CN206225321U

CN206225321U - Novel ion beam intensifying device

Info

Publication number: CN206225321U
Application number: CN201621211646.5U
Authority: CN
Inventors: 赵鹏; 洪欢欢; 闻路红
Original assignee: Ningbo Huayi Ningchuang Intelligent Science & Technology Co Ltd; Ningbo University
Current assignee: Ningbo Huayi Ningchuang Intelligent Science & Technology Co Ltd; Ningbo University
Priority date: 2016-11-10
Filing date: 2016-11-10
Publication date: 2017-06-06
Anticipated expiration: 2026-11-10

Abstract

The utility model provides a kind of novel ion beam intensifying device, and the gene transferring by N~+ device includes：First pipe, has gas passage in first pipe；Heating unit, the heating unit is used to heat first pipe；Second pipe, one end connection first pipe of second pipe, the internal diameter of the internal diameter less than first pipe of the non-part Chong Die with first pipe of second pipe；Electrode, the electrode is used to ionize the gas entered in second pipe.The utility model has the advantages that gas utilization efficiency is high, ion beam intensity is high.

Description

Novel ion beam intensifying device

Technical field

The utility model is related to ion gun, more particularly to novel ion beam intensifying device.

Background technology

Ion beam injection intensity be by shaped ion beam into length, speed with spray caliber determine, i.e., in rational air inlet Under speed and injection caliber, very strong ion beam is exported, realize efficient discharge gas utilization ratio.

The method for solving ion beam intensity optimization at present：1) playpipe footpath diameter is reduced, the method causes the ion of injection Speed Shu Jiayou higher, but the density of an ion beam is reduced with the number of ions total amount of unit section, so as to reduce ion beam intensity Degree, and under comparatively faster gas flow rate, may result in electric discharge insufficient；2) feed rate is reduced, the method is applied to Multi-example continuous sample introduction environment, but can cause that the density of an ion beam reduces, cause ion beam intensity not high.

Utility model content

Be to solve the deficiency in above-mentioned prior art, the utility model provide a kind of ion beam jet length it is remote, The novel ion beam intensifying device that intensity is high, gas utilization efficiency is high.

The purpose of this utility model is achieved through the following technical solutions：

A kind of novel ion beam intensifying device, the gene transferring by N~+ device includes：

First pipe, has gas passage in first pipe；

Heating unit, the heating unit is used to heat first pipe；

Second pipe, second pipe one end connection it is described first pipe, second pipe it is non-Chong Die with first pipe Part internal diameter less than first pipe internal diameter；

Electrode, the electrode is used to ionize the gas entered in second pipe.

According to above-mentioned gene transferring by N~+ device, it is preferable that the electrode is arranged on the outer rim of second pipe.

According to above-mentioned gene transferring by N~+ device, it is preferable that the electrode is arranged on facing for the outer rim of second pipe At first pipe.

According to above-mentioned gene transferring by N~+ device, it is preferable that the internal diameter of first pipe is 2.5-3.2mm, described second The internal diameter of pipe is 1.8-2.5mm.

According to above-mentioned gene transferring by N~+ device, it is preferable that second pipe uses glass tube.

According to above-mentioned gene transferring by N~+ device, it is preferable that one end of second pipe is enclosed within the outer rim of first pipe.

Compared with prior art, the utility model have the advantage that for：

The ion beam intensity of generation, density equal strength factor are significantly improved, the particular design of the first pipe and the second bore So that ion beam length can reach 40mm, the raising of ion beam intensity contributes to the degree of ionization of sample, the length of ion beam The range of application that increasing helps to expand ion gun (can increase the ion gun anglec of rotation, avoid space mounting conflict, large volume solid Aspect product etc.).

Brief description of the drawings

Referring to the drawings, disclosure of the present utility model will be easier to understand.Skilled addressee readily understands that It is：These accompanying drawings are used only for illustrating the technical solution of the utility model, and are not intended to protection of the present utility model Scope is construed as limiting.In figure：

Fig. 1 is the sectional view of the novel ion beam intensifying device according to the utility model embodiment 1；

Fig. 2 is the change in flow comparison diagram according to the utility model embodiment 1；

Fig. 3 is the temperature change comparison diagram according to the utility model embodiment 1.

Specific embodiment

Fig. 1-3 and following description describe optional embodiment of the present utility model how to instruct those skilled in the art Implement and reproduce the utility model.In order to instruct technical solutions of the utility model, some conventional aspects are simplified or have eliminated.This Art personnel should be appreciated that modification from these implementation methods or replacement will be in the range of the utility model.This area Technical staff should be appreciated that following characteristics can combine to form multiple modifications of the present utility model in a variety of ways.Thus, originally Utility model is not limited to following optional embodiments, and is only limited by claim and their equivalent.

Embodiment 1：

Fig. 1 schematically illustrates the sectional view of the novel ion beam intensifying device of the utility model embodiment, such as Fig. 1 institutes Show, the novel ion beam intensifying device includes：

First pipe 1, has gas passage in first pipe；

Heating unit, the heating unit is used to heat first pipe, and the gas of the first Bottomhole pressure is heated indirectly；

Second pipe 2, second pipe one end connection it is described first pipe, second pipe it is non-Chong Die with first pipe Part internal diameter less than first pipe internal diameter；So as to change the flow velocity and temperature of the gas entered in the second pipe from the first pipe Degree；

Electrode 3, the electrode is used to ionize the gas entered in second pipe, forms ion beam.

The course of work of novel ion beam intensifying device：

Gas flows in the passage in the first pipe, and is heated；

Gas after heating enters in the second pipe, and the internal diameter of the non-part Chong Die with first pipe of second pipe is small In the internal diameter of first pipe, so that the temperature and pressure of gas changes：Flow velocity rises, temperature drop；

Electrode discharge, is ionized into the gas in the second pipe, the ion beam that formation is sprayed forward.

Embodiment 2：

The application examples of the novel ion beam intensifying device according to the utility model embodiment 1.

In the application examples, heating unit uses heating wire, is wound on the outer rim of first pipe；Second pipe uses glass Pipe, one end is fixed on the outer rim of first pipe, and the internal diameter of the non-part Chong Die with the first pipe of the second pipe is less than described first The internal diameter of pipe, the internal diameter of the first pipe is 2.5-3.2mm as described, and the internal diameter of second pipe is 1.8-2.5mm；High-field electrode sets The outer rim put in second pipe is faced at first pipe, after being easy to the heating that ionization enters in the second pipe from the first pipe Gas so that the spray penetration of the ion beam that gas is formed after being ionized reaches 40mm.

Shown in Fig. 2, the gas in the first pipe after heating enters when in the second pipe, and speed changes, in Fig. 2：Y-coordinate Numerical value is represented：The air inlet position of ion gun is 0, overall length 230mm ion gun overall length (the i.e. pipe with small pipe diameter nozzle position of the second pipe Put), numerical value 175mm is position at reducing, the change of speed occurs in this position.Dotted line represents the case for this embodiment：First Bore is 3mm, and the second bore is 2mm, and solid line represents the first pipe and the second bore is the situation of 3mm.

Shown in Fig. 3, the gas in the first pipe after heating enters when in the second pipe, and temperature changes, the numerical tabular of z coordinate Show：To count 0 position at reducing, launch to both sides, i.e., temperature of the temperature at reducing higher than isometrical contrast.Dotted line is represented The case for this embodiment：First bore is 3mm, and the second bore is 2mm, and solid line represents the first pipe and the second bore is The situation of 3mm.

Claims

1. a kind of novel ion beam intensifying device, it is characterised in that：The gene transferring by N~+ device includes：

First pipe, has gas passage in first pipe；

Heating unit, the heating unit is used to heat first pipe；

Second pipe, one end connection first pipe of second pipe, the non-portion Chong Die with first pipe of second pipe Internal diameter of the internal diameter for dividing less than first pipe；

Electrode, the electrode is used to ionize the gas entered in second pipe.

2. gene transferring by N~+ device according to claim 1, it is characterised in that：The electrode is arranged on second pipe Outer rim.

3. gene transferring by N~+ device according to claim 2, it is characterised in that：The electrode is arranged on second pipe Outer rim is faced at first pipe.

4. gene transferring by N~+ device according to claim 1, it is characterised in that：The internal diameter of first pipe is 2.5- 3.2mm, the internal diameter of second pipe is 1.8-2.5mm.

5. gene transferring by N~+ device according to claim 1, it is characterised in that：Second pipe uses glass tube.

6. gene transferring by N~+ device according to claim 1, it is characterised in that：One end of second pipe is enclosed within described The outer rim of one pipe.