability in interferometer measurement positioning.
Description
Technical field
The utility model is related to a kind of interferometer measuring system positioning gauge head, belongs to optical processing technology field.
Background technology
Existing interferometer measuring system spacing is unable to reach expected measurement effect and precision, reaches the measurement of measurement accuracy
System cost is too high.By taking the Aspherical-surface testing with compensator as an example, it needs to be determined that compensator minute surface and aspheric when building light path
The accurate distance on the summit in face, current existing technology is to build three dimensional virtual models by laser tracker, uses tracking
Bulb carrys out the space coordinate of positioning compensation device minute surface and aspheric vertex of surface, and to calculate at the distance between 2 points, this method is not only
It is with high costs, and application method is complicated, and measurement process is complicated.
Utility model content
The utility model is dry there is provided one kind in order to solve the problem of existing interferometer measuring system measurement is complex and high cost
Interferometer measuring system positions gauge head.
The technical solution of the utility model is：
Interferometer measuring system positions gauge head, it is characterized in that, it includes double contact measurement tables, dial framework and six-dimensional adjusting support,
Dial framework upper surface sets groove, and double contact measurement tables are arranged in the groove of dial framework, lower end and the six-dimensional adjusting support screw thread of dial framework
Connection, six-dimensional adjusting support can adjust the exact position of dial framework.
Six-dimensional adjusting support is threadedly coupled with the grating scale objective table on interferometer guide rail.
Interferometer measuring system positioning gauge head in the utility model, simple in construction, cost of manufacture is cheap, and can protect
The accuracy requirement of interferometer measurement alignment system is demonstrate,proved, can most importantly ensure the extensive adaptation in interferometer measurement is positioned
Property.
Brief description of the drawings
Fig. 1 is the side view that the utility model interferometer measuring system positions gauge head；
In figure：1st, double contact measurement tables；2nd, dial framework；3rd, six-dimensional adjusting support；4th, grating scale objective table.
Embodiment
The utility model will be further described below in conjunction with the accompanying drawings.
As shown in figure 1, interferometer measuring system positions gauge head, including double contact measurement tables 1, dial framework 2 and six-dimensional adjusting support
3.The upper surface of dial framework 2 sets groove, and double contact measurement tables 1 are arranged in the groove of dial framework 2, and the lower end of dial framework 2 is provided with screw thread, its
It is threadedly coupled with six-dimensional adjusting support 3, six-dimensional adjusting support 3 can adjust the exact position of dial framework.Using when, six-dimensional adjusting support 3 with it is dry
Grating scale objective table 4 on interferometer guide rail is with threaded connection, it is ensured that position is constant.
There is described double contact measurement tables 1 system to position required precision.
Dial framework 2 is 304 stainless steels.
By taking the Aspherical-surface testing for having compensator as an example, by structure of the present utility model on the guide rail of horizontal interferometer,
Guide rail is provided with measuring grating scale, when grating scale objective table is moved near compensating glass minute surface, double contact measurement tables in itself
End thereof contacts compensating glass minute surface, write down the numerical value in measurement table, it is attached grating scale objective table is moved into aspherical summit
Closely, with the aspherical summit of another end in contact of double contact measurement tables, meter reading structure is measured by grating scale reading and double contacts
Into the dimension chain of closure, so as to be compensated device minute surface apart from the distance between aspherical summit.
Claims (2)
1. interferometer measuring system positions gauge head, it is characterized in that, it includes double contact measurement tables (1), dial framework (2) and sextuple adjustment
Frame (3), dial framework (2) upper surface sets groove, and double contact measurement tables (1) are arranged in the groove of dial framework (2), under dial framework (2)
End is threadedly coupled with six-dimensional adjusting support (3), and six-dimensional adjusting support (3) can adjust the exact position of dial framework (2).
2. interferometer measuring system according to claim 1 positions gauge head, it is characterised in that six-dimensional adjusting support (3) is with doing
Grating scale objective table (4) threaded connection on interferometer guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720248088.8U CN206618382U (en) | 2017-03-14 | 2017-03-14 | Interferometer measuring system positions gauge head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720248088.8U CN206618382U (en) | 2017-03-14 | 2017-03-14 | Interferometer measuring system positions gauge head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206618382U true CN206618382U (en) | 2017-11-07 |
Family
ID=60232805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720248088.8U Active CN206618382U (en) | 2017-03-14 | 2017-03-14 | Interferometer measuring system positions gauge head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206618382U (en) |
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2017
- 2017-03-14 CN CN201720248088.8U patent/CN206618382U/en active Active
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