CN206322679U - A kind of Etaching device - Google Patents
A kind of Etaching device Download PDFInfo
- Publication number
- CN206322679U CN206322679U CN201720017533.XU CN201720017533U CN206322679U CN 206322679 U CN206322679 U CN 206322679U CN 201720017533 U CN201720017533 U CN 201720017533U CN 206322679 U CN206322679 U CN 206322679U
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- Prior art keywords
- water
- gas
- liquid separator
- pipeline
- etaching device
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- 239000007788 liquid Substances 0.000 claims abstract description 48
- 238000010521 absorption reaction Methods 0.000 claims abstract description 35
- 238000005530 etching Methods 0.000 claims abstract description 25
- 238000005507 spraying Methods 0.000 claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 239000003814 drug Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Weting (AREA)
Abstract
The utility model is related to a kind of Etaching device, including body and water-absorption mechanism, the water-absorption mechanism is arranged in the body, also including blower fan and gas-liquid separator, the water-absorption mechanism is connected with the gas-liquid separator pipeline, and the gas-liquid separator is connected with the Fan pipeline.Etaching device of the present utility model, which can save the energy and can significantly improve, vacuumizes efficiency, improves the uniformity and etching speed of etching.
Description
Technical field
The utility model is related to etching technique, more particularly to a kind of Etaching device.
Background technology
Etching generally also referred to as photochemical etching, refers to by after development, will the diaphragm of etching area remove, in etching
Chemical solution is contacted, the effect of dissolved corrosion is reached.In order to improve the uniformity of etching, it can typically be set on the upside of conveying roller
Water-absorption mechanism is put, water-absorption mechanism discharges the liquid medicine of upper face, to improve the quality of workpiece.Etaching device of the prior art, inhales
Water dispenser structure is connected with ejector and water pump, after pumping for water pump, squeezes into ejector, after ejector injection, can be produced at an upper portion thereof
Vacuum, when being linked into water-absorption mechanism, water-absorption mechanism can draw the medicine water and air of workpiece surface.Produced by ejector and water pump
Raw vacuum, because pumping for water pump requires the expenditure of energy, while also to pass through ejector so that produce the less efficient of vacuum.
Utility model content
Technical problem to be solved in the utility model is：A kind of energy-conservation is provided and the Etaching device of efficiency high is vacuumized.
In order to solve the above-mentioned technical problem, the technical solution adopted in the utility model is：
A kind of Etaching device, including body and water-absorption mechanism, the water-absorption mechanism is arranged in the body, also including wind
Machine and gas-liquid separator, the water-absorption mechanism are connected with the gas-liquid separator pipeline, the gas-liquid separator and the blower fan
Pipeline is connected.
Further, the blower fan is connected with the body pipeline.
Further, the gas-liquid separator is connected with the body pipeline.
Further, also including accumulator tank, the accumulator tank is arranged in the body and positioned at the bottom of body, described
Gas-liquid separator connects setting by pipeline with the accumulator tank.
Further, also including conveying mechanism, the conveying mechanism is arranged in the body, and the water-absorption mechanism is set
Set in the top of the conveying mechanism and towards conveying mechanism.
Further, also including etching mechanism, the etching mechanism include upper spraying mechanism and lower spraying mechanism, it is described on
Spraying mechanism and lower spraying mechanism are separately positioned in the body, and the upper spraying mechanism is upper located at the lower spraying mechanism
Side, the water-absorption mechanism is arranged between the upper spraying mechanism and lower spraying mechanism.
The beneficial effects of the utility model are：
Water-absorption mechanism is connected with gas-liquid separator by pipeline, and gas-liquid separator is connected with blower and pipeline, so that logical
Vacuum can directly be produced by crossing blower fan, without using water pump, can not only save the energy, and can be improved and vacuumized efficiency so that
Water-absorption mechanism in time can discharge the liquid medicine on workpiece, not only greatly improve the uniformity of etching, and can improve entirety
Etching speed.
Brief description of the drawings
Fig. 1 is the structural representation of the Etaching device of the utility model embodiment.
Label declaration：
1st, body；2nd, water-absorption mechanism；3rd, blower fan；4th, gas-liquid separator；5th, conveying mechanism；
6th, etching mechanism；61st, upper spraying mechanism；62nd, lower spraying mechanism.
Embodiment
To describe technology contents of the present utility model, the objects and the effects in detail, below in conjunction with embodiment and match somebody with somebody
Accompanying drawing is closed to be explained.
The design of the utility model most critical is：Vacuum is produced using blower fan, is vacuumized so as to save the energy and improve
Efficiency, and then improve etch uniformity and speed.
Fig. 1, a kind of Etaching device, including body 1 and water-absorption mechanism 2 are refer to, the water-absorption mechanism 2 is arranged on the machine
In body 1, also including blower fan 3 and gas-liquid separator 4, the water-absorption mechanism 2 is connected with the pipeline of gas-liquid separator 4, the gas
Liquid/gas separator 4 is connected with the pipeline of blower fan 3.
Operation principle of the present utility model is：
Vacuum is produced using blower fan, rather than as in the prior art by the way of water pump.Height of the impeller of blower fan in motor
Speed is rotarily driven down, and air is sucked in fans entrance, is rotarily driven down through impeller and is expelled to outlet；It can be produced in the entrance of blower fan
Raw negative pressure, draws air into；Malleation can be produced in the air outlet of blower fan, wind is discharged.
Liquid is extracted in the prior art typically to carry out using water pump, it is different, the utility model using blower fan and
Gas-liquid separator, to replace ejector of the prior art and water pump, the change of said structure can significantly be improved and vacuumized
Efficiency, also, avoid the energy waste because being brought using ejector and pump equipment.
Knowable to foregoing description, the beneficial effects of the utility model are：
Water-absorption mechanism is connected with gas-liquid separator by pipeline, and gas-liquid separator is connected with blower and pipeline, so that logical
Vacuum can directly be produced by crossing blower fan, without using water pump, can not only save the energy, and can be improved and vacuumized efficiency so that
Water-absorption mechanism in time can discharge the liquid medicine on workpiece, not only greatly improve the uniformity of etching, and can improve entirety
Etching speed.
Further, the blower fan 3 is connected with the pipeline of body 1.
Seen from the above description, water-absorption mechanism draws medicine water and air, enters after gas-liquid separator, and gas-liquid separator will
Liquid and gas are separated, and gas enters blower fan by pipeline, enter back into and circulation is completed in body.
Further, the gas-liquid separator 4 is connected with the pipeline of body 1.
Seen from the above description, the liquid through gas-liquid separator separates is entered in body through piping.
Further, also including accumulator tank, the accumulator tank is arranged in the body 1 and positioned at the bottom of body 1, institute
State gas-liquid separator 4 and setting is connected with the accumulator tank by pipeline.
Seen from the above description, the liquid through gas-liquid separator separates is entered in the accumulator tank in body, so as to medicine
Water is reclaimed so that liquid medicine reusable edible, saves former material.
Further, also including conveying mechanism 5, the conveying mechanism 5 is arranged in the body, the water-absorption mechanism 2
It is arranged on the top of the conveying mechanism 5 and is set towards conveying mechanism 5.
Seen from the above description, on the conveyor, water-absorption mechanism is set workpiece setting towards conveying mechanism, it is convenient to
By the liquid medicine draining on workpiece.
Further, also including etching mechanism 6, the etching mechanism 6 includes upper spraying mechanism 61 and lower spraying mechanism 62,
The upper spraying mechanism 61 and lower spraying mechanism 62 are separately positioned in the body 1, and the upper spraying mechanism 61 is located at described
The top of lower spraying mechanism 62, the water-absorption mechanism 2 is arranged between the upper spraying mechanism 61 and lower spraying mechanism 62.
Seen from the above description, etching mechanism includes upper and lower spraying mechanism, and the upper and lower surface of workpiece can be lost simultaneously
Carve, improve etching efficiency.
Figure is refer to, embodiment one of the present utility model is：
The Etaching device of the present embodiment, including body 1 and water-absorption mechanism 2, the water-absorption mechanism 2 are arranged on the body 1
Interior, also including blower fan 3 and gas-liquid separator 4, it (is gas in pipeline that the water-absorption mechanism 2 is connected with the pipeline of gas-liquid separator 4
The liquid medicine of body and liquid), the gas-liquid separator 4 is connected (being gas in pipeline) with the pipeline of blower fan 3.The blower fan 3 with
The pipeline of body 1 connection (being gas in pipeline).It (is liquid in pipeline that the gas-liquid separator 4 is connected with the pipeline of body 1
Body).The flow direction of gas and liquid liquid medicine is as shown in the direction of arrow in Fig. 1.Also include accumulator tank, the accumulator tank is arranged on described
In body 1 and positioned at the bottom of body 1, the gas-liquid separator 4 connects setting by pipeline with the accumulator tank.Also include defeated
Mechanism 5 is sent, the conveying mechanism 5 is arranged in the body, and the water-absorption mechanism 2 is arranged on the top of the conveying mechanism 5
And set towards conveying mechanism 5.Also include etching mechanism 6, the etching mechanism 6 includes upper spraying mechanism 61 and lower spraying mechanism
62, the upper spraying mechanism 61 and lower spraying mechanism 62 are separately positioned in the body 1, and the upper spraying mechanism 61 is located at institute
The top of lower spraying mechanism 62 is stated, the water-absorption mechanism 2 is arranged between the upper spraying mechanism 61 and lower spraying mechanism 62.
Vacuumize efficiency test
Prior art in Etaching device of the present utility model and background technology is included into the etching of ejector and water pump
Device carries out vacuumizing efficiency test respectively.
Concrete operations be for：15 DEG C of air are being aspirated, pressure at expulsion is under 1013mbar operating mode, franchise ± 10% is inhaled
Enter air and environment temperature is no more than 25 DEG C, carry out experiment and vacuumize efficiency test.Test result is as shown in table 1 below.Mark 1 is this
The data of the vacuum that the blower fan of the Etaching device of utility model is produced and the vacuum that the water pump of the Etaching device of prior art is produced
Contrast table.
Table 1
According to table 1, it will be evident that in the case where power is less than pump power, Etaching device of the present utility model
Vacuum pressure and air mass flow that blower fan is produced are all higher than the vacuum pressure and sky that the water pump of the Etaching device of prior art is produced
Throughput.Through equivalent calculated, produce under identical vacuumizing effect, blower fan saves 45% energy than water pump.
In summary, the Etaching device that the utility model is provided, vacuum is produced by blower fan, without using water pump, not only
The energy can be saved, and can significantly improve and vacuumize efficiency so that water-absorption mechanism in time can discharge the liquid medicine on workpiece,
Not only greatly improve the uniformity of etching, and overall etching speed can be improved.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is every
The equivalents made using the utility model specification and accompanying drawing content, or directly or indirectly it is used in the technology neck of correlation
Domain, is similarly included in scope of patent protection of the present utility model.
Claims (6)
1. a kind of Etaching device, including body and water-absorption mechanism, the water-absorption mechanism are arranged in the body, its feature exists
In also including blower fan and gas-liquid separator, the water-absorption mechanism is connected with the gas-liquid separator pipeline, the gas-liquid separator
It is connected with the Fan pipeline.
2. Etaching device according to claim 1, it is characterised in that the blower fan is connected with the body pipeline.
3. Etaching device according to claim 1, it is characterised in that the gas-liquid separator connects with the body pipeline
Connect.
4. Etaching device according to claim 3, it is characterised in that also including accumulator tank, the accumulator tank is arranged on institute
State in body and positioned at the bottom of body, the gas-liquid separator connects setting by pipeline with the accumulator tank.
5. Etaching device according to claim 1, it is characterised in that also including conveying mechanism, the conveying mechanism is set
In the body, the water-absorption mechanism is arranged on the top of the conveying mechanism and set towards conveying mechanism.
6. Etaching device according to claim 1, it is characterised in that also including etching mechanism, the etching mechanism includes
Upper spraying mechanism and lower spraying mechanism, the upper spraying mechanism and lower spraying mechanism are separately positioned in the body, it is described on
Spraying mechanism is located at the top of the lower spraying mechanism, and the water-absorption mechanism is arranged on the upper spraying mechanism and lower spraying mechanism
Between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720017533.XU CN206322679U (en) | 2017-01-06 | 2017-01-06 | A kind of Etaching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720017533.XU CN206322679U (en) | 2017-01-06 | 2017-01-06 | A kind of Etaching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206322679U true CN206322679U (en) | 2017-07-11 |
Family
ID=59261565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720017533.XU Active CN206322679U (en) | 2017-01-06 | 2017-01-06 | A kind of Etaching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206322679U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106558518A (en) * | 2017-01-06 | 2017-04-05 | 深圳天华机器设备有限公司 | A kind of Etaching device |
-
2017
- 2017-01-06 CN CN201720017533.XU patent/CN206322679U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106558518A (en) * | 2017-01-06 | 2017-04-05 | 深圳天华机器设备有限公司 | A kind of Etaching device |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 518000 No.25 factory building, longtiantongfuyu Industrial Park, Kengzi street, Pingshan New District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Tianhua Machinery Equipment Co.,Ltd. Address before: 518000 No.25 factory building, longtiantongfuyu Industrial Park, Kengzi street, Pingshan New District, Shenzhen City, Guangdong Province Patentee before: TIANHUA MACHINE EQUIPMENT Co.,Ltd. |
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| CP03 | Change of name, title or address |
Address after: Unit A2201F, Innovation Plaza, 2007 Pingshan Avenue, Liulian Community, Pingshan Street, Shenzhen City, Guangdong Province, 518118 Patentee after: Shenzhen Tianhua Machinery Equipment Co.,Ltd. Country or region after: China Address before: 518000 No.25 factory building, longtiantongfuyu Industrial Park, Kengzi street, Pingshan New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Tianhua Machinery Equipment Co.,Ltd. Country or region before: China |