CN206293469U - Piezo ceramic unimorph and piezoelectric bimorph - Google Patents
Piezo ceramic unimorph and piezoelectric bimorph Download PDFInfo
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- CN206293469U CN206293469U CN201621355379.9U CN201621355379U CN206293469U CN 206293469 U CN206293469 U CN 206293469U CN 201621355379 U CN201621355379 U CN 201621355379U CN 206293469 U CN206293469 U CN 206293469U
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Abstract
The utility model provides a kind of piezo ceramic unimorph and piezoelectric bimorph,It is related to piezo ceramic element technical field,Including the first piezoelectric ceramic piece and toughening ceramic substrate,First piezoelectric ceramic piece includes the first potsherd and is respectively arranged at electrode slice in the first external electrode piece and first of the first potsherd upper and lower surface,The toughening ceramic substrate is arranged at the lower section of first piezoelectric ceramic piece,First piezoelectric ceramic piece and the toughening ceramic substrate have the integral structure for burning till type altogether,Solve piezoelectric ceramic wafer of the prior art,Connected using adhesive between piezoelectric ceramic piece and supporting substrate,Cause unstable properties in use,The technical problem of poor reliability,The connection reached between the first piezoelectric ceramic piece and toughening ceramic substrate is form compact and stable,Piezoelectric ceramic wafer stable performance in use,The technique effect of good reliability.
Description
Technical field
The utility model is related to piezo ceramic element technical field, more particularly, to piezo ceramic unimorph and piezoelectric ceramics
Twin lamella.
Background technology
With the development of electronic technology, the piezo crystals formed using the direct piezoelectric effect or inverse piezoelectric effect of piezo technology
Piece is widely used in many fields, such as piezo-electric motor, piezoelectric pump, high-speed intelligent valve, tricot machine Jacquard, weft machine
Slide cam selector etc..
Existing piezoelectric chip includes piezoelectric ceramic piece and supporting substrate, and piezoelectric ceramic piece passes through adhesive and supporting substrate
Bonding connection, but due to producing contraction in adhesive solidification process, cause to produce receipts between piezoelectric ceramic piece and supporting substrate
Stress under compression, and adhesive easily aging deformation so that piezoelectric ceramic wafer unstable properties in use, reliability
Difference.
In view of this, it is special to propose the utility model.
Utility model content
One of the purpose of this utility model is to provide a kind of piezo ceramic unimorph, to solve piezoelectricity of the prior art
Ceramic wafers, its piezoelectric ceramic piece is bonded with supporting substrate by adhesive and is connected, because adhesive is produced in the curing process
Shrink, and adhesive easily aging deformation, cause piezoelectric ceramic wafer unstable properties in use, the skill of poor reliability
Art problem.
The piezo ceramic unimorph that the utility model is provided, including the first piezoelectric ceramic piece and toughening ceramic substrate, it is described
First piezoelectric ceramic piece includes the first potsherd and is respectively arranged at the first external electrode piece of the first potsherd upper and lower surface
With first in electrode slice, the toughening ceramic substrate is arranged at the lower section of first piezoelectric ceramic piece, the first piezoelectricity pottery
Ceramics and the toughening ceramic substrate have the integral structure for burning till type altogether.
Further, first piezoelectric patches is single layer structure or sandwich construction.
Further, the piezo ceramic unimorph also includes the first pad and the second pad, first pad and institute
The connection of the first external electrode piece is stated, second pad is connected with electrode slice in described first.
Further, the piezo ceramic unimorph also includes the first conductive pole, and second pad passes through described first
Conductive pole is connected with electrode slice in described first.
The two of the purpose of this utility model are to provide a kind of piezoelectric bimorph, to solve piezoelectricity of the prior art
Ceramic wafers, its piezoelectric ceramic piece is bonded with supporting substrate by adhesive and is connected, due to being produced in the solidification process of adhesive
Shrink, and adhesive easily aging deformation, cause piezoelectric ceramic wafer unstable properties in use, the skill of poor reliability
Art problem.
The piezoelectric bimorph that the utility model is provided includes the piezo ceramic unimorph and that the utility model is provided
Two piezoelectric ceramic pieces, second piezoelectric ceramic piece includes the second potsherd and is respectively arranged at following table on second potsherd
The second inner electrode piece and the second external electrode piece in face, second piezoelectric ceramic piece are arranged under the toughening ceramic substrate
Side, first piezoelectric ceramic piece, the toughening ceramic substrate and second piezoelectric ceramic piece have the one for burning till type altogether
Formula structure.
Further, second piezoelectric ceramic piece is single layer structure or sandwich construction.
Further, the piezoelectric bimorph also includes the 3rd pad, the 4th pad and the 5th pad, the described 3rd
Pad is connected with the first external electrode piece, the 4th pad respectively with described first in electrode slice and the second inner electrode
Piece is connected, and the 5th pad is connected with the second external electrode piece..
Further, the piezoelectric bimorph also includes the second conductive pole, and the 4th pad passes through described second
Conductive pole is connected with electrode slice in described first and the second inner electrode piece respectively.
Further, the piezoelectric bimorph also includes the 6th pad, the 7th pad, the 8th pad and the 9th weldering
Disk, the 6th pad is connected with the first external electrode piece, and the 7th pad is connected with electrode slice in described first, described
8th pad is connected with the second inner electrode piece, and the 9th pad is connected with the second external electrode piece.
Further, the piezoelectric bimorph also includes the 3rd conductive pole and the 4th conductive pole, the 7th pad
Be connected with electrode slice in described first by the 3rd conductive pole, the 8th pad by the 4th conductive pole with it is described
The second inner electrode piece is connected.
The piezo ceramic unimorph that the utility model is provided, has by making the first piezoelectric ceramic piece and toughening ceramic substrate
The integral structure of type is burnt till altogether so that the connection between the first piezoelectric ceramic piece and toughening ceramic substrate is form compact and stable, will not
Shrinkage stress is produced, aging deformation is not easy to, so that the piezo ceramic unimorph that the utility model is provided is using process
Middle stable performance, good reliability.
The piezoelectric bimorph that the utility model is provided, by making the first piezoelectric ceramic piece, toughening ceramic substrate and the
Two piezoelectric ceramic pieces have the integral structure for burning till type altogether, obtain the first piezoelectric ceramic piece, toughening ceramic substrate and the second piezoelectricity
Connection between potsherd is form compact and stable, will not produce shrinkage stress, is not easy to aging deformation, so that the utility model is carried
The stable performance in use of the piezoelectric bimorph of confession, good reliability.
Brief description of the drawings
In order to illustrate more clearly of the utility model specific embodiment or technical scheme of the prior art, below will be right
The accompanying drawing to be used needed for specific embodiment or description of the prior art is briefly described, it should be apparent that, describe below
In accompanying drawing be some implementation methods of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the decomposition texture schematic diagram of the piezo ceramic unimorph that the utility model embodiment 1 is provided；
Fig. 2 is the structural representation of the cross section of the piezo ceramic unimorph shown in Fig. 1；
Fig. 3 is the decomposition texture schematic diagram of the piezoelectric bimorph that the utility model embodiment 2 is provided；
Fig. 4 is the cross-sectional view of the piezoelectric bimorph shown in Fig. 3；
The decomposition texture schematic diagram of the piezoelectric bimorph that Fig. 5 is provided by the utility model embodiment 3.
Icon：The potsherds of 101- first；102- toughening ceramic substrates；103- the first external electrode pieces；Electrode in 104- first
Piece；The first slurries of 105- hole；The pads of 106- first；The pads of 107- second；The potsherds of 108- second；109- the second inner electrode pieces；
110- the second external electrode pieces；The second slurries of 111- hole；The pads of 112- the 3rd；The pads of 113- the 4th；The pads of 114- the 5th；115-
Three slurry holes；The slurry holes of 116- the 4th；The pads of 117- the 6th；The pads of 118- the 7th；The pads of 119- the 8th；The pads of 120- the 9th.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described
Embodiment is a part of embodiment of the utility model, rather than whole embodiments.Based on the embodiment in the utility model, this
The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality
Novel protected scope.
It is term " " center ", " on ", D score, "left", "right", " perpendicular, it is necessary to explanation in description of the present utility model
Directly ", the orientation or position relationship of the instruction such as " level ", " interior ", " outward " are, based on orientation shown in the drawings or position relationship, to be only
Described with simplified for the ease of description the utility model, must had rather than the device or element for indicating or implying meaning specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.Additionally, term " the
One ", " second ", " the 3rd " are only used for describing purpose, and it is not intended that indicating or implying relative importance.
, it is necessary to explanation, unless otherwise clearly defined and limited, term " is pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or integratedly
Connection；Can mechanically connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary,
Can be two connections of element internal.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Concrete meaning of the language in the utility model.
Embodiment 1
Fig. 1 is the decomposition texture schematic diagram of the piezo ceramic unimorph that the utility model embodiment 1 is provided；Fig. 2 is Fig. 1 institutes
The structural representation of the cross section of the piezo ceramic unimorph shown；As depicted in figs. 1 and 2, the utility model embodiment is provided
Piezo ceramic unimorph includes the first piezoelectric ceramic piece and toughening ceramic substrate 102, and the first piezoelectric ceramic piece includes the first ceramics
Piece 101 and it is respectively arranged at electrode slice 104, toughness reinforcing in the first external electrode piece 103 and first of the upper and lower surface of the first potsherd 101
Ceramic substrate 102 is arranged at the lower section of electrode slice 104 in first, and the first piezoelectric ceramic piece and toughening ceramic substrate 102 have altogether
Burn till the integral structure of type.
The piezo ceramic unimorph that the utility model embodiment is provided, by making the first external electrode piece 103, the first potsherd
101st, electrode slice 104 and the one of toughening ceramic substrate 102 burn till type altogether in first so that the ceramics of the first external electrode piece 103, first
Connection in piece 101 and first between first piezoelectric ceramic piece and toughening ceramic substrate 102 of the composition of electrode slice 104 is fine and close steady
It is fixed, shrinkage stress will not be produced, and aging will not deform, so that the piezo ceramic unimorph that the utility model is provided makes
Can stabilization, good reliability with process neutrality.
In the utility model embodiment, toughening ceramic substrate 102 is aluminum oxide toughening ceramic substrate or Zirconium oxide plasticizing
Ceramic substrate.
In the present embodiment, the first piezoelectric ceramic piece can be single layer structure, or be prepared by stack technology
Sandwich construction.
It should be noted that in embodiments of the present invention, the single layer structure of the first piezoelectric ceramic piece refers to the first dispatch from foreign news agency
The structure that electrode slice is cascading from top to bottom in pole piece, the first potsherd and first；The multilayer of the first piezoelectric ceramic piece
Structure refers to electrode slice in the first external electrode piece, the first potsherd and first and is cascading from top to bottom, wherein, first
The quantity of electrode slice is electrode slice in multiple, and the first potsherd and first and corresponds in potsherd and first.
The piezo ceramic unimorph that the present embodiment is provided also includes the first pad 106 and the second pad 107, first weldering
Disk 106 is connected with the first external electrode piece 103, and second pad 107 is connected with electrode slice 104 in described first.
First pad 106 is connected by lead with the opposed polarity end of power supply respectively with the second pad 107, so that piezoelectricity is made pottery
Porcelain single-chip can realize the mutual conversion of electric energy and mechanical energy.
The piezo ceramic unimorph that the utility model is provided also includes the first conductive pole, and the second pad 107 is led by first
Electric post is connected with electrode slice in first 104.
The second pad 107 is connected with outside lead for the ease of workmen, the second pad 107 and the first pad 106
The unilateral homonymy of piezo ceramic unimorph is may be contained within, this is accomplished by the second pad 107 will be through the first potsherd 101 and the
Electrode slice 104 is connected in one.In the present embodiment, it is respectively arranged with first on the potsherd 101 of the first external electrode piece 103 and first
Slurry hole 105, is provided with the first conductive pole in the first slurry hole 105, the second pad 107 is by electricity in the first conductive pole and first
Pole piece 104 is connected.
Short circuit is caused in order to avoid the first conductive pole is connected with the first external electrode piece 103, in embodiments of the present invention, first
Conductive pole is isolated with the first external electrode piece 103.
In addition, it is necessary to illustrate, the second pad 107 can be connected by the first conducting film with electrode slice in first 104,
First conducting film is arranged at the outside of the short transverse of the first potsherd 101.
In the utility model embodiment, the material of electrode slice 104 is the one kind in platinum, palladium, gold, silver, copper, nickel in first
Or any two kinds of alloy；The material of the first external electrode piece 103 is one kind or any two kinds in platinum, palladium, gold, silver, copper, nickel
Alloy.
In the present embodiment, the first conductive pole is formed by electrocondution slurry solidification, and electrocondution slurry is same to prepare the first external electrode piece
103 prepare slurry in first used by electrode slice 104.
The preparation method of the piezo ceramic unimorph that the utility model embodiment is provided, comprises the following steps：(A) prepare and increase
Tough ceramic substrate green compact and the first potsherd green compact；
(B) upper and lower surface in the first potsherd green compact prepares electrode slice in the first external electrode piece 103 and first respectively
104, the first piezoelectric ceramic piece green compact are obtained；
(C) the first piezoelectric ceramic piece green compact are positioned over the top of toughening ceramic substrate green compact, common burning is carried out；Piezoelectricity is obtained
Ceramic unimorph semi-finished product；
(D) piezo ceramic unimorph semi-finished product are carried out into polarization process, that is, is made piezo ceramic unimorph.
In the utility model, in (A) step, toughening ceramic substrate green compact and the first potsherd green compact are used and are cast into
Type method is prepared from.
Toughening ceramic substrate green compact and the first potsherd green compact are prepared by using doctor-blade casting process so that fire
The thickness of the potsherd 101 of toughening ceramic substrate 102 and first is accurate, production efficiency is high, uniform texture, product quality more
It is excellent.
(B) in step, electrode slice 104 is by by screen printing mode system in the first external electrode piece 103 and first
It is standby to form.
(C) in step, after the first piezoelectric ceramic piece is positioned over the upper surface of toughening ceramic substrate 102, isostatic pressing is carried out,
The pressure of isostatic pressing is 40MPa-70MPa, temperature is 40 DEG C -70 DEG C.
(C) in step, co-fired temperature is 800-1250 DEG C, and it is 0.5-5 hours that soaking time is burnt altogether.
(D) in step, polarized using oil bath polarization method or air polarization method, preferably air polarization method, using sky
When gas polarization method is polarized, polarizing voltage is 2.5-6kV/mm.
The preparation method that the utility model leads to the piezo ceramic unimorph of offer is simple, it is easy to operate, by using burning altogether
Knot technique so that first piezoelectric ceramics as obtained in electrode slice 104 in the first external electrode piece 103, the first potsherd 101 and first
Connection between piece and toughening ceramic substrate 102 is form compact and stable, greatly improves the vibration number of its tolerance, and can realize piezoelectricity
The mass production of ceramic unimorph, improve production efficiency.
Embodiment 2
Fig. 3 is the decomposition texture schematic diagram of the piezoelectric bimorph that the utility model embodiment 2 is provided；Fig. 4 is Fig. 3 institutes
The cross-sectional view of the piezoelectric bimorph for showing.As shown in Figure 3 and Figure 4, a kind of piezoelectric ceramics is present embodiments provided double
Chip, the present embodiment is the further improvement on the basis of embodiment 1, and the technical scheme described by embodiment one falls within this reality
Example is applied, the technical scheme that embodiment 1 has been described is not repeated description.
The piezoelectric bimorph that the present embodiment is provided also includes the second piezoelectric ceramic piece, and the second piezoelectric ceramic piece includes the
Two potsherds 108 and the second inner electrode piece 109 and the second external electrode piece for being respectively arranged at the upper and lower surface of the second potsherd 108
110, the second piezoelectric ceramic piece is arranged at the lower section of toughening ceramic substrate 102, the first piezoelectric ceramic piece, toughening ceramic substrate 102
There is the integral structure for burning till type altogether with the second piezoelectric ceramic piece.
In the present embodiment, for being made up of electrode slice 104 in the first external electrode piece 103, the first potsherd 101 and first
One piezoelectric ceramic piece and toughening ceramic substrate 102 and by the second inner electrode piece 109, the second potsherd 108 and the second external electrode piece
110 the second piezoelectric ceramic piece co-sintering connections being made so that the first piezoelectric ceramic piece, toughening ceramic substrate 102 and second are pressed
Connection between electroceramics piece is form compact and stable, will not produce shrinkage stress, so that the piezoelectric ceramics that the utility model is provided
Twin lamella stable performance in use, good reliability.
In the present embodiment, the second piezoelectric ceramic piece can be single layer structure, or be prepared by stack technology
Sandwich construction.
The single layer structure or sandwich construction of the second piezoelectric ceramic piece will not be repeated here with the first piezoelectric ceramic piece.
The piezoelectric bimorph that the present embodiment is provided also includes the 3rd pad 112, the 4th pad 113 and the 5th pad
114, the 3rd pad 112 is connected with the first external electrode piece 103, the 4th pad 113 successively with first in electrode slice 104 and second
Electrode slice 109 is connected, and the 5th pad 114 is connected with the second external electrode piece 110.
The polarity phase of the piezoelectric bimorph that the present embodiment is provided, the first external electrode piece 103 and the second external electrode piece 110
Together, the first external electrode piece 103 is connected with the 3rd pad 112, and the second external electrode piece 110 is connected with the 5th pad 114；Electricity in first
Pole piece 104 is identical with the polarity of the second inner electrode piece 109, and in first electrode slice 104 and the second inner electrode piece 109 successively with
Four pads 113 are connected.
The piezoelectric bimorph that the present embodiment is provided also includes the second conductive pole, and the 4th pad 113 is conductive by second
Post is connected with electrode slice in first 104 and the second inner electrode piece 109 successively.
The 4th pad 113 is connected with outside lead for the ease of workmen, the 4th pad 113 and the 3rd pad 112
May be contained within the unilateral homonymy of piezoelectric bimorph, this be accomplished by the 4th pad 113 successively with first in electrode slice 104 with
The second inner electrode piece 109 is connected.In the present embodiment, electrode slice in the first external electrode piece 103, the first potsherd 101, first
104th, the second slurry hole 111 is respectively arranged with toughening ceramic substrate 102, the second conductive pole is arranged in the second slurry hole 111,
4th pad 113 is connected with electrode slice in first 104 and the second inner electrode piece 109 successively by the second conductive pole.
It should be noted that the second conductive pole is isolated with the first external electrode piece 103, to avoid the formation of short circuit.
In the present embodiment, the second conductive paste is formed by electrocondution slurry solidification, and the electrocondution slurry is same to prepare the first external electrode
Slurry in piece 103 or preparation first used by electrode slice 104.
In embodiments of the present invention, in first the material of electrode slice 104 and the second inner electrode piece 109 be platinum, palladium, gold,
One kind or any two kinds of alloy in silver, copper, nickel；The material of the first external electrode piece 103 and the second external electrode piece 110 is
One kind or any two kinds of alloy in platinum, palladium, gold, silver, copper, nickel.
The preparation method of piezoelectric bimorph provided in an embodiment of the present invention, comprises the following steps：
(A) toughening ceramic substrate green compact, the first potsherd green compact and the second potsherd green compact are prepared；
(B) upper and lower surface in the first potsherd green compact prepares electrode slice 104 in the first external electrode piece 103 first respectively,
The first piezoelectric ceramic piece green compact are obtained；The second inner electrode piece 109 and are prepared respectively in the upper and lower surface of the second potsherd green compact
Two dispatch from foreign news agency pole pieces 110, are obtained the second piezoelectric ceramic piece green compact；
(C) stack gradually the first piezoelectric ceramic piece green compact, toughening ceramic substrate green compact and the second piezoelectric ceramic piece green compact
Set, carry out common burning, piezoelectric bimorph semi-finished product are obtained；
(D) piezoelectric bimorph semi-finished product are carried out into polarization process, that is, is made piezoelectric bimorph.
In embodiments of the present invention, in (A) step, toughening ceramic substrate green compact, the first potsherd green compact and the second ceramics
Piece green compact are prepared from using doctor-blade casting process.Toughening ceramic substrate green compact, the first pottery are prepared by using doctor-blade casting process
Ceramics green compact and the second potsherd green compact so that toughening ceramic substrate 102, the first potsherd 101 and the second pottery fired
The thickness of ceramics 108 is accurate, production efficiency is high, uniform texture, product quality are more excellent.
(B) in step, electrode slice 104 is prepared from by screen printing mode in the first external electrode piece 103 and first,
The second inner electrode piece 109 and the second external electrode piece 110 are also to be prepared from by screen printing mode.
(C) in step, the first external electrode piece 103, the first potsherd green compact, electrode slice 104, toughening ceramic substrate in first
After green compact, the second inner electrode piece 109, the second potsherd green compact, the second external electrode piece 110 are cascading, isostatic pressed is carried out
Shaping, the pressure of isostatic pressing is 40MPa-70MPa, temperature is 40 DEG C -70 DEG C.
(C) in step, co-fired temperature is 800-1250 DEG C, and it is 0.5-5 hours that soaking time is burnt altogether.
(D) in step, polarized using oil bath polarization method or air polarization method, preferably air polarization method, using sky
When gas polarization method is polarized, polarizing voltage is 2.5-6kV/mm.
The preparation method of the logical piezoelectric bimorph for providing of the present invention is simple, it is easy to operate, by using co-sintering work
Skill so that the connection between the first piezoelectric ceramic piece, the piezoelectric ceramic piece of toughening ceramic substrate 102 and second is form compact and stable, significantly
The vibration number of its tolerance is improved, and the mass production of piezoelectric bimorph, improve production efficiency can be realized.
Embodiment 3
The decomposition texture schematic diagram of the piezoelectric bimorph that Fig. 5 is provided by the utility model embodiment 3；Such as Fig. 5 institutes
Show, the present embodiment is distinguished with embodiment 2, the 3rd pad 112, the 4th pad 113 and the 5th weldering are provided with example 2
Disk 114, and the present embodiment is provided with the 6th pad 117, the 7th pad 118, the 8th pad 119 and the 9th pad 120, wherein,
6th pad 117 is connected with the first external electrode piece 103, and the 7th pad 118 is connected with electrode slice in first 104, the 8th pad 119
It is connected with the second inner electrode piece 109, the 9th pad 120 is connected with the second external electrode piece 110.
By setting the 6th pad 117, the 7th pad 118, the 8th pad 119 and the 9th pad 120 so that the present embodiment
The piezoelectric bimorph of offer can apply different voltages on the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, to expand
The use scope of the piezoelectric bimorph that big the present embodiment is provided.
Piezoelectric bimorph provided in an embodiment of the present invention also includes the 3rd conductive pole and the 4th conductive pole, the 7th pad
118 are connected by the 3rd conductive pole with electrode slice in first 104, and the 8th pad 119 passes through the 4th conductive pole and the second inner electrode
Piece 109 is connected.
As shown in figure 5, the 6th pad 117, the 7th pad 118 may be contained within the unilateral homonymy of piezoelectric bimorph,
8th pad 119 and the 9th pad 120 are arranged at the opposite side of piezoelectric bimorph, in embodiments of the present invention, the 6th weldering
Disk 117 is connected with the first external electrode piece 103；The potsherd 101 of the first external electrode piece 103 and first is respectively arranged with the 3rd slurry hole
115, the 3rd conductive pole is arranged in the 3rd slurry hole 115, and the 7th pad 118 is by electrode slice in the 3rd conductive pole and first
104 connections；The 4th slurry hole 116, the 4th slurry hole 116 are provided with the potsherd 108 of the second external electrode piece 110 and second
In be provided with the 4th conductive pole, the 8th pad 119 is connected by the 4th conductive pole with the second inner electrode piece 109.
In embodiments of the present invention, the 3rd conductive pole and the 4th conductive pole are formed by electrocondution slurry solidification, electrocondution slurry
With the slurry prepared in the first external electrode piece 103 or preparation first used by electrode slice 104.
Finally it should be noted that：Various embodiments above is only used to illustrate the technical solution of the utility model, rather than it is limited
System；Although being described in detail to the utility model with reference to foregoing embodiments, one of ordinary skill in the art should
Understand：It can still modify to the technical scheme described in foregoing embodiments, or to which part or whole
Technical characteristic carries out equivalent；And these modifications or replacement, the essence of appropriate technical solution is departed from this practicality newly
The scope of each embodiment technical scheme of type.
Claims (10)
1. a kind of piezo ceramic unimorph, it is characterised in that including the first piezoelectric ceramic piece and toughening ceramic substrate, described first
Piezoelectric ceramic piece includes the first potsherd and is respectively arranged at the first external electrode piece and the of the first potsherd upper and lower surface
Electrode slice in one, the toughening ceramic substrate is arranged at the lower section of first piezoelectric ceramic piece, first piezoelectric ceramic piece
There is the integral structure for burning till type altogether with the toughening ceramic substrate.
2. piezo ceramic unimorph according to claim 1, it is characterised in that first piezoelectric ceramic piece is individual layer knot
Structure or sandwich construction.
3. piezo ceramic unimorph according to claim 1 and 2, it is characterised in that also welded including the first pad and second
Disk, first pad is connected with the first external electrode piece, and second pad is connected with electrode slice in described first.
4. piezo ceramic unimorph according to claim 3, it is characterised in that also including the first conductive pole, described second
Pad is connected by first conductive pole with electrode slice in described first.
5. a kind of piezoelectric bimorph, it is characterised in that including the piezo ceramic unimorph described in claim 1 or 2 and
Two piezoelectric ceramic pieces, second piezoelectric ceramic piece includes the second potsherd and is respectively arranged at following table on second potsherd
The second inner electrode piece and the second external electrode piece in face, second piezoelectric ceramic piece are arranged under the toughening ceramic substrate
Side, first piezoelectric ceramic piece, the toughening ceramic substrate and second piezoelectric ceramic piece have the one for burning till type altogether
Formula structure.
6. piezoelectric bimorph according to claim 5, second piezoelectric ceramic piece is single layer structure or multilayer knot
Structure.
7. piezoelectric bimorph according to claim 5, it is characterised in that also including the 3rd pad, the 4th pad and
5th pad, the 3rd pad is connected with the first external electrode piece, the 4th pad respectively with described first in electrode
Piece and the second inner electrode piece are connected, and the 5th pad is connected with the second external electrode piece.
8. piezoelectric bimorph according to claim 7, it is characterised in that also including the second conductive pole, the described 4th
Pad is connected with electrode slice in described first and the second inner electrode piece respectively by second conductive pole.
9. piezoelectric bimorph according to claim 5, it is characterised in that also including the 6th pad, the 7th pad,
Eight pads and the 9th pad, the 6th pad are connected with the first external electrode piece, in the 7th pad and described first
Electrode slice is connected, and the 8th pad is connected with the second inner electrode piece, the 9th pad and the second external electrode piece
Connection.
10. piezoelectric bimorph according to claim 9, it is characterised in that also led including the 3rd conductive pole and the 4th
Electric post, the 7th pad is connected by the 3rd conductive pole with electrode slice in described first, and the 8th pad passes through institute
The 4th conductive pole is stated to be connected with the second inner electrode piece.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621355379.9U CN206293469U (en) | 2016-12-09 | 2016-12-09 | Piezo ceramic unimorph and piezoelectric bimorph |
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| CN201621355379.9U CN206293469U (en) | 2016-12-09 | 2016-12-09 | Piezo ceramic unimorph and piezoelectric bimorph |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106784297A (en) * | 2016-12-09 | 2017-05-31 | 苏州攀特电陶科技股份有限公司 | Piezoelectric ceramic actuator piece and preparation method thereof |
| CN111179976A (en) * | 2018-11-09 | 2020-05-19 | 马格内康普公司 | Method of manufacturing piezoelectric microactuator having wound electrodes |
| CN116171097A (en) * | 2023-04-25 | 2023-05-26 | 常州威图流体科技有限公司 | Piezoelectric bimorph structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106784297A (en) * | 2016-12-09 | 2017-05-31 | 苏州攀特电陶科技股份有限公司 | Piezoelectric ceramic actuator piece and preparation method thereof |
| CN106784297B (en) * | 2016-12-09 | 2020-09-25 | 苏州攀特电陶科技股份有限公司 | Piezoelectric ceramic actuating piece and preparation method thereof |
| CN111179976A (en) * | 2018-11-09 | 2020-05-19 | 马格内康普公司 | Method of manufacturing piezoelectric microactuator having wound electrodes |
| CN111179976B (en) * | 2018-11-09 | 2023-08-29 | 马格内康普公司 | Method of manufacturing piezoelectric micro-actuator with wound electrode |
| CN116171097A (en) * | 2023-04-25 | 2023-05-26 | 常州威图流体科技有限公司 | Piezoelectric bimorph structure |
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