CN206340514U - A kind of large scale Excimer lamp - Google Patents
A kind of large scale Excimer lamp Download PDFInfo
- Publication number
- CN206340514U CN206340514U CN201621434325.1U CN201621434325U CN206340514U CN 206340514 U CN206340514 U CN 206340514U CN 201621434325 U CN201621434325 U CN 201621434325U CN 206340514 U CN206340514 U CN 206340514U
- Authority
- CN
- China
- Prior art keywords
- sealing
- excimer lamp
- illuminating part
- luminous tube
- large scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of large scale Excimer lamp, including Excimer lamp body, the one end on the Excimer lamp body with sealing discharge vessel is provided with sealing, and the other end of Excimer lamp body is provided with end head, the sealing and illuminating part constitute luminous tube, the outer electrode of the outer surface configuration plating goldleaf of the illuminating part, and the inside configuration mesh internal electrode of illuminating part, the outer electrode, which is used, to be electroplated goldleaf on ultraviolet high elegant quartz and is covered in around luminous tube and axially extends, the internal electrode is by shaft-like quartz ampoule support of the inside of luminous tube along pipe axle center configuration and the winding molybdenum net on quartz ampoule, the two ends of the internal electrode are connected with the metal foil being embedded in inside sealing and by the glass support of sealing, the other end connection outside lead of the metal foil.The utility model can realize the design and producing of high-power excimer light source, and length dimension can be designed according to concrete application and adjusted.
Description
Technical field
The utility model is related to Excimer lamp technical field, specially a kind of large scale Excimer lamp.
Background technology
With the development of science and technology, particularly semiconductor, liquid crystal, the development of the industry such as photovoltaic generates new industrial requirement,
Liquid crystal panel, semiconductor wafer, photovoltaic silicon wafer gradually maximizes, and mass production in PROCESS FOR TREATMENT, it is necessary to use ultraviolet
Cleaned, the processing such as etching, and need to realize the long lifetime of lamp.Therefore, Excimer lamp is liquid crystal panel as one kind
Substrate, semiconductor wafer, photovoltaic silicon wafer etc. is cleaned, the advanced technology means of processing substrate such as etching and attract attention.It is accurate
Molecule lamp has been used in multiple use as the light source of below major radiation wavelength 200nm vacuum-ultraviolet light.
At present, Excimer lamp of the prior art, typically by illuminating part, outer electrode, internal electrode is constituted.Luminous tube by
The sealing for being internally sealed with the illuminating part of luminous gas and being formed at the both ends of the illuminating part is constituted, and outer electrode is matched somebody with somebody
Put on the outer surface of the illuminating part, internal electrode is configured in the inside of the illuminating part.But, existing accurate point on the market
Sub- lamp is small size in terms of design and producing, all, and lamp design is complicated, and power supply mode is dumb, is unfavorable for industry spot
Use.
Utility model content
The purpose of this utility model is to provide a kind of large scale Excimer lamp, it is possible to achieve high-power excimer light source
Design and produce, maximum 500W power can be realized through sample test, crest is in 172nm, and light source surface intensity of illumination is reachable
40mW/cm2, length dimension can be designed according to concrete application and adjusted, and solve above-mentioned background technology more than 3000 hours the life-span
Proposed in the problem of.
To achieve the above object, the utility model provides following technical scheme：A kind of large scale Excimer lamp, including accurate point
The one end on sub- lamp body, the Excimer lamp body with sealing discharge vessel is provided with sealing, and Excimer lamp body
The other end is formed with the end head as exhaust termination remaining part, and the sealing and illuminating part constitute luminous tube, the luminous tube
It is made of quartz glass, the outer electrode of the outer surface configuration plating goldleaf of the illuminating part, and the inside configuration of illuminating part
Netted internal electrode, the outer electrode, which is used, to be electroplated goldleaf on ultraviolet high elegant quartz and is covered in around luminous tube and edge
Axially extending, the internal electrode is supported and in quartz ampoule by the shaft-like quartz ampoule in the inside of luminous tube along pipe axle center configuration
Upper winding molybdenum net, the two ends of the internal electrode are connected with the metal foil being embedded in inside sealing and by the glass branch of sealing
Support, the other end connection outside lead of the metal foil, the outside lead is drawn from the end of sealing to outside and with connecing
Mouth connection.
It is preferred that, the sealing is pressed formed by the end heat of the quartz glass tube by luminous tube is constituted and flattening
Tightening seal portion is constituted.
It is preferred that, envelope has xenon as stimulated luminescence gas in the illuminating part.
It is preferred that, the end of the outer electrode extend from illuminating part and sealed part side wound on illuminating part root
On, and the end of outer electrode at least extends to the presence of the necking part that external diameter is tapered into from illuminating part towards sealing.
It is preferred that, the internal electrode realizes sealing press seal by using sealing-in molybdenum sheet.
Compared with prior art, the beneficial effects of the utility model are as follows：
1st, the utility model is by setting the outside good and not oxidizable using electric conductivity of Excimer lamp body
Electroplate Gold foil outer electrode, can according to different application demand along fluorescent tube axial direction, by technological requirement with a plurality of 1-8 millimeters not
High thoroughly quartzy outer tube layer is axially coated in arc is wide, two ends are with that can widen or fill at external electrical contact.In addition, external electrical
Extremely lightweight and uniform, whole coating layer thickness is less than 0.08 millimeter, hardly increases tube diameter, peace is controlled to greatest extent
Size is filled, construction costs and safety coefficient is reduced, and many residue stresses will not be caused to quartz ampoule；It is firm, conduct electricity very well,
Ensure that ultraviolet light is uniformly utilized.
2nd, the utility model by by the inside of luminous tube along pipe axle center configuration shaft-like quartz ampoule support inside electricity
Pole, the existing good insulating properties of quartz ampoule has good translucency again, it is ensured that the axle in Excimer lamp body of internal electrode
Heart line, it is ensured that the uniform normal direction transmitting of ultraviolet light.In addition, internal electrode realizes sealing press seal by sealing-in molybdenum sheet structure, protect
The air-tightness of fluorescent tube cavity has been demonstrate,proved, has also been connected by outside lead with interface, using standard interface mode, has facilitated onsite application.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
In figure：Outside 1- discharge vessels, 2- sealings, 3- end heads, 4- illuminating parts, 5- outer electrodes, 6- internal electrodes, 7-
Portion's lead, 8- interfaces.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Referring to Fig. 1, the utility model provides a kind of large scale Excimer lamp technical scheme：A kind of large-size quasi molecule
The one end on lamp, including Excimer lamp body, the Excimer lamp body with sealing discharge vessel 1 is provided with sealing 2, and accurate
The other end of molecule lamp body is formed with the end head 3 as exhaust termination remaining part, and the sealing 2 and illuminating part 4 constitute hair
Light pipe, the luminous tube is made of quartz glass, and the sealing 2 is added by the end of the quartz glass tube by luminous tube is constituted
Sealing 2 is compressed formed by heat and flattening to constitute, envelope has xenon as stimulated luminescence gas, the hair in the illuminating part 4
The outer electrode 5 of the outer surface configuration plating goldleaf in light portion 4, and the inside configuration mesh internal electrode 6 of illuminating part 4, it is described outer
Portion's electrode 5 is axially extended, the outside using electroplating goldleaf on ultraviolet high elegant quartz and being covered in around luminous tube
The end of electrode 5 extends from illuminating part 4 and on the root of the side of sealing 2 of illuminating part 4, and the end of outer electrode 5
The presence for the necking part that external diameter is tapered into from illuminating part 4 towards sealing 2 is at least extended to, the internal electrode 6 is by luminous
Shaft-like quartz ampoule support of the inside of pipe along pipe axle center configuration and the winding molybdenum net on quartz ampoule, the internal electrode 6 pass through
Sealing press seal is realized using sealing-in molybdenum sheet, the two ends of the internal electrode 6 are connected simultaneously with the metal foil being embedded in inside sealing 2
By the glass support of sealing 2, the other end connection outside lead 7 of the metal foil, the outside lead 7 is from sealing 2
Draw and be connected with interface 8 to outside in end.
By forming such structure, in above-mentioned reducing diameter part, the distance between outer electrode 5 and internal electrode 6 are than it
It is partly approached, and the part suitable with the minim gap being internally formed in the reducing diameter part is dielectric close to internal electrode
6 position, the potential difference between outer electrode 5 and internal electrode 6 becomes minimum, so easily discharged via dielectric,
Excimer lamp is set to start well.
In addition, forming sealing 2 and the Excimer lamp with outside lead 7, only portion at one end at the both ends of luminous tube
Sealing 2 is formed, in this case, as long as forming the structure for making outside lead 7 be protruded from the sealing 2 of the one end.
Operation principle：By setting the outside plating good and not oxidizable using electric conductivity of Excimer lamp body
Gold foil outer electrode 5, can be different with a plurality of 1-8 millimeters by technological requirement according to different application demand along fluorescent tube axial direction
Arc is wide to be axially coated in high thoroughly quartzy outer tube layer, and two ends are with that can widen or fill at external electrical contact.In addition, outer electrode
5 is lightweight and uniform, and whole coating layer thickness is less than 0.08 millimeter, hardly increases tube diameter, peace is controlled to greatest extent
Size is filled, construction costs and safety coefficient is reduced, and many residue stresses will not be caused to quartz ampoule；It is firm, conduct electricity very well,
Ensure that ultraviolet light is uniformly utilized, by supporting internal electrode by the shaft-like quartz ampoule in the inside of luminous tube along pipe axle center configuration
6, the existing good insulating properties of quartz ampoule has good translucency again, it is ensured that the axle in Excimer lamp body of internal electrode 6
Heart line, it is ensured that the uniform normal direction transmitting of ultraviolet light.In addition, internal electrode 6 realizes sealing press seal by sealing-in molybdenum sheet structure, protect
The air-tightness of fluorescent tube cavity has been demonstrate,proved, has also been connected by outside lead 7 with interface 8, using the mode of standard interface 8, has facilitated scene to make
With in crystal round etching, the field application value such as ultra-violet curing, material deposition, film preparation, material surface modifying and Environmental capacity
It is huge.
It is as discussed above, due to the end for the outer electrode 5 that the outer surface of the illuminating part 4 in luminous tube is configured
Extend and on the root of the side of sealing 2 of the illuminating part 4, so gradually becoming from illuminating part 4 to the external diameter of sealing 2
There is outer electrode 5 on the surface of small reducing diameter part, the outer electrode 5 physically connects with the internal electrode 6 in illuminating part 4
Closely, current potential becomes close to, so easily being put via dielectric (luminous tube) between the internal electrode 6 and outer electrode 5
Electricity, thus the startability of lamp greatly improve, suppress relatively low can also obtain good startability even if by modulating voltage.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out in the case where not departing from principle of the present utility model and spirit a variety of changes, repaiies
Change, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of large scale Excimer lamp, including Excimer lamp body, it is characterised in that：Have on the Excimer lamp body close
The one end for sealing discharge vessel (1) is provided with sealing (2), and the other end of Excimer lamp body is formed with as exhaust termination remaining part
End head (3), the sealing (2) and illuminating part (4) constitute luminous tube, and the luminous tube is made of quartz glass, institute
State the outer electrode (5) of the outer surface configuration plating goldleaf of illuminating part (4), and electricity inside the inside configuration mesh of illuminating part (4)
Pole (6), the outer electrode (5) using the plating goldleaf on ultraviolet high elegant quartz and be covered in around luminous tube and vertically
Extension, the internal electrode (6) is supported and in quartz ampoule by the shaft-like quartz ampoule in the inside of luminous tube along pipe axle center configuration
Upper winding molybdenum net, the two ends of the internal electrode (6) metal foil internal with being embedded in sealing (2) is connected and by sealing
(2) glass support, the other end connection outside lead (7) of the metal foil, the outside lead (7) is from sealing (2)
Draw and be connected with interface (8) to outside in end.
2. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：The sealing (2) will be by that will constitute
Sealing (2) is compressed formed by the end heat of the quartz glass tube of luminous tube and flattening to constitute.
3. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：Envelope has xenon in the illuminating part (4)
Gas is used as stimulated luminescence gas.
4. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：The end of the outer electrode (5)
From illuminating part (4) extend and on the root of sealing (2) side of illuminating part (4), and outer electrode (5) end at least
Extend to the presence for the necking part that external diameter is tapered into from illuminating part (4) towards sealing (2).
5. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：The internal electrode (6) is by adopting
Sealing press seal is realized with sealing-in molybdenum sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621434325.1U CN206340514U (en) | 2016-12-26 | 2016-12-26 | A kind of large scale Excimer lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621434325.1U CN206340514U (en) | 2016-12-26 | 2016-12-26 | A kind of large scale Excimer lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206340514U true CN206340514U (en) | 2017-07-18 |
Family
ID=59301763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621434325.1U Active CN206340514U (en) | 2016-12-26 | 2016-12-26 | A kind of large scale Excimer lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206340514U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783526A (en) * | 2016-12-26 | 2017-05-31 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
-
2016
- 2016-12-26 CN CN201621434325.1U patent/CN206340514U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783526A (en) * | 2016-12-26 | 2017-05-31 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1089541C (en) | Low-voltage mercury vapour discharge lamp, illuminating apparatus and display device | |
| CN100543921C (en) | The field emission light-emitting lighting source | |
| CN206340514U (en) | A kind of large scale Excimer lamp | |
| CN106783526A (en) | A kind of large scale Excimer lamp | |
| US8786171B2 (en) | Field emission light source device and manufacturing method thereof | |
| TWI304597B (en) | External electrode fluorescent lamp | |
| CN208253518U (en) | A kind of gas tube sign transformer | |
| JP5648968B2 (en) | Xenon flash lamp lighting device | |
| CN100461332C (en) | High photosynthetic efficiency external electrode porcelain tube cathode fluorescent lamp and its making method | |
| JP2006114271A (en) | Fluorescent lamp, backlight unit, and liquid crystal television | |
| JP2006286448A (en) | External electrode type fluorescent lamp, backlight unit, and manufacturing method of external electrode type fluorescent lamp | |
| CN216818274U (en) | Excimer lamp and light source device thereof | |
| CN103247513B (en) | Discharge lamp | |
| KR100575112B1 (en) | an electroide structure of a External Electroide Fiuorescent Lamp | |
| TWI258042B (en) | Fluorescent lamp and manufacturing method thereof | |
| CN1728330A (en) | Illuminated light source of field emission luminescence | |
| JP4525305B2 (en) | Fluorescent lamp, backlight unit and LCD TV | |
| CN2731902Y (en) | Field emitting luminous illumination light source | |
| CN2457735Y (en) | No metal electrode cold cathode gas discharge device | |
| CN201219098Y (en) | Cold cathode air discharge lamp | |
| CN2555558Y (en) | Non-electrode high froquency induction neon lamp | |
| CN113421818A (en) | Excimer lamp and light source device thereof | |
| CN202058697U (en) | Electric arc tube for ceramic metal halide lamp | |
| CN201185173Y (en) | Novel double-core HID xenon bulb for outdoor lighting | |
| CN2346072Y (en) | Energy-saving florescent lamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |