CN206339496U - A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw - Google Patents
A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw Download PDFInfo
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- CN206339496U CN206339496U CN201720017403.6U CN201720017403U CN206339496U CN 206339496 U CN206339496 U CN 206339496U CN 201720017403 U CN201720017403 U CN 201720017403U CN 206339496 U CN206339496 U CN 206339496U
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- 238000003384 imaging method Methods 0.000 title claims abstract description 89
- 239000012780 transparent material Substances 0.000 title claims abstract description 40
- 238000005286 illumination Methods 0.000 claims abstract description 69
- 230000007547 defect Effects 0.000 abstract description 25
- 239000000463 material Substances 0.000 abstract description 16
- 238000001514 detection method Methods 0.000 abstract description 13
- 238000009776 industrial production Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 3
- 230000008033 biological extinction Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000010813 municipal solid waste Substances 0.000 description 1
- 210000003739 neck Anatomy 0.000 description 1
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- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model provides a kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw.Details in a play not acted out on stage, but told through dialogues microscopic imaging device of the present utility model is made up of dark-ground illumination unit, shelter and the imaging microscope being sequentially placed along same axis, dark-ground illumination unit is made up of light source and illumination camera lens, transparent material to be detected is placed between illumination camera lens and shelter, and shelter size is less than the size of the first face of imaging microscope lens.Shelter before imaging microscope can stop that the illumination direct light of dark-ground illumination unit enters microscope, and shelter can be then bypassed by the light of defect scattering and enters imaging microscope, darkfield image is formed.The utility model can be that the transparent material surface in industrial production and scientific research and internal defects detection provide a kind of effective easily means, have the advantages that low cost, easily alignment, material thickness wide adaptability.
Description
Technical field
The utility model belongs to material tests field, and in particular to a kind of detection transparent material surface and internal flaw it is dark
Field microscopic imaging device.The utility model can be used in scientific research and industry manufacture to transparent material surface and internal flaw
Image checking.
Background technology
The surface of transparent optical material and internal flaw（Such as cut, field trash, insert, the pollutant and bubble adhered to
Deng）Have impact on optical element surface and internal flaw in the optical property of element, such as high energy laser system can absorb light energy and
Element is set easily to damage, for another example for depositing the semiconductor and glass substrate of circuit pattern, its surface defect can reduce deposition electricity
The yields on road.
Dark-ground illumination microscope is the efficient apparatus for detecting defect.Dark-ground illumination microscope is kept away using special lighting system
Exempt from illumination light and its reflection, refraction light are directly entered imaging microscope, and allow the scattered light of defect to join into imaging microscope
With imaging.Scattered light relies on the scattering phenomenon of defect in itself, or fault location refractive index abrupt interface refraction, or defect is irregular
The factors such as the reflection at edge, change the direction of propagation of illumination light.Details in a play not acted out on stage, but told through dialogues micro-imaging has very sensitive imaging to scatterer
Effect, contrast is high, is very suitable for detecting the defect of transparent material.
For detection transparent material surface and internal flaw, transmission-type details in a play not acted out on stage, but told through dialogues micro-imaging is a kind of conventional method, and it is former
Reason is：Defect is run into when light is propagated in transparent material and produces scattering, imaging microscope utilizes and scatters photoimaging.Transmission at present
Formula details in a play not acted out on stage, but told through dialogues micro imaging method mainly has two kinds, and a kind of is the method using prism-coupled illumination light（Total internal reflection type）, it is a kind of
It is the method using ring-shaped light oblique illumination（Ring-shaped lighting formula）.The details in a play not acted out on stage, but told through dialogues micro-imaging of total internal reflection type make use of the total reflection of light
Principle：When light is from high index of refraction object（It is transparent material to be detected herein）Directive low-refraction object（It is air herein）
When, if incidence angle is more than critical angle, light cannot propagate into air, and be completely reflected back transparent material on transparent material interface
Material；But inside the transparent material or during the existing defects of surface, light by defect scattering, scattered light because be unsatisfactory for total reflection condition and from
Air is leaked into transparent material, leak light is captured by microscope and participates in being imaged.So, only the ground of existing defects is just now
Bright image can be formed, without defect place because leak without light but dark.For the photograph by total reflection condition is met
Mingguang City is coupled into inside transparent material, it is necessary to be placed in the lower surface of material to be detected with a triangular prism, and illumination light is from three
The side of angle prism is injected.Therefore total internal reflection type details in a play not acted out on stage, but told through dialogues micro imaging method needs one not less than scantling to be detected
Triangular prism, this detects very uneconomical to large-sized transparent material, and heavy, additionally, due to illumination path and imaging optical path
Axis it is misaligned, therefore illumination region is directed at relatively time-consuming with imaging region.The details in a play not acted out on stage, but told through dialogues micro-imaging profit of ring-shaped lighting formula
Illuminated with object lens one bigger than imaging microscope numerical aperture, the emergent light of illumination objective lens is ring-type, it is micro- with being imaged
The corresponding middle body of mirror does not have light, therefore illumination light can not be directly entered imaging microscope.When material internal or surface have
During defect, illumination light is scattered, and some scattered light can enter imaging microscope and participate in imaging.Ring-shaped lighting formula dark-field imaging is needed
Wanting object lens one bigger than imaging microscope numerical aperture is used to illuminate, and cost is higher, and the operating distance of illumination objective lens
It is very short（It is general several millimeters）, therefore ring-shaped lighting formula details in a play not acted out on stage, but told through dialogues micro imaging method is not suitable for the larger object under test of thickness.
The content of the invention
In order to overcome in the prior art, details in a play not acted out on stage, but told through dialogues microscopic imaging device cost is higher, be difficult alignment, material thickness bad adaptability
Deficiency, the utility model provides a kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw, this practicality
The new details in a play not acted out on stage, but told through dialogues microscopic imaging device that can be used in larger thickness transparent material, to meet the necks such as optics manufacture and semi-conductor industry
Domain is to material surface and the detection demand of internal flaw.
The technical solution of the utility model is：
A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw of the present utility model, its feature
It is that described details in a play not acted out on stage, but told through dialogues microscopic imaging device includes dark-ground illumination unit, shelter, imaging microscope.Described dark-ground illumination list
Member is made up of light source and illumination camera lens, and light source, illumination camera lens, shelter, imaging microscope are successively set in coaxial optical path.Treat
The transparent material of detection is arranged between illumination camera lens and shelter, on the imaging surface of imaging microscope.Described light source
The illumination direct light sent is radiated on shelter after illuminating camera lens, transparent material successively.Described illumination direct light is penetrated
Hot spot on shelter is less than the size of shelter.The size of described shelter is less than the first face lens in imaging microscope
Size.
Described shelter is blocked using extinction type shelter, concave shape shelter, tapered shield thing, angled reflection
One kind in thing, convex-shaped shelter.
In the utility model, by lighting unit（Containing light source and illumination camera lens）Staggered relatively with imaging microscope, illumination is single
Member and imaging microscope optical axis coincidence, transparent material to be detected is placed between lighting unit and imaging microscope, and order is treated
Detection zone is overlapped with the imaging surface of imaging microscope.The light sent using camera lens is illuminated by light source is focused on, the light beam after focusing
Distribution is in cone space region, and imaging region is located at the waist of the taper, and the top of taper be in imaging microscope it
Near preceding shelter.Illumination light after focusing has larger area on the section of imaging region, and shelter is blocked
Illumination direct light enters imaging microscope.Material surface and internal defect make it that illumination direct light produces scattering, these scatterings
Light deviate from the transmission path of illumination direct light, therefore some scattered light will not be by the shelter before imaging microscope
Stop and enter imaging microscope and participate in imaging.Because illumination direct light can not participate in imaging, therefore only material surface or interior
The place of portion's existing defects can just excite scattered light and into bright picture；Place without defect can not excite scattered light, because
This is black on image.The defect image of distinctness is thus formd in the background of black, with very high contrast
Degree.
The optical axis coincidence of lighting unit and imaging microscope in the utility model, therefore on the surface of detection transparent material
During with internal flaw, illumination region is with imaging region in transverse direction（Perpendicular to illuminating light propagation direction）It is in alignment with, the feature is not
It can change with the thickness of material to be detected.In axial direction（Along illuminating light propagation direction）On, all regions be all it is illuminated, therefore
Illumination region is also in alignment with detection zone in the axial direction, is not also changed with material thickness.Therefore, examined using the utility model
It is easy to adjust and is directed at region interested when surveying defect, it is not necessary to complicated and careful for a long time operation, need to will only feels emerging
The region of interest is placed within microscopical visual field and the depth of field and can be imaged.
The shelter that direct light is illuminated for stopping is positioned over the forefront of imaging microcobjective, its mesh by the utility model
Be that illumination direct light is blocked in outside imaging microscope, in order to avoid illumination direct light multiple reflections and shadow in imaging microscope
Ring picture contrast.In addition, the forefront that shelter is positioned over into image-forming objective lens is also a kind of mode for being easiest to realize.
The beneficial effects of the utility model are that the utility model eliminates the influence of illumination direct light using shelter and realized
The details in a play not acted out on stage, but told through dialogues micro-imaging of transparent material surface and internal flaw, is adapted to low cost simple in construction, easy to adjust, material thickness
Property it is wide the advantages of, can be used in transparent material surface and internal defects detection in industry and scientific research.
Brief description of the drawings
Fig. 1 shows for the structure of detection transparent material surface of the present utility model and the details in a play not acted out on stage, but told through dialogues microscopic imaging device of internal flaw
It is intended to；
Fig. 2 a to e are Fig. 1 partial structural diagram；
In figure, the scattered light 7. of 1. light sources 2. illumination illumination 4. transparent material of direct light of camera lens 3., 5. defect 6. hides
The imaging microscope of block material 8..
Embodiment
The utility model is described in detail below in conjunction with the accompanying drawings.
Embodiment 1
Fig. 1 shows for the structure of detection transparent material surface of the present utility model and the details in a play not acted out on stage, but told through dialogues microscopic imaging device of internal flaw
It is intended to, Fig. 2 is Fig. 1 partial structural diagram, Fig. 2 shows five kinds of different structures of shelter.In Fig. 1, Fig. 2, this
The detection transparent material surface of utility model and the details in a play not acted out on stage, but told through dialogues microscopic imaging device of internal flaw, including dark-ground illumination unit, block
Thing 7, imaging microscope 8.Described dark-ground illumination unit by light source 1 and illumination camera lens 2 constitute, light source 1, illumination camera lens 2, block
Thing 7, imaging microscope 8 are successively set in coaxial optical path.Transparent material 4 to be detected is arranged at illumination camera lens 2 and shelter 7
Between, on the imaging surface of imaging microscope 8.The illumination direct light 3 that described light source 1 is sent successively through illuminate camera lens 2, thoroughly
It is radiated at after bright material 4 on shelter 7.The hot spot that described illumination direct light 3 is penetrated on shelter 7 is less than the chi of shelter 7
It is very little.The size of described shelter 7 is less than the size of the first face lens in imaging microscope 8.
In the present embodiment, described shelter 7 uses extinction type shelter, and direct light 3 is illuminated as shown in Figure 2 a to be hidden
Block material 7 absorbs.
In the utility model, the illuminated camera lens 2 of illumination light that light source 1 is sent is assembled or collimated, and illumination direct light 3, which is passed through, to be treated
The transparent material 4 of detection is penetrated on shelter 7, and spot size of the direct light 3 on shelter 7 is less than the horizontal chi of shelter 7
It is very little, can all it be absorbed, therefore cannot be introduced into imaging microscope 8.And the defect 5 in transparent material 4 is by partial illumination light scattering,
Form the scattered light 6 for deviateing the path of direct light 3.Scattered light 6 be not blocked thing 7 completely stop and part enter imaging microscope
8, can be to defect imaging.
In the present embodiment, light source 1, illumination camera lens 2, shelter 7 and imaging microscope 8 are arranged point-blank.This
Plant arrangement and cause what illumination region and imaging region were in alignment with the axial direction, so even the thickness of transparent material 4 changes, also not
The situation that illumination region and imaging region can be caused to lack of proper care.Even if because the change of the thickness of transparent material 4 causes illumination region can not
Imaging region is filled up, but as long as adjustment light source 1 and illumination camera lens 2 vertically.
Because imaging microscope 8 has certain depth of field, regulation can only be passed through to the defect imaging in the range of certain depth
The axial location of transparent material 4 can be realized to be detected to the defect situation of transparent material surface and internal different depth.
Embodiment 2
The present embodiment is identical with the structure of embodiment 1, is a difference in that, described shelter 7 uses Fig. 2（b）In it is recessed
Planar shelter, dissipates after can illumination direct light 3 be focused on, illumination direct light is cannot be introduced into imaging microscope 8.
Embodiment 3
The present embodiment is identical with the structure of embodiment 1, is a difference in that, described shelter 7 uses Fig. 2（c）In cone
Shape shelter, illumination direct light 3 can directly be dissipated, illumination direct light is cannot be introduced into imaging microscope 8.
Embodiment 4
The present embodiment is identical with the structure of embodiment 1, is a difference in that, described shelter 7 uses Fig. 2（d）In have
Angle reflection shelter, can will illuminate direct light 3 and deflect into and cannot be introduced into the direction of imaging microscope, make illumination direct light without
Method enters imaging microscope 8.
Embodiment 5
The present embodiment is identical with the structure of embodiment 1, is a difference in that, described shelter 7 uses Fig. 2（e）In it is convex
Planar shelter, illumination direct light 3 can be dissipated, illumination direct light is cannot be introduced into imaging microscope 8 to surrounding.
Claims (2)
1. a kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw, it is characterised in that：Described details in a play not acted out on stage, but told through dialogues
Microscopic imaging device includes dark-ground illumination unit, shelter（7）, imaging microscope（8）；Described dark-ground illumination unit is by light source
（1）With illumination camera lens（2）Composition, light source（1）, illumination camera lens（2）, shelter（7）, imaging microscope（8）It is successively set on same
On axial light path；Transparent material to be detected（4）It is arranged at illumination camera lens（2）With shelter（7）Between be located at imaging microscope（8）
Imaging surface on；Described light source（1）The illumination direct light sent（3）Successively through illuminating camera lens（2）, transparent material（4）Afterwards according to
Penetrate in shelter（7）On；Described illumination direct light（3）Penetrate in shelter（7）On hot spot be less than shelter（7）Size；
Described shelter（7）Size be less than imaging microscope（8）The size of interior first face lens.
2. details in a play not acted out on stage, but told through dialogues microscopic imaging device according to claim 1, is further characterized in that：Described shelter（7）Using suction
One kind in light type shelter, concave shape shelter, tapered shield thing, angled reflection shelter, convex-shaped shelter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720017403.6U CN206339496U (en) | 2017-01-09 | 2017-01-09 | A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720017403.6U CN206339496U (en) | 2017-01-09 | 2017-01-09 | A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw |
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| CN206339496U true CN206339496U (en) | 2017-07-18 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770329A (en) * | 2017-01-09 | 2017-05-31 | 中国工程物理研究院机械制造工艺研究所 | A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw |
| CN111107257A (en) * | 2020-01-20 | 2020-05-05 | 成都德图福思科技有限公司 | Method for carrying out high-contrast imaging on transparent medium surface etching or embossment pattern |
| CN113984790A (en) * | 2021-09-28 | 2022-01-28 | 歌尔光学科技有限公司 | Lens quality detection method and device |
-
2017
- 2017-01-09 CN CN201720017403.6U patent/CN206339496U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770329A (en) * | 2017-01-09 | 2017-05-31 | 中国工程物理研究院机械制造工艺研究所 | A kind of details in a play not acted out on stage, but told through dialogues microscopic imaging device for detecting transparent material surface and internal flaw |
| CN111107257A (en) * | 2020-01-20 | 2020-05-05 | 成都德图福思科技有限公司 | Method for carrying out high-contrast imaging on transparent medium surface etching or embossment pattern |
| CN113984790A (en) * | 2021-09-28 | 2022-01-28 | 歌尔光学科技有限公司 | Lens quality detection method and device |
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