CN206279260U - Mask plate body and mask plate - Google Patents
Mask plate body and mask plate Download PDFInfo
- Publication number
- CN206279260U CN206279260U CN201621438086.7U CN201621438086U CN206279260U CN 206279260 U CN206279260 U CN 206279260U CN 201621438086 U CN201621438086 U CN 201621438086U CN 206279260 U CN206279260 U CN 206279260U
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- Prior art keywords
- mask plate
- plate body
- mask
- regions
- bending section
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Abstract
The utility model provides a kind of mask plate body, including at least one mask regions and the unmasked areas that is looped around around the mask regions, and the mask plate body is set to bending section along the part corresponding to the mask regions at the edge of default draw direction extension；From the middle part of at least one end to the bending section of the bending section, the edge that the bending section moves closer to or extends along the default draw direction near the mask regions in staged；The default draw direction is the length direction or width of the mask plate body.Correspondingly, the utility model also provides a kind of mask plate.The utility model can improve the buckling phenomena of the mask regions both sides of mask plate.
Description
Technical field
The utility model is related to the production field of display device, and in particular to a kind of mask plate body and mask plate.
Background technology
At present, OLED (Organic Light-Emitting Diode) display mainly uses fine metal in volume production
Mask (Fine Metal Mask, FMM) mode forms color monitor, particular by evaporation mode by luminous organic material
According on preset program evaporation to display backboard, using the figure on mask plate so that the organic material evaporation of shades of colour is arrived
On corresponding position.For this reason, it may be necessary to first make mask plate.
Due to the very thin thickness of mask plate, therefore, in the manufacturing process of mask plate, mask is formed on mask plate body
Qu Hou, it will usually apply pulling force (as shown in Figure 1) at the two ends of mask plate body and stretched with to it, so that after stretching
Mask plate body produces some strength and keeps the stabilization of shape.But, due to mask regions M and the thickness of the unmasked areas of its both sides
Degree is different, therefore, in stretching, the edge of mask plate body is inside contracted, so as to cause the non-of the mask plate body after stretching
Mask regions form fold, and closer to the middle part along draw direction, buckling phenomena is more obvious.Fig. 2 be Fig. 1 in mask plate body be subject to
The buckle condition schematic diagram in the AA ' sections after stretching, two high spots of curve represent the fold of mask regions two side portions in Fig. 2
More apparent, the flat place between two high spots represents that mask regions are flatter.When the mask plate of these generation folds puts into production
When, it will influence product yield.
Therefore, how to improve the buckling phenomena of mask plate turns into this area technical problem urgently to be resolved hurrily.
Utility model content
The utility model is intended at least solve one of technical problem present in prior art, it is proposed that a kind of mask plate sheet
Body and mask plate, to improve the buckling phenomena of mask plate.
One of in order to solve the above-mentioned technical problem, the utility model provides a kind of mask plate body, including at least one covers
Film area and the unmasked areas being looped around around the mask regions, the edge that the mask plate body extends along default draw direction
Part corresponding to the mask regions is set to bending section；From the middle part of at least one end to the bending section of the bending section,
The edge that the bending section moves closer to or extends along the default draw direction near the mask regions in staged；It is described pre-
If draw direction is the length direction or width of the mask plate body.
Preferably, the two ends from the bending section are to middle part, and the bending section moves closer to or in staged near described
Mask regions.
Preferably, the bending section is arc.
Preferably, the mask regions along the size of the default draw direction between 100mm~120mm；
The two ends of the bending section to the middle part of distance and the bending section of the mask regions to the mask regions away from
Difference between in [140L, 160L] μm, the distance at the middle part of the bending section to the mask regions 380 μm~
Between 420 μm；
Wherein, L is reference mask plate body corresponding with the mask plate body on by the default draw direction
Stretching when, the value that the marginal center of the reference mask plate body shrinks towards the reference mask plate body interior.
Preferably, the length of the mask plate body is between 800mm~900mm, width between 80mm~100mm,
Thickness is between 20 μm~40 μm；The default draw direction is the length direction of the mask plate body.
The material for being preferably made from the mask plate body includes invar.
Preferably, along the default draw direction, the mask plate body is located at the both sides of all mask regions regions
Part in, per part include：Two extensions extended along the default draw direction and being connected to described in two prolong
Connecting portion between extending portion, the connecting portion is connected with the extension near one end of the mask regions.
Correspondingly, the utility model also provides a kind of mask plate, and it is above-mentioned that the mask plate includes that the utility model is provided
Mask plate body.
It is curved because the part corresponding to mask regions at the edge of mask plate body forms bending section in the utility model
Pars convoluta moves closer to mask regions on the whole from its at least one end to middle part, therefore, stretched when along the default draw direction
During mask plate body, pulling force can be decomposed into two parts, and a part is stretched along default draw direction to mask plate body, another
The region that mask regions both sides are ordered about in part produces the trend for expanding outwardly, so that the fold of the mask plate formed after stretching shows
As mitigating, and then cause that the yield of the display product made using the mask plate is improved.
Brief description of the drawings
Accompanying drawing is further understood to of the present utility model for providing, and constitutes a part for specification, and following
Specific embodiment be used to explain the utility model together, but do not constitute to limitation of the present utility model.In the accompanying drawings：
Fig. 1 is the structural representation of mask plate body of the prior art；
Fig. 2 is the buckle condition schematic diagram at the AA ' lines after mask plate body is stretched in Fig. 1；
Fig. 3 is the structural representation of the mask plate body of offer in embodiment of the present utility model；
Fig. 4 is the expansion trend schematic diagram that mask plate body of the present utility model is produced when being stretched；
Fig. 5 be buckle condition at the AA ' lines after mask plate body of the present utility model is stretched with the prior art
Mask plate body be stretched after AA ' lines at buckle condition contrast schematic diagram；
Fig. 6 is ansys software emulation schematic diagrames when mask plate body of the present utility model is stretched.
Wherein, reference is：
10th, mask plate body；1/4 part of 10a, mask plate body；11st, bending section；12nd, extension；13rd, connecting portion；
M, mask regions；S1~S9, bar-shaped zone.
Specific embodiment
Specific embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.It should be appreciated that herein
Described specific embodiment is merely to illustrate and explains the utility model, is not limited to the utility model.
As one side of the present utility model, there is provided a kind of mask plate body 10, as shown in figure 3, mask plate body 10 is wrapped
At least one mask regions M and the unmasked areas (i.e. white space in Fig. 3) being looped around around the M of mask regions are included, mask regions M is used for
Viewing area with display base plate is corresponding, and mask plate body 10 sets along the edge part corresponding with mask regions M that preset direction extends
Bending section 11 is set to, the default draw direction is the length direction or width of mask plate body 10.From bending section 11
At least middle part of one end to bending section 11, bending section 11 move closer to or in staged near mask regions M along the default stretching
The edge that direction extends.
It should be noted that the edge of described " extending along default draw direction " is not offered as the edge one and is set to straight line,
As long as being extended along the default draw direction.In such as Fig. 3, when the default draw direction is length direction
When (i.e. above-below direction in Fig. 3), the edge of described " extending along default draw direction " is the edge of the left and right sides.Should manage
Solution, the two ends of bending section 11 are the two ends along the default draw direction, and the middle part of bending section 11 is between two ends
The corresponding position of the heart is close to the corresponding position in center.
It is understood that above-mentioned, " from the middle part of at least one end to the bending section 11 of bending section 11, bending section 11 is gradually leaned on
Edge that is near or extending along the default draw direction near mask regions M in staged " refers to that at least one end of bending section 11 is arrived
The part at middle part meets：On the part any two position (position a in such as Fig. 3 between the lower end of bending section 11 and middle part and
In the b) of position, when position a is closer to 11 middle part of bending section, the vertical range of position a to the left side edge of mask regions M be less than or
Equal to the left side edge vertical range of position b to mask regions M, and the lower end of bending section 11 is to the vertical of the left side edge of mask regions M
Vertical range of the distance more than the middle part of bending section 11 to the left side edge of mask regions M.That is, bending section 11 from its at least one end into
Portion, moves closer to mask regions M on the whole.
In the manufacturing process of mask plate, after forming mask plate body 10, then mask plate body 10 is stretched to carry
Its structural stability high, so as to obtain final required mask plate；Wherein, the direction of pull of applying can be along the default stretching
Direction.And due to bending section 11 from its at least one end to middle part, mask regions M is moved closer on the whole, therefore, when along described
During default draw direction stretching mask plate body 10, pulling force can be decomposed into two parts, and a part is along default draw direction to mask
Plate body 10 is stretched, and the region that another part orders about mask regions M both sides produces the trend for expanding outwardly, so as to alleviate drawing
The buckling phenomena produced when stretching, and then cause that the yield of the display product prepared using the mask plate body after stretching is improved.
Preferably, from the two ends of bending section 11 to middle part, bending section 11 moves closer to (as shown in Figure 3) or is leaned in staged
Nearly mask regions M so that each position of bending section can produce expand outwardly trend (as in Fig. 4 to left and right direction
Shown in arrow).Also, when being stretched to mask plate body of the prior art, closer to mask regions along default stretching side
To the region at center, buckling phenomena is more obvious, and the utility model using structure in Fig. 3 when, closer to along default stretching side
To middle part, expansion trend is more obvious (black arrow is more long in Fig. 4, shows that expansion trend is more obvious), so that different position
The different buckling phenomenas put are improved accordingly.Fig. 5 be Fig. 4 of the present utility model mask plate body it is stretched after
The buckle condition comparison diagram in AA ' section of the buckle condition in AA ' sections with the mask plate body of Fig. 1 after stretched, can see
Go out, the fold degree after the mask plate body 10 in the utility model is stretched is significantly less than mask plate sheet of the prior art
Fold degree after body is stretched.
Further, bending section 11 is the arc towards mask regions M bendings, in order to pulling force in mask regions M two side areas
Middle transmission, expands outwardly so as to be more beneficial for mask regions M two side portions.
Multiple mask regions M can be provided with mask plate body 10, and when multiple mask regions M are arranged as multiple row, it is adjacent
Part between two row mask regions M is also susceptible to fold, therefore, in order to reduce the generation of fold, multiple mask regions M are lined up
One row, as shown in Figure 3 and Figure 4.
Wherein, mask regions M along the size of the default draw direction between 100mm~120mm, it is in this case, curved
The two ends of pars convoluta 11 exist to the distance of mask regions M and the middle part of bending section 11 to the difference between the distance of mask regions M
In [140L, 160L] μm, the distance at the middle part of bending section 11 to mask regions M is between 380 μm~420 μm；Wherein, L is and institute
When stating stretching of the corresponding reference mask plate body of mask plate body on by the default draw direction, the reference mask
The value that the marginal center of plate body shrinks towards the reference mask plate body interior.It should be noted that the reference mask
Plate body refer to the utility model provide the above-mentioned size of mask plate body 10 it is identical but its along default draw direction edge
It is the mask plate body of straight line, that is, mask plate body of the prior art.In actual applications, multiple sides can first be selected
Edge is the mask plate body (that is, reference mask plate body) of straight line, it is stretched along default draw direction then, then detect
Size is inside contracted in the middle part of reference mask plate body edges after stretching, this inside contracts size as L.The two ends and middle part of bending section 11
Distance to mask regions M each means the vertical range at the edge extended along default draw direction to mask regions M.
Mask plate body in the utility model be particularly suited for fine metal mask plate (Fine Metal Mask,
FMM), specifically, between 800mm~900mm, between 80mm~100mm, thickness is 20 for width for the length of mask plate body
μm~40 μm between.At this moment, in mask plate manufacturing process, mask plate body 10 is stretched along its length, in order to apply to draw
Power；Correspondingly, the default draw direction is the length direction of the mask plate.
Further, in order that mask plate body 10 has toughness and plasticity higher, in the utility model, it is made mask
The material of plate body 10 includes invar, consequently facilitating improving the intensity and structural stability of mask plate body 10 by stretching.
Further, as shown in figure 3, along the default draw direction (in the utility model, the default draw direction
The specially length direction of mask plate body 10), mask plate body 10 is located at the part of the both sides of all mask regions M regions
In, include per part：Two extensions 12 extended along the default draw direction and be connected to two extensions 12 it
Between connecting portion 13, connecting portion 12 and extension 13 are connected near one end of mask regions M.In the conveyance process of mask plate body 10
In, extension 12 is clamped using holder, and then transport mask plate body 10.
As another aspect of the present utility model, there is provided a kind of preparation method of mask plate, including：
First, there is provided mask plate body 10, the mask plate body 10 is above-mentioned mask plate body 10, and it includes at least one
Individual mask regions M and the unmasked areas being looped around around the M of mask regions, the edge extended along default draw direction of mask plate body 10
Part corresponding with mask regions M forms bending section 11；It is described from the middle part of at least one end to the bending section of the bending section
The edge that bending section moves closer to or extends along the default draw direction near the mask regions in staged.
Then, apply respectively along the default stretching side along the two ends of the default draw direction in mask plate body 10
To and towards pulling force outside mask plate body 10.Wherein, the default draw direction is the length direction of mask plate body 10
Or width.In the utility model, the length of mask plate body 10 between 800mm~900mm, width 80mm~
Between 100mm, the default draw direction is the length direction of mask plate body 10.As shown in figure 4, applying pulling force to mask
When plate body 10 is stretched, the pulling force at two ends is distinguished along its length up and down.
The preparation method can also include：Mask plate body 10 after stretching is fixed on framework, so as to obtain
The mask plate of needs, the mask plate can put into evaporation chamber and is deposited with.
As described above, along the default draw direction, mask plate body 10 is located at the two of all mask regions M regions
In the part of side, include per part：Two extensions 12 extended along the default draw direction and it is connected to two and prolongs
Connecting portion 13 between extending portion 12, connecting portion 13 is connected with extension 12 near one end of mask regions M.In this case, right
When mask plate body 10 is stretched, the pulling force is applied to extension 12 away from one end of mask regions M.
In order that the part for obtaining mask regions M both sides can reduce fold in the abducent trend of effect of pulling force, while
Prevent pulling force it is excessive cause mask plate deform or damage, it is preferable that be applied to mask plate body 10 per one end pulling force by 1N
~3N gradually increases to 8N~12N.For example, often end pulling force increases to 5N by 2N, 7N is then increased to, then increase to 10N.
Metamorphosis of the utility model by Ansys softwares to mask plate in manufacturing process carries out analogue simulation.Its
In, mask plate body 10 is made up of invar, and length is 850mm, and width is 85mm, and thickness is 30 μm；And including two mask regions
M；In the edge of mask plate body 10, corresponding with mask regions M part forms the bending section 11 of arc, and the two ends of bending section 11 are to covering
The distance in film area is (400+150L) μm, and the distance at the middle part of bending section 11 to mask regions is 400 μm.Wherein, L is reference mask
When plate body is stretched in manufacturing process, the size that edge is inside contracted, reference mask plate body and above-mentioned mask plate body 10
Differ only in：Reference mask plate body is straight line along the edge of default draw direction, and the side of above-mentioned mask plate body 10
Edge forms above-mentioned bending section 11.In simulation, only the 1/4 part 10a to mask plate body 10 in Fig. 3 is simulated, the part
After two ends apply summation for the pulling force of 10N, the state change result of 1/4 part 10a of mask plate body 10 is as shown in Figure 6.
During analogue simulation, in order to be more clearly visible that the expansion trend of each several part of mask plate body 10, by 1/4 of mask plate body 10
10a is divided to be divided into multiple bar-shaped zone S1~S9, bar-shaped zone S1~S7 corresponds to 1/4 part 10a's of mask plate body 10
Mask regions, the unmasked areas of 1/4 part 10a of region S8~S9 correspondence mask plates body 10.
Each area's extension of a field trend of mask plate body 10 is as shown in fig. 6, the dotted line in figure is each region original before the stretching
Beginning position, as seen in Figure 6, the expansion trend of region S1~S4 is relatively small, and the expansion trend of region S5~S9 is relative
It is larger, also, the expansion trend of region S5~S9 upper and lower ends is smaller, and the expansion trend at middle part is larger.And due to upper and lower ends
Fold degree less than middle part fold degree, therefore, after being stretched to mask plate body 10 in actual production, mask regions
The buckle condition of each position of two side portions can improve.
As another further aspect of the present utility model, there is provided a kind of mask plate, the mask plate includes above-mentioned mask plate body, institute
Stating mask plate also includes the framework for being used to install the mask plate body.In order to improve the strength and stability of mask plate body,
First mask plate body can be stretched, then the mask plate body after stretching is fixed on framework.It should be appreciated that due to covering
The size that lamina membranacea body is expanded when being stretched is the length and width much smaller than mask plate body, therefore, the mask plate
The size and dimension mask plate body 10 that may refer to shown in Fig. 3.
By above description as can be seen that in the utility model provide mask plate body edge corresponding to mask regions
Part form bending section, the bending section moves closer to the mask regions on the whole from its at least one end to middle part, because
This, when along the default draw direction stretching mask plate body, generation is ordered about to extending out in the region of mask regions both sides from stress
The trend opened such that it is able to mitigate the buckling phenomena of the mask plate for preparing, and then cause the display base plate using mask plate making
Quality advance.
It is understood that embodiment of above be merely to illustrate that principle of the present utility model and use it is exemplary
Implementation method, but the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, and these variations and modifications are also considered as this reality
With new protection domain.
Claims (8)
1. a kind of mask plate body, including at least one mask regions and the unmasked areas being looped around around the mask regions, it is special
Levy and be, the mask plate body is set to curved along the part corresponding to the mask regions at the edge of default draw direction extension
Pars convoluta；From the middle part of at least one end to the bending section of the bending section, the bending section moves closer to or is leaned in staged
The edge that the nearly mask regions extend along the default draw direction；The default draw direction is the length of the mask plate body
Degree direction or width.
2. mask plate body according to claim 1, it is characterised in that the two ends from the bending section are described to middle part
Bending section moves closer to or in staged near the mask regions.
3. mask plate body according to claim 2, it is characterised in that the bending section is arc.
4. mask plate body according to claim 2, it is characterised in that the mask regions are along the default draw direction
Size is between 100mm~120mm；
The two ends of the bending section to distance and the bending section of the mask regions middle part to the mask regions distance it
Between difference in [140L, 160L] μm, the distance at the middle part of the bending section to the mask regions is at 380 μm~420 μm
Between；
Wherein, L is reference mask plate body corresponding with the mask plate body drawing on by the default draw direction
When stretching, the value that the marginal center of the reference mask plate body shrinks towards the reference mask plate body interior.
5. mask plate body as claimed in any of claims 1 to 4, it is characterised in that the mask plate body
Between 800mm~900mm, between 80mm~100mm, thickness is between 20 μm~40 μm for width for length；The default drawing
Stretch the length direction that direction is the mask plate body.
6. mask plate body as claimed in any of claims 1 to 4, it is characterised in that be made the mask plate sheet
The material of body includes invar.
7. mask plate body as claimed in any of claims 1 to 4, it is characterised in that along the default stretching side
To the mask plate body is located in the part of the both sides of all mask regions regions, is included per part：Two along described
Extension that default draw direction extends and the connecting portion being connected between two extensions, the connecting portion with it is described
Extension is connected near one end of the mask regions.
8. a kind of mask plate, it is characterised in that the mask plate includes the mask plate described in any one in claim 1 to 7
Body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621438086.7U CN206279260U (en) | 2016-12-26 | 2016-12-26 | Mask plate body and mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621438086.7U CN206279260U (en) | 2016-12-26 | 2016-12-26 | Mask plate body and mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206279260U true CN206279260U (en) | 2017-06-27 |
Family
ID=59071282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621438086.7U Withdrawn - After Issue CN206279260U (en) | 2016-12-26 | 2016-12-26 | Mask plate body and mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206279260U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106591775A (en) * | 2016-12-26 | 2017-04-26 | 京东方科技集团股份有限公司 | Mask body, mask and manufacturing method of mask |
| CN111158211A (en) * | 2020-01-02 | 2020-05-15 | 京东方科技集团股份有限公司 | Preparation method of mask plate and preparation method of display substrate |
-
2016
- 2016-12-26 CN CN201621438086.7U patent/CN206279260U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106591775A (en) * | 2016-12-26 | 2017-04-26 | 京东方科技集团股份有限公司 | Mask body, mask and manufacturing method of mask |
| WO2018120727A1 (en) * | 2016-12-26 | 2018-07-05 | 京东方科技集团股份有限公司 | Mask plate body, mask plate and manufacturing method thereof |
| CN106591775B (en) * | 2016-12-26 | 2019-06-07 | 京东方科技集团股份有限公司 | Mask plate ontology, mask plate and preparation method thereof |
| CN111158211A (en) * | 2020-01-02 | 2020-05-15 | 京东方科技集团股份有限公司 | Preparation method of mask plate and preparation method of display substrate |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170627 Effective date of abandoning: 20190607 |