A kind of device of packaged type space constraint laser induced plasma
Technical field
The utility model belongs to LIBS detecting instrument correlative technology field, more particularly, to one kind
The device of packaged type space constraint laser induced plasma.
Background technology
LIBS (Laser-induced Breakdown Spectroscopy, LIBS) is a kind of to swash
Light is the plasma emission spectrometry technology of excitaton source, and because laser pulse action time is short, plasma lifetime is short, hair
Penetrate spectral intensity to decay rapidly, the decline of the intensity of spectral line makes elementary analysis sensitivity decrease.Current LIBS spectrum Enhancement Method masters
There is dipulse to excite, resonant excitation, microwave radiation technology, electric spark auxiliary, space constraint etc., due to space constraint technical costs
Low, full spectrum enhancing effect is good, can not only improve the intensity of spectral line, also have to quantitative analysis performance improves to a certain degree.However, existing
Space constraint chamber can only be fixed on sample surfaces, with the increase of accumulation laser pulse number, laser is anti-to sample same position
Resintering erosion can produce deeper rhegmalypt, and then influence LIBS analysis precisions.
At present, relevant technical staff in the field has done some researchs, and such as Application No. 201520089462.5 is special
Profit discloses a kind of LIBS space Enhancement test device, and the space enhancing diaphragm that the device is used includes three layers
The concentric round platform being added together to eight stackings, is evenly equipped with the diaphragm of different pore size, space enhancing diaphragm on each concentric round platform
Sample support is installed, sample is arranged on the upper back of maximum round platform with one heart, it is seen that the device can be flexible on support
Different pore size space enhancing diaphragm is changed, but sample is relatively fixed during plasma exciatiaon, and sample and constraint chamber connect firmly
Touch, sample is immovable, it is impossible to avoid to same position repeatedly ablation produce dell the problem of.And for example Application No.
201610045515.2 disclose a kind of LIBS systems of the micro heavy detection based on plasma confinement chamber, the LIBS
System includes sample stage, laser, plasma confinement chamber, spectrometer and data processor, and it is set on sample surfaces
Plasma confinement chamber, plasma radiant light serves humidification, but sample still can not be moved relative to constraint chamber
It is dynamic.Correspondingly, this area has the technical need for developing the device that a kind of sample can be moved relative to space constraint chamber.
Utility model content
For the defect of prior art, the utility model provides a kind of packaged type space constraint laser induced plasma
The device of body, its work characteristics based on laser-induced breakdown spectroscopy device, for space constraint laser induced plasma
The structure and part connecting relation of device are designed.The device of the packaged type space constraint laser induced plasma
Travel mechanism is provided with, the travel mechanism drives sample to be moved relative to space constraint chamber so that laser action is in sample table
The position in face changes, and then avoids same position of the laser to sample surfaces ablation produces dell repeatedly, improves LIBS points
Analyse precision.In addition, the device volume of described packaged type space constraint laser induced plasma is smaller, cost is relatively low,
And there is preferable compatibility relative to conventional laser induced breakdown spectroscopy system, be conducive to using space constraint enhanced spectrum
The stability of spectrum is ensure that simultaneously.
To achieve the above object, the utility model provides a kind of packaged type space constraint laser induced plasma
Device, it includes coaxial optical path connecting rod, constraint chamber fixture, space constraint chamber, sample clamping component and travel mechanism, its feature
It is:
The coaxial optical path connecting rod is connected to coaxial collection LIBS system, so as to realize that both is same
Axle is positioned;The constraint chamber fixture is connected to the coaxial optical path connecting rod, and being connected to for the space constraint chamber activity is described
Constrain chamber fixture;The sample clamping component is arranged in the travel mechanism, and it sets with the space constraint chamber relative spacing
Put;The sample clamping component is used to clamp sample, and the travel mechanism is by mobile to drive the sample in the horizontal direction
Or vertical direction movement, to change the laser of the laser condensing lens from the coaxial collection LIBS system
Beam is radiated at the position of the sample surfaces or changes the distance between the laser condensing lens and described sample.
Further, the constraint chamber fixture includes lid on constraint chamber fixture, connected with lid screw thread on the constraint chamber fixture
The constraint chamber fixture lower cover that connects and compression spring on the constraint chamber fixture in lid and the constraint chamber lower cover is contained in, it is described
Constraint chamber fixture top cap is connected to the coaxial optical path connecting rod.
Further, lid is stair-stepping cavity cylinder on the constraint chamber fixture, and it includes first step portion and solid
Surely the first noumenon portion in the first step portion is connected to, the first step portion offers through hole, and the first noumenon portion is opened
Provided with the first step trough being connected with the through hole, the through hole is provided commonly for supplying the laser beam with first step trough
Pass through.
Further, the stepped cylinder of the constraint chamber fixture lower cover, it is offered and first step trough
The second step trough being connected, second step trough is through the constraint chamber fixture lower cover;One end of the compression spring connects
The bottom surface of first step trough is connected to, the other end stretches into second step trough and be connected to after passing through first step trough
The space constraint chamber;The compression spring is used for the upper table face pressure by the lower surface of the space constraint chamber and the sample
Tightly.
Further, the space constraint chamber is stair-stepping cylinder, and it includes second step portion and is fixedly connected on
Second body in the second step portion, second body offers hemispherical chamber, and the second step portion is opened up
There is the through hole being connected with the hemispherical chamber, the through hole is connected with second step trough;Described second
Rank portion is resisted against on the cascaded surface of second step trough, and the cascaded surface is used to limit the space constraint chamber towards the movement
The movement travel of mechanism.
Further, the laser beam sequentially passes through the through hole, first step trough, second step trough and institute
State and enter the hemispherical chamber after through hole and be radiated on the surface of the sample set by the hemispherical chamber enclosure, with
Sample described in ablation produces plasma, produces shock wave while the plasma exciatiaon, and the shock wave is to extending out
Reflected in scattered process by the inwall of the hemispherical chamber, the shock wave of reflection passes through the plasma to expansion
Enter row constraint to realize the increase of spectral intensity.
Further, the sample clamping component includes sample deck and sample clamping screw, and the sample deck is removable
That unloads is connected in the travel mechanism;The sample clamping screw be engaged with the sample deck to clamp the sample and
The sample is positioned.
Further, the travel mechanism includes Z-direction vertical displacement platform, X-direction horizontal position moving stage and Y-direction horizontal position
Moving stage, the Z-direction vertical displacement platform, the X-direction horizontal position moving stage and the Y-direction horizontal position moving stage are movable from up to down
Link together, and three formed three-shaft displacement platform.
Further, the Z-direction vertical displacement platform is used to drive the sample vertically mobile described to change
The distance between sample and the laser condensing lens;The X-direction horizontal position moving stage and the Y-direction horizontal position moving stage are used for band
The dynamic sample is moved in the horizontal direction acts on the position of the sample surfaces to change the laser beam, and then avoids described
Laser beam produces dell to the sample ablation repeatedly in same position.
Further, the quantity of the coaxial optical path connecting rod is four, and four coaxial optical path connecting rods are around described
The central shaft of space constraint chamber is uniformly arranged.
By the contemplated above technical scheme of the utility model, compared with prior art, what the utility model was provided can
The device of portable space constraint laser induced plasma mainly has the advantages that:
(1) travel mechanism can drive the sample in the horizontal direction by mobile or vertical direction is moved,
The sample is radiated at the laser beam for changing the laser condensing lens from the coaxial collection LIBS system
The position on surface changes the distance between the laser condensing lens and described sample, it is to avoid laser beam is to sample surfaces
Same position ablation repeatedly, improves LIBS analysis precisions, and small volume, and cost is relatively low, and compatibility is preferably;
(2) the second step portion of the space constraint chamber is resisted against on the cascaded surface of second step trough, the ladder
Face is used to limit the space constraint chamber towards the movement travel of the travel mechanism, realizes the space constraint chamber and the constraint
Chamber fixture lower cover realizes the travel limit of the space constraint chamber while flexible connection;
(3) lid is threadedly coupled with the constraint chamber fixture lower cover on the constraint chamber fixture so that the constraint chamber lower cover
It can quickly cover and remove from the constraint chamber fixture, and then be easy to space constraint chamber described in quick-replaceable;
(4) inwall of the hemispherical chamber of the space constraint chamber returns shock reflection, and the shock wave of reflection is to swollen
Swollen plasma enters row constraint so that its volume diminishes, and population density increases, so as to realize the increase of spectral intensity.
Brief description of the drawings
Fig. 1 is the dress for the packaged type space constraint laser induced plasma that the utility model better embodiment is provided
Put the schematic diagram in use state.
In all of the figs, identical reference is used for representing identical element or structure, wherein:1- coaxial optical paths connect
Extension bar, 2- laser condensing lens, 3- is focused on to be covered on mirror holder, 4- laser beams, 5- constraint chamber fixtures, 6- compression springs, 7- constraint chamber folders
Has lower cover, 8- space constraint chambers, 9- plasmas, 10- samples, 11- sample decks, 12- sample clamping screws, 13-Z directions are hung down
Straight displacement platform, 14-X directions horizontal position moving stage, 15-Y directions horizontal position moving stage.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain
The utility model, is not used to limit the utility model.
Referring to Fig. 1, the packaged type space constraint laser induced plasma that the utility model better embodiment is provided
The device of body, described device can make sample during plasma exciatiaon relative to space constraint chamber level by travel mechanism
Mobile, to be prevented effectively from repeatedly ablation of the laser beam to sample surfaces same position, and described device small volume, cost is low, with
Conventional laser induced breakdown spectroscopy system has preferable compatibility, is conducive to ensureing while using space constraint enhanced spectrum
The stability of spectrum.
The device of described packaged type space constraint laser induced plasma includes coaxial optical path connecting rod 1, constraint
Chamber fixture, space constraint chamber 8, sample clamping component and travel mechanism, the coaxial optical path connecting rod 1 are connected to coaxial collection and swashed
Photoinduction breakdown spectral system, so that the device of described packaged type space constraint laser induced plasma and original optical path system
System (coaxial collection LIBS system) coaxial positioning.In present embodiment, in order to ensure positioning precision and connection
Stability, the quantity of the coaxial optical path connecting rod 1 is four, four coaxial optical path connecting rods 1 around the space about
The central shaft of beam chamber 8 is uniformly arranged;It is appreciated that in other embodiments, the quantity of the coaxial optical path connecting rod 1 can be with
Increase according to actual needs or reduce.
The constraint chamber fixture is connected to the coaxial optical path connecting rod 1.The space constraint chamber 8 activity is connected to institute
State constraint chamber fixture.The sample clamping component is arranged in the travel mechanism, and it is used to clamp sample 10, the sample 10
Positioned at the underface of the space constraint chamber 8.The travel mechanism is used to drive the sample 10 in the horizontal direction or vertically
Direction is moved, with change laser beam 4 act on the sample 10 surface position or change the sample 10 and gather with laser
The distance between burnt mirror 2.
One end of the coaxial optical path connecting rod 1 is connected to the constraint chamber fixture, and the other end is connected to focusing mirror holder 3.
The focusing mirror holder 3 offers accepting hole, and the accepting hole is used to house the laser condensing lens 2.It is described in present embodiment
The central shaft of the central shaft of laser condensing lens 2, the central shaft of the constraint chamber fixture and the space constraint chamber 8 is substantially overlapped.
One end of the constraint chamber fixture is connected to the coaxial optical path connecting rod 1, and the other end is connected to the space about
Beam chamber 8.The constraint chamber fixture includes lid 5 on constraint chamber fixture, constrains the constraint chamber that lid 5 is threadedly coupled on chamber fixture with described
Fixture lower cover 7 and it is contained in compression spring 6 on the constraint chamber fixture in lid 5 and the constraint chamber lower cover 7.The constraint chamber
Lid 5 is connected to the coaxial optical path connecting rod 1 on fixture, and the activity of constraint chamber fixture lower cover 7 is connected to the space about
Beam chamber 8.
Lid 5 is stair-stepping cavity cylinder on the constraint chamber fixture, and it includes first step portion and is fixedly connected on
The first noumenon portion in the first step portion, the first step portion offers through hole, and the first noumenon portion is offered and institute
The first step trough that through hole is connected is stated, the through hole is provided commonly for supplying to come from the laser condensing lens with first step trough
2 laser beam 4 is passed through.In present embodiment, the coaxial optical path connecting rod 1 is connected to the edge in the first step portion;Institute
The first step trough is stated towards being formed with internal thread on one end inwall of the constraint chamber fixture lower cover 7.
The constraint chamber fixture lower cover 7 stepped cylinder substantially, it is offered is connected with first step trough
The second logical step trough, second step trough is through the constraint chamber fixture lower cover 7.In present embodiment, the constraint chamber
Fixture lower cover 7 towards being formed with external screw thread on the periphery of one end of lid 5 on the constraint chamber fixture, the external screw thread with it is described interior
Screw thread is engaged, so that lid 5 is threadedly coupled with the constraint chamber fixture lower cover 7 on the constraint chamber fixture.The constraint chamber folder
Tool lower cover 7 can be removed quickly from lid 5 on the constraint chamber fixture, in order to space constraint chamber 8 described in quick-replaceable.
One end of the compression spring 6 is connected to the bottom surface of first step trough, and the other end passes through first ladder
Second step trough is stretched into after groove and the space constraint chamber 8 is connected to.The compression spring 6 is used for the space constraint
The upper surface of the lower surface of chamber 8 and the sample 10 is compressed so that the lower surface of the space constraint chamber 8 and the sample 10
Upper surface forms soft contact.
The space constraint chamber 8 is stair-stepping cylinder, and it includes second step portion and is fixedly connected on described second
Second body of stage portion, second body offers hemispherical chamber, the second step portion offer with it is described
The through hole that hemispherical chamber is connected, the through hole is connected with second step trough.It is described to pass through in present embodiment
The center overlapping of axles of the central shaft of perforation, the central shaft of the space constraint chamber 8 and the hemispherical chamber.The second step
Portion is resisted against on the cascaded surface of second step trough, and the cascaded surface is used to limit the space constraint chamber 8 towards the shifting
The movement travel of motivation structure.Second body passes through second step trough.The hemispherical chamber is located at described sharp
Light beam 4 is acted on the region of the sample 10, and the laser beam 4 sequentially passes through the through hole, first step trough, described
Enter the hemispherical chamber after second step trough and the through hole and described in being radiated at and being set by the hemispherical chamber enclosure
On the surface of sample 10, the plasma 9 of HTHP is produced with sample described in ablation 10, it is same that the plasma 9 is excited
When produce shock wave, the shock wave is during to external diffusion by the inwall of the hemispherical chamber of the space constraint chamber 8
Reflect, the shock wave of reflection enters row constraint so that its volume diminishes to the plasma 9 of expansion, and population is close
Degree increase, so as to realize the increase of spectral intensity.The light of the plasma 9 is returned along laser beam optical path, is sequentially passed through described
Collected on space constraint chamber 8, the constraint chamber fixture lower cover 7 and the constraint chamber after lid 5 by the laser condensing lens 2, finally
Spectrometer, which is transferred to, after into coaxial collection light path carries out light splitting.
The sample clamping component includes sample deck 11 and sample clamping screw 12, and the sample deck 11 is dismountable
It is connected in the travel mechanism, in order to the quick regulation position of sample deck 11.In present embodiment, the sample card
The quantity of seat 11 is two, and two relative spacings of sample deck 11 are set;One in two sample decks 11 is opened
Provided with screwed hole, the sample clamping screw 12 is supported on the sample 10 after passing through the screwed hole, so that the sample
10 support on another sample deck 11, and the sample clamping screw 12 is engaged to clamp with the sample deck 11
The sample 10 and the sample 10 is positioned;It is appreciated that in other embodiments, the number of the sample deck 11
Amount can increase or reduce according to actual needs.
The travel mechanism includes Z-direction vertical displacement platform 13, X-direction horizontal position moving stage 14 and Y-direction horizontal position moving stage
15, the Z-direction vertical displacement platform 13, the X-direction horizontal position moving stage 14 and the Y-direction horizontal position moving stage 15 are successively from upper
Downward movable links together.The Z-direction vertical displacement platform 13 is connected with the sample deck 11.Present embodiment
In, the Z-direction vertical displacement platform 13, the X-direction horizontal position moving stage 14 and the row of Y-direction horizontal position moving stage 15 are into three axles
Displacement platform.The Z-direction vertical displacement platform 13 is used to drive the sample 10 vertically to move to change the sample 10
The distance between with the laser condensing lens 2.In present embodiment, to prevent from focusing on laser breakdown air, the sample is adjusted
10 surfaces are located above laser spot at about 3~4mm.The X-direction horizontal position moving stage 14 and the Y-direction horizontal position moving stage 15
For driving the sample 10 to move in the horizontal direction to change the position that the laser beam 4 acts on the surface of sample 10,
The laser beam 4 is avoided to produce dell to the ablation of sample 10 repeatedly in same position.In present embodiment, the X side
Moved along the horizontal plane in " bow " shape to horizontal position moving stage 14 and the Y-direction horizontal position moving stage 15.
The device for the packaged type space constraint laser induced plasma that the utility model is provided, its travel mechanism can
By mobile to drive the sample in the horizontal direction or vertical direction is moved, lured with changing from the coaxial collection laser
The laser beam for leading the laser condensing lens of breakdown spectral system is radiated at the position of the sample surfaces or changes the laser and gathers
The distance between sample described in Jiao Jingyu, it is to avoid same position repeatedly ablation of the laser beam to sample surfaces, improves LIBS
Precision, and small volume are analyzed, cost is relatively low, compatibility is preferably;The second step portion of the space constraint chamber is resisted against institute
On the cascaded surface for stating the second step trough, the cascaded surface is used to limit the space constraint chamber towards the motion row of the travel mechanism
Journey, realize realizes the space constraint chamber while space constraint chamber is flexibly connected with the constraint chamber fixture lower cover
Travel limit;Lid is threadedly coupled with the constraint chamber fixture lower cover on the constraint chamber fixture so that the constraint chamber lower cover can
Quick covered from the constraint chamber fixture is removed, and then is easy to space constraint chamber described in quick-replaceable;The space constraint chamber
The inwall of hemispherical chamber returns shock reflection, and the shock wave of reflection enters row constraint so that its body to the plasma of expansion
Product diminishes, population density increase, so as to realize the increase of spectral intensity.
As it will be easily appreciated by one skilled in the art that the foregoing is only preferred embodiment of the present utility model, not
To limit the utility model, all any modifications made within spirit of the present utility model and principle, equivalent substitution and change
Enter, should be included within protection domain of the present utility model.