CN206326465U - Silicon chip automatic burr removing device - Google Patents
Silicon chip automatic burr removing device Download PDFInfo
- Publication number
- CN206326465U CN206326465U CN201621494302.XU CN201621494302U CN206326465U CN 206326465 U CN206326465 U CN 206326465U CN 201621494302 U CN201621494302 U CN 201621494302U CN 206326465 U CN206326465 U CN 206326465U
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- frame
- silicon chip
- pull bar
- slide plate
- workbench
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Abstract
The utility model is related to silicon chip production equipment technical field, more particularly, to a kind of silicon chip automatic burr removing device, including frame and the workbench being rotatably arranged in frame, the frame is provided with the first motor for being used for driving workbench to rotate, the frame is provided with the cutter head for burr removing, the frame, which is provided with, is used for the first cylinder with the close or remote workbench of dynamic cutter head, slided in the frame and be provided with slide plate, the slide plate is located above the workbench, the frame is provided with the drive device for being used for driving slide plate slides, the utility model can quickly remove the flash on silicon chip, improve the qualification rate of silicon chip, easily there are the phenomenons such as flash in the silicon chip for avoiding well cutting, during the subsequent production of silicon chip, flash is easily caused silicon chip and scrapped, so that silicon chip can not be used, causing production cost increases, and cause the problem of qualification rate of product is relatively low.
Description
Technical field
The utility model is related to silicon chip production equipment technical field, more particularly, to a kind of silicon chip automatic burr removing device.
Background technology
During multi-wire saw crystal bar production silicon chip, the conventionally employed progress degumming by hand of silicon chip to well cutting is cut
Easily there are the phenomenons such as flash in the silicon chip cut, during the subsequent production of silicon chip, and flash is easily caused silicon chip and scrapped so that silicon
Piece can not be used, and cause production cost to increase, and make it that the qualification rate of product is relatively low.
Utility model content
The technical problems to be solved in the utility model is：In order to which easily there are the phenomenons such as flash in the silicon chip for solving well cutting,
During the subsequent production of silicon chip, flash is easily caused silicon chip and scrapped so that silicon chip can not be used, and causes production cost to increase,
And cause the problem of qualification rate of product is relatively low, now there is provided a kind of silicon chip automatic burr removing device.
The utility model solves the technical scheme that its technical problem used：A kind of silicon chip automatic burr removing device, bag
Including rack and the workbench being rotatably arranged in frame, the frame are provided with the first electricity for being used to drive workbench to rotate
Machine, the frame be provided with for burr removing cutter head, the frame be provided be used for band dynamic cutter head close to or away from work
Slided in first cylinder of platform, the frame and be provided with slide plate, the slide plate is located above the workbench, the frame
It is provided with the drive device for being used for driving slide plate slides, the slide plate and slides along direction provided with the first pull bar and the second drawing
Bar, one end of first pull bar, which is rotated, is provided with pressing plate, and one end of second pull bar, which is provided with sucker, second pull bar, to be set
There is asepwirator pump, the asepwirator pump is connected with the sucker, the sucker is respectively positioned on the top of the workbench with pressing plate, described
Slide plate is provided with external part the second cylinder directed downwardly, and first pull bar and the second pull bar are arranged at stretching for second cylinder
Go out on end.The utility model is applied to circular silicon chip, and the second pull bar is driven by the second cylinder, and by the sucker on the second pull bar
Silicon chip is held, then silicon chip is placed on workbench, silicon chip is pushed down by the pressing plate on the first pull bar, passes through first
Motor drives rotatable platform to rotate, while drive silicon chip and press plate rotary, then by the first cylinder with dynamic cutter head close to the side of silicon chip
The flash of edge is removed, and completes to take silicon chip away after removing.
Further, the drive device includes the second motor being arranged in frame, and the frame is provided with guide rail, institute
State to slide on guide rail and be provided with guide pad, the guide pad is arranged on the slide plate, rotated in the frame and be provided with leading screw,
The leading screw is threadedly coupled with the guide pad, and the leading screw and the guide rail are arranged in parallel.Pass through leading screw band action-oriented
Block is slided on guide rail, and realizes that slide plate is slided in frame.
Further, the external part of second cylinder is provided with connecting rod, and first pull bar is arranged on one end of connecting rod,
Second pull bar be arranged on offered on the other end of connecting rod, the slide plate with first pull bar match first lead to
The second through hole matched with second pull bar, the described one end of first pull bar away from pressing plate are offered on hole, the slide plate
It is slidably arranged in the first through hole, the described one end of second pull bar away from sucker is slidably arranged in second through hole.
The second cylinder enable while driving the first pull bar and the second pull bar to rise or decline, first through hole is played to the first pull bar
Guide effect, the second through hole plays guide effect to the second pull bar.
In order to prevent that workbench from deflecting, further, Universal caster is provided between the frame and the workbench.
Universal caster plays certain supporting role to workbench, while it is smooth without hindrance also to ensure that workbench is rotated.
The beneficial effects of the utility model are：The utility model silicon chip automatic burr removing device is when in use, it is adaptable to circle
Shape silicon chip, the second pull bar is driven by the second cylinder, and is held silicon chip by the sucker on the second pull bar, then places silicon chip
On workbench, silicon chip is pushed down by the pressing plate on the first pull bar, drives rotatable platform to rotate by the first motor, simultaneously
Drive silicon chip and press plate rotary, then the flash by the first cylinder with dynamic cutter head close to the edge of silicon chip is removed, and completes to remove
Silicon chip is taken away afterwards, the utility model can quickly remove the flash on silicon chip, improve the qualification rate of silicon chip, it is to avoid
Easily there are the phenomenons such as flash in the silicon chip of well cutting, and during the subsequent production of silicon chip, flash is easily caused silicon chip and scrapped, and makes
Obtaining silicon chip can not use, and cause production cost to increase, and so that the problem of qualification rate of product is relatively low.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the front view of the utility model silicon chip automatic burr removing device；
Fig. 2 is the top view of the utility model silicon chip automatic burr removing device.
In figure：1st, frame, 2, workbench, the 3, first motor, 4, cutter head, the 5, first cylinder, 6, slide plate, 7, first draws
Bar, the 8, second pull bar, 9, pressing plate, 10, sucker, 11, asepwirator pump, the 12, second cylinder, the 13, second motor, 14, guide rail, 15, lead
To block, 16, leading screw, 17, connecting rod, 18, Universal caster.
Embodiment
Presently in connection with accompanying drawing, the utility model is described in more detail.These accompanying drawings are simplified schematic diagram,
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model.
Embodiment
As illustrated in fig. 1 and 2, a kind of silicon chip automatic burr removing device, including frame 1 and the work that is rotatably arranged in frame 1
Make platform 2, the frame 1 is provided with the first motor 3 for being used for driving workbench 2 to rotate, and the frame 1, which is provided with, to be used to go
The cutter head 4 of flash, cutter head 4 is the opening shape structure of inner concave shape, and the frame 1 is provided with close or remote for band dynamic cutter head 4
Slided from the first cylinder 5 of workbench 2, in the frame 1 and be provided with slide plate 6, the slide plate 6 is located at the workbench 2
Top, the frame 1 is provided with the drive device for being used for driving slide plate 6 to slide, and direction is slid along on the slide plate 6 provided with the
One pull bar 7 and the second pull bar 8, one end of first pull bar 7 are rotatablely equipped with pressing plate 9, second pull bar 8 by bearing
One end be provided with sucker 10, second pull bar 8 is provided with asepwirator pump 11, and the asepwirator pump 11 connects with the sucker 10, institute
State sucker 10 and be respectively positioned on the top of the workbench 2 with pressing plate 9, the slide plate 6 is provided with external part the second cylinder directed downwardly
12, the pull bar 8 of the first pull bar 7 and second is arranged on the external part of second cylinder 12.
The drive device includes the second motor 13 being arranged in frame 1, and the frame 1 is provided with guide rail 14, described
Slided on guide rail 14 and be provided with guide pad 15, the guide pad 15 is arranged on the slide plate 6, rotated and set in the frame 1
There is leading screw 16, the leading screw 16 is threadedly coupled with the guide pad 15, the leading screw 16 and the guide rail 14 are arranged in parallel.
The external part of second cylinder 12 is provided with connecting rod 17, and first pull bar 7 is arranged on one end of connecting rod 17,
Second pull bar 8 is arranged on for offering and matching with first pull bar 7 on the other end of connecting rod 17, the slide plate 6
The second through hole matched with second pull bar 8 is offered on one through hole, the slide plate 6, first pull bar 7 is away from pressing plate
9 one end is slidably arranged in the first through hole, and the described one end of second pull bar 8 away from sucker 10 is slidably arranged in described
In two through holes.
Universal caster 18 is provided between the frame 1 and the workbench 2.The cylinder 12 of first cylinder 5 second is connect
Enter external gas source and by peripheral control unit control open and close, the first motor 3 and the second motor 13 by access external power supply, and by
Peripheral control unit control is opened and closed.
Above-mentioned silicon chip automatic burr removing device places the circular silicon chip for wanting burr removing on one side of frame 1 when using,
Concrete operation step is as follows：Start the second cylinder 12, the He of 17 and first pull bar of external part drivening rod 7 of the second cylinder 12 first
Second pull bar 8 declines, and the sucker 10 on the second pull bar 8 is contacted with silicon chip, starts asepwirator pump 11, and sucker 10 inhales silicon chip
Firmly, the second cylinder 12 of control drives the second pull bar 8 to rise, while the second pull bar 8 is slided in the second through hole, the first pull bar 7 exists
Slided in first through hole, the second motor 13 of control drives leading screw 16 to rotate so that sucker 10 is located at directly over workbench 2, control
Making the second cylinder 12 drives silicon chip to decline, and control asepwirator pump 11 is stopped, and silicon chip is placed on workbench 2, starts the
Two motors 13 drive leading screw 16 to rotate so that the guide pad 15 on slide plate 6 is slided on guide rail 14, drive first on slide plate 6
The displacement of 7 and second pull bar of pull bar 8, then held by the sucker 10 on the second pull bar 8 and need the silicon chip of burr removing, the central shaft of silicon chip
The center of rotation axis of line and the pressing plate 9 on the first pull bar 7 overlaps with the center of rotation axis of workbench 2 so that pressing plate 9
Push down silicon chip, start the first motor 3 and simultaneously drive workbench 2 to rotate, the Universal caster 18 of the lower section of workbench 2 with turning together
Dynamic, so as to be rotated with dynamic pressure plate 9, the first cylinder 5 of control stretches out with dynamic cutter head 4, and removes the flash of silicon chip edge, completes silicon chip
Burr removing after, stop the first cylinder 5 and the first motor 3, workbench 2 stops operating, the external part of the first cylinder 5 is with moving knife
First 4 shrink, and start the second cylinder 12 and drive the first pull bar 7 and the second pull bar 8 to rise, while the silicon for completing burr removing is taken out,
Now control the second motor 13 so that sucker 10 puts silicon chip the top of 8 displacement workbench of the second pull bar 2, control sucker 10
Put on workbench 2, burr removing can be carried out to silicon chip repeatedly by repeating the above steps.
Above-mentioned is enlightenment according to desirable embodiment of the present utility model, passes through above-mentioned description, relevant staff
Various changes and amendments can be carried out in the range of without departing from this utility model technological thought completely.This practicality
New technical scope is not limited to the content on specification, it is necessary to determine that its is technical according to right
Scope.
Claims (4)
1. a kind of silicon chip automatic burr removing device, it is characterised in that：Including frame (1) and the work being rotatably arranged in frame (1)
Make platform (2), the frame (1) is provided with the first motor (3) for being used for driving workbench (2) to rotate, the frame (1)
Provided with the cutter head (4) for burr removing, the frame (1), which is provided with, is used for band dynamic cutter head (4) close to or away from workbench
(2) slided on the first cylinder (5), the frame (1) and be provided with slide plate (6), the slide plate (6) is located at the workbench
(2) top, the frame (1) is provided with the drive device for being used for driving slide plate (6) to slide, the slide plate (6) and slid along
Direction is provided with the first pull bar (7) and the second pull bar (8), and one end of first pull bar (7) is rotated provided with pressing plate (9), and described the
One end of two pull bars (8) be provided with sucker (10), second pull bar (8) be provided with asepwirator pump (11), the asepwirator pump (11) with
Sucker (10) connection, the sucker (10) is respectively positioned on the top of the workbench (2), the slide plate (6) with pressing plate (9)
External part the second cylinder (12) directed downwardly is provided with, first pull bar (7) and the second pull bar (8) are arranged at second gas
On the external part of cylinder (12).
2. silicon chip automatic burr removing device according to claim 1, it is characterised in that：The drive device includes being arranged on
The second motor (13) in frame (1), the frame (1) is provided with to slide to be provided with guide rail (14), the guide rail (14) and led
To block (15), the guide pad (15) is arranged on the slide plate (6), is rotated on the frame (1) and is provided with leading screw (16), institute
State leading screw (16) to be threadedly coupled with the guide pad (15), the leading screw (16) and the guide rail (14) are arranged in parallel.
3. silicon chip automatic burr removing device according to claim 1, it is characterised in that：The stretching of second cylinder (12)
End is provided with connecting rod (17), and first pull bar (7) is arranged on one end of connecting rod (17), the second pull bar (8) company of being arranged on
The first through hole matched with first pull bar (7), the slide plate are offered on the other end of bar (17), the slide plate (6)
(6) the second through hole matched with second pull bar (8), the one end of first pull bar (7) away from pressing plate (9) are offered on
It is slidably arranged in the first through hole, the one end of second pull bar (8) away from sucker (10) is slidably arranged in described second
In through hole.
4. silicon chip automatic burr removing device according to claim 1, it is characterised in that：The frame (1) and the work
Universal caster (18) is provided between platform (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621494302.XU CN206326465U (en) | 2016-12-30 | 2016-12-30 | Silicon chip automatic burr removing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621494302.XU CN206326465U (en) | 2016-12-30 | 2016-12-30 | Silicon chip automatic burr removing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206326465U true CN206326465U (en) | 2017-07-14 |
Family
ID=59294571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621494302.XU Active CN206326465U (en) | 2016-12-30 | 2016-12-30 | Silicon chip automatic burr removing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206326465U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106736970A (en) * | 2016-12-30 | 2017-05-31 | 常州亿晶光电科技有限公司 | Silicon chip automatic burr removing device |
| CN107457667A (en) * | 2017-09-03 | 2017-12-12 | 湖北天宝光电科技有限公司 | The processing jig and method of sapphire wrist-watch eyeglass |
| CN108995060A (en) * | 2018-07-26 | 2018-12-14 | 合肥米弘智能科技有限公司 | A kind of semiconductor integrated circuit wafer fabrication lines and its production and processing method |
| CN110948717A (en) * | 2018-09-27 | 2020-04-03 | 天津众晶半导体材料有限公司 | Thimble device for cutting high-precision monocrystalline silicon |
-
2016
- 2016-12-30 CN CN201621494302.XU patent/CN206326465U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106736970A (en) * | 2016-12-30 | 2017-05-31 | 常州亿晶光电科技有限公司 | Silicon chip automatic burr removing device |
| CN107457667A (en) * | 2017-09-03 | 2017-12-12 | 湖北天宝光电科技有限公司 | The processing jig and method of sapphire wrist-watch eyeglass |
| CN108995060A (en) * | 2018-07-26 | 2018-12-14 | 合肥米弘智能科技有限公司 | A kind of semiconductor integrated circuit wafer fabrication lines and its production and processing method |
| CN108995060B (en) * | 2018-07-26 | 2020-09-18 | 温州怡沃机械科技有限公司 | Semiconductor integrated circuit wafer processing production line and production processing method thereof |
| CN110948717A (en) * | 2018-09-27 | 2020-04-03 | 天津众晶半导体材料有限公司 | Thimble device for cutting high-precision monocrystalline silicon |
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