CN206270301U - A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation - Google Patents
A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation Download PDFInfo
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- CN206270301U CN206270301U CN201621382650.8U CN201621382650U CN206270301U CN 206270301 U CN206270301 U CN 206270301U CN 201621382650 U CN201621382650 U CN 201621382650U CN 206270301 U CN206270301 U CN 206270301U
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Abstract
Force characteristic calibrating installation is differentiated the utility model discloses a kind of ultrasonic scanning microscope imaging, including optical grating measuring system, ultrasonic scanning microscope, straight-line displacement auto-translating mechanism and calibration platform, wherein, the straight-line displacement auto-translating mechanism is arranged on calibration platform, optical grating measuring system is also equipped with calibration platform, just to calibration platform, the ultrasonic scanning microscope and optical grating measuring system are connected the ultrasonic scanning microscope with computer；By the Pixel gray difference of adjacent two images specified point in ultrasonic scanning microscope scanning standard test block during calibration, calculate corresponding actual size value, and the corresponding displacement of the straight-line displacement auto-translating mechanism measured to optical grating measuring system is compared, you can complete the calibration of Imaging Resolution characteristic；The problems such as standard test block installation is difficult when the utility model solves current ultrasonic scanning microscope imaging resolution measurement characteristic calibration and evaluates not comprehensive to Imaging Resolution measurement characteristicses.
Description
Technical field
The utility model is related to a kind of ultrasonic scanning microscope imaging to differentiate force characteristic calibrating installation, belongs to instrument and equipment school
Quasi- technical field.
Background technology
Ultrasonic scanning microscope is mainly used in material detection（IQC）, failure analysis（FA）, quality control（QC）, quality protect
Card and reliability（QA/REL）, research and development（R&D）Deng field, can be on the premise of material electric property and structural intergrity not be destroyed
Detected, whether its value is accurately directly connected to the accuracy of Related product performance test results, scanned resolving power level
The detectability of ultrasonic scanning micro measurement system is determined, the inspection that force characteristic calibration is mainly used for verifying detecting system is differentiated
Survey ability.Calibrated by ultrasonic scanning micro measurement system Imaging Resolution characteristic and imaging geometry dimensional measurement performance
To carry out the checking of the image geometry size detection ability of detecting system, Imaging Resolution characteristic is mainly research detecting system
Image minimum recognition capability, therefore, design a kind of clamping, calibrating installation easy for installation, the calibration to Imaging Resolution characteristic
Frock has very important realistic meaning.
The calibration that ultrasonic scanning microscope imaging differentiates force characteristic is mainly carried out using reference block at present, is passed through when using
Scanning standard test block lateral cross section image evaluates its Imaging Resolution measurement characteristics, and the calibration of this Imaging Resolution characteristic deposits
In following problem：（1）Reference block limited amount, its measuring data sample amount is few, it is impossible to evaluated comprehensively；（2）Small chi
The processing of very little reference block and its difficulty, price are high, and cannot be installed, thus to the calibration of Imaging Resolution measurement characteristicses not
Comprehensively, it is impossible to ensure its magnitude tracing result.
Utility model content
The technical problems to be solved in the utility model is：A kind of ultrasonic scanning microscope imaging is provided and differentiates force characteristic calibration
Device, with solve standard test block installation when current ultrasonic scanning microscope imaging resolution measurement characteristic is calibrated it is difficult and into
The problems such as picture resolution measurement evaluating characteristics are not comprehensive.
The technical solution of the utility model：A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation, including light
Grid measuring system, ultrasonic scanning microscope, straight-line displacement auto-translating mechanism and calibration platform, wherein, the straight-line displacement is certainly
Dynamic translation mechanism is arranged on calibration platform, and optical grating measuring system is also equipped with calibration platform, and the ultrasonic scanning is micro-
Just to calibration platform, the ultrasonic scanning microscope and optical grating measuring system are connected mirror with computer.
The straight-line displacement auto-translating mechanism includes translational block, leading screw and the motor for installing reference block, wherein,
Translational block is arranged on leading screw, leading screw and motor connection.
The control port of the motor is connected with computer.
The calibration method that the ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation is comprised the following steps：
Step 1：Reference block is arranged in straight-line displacement auto-translating mechanism by translational block；
Step 2：By the image of ultrasonic scanning microscope scanning standard test block, and analytical calculation reference block designated edge
Gray level image；
Step 3：Control straight-line displacement auto-translating mechanism is uniformly moved, and is then swept by ultrasonic scanning microscope again
Retouch the image on reference block；
Step 4：Analytical calculation goes out the Pixel gray difference of the adjacent two images specified point of reference block, calculates corresponding
Actual size value；
Step 5：Foregoing actual size value is corresponding to the straight-line displacement auto-translating mechanism that optical grating measuring system is measured
Displacement is compared, you can complete the calibration of Imaging Resolution characteristic.
Compared with prior art, the utility model has the advantage of：
（1）The utility model has simple structure and realizes convenient advantage, can realize the Fast Installation of reference block
And adjustment.
（2）The utility model can produce substantial amounts of measurement data using straight-line displacement auto-translating mechanism, and its sample size is complete
Full up sufficient calibration requirements,
（3）The utility model improves the reliability of ultrasonic scanning microscope imaging resolution measurement characteristic calibration, improves
Calibration efficiency, solves standard test block installation when ultrasonic scanning microscope imaging resolution measurement characteristic is calibrated difficult and right
The problems such as Imaging Resolution measurement characteristicses evaluate not comprehensive.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is calibrating principle block diagram of the present utility model；
In figure：1- calibrates platform, 2- reference blocks, 3- leading screws, 4- motors, 5- data acquisitions and electric machine control system, 6-
Computer, 7- optical grating measuring systems, 8- ultrasonic scanning microscopes, 9- translational blocks.
Specific embodiment
It is new to this practicality below in conjunction with accompanying drawing to make the purpose of this utility model, technical scheme and advantage clearer
Type is described in further detail.
Such as Fig. 1, the Imaging Resolution characteristic calibrating installation of the utility model ultrasonic scanning microscope 8, including grating measuring system
System 7, ultrasonic scanning microscope 8, straight-line displacement auto-translating mechanism and calibration platform 1, wherein, straight-line displacement auto-translating mechanism
On calibration platform 1, optical grating measuring system 7 is also equipped with calibration platform 1, ultrasonic scanning microscope 8 is just to calibration
Platform 1；Straight-line displacement auto-translating mechanism includes translational block 9, leading screw 3 and the motor 4 for installing reference block 2, wherein, put down
Move block 9 to be arranged on leading screw 3, leading screw 3 is connected with motor 4.
The ultrasonic scanning microscope 8 is connected with computer 6, and scanning imagery imaging system is provided with computer 6.
The optical grating measuring system 7 and the control port of motor 4 are by data acquisition and electric machine control system 5 and computer 6
Connection.
Calibration software is installed in the computer 6.
Such as Fig. 2, the calibration method of the Imaging Resolution characteristic calibrating installation of the ultrasonic scanning microscope 8 includes following step
Suddenly：
Step 1：Reference block 2 is arranged in straight-line displacement auto-translating mechanism by translational block 9；
Step 2：Specified by the image of the scanning standard test block 2 of ultrasonic scanning microscope 8, and analytical calculation reference block 2
The gray level image at edge；
Step 3：Control straight-line displacement auto-translating mechanism is uniformly moved, and ultrasonic scanning microscope 8 is then passed through again
Image of the scanning on reference block 2；
Step 4：Analytical calculation goes out the Pixel gray difference of the adjacent two images specified point of reference block 2, calculates corresponding
Actual size value；
Step 5：Foregoing actual size value is corresponding to the straight-line displacement auto-translating mechanism that optical grating measuring system 7 is measured
Displacement is compared, i.e., by the Comparison calibration of calibration software, you can complete the calibration of Imaging Resolution characteristic.
The above, specific embodiment only of the present utility model, but protection domain of the present utility model do not limit to
In this, any one skilled in the art can readily occur in change in the technical scope that the utility model is disclosed
Or replace, should all cover within protection domain of the present utility model, therefore, protection domain of the present utility model should be with the power
The protection domain that profit is required is defined.
Claims (3)
1. a kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation, it is characterised in that：Including optical grating measuring system
（7）, ultrasonic scanning microscope（8）, straight-line displacement auto-translating mechanism and calibration platform（1）, wherein, the straight-line displacement is automatic
Translation mechanism is arranged on calibration platform（1）On, in calibration platform（1）On be also equipped with optical grating measuring system（7）, the ultrasound sweeps
Retouch microscope（8）Just to calibration platform（1）, the ultrasonic scanning microscope（8）And optical grating measuring system（7）And computer
（6）Connection.
2. ultrasonic scanning microscope imaging according to claim 1 differentiates force characteristic calibrating installation, it is characterised in that：It is described
Straight-line displacement auto-translating mechanism is included for installing reference block（2）Translational block（9）, leading screw（3）And motor（4）, wherein,
Translational block（9）Installed in leading screw（3）On, leading screw（3）With motor（4）Connection.
3. ultrasonic scanning microscope imaging according to claim 2 differentiates force characteristic calibrating installation, it is characterised in that：It is described
Motor（4）Control port and computer（6）Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621382650.8U CN206270301U (en) | 2016-12-16 | 2016-12-16 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621382650.8U CN206270301U (en) | 2016-12-16 | 2016-12-16 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206270301U true CN206270301U (en) | 2017-06-20 |
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ID=59046688
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621382650.8U Active CN206270301U (en) | 2016-12-16 | 2016-12-16 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770690A (en) * | 2016-12-16 | 2017-05-31 | 贵州航天计量测试技术研究所 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation and calibration method |
| CN110346114A (en) * | 2018-04-08 | 2019-10-18 | 中国科学院声学研究所 | It is a kind of for detecting the complete test specimen of high frequency ultrasound imaging instrument azimuthal resolution |
-
2016
- 2016-12-16 CN CN201621382650.8U patent/CN206270301U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770690A (en) * | 2016-12-16 | 2017-05-31 | 贵州航天计量测试技术研究所 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation and calibration method |
| CN110346114A (en) * | 2018-04-08 | 2019-10-18 | 中国科学院声学研究所 | It is a kind of for detecting the complete test specimen of high frequency ultrasound imaging instrument azimuthal resolution |
| CN110346114B (en) * | 2018-04-08 | 2024-03-26 | 中国科学院声学研究所 | Complete test piece for detecting axial resolution of high-frequency ultrasonic imaging instrument |
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