CN206194706U - Cleaning stand - Google Patents
Cleaning stand Download PDFInfo
- Publication number
- CN206194706U CN206194706U CN201621177916.5U CN201621177916U CN206194706U CN 206194706 U CN206194706 U CN 206194706U CN 201621177916 U CN201621177916 U CN 201621177916U CN 206194706 U CN206194706 U CN 206194706U
- Authority
- CN
- China
- Prior art keywords
- screens
- support
- axle
- bayonet socket
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model relates to a cleaning stand for wash the wafer, its include two parallel placements the support, connect the at least three screens axle on the support and two insert perpendicularly, a bayonet socket has respectively been seted up on the support, inserting, corresponding embedding bayonet socket is interior to be fixed the both ends of one of them screens axle respectively in the bayonet socket of two supports, insert can be under the exogenic action with the bayonet socket separation, the both ends of other screens axles are connected respectively on two supports, each screens is epaxial including a plurality of equidistant spaced apart latches, axle center that the latch used the screens axle is the axle center, the wafer is placed between the two adjacent latches of screens axle. The utility model discloses cleaning stand not only provides the multi -disc wafer and rinses simultaneously, and number of times that reduction wafer that can also be very big shifted rinses not unidimensional wafer, only need adjust the size of cleaning stand's support, reduces and rinses the cost.
Description
Technical field
The utility model is related to wafer cleaner, more particularly to a kind of rack for cleaning.
Background technology
The cleaning procedure of current semiconductor wafer is usually monolithic cleaning, including choose piece, to put clip, cleaning, drying etc. numerous
Trivial operation, efficiency is low, for example, clean a piece of germanium wafer, it is necessary to close to ten minutes.Chip transfer is frequent in cleaning process, chip
Drop and wipe and touch probability and greatly increase.Cleaning employment high cost, the clear of different size need be used for different chips, different size
Wash instrument, implement is various to involve great expense, have in the market production two cun, four cun, six cun, thickness piece, twin polishing piece
Deng different size specification, divide numerous wafer varieties such as silicon chip, GaAs, germanium wafer again, every kind of various sizes of chip need not
Same cleaning means.
To overcome the drawbacks described above of prior art, a kind of new rack for cleaning of offer is needed badly.
Utility model content
The purpose of this utility model is to overcome the different size chip every time can only be brilliant in monolithic cleaning and cleaning process
A kind of problem after piece polishing more than transfer number, there is provided rack for cleaning.
To realize object defined above, the utility model is adopted the following technical scheme that：A kind of rack for cleaning, for cleaning chip, its
Including two supports being placed in parallel, at least three screens axles being vertically connected on support and two inserts, on the support
A bayonet socket is respectively offered, the insert is correspondingly embedded in bayonet socket and for the two ends of one of screens axle to be separately fixed at two stands
In bayonet socket, the insert can be separated with bayonet socket under external force, and the two ends of other screens axles are connected on two stands,
On each screens axle including some equal spacings latch, the latch with the axle center of screens axle as axle center, the chip
It is positioned between the two adjacent latches of screens axle.
Used as further improvement of the utility model, the support uses circular ring type structure, and the screens axle is on support
Equidistantly distributed.
Used as further improvement of the utility model, the screens axle two ends are provided with external screw thread, the external screw thread and spiral shell
Cap cooperation is fixed on support.
Used as further improvement of the utility model, the bayonet socket is located at the outer rim of support and in outer narrow inner width structure.
The utility model rack for cleaning 100 not only provides more wafers and cleans simultaneously, moreover it is possible to be significantly reduced chip transfer
Number of times, cleans to different size chip, it is only necessary to adjust the size of the support of rack for cleaning, reduces cleaning cost.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the embodiment of the utility model rack for cleaning.
Specific embodiment
Technical scheme is clearly and completely described below in conjunction with the utility model embodiment, it is clear that described
Embodiment is only a part of embodiment of the utility model, rather than whole embodiments.Based on the implementation in the utility model
Example, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made is belonged to
The scope of the utility model protection.
Refer to Fig. 1, a kind of rack for cleaning 100 for cleaning chip, it includes two supports 1 being placed in parallel, vertical
At least three screens axles 2 being connected on support 1 and two inserts 3, in the present embodiment, the quantity of screens axle 2 is four.
Support 1 uses circular ring type structure, the equidistantly distributed in a ring on support 1 of screens axle 2 respectively to be offered on support 1
One bayonet socket 11, bayonet socket 11 is located at the outer rim of support 1 and in outer narrow inner width structure.
Latch 21 including some equal spacings on each screens axle 2, latch 21 is with the axle center of screens axle 2 as axle
The heart, chip is positioned between the two adjacent latches 21 of screens axle 2.The bottom of latch 21 of screens axle 2 uses arc structure, interior narrow
Outer inclined-plane wide can effectively protect the positive back side of chip not contact（Only wafer edge contact）, it is to avoid have influence on the positive back side of chip
（As scratched, polluting）.
Insert 3 is correspondingly embedded in bayonet socket 11 bayonet socket 11 that the two ends of one of screens axle 2 are separately fixed at two stands 1
Interior, when needing to place chip or transferring plates, insert 3 can be separated with bayonet socket 11 under external force, the card fixed
Position axle 2 can also be separated with support 1 so as to formed a breach be easy to chip into and out rack for cleaning 100, other screens axles 2
Two ends be connected on two stands 2, in the present embodiment, the two ends of all screens axles 2 are respectively arranged with external screw thread（On figure not
Show）, external screw thread and nut 4 coordinate screens axle 2 are fixed on support 1.
Using this rack for cleaning 100, can simultaneously place more wafers and cleaning and drying process are completed in rack for cleaning 100,
Chip transfer number is reduced, the risk that chip is damaged is reduced, from piece is chosen to drying and can be completed by 1 people, man-hour is saved.
When needing to clean the chip of other sizes, it is only necessary to change the support of other sizes and suitably increase the number of screens axle
Amount.
The utility model rack for cleaning 100 not only provides more wafers and cleans simultaneously, moreover it is possible to be significantly reduced chip transfer
Number of times, cleans to different size chip, it is only necessary to adjust the size of the support of rack for cleaning, reduces cleaning cost.
Although being example purpose, preferred embodiment of the present utility model, the common skill of this area are had been disclosed for
Art personnel by, it is realized that disclosed in not departing from by appending claims scope and spirit of the present utility model situation
Under, various improvement, increase and substitution are possible.
Claims (4)
1. a kind of rack for cleaning, for cleaning chip, it is characterised in that：It includes two supports being placed in parallel, is vertically connected on
At least three screens axles and two inserts on support, respectively offer a bayonet socket on the support, the insert is correspondingly embedded in card
The intraoral two ends by one of screens axle are separately fixed in the bayonet socket of two stands, the insert can under external force with
Bayonet socket is separated, and the two ends of other screens axles are connected on two stands, and some equal spacings are included on each screens axle
Latch, with the axle center of screens axle as axle center, the chip is positioned between the two adjacent latches of screens axle the latch.
2. the rack for cleaning according to claim 1, it is characterised in that：The support uses circular ring type structure, the screens axle
The equidistantly distributed on support.
3. the rack for cleaning according to claim 1, it is characterised in that：The screens axle two ends are provided with outer Luo lines, described outer
Screw thread is fixed on support with nut cooperation.
4. the rack for cleaning according to claim 1, it is characterised in that：The bayonet socket is located at the outer rim of support and in outer narrow interior
Structure wide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621177916.5U CN206194706U (en) | 2016-11-03 | 2016-11-03 | Cleaning stand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621177916.5U CN206194706U (en) | 2016-11-03 | 2016-11-03 | Cleaning stand |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206194706U true CN206194706U (en) | 2017-05-24 |
Family
ID=58732381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621177916.5U Active CN206194706U (en) | 2016-11-03 | 2016-11-03 | Cleaning stand |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206194706U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112011832A (en) * | 2020-08-19 | 2020-12-01 | 中国电子科技集团公司第十一研究所 | InSb wafer processing device and processing method |
-
2016
- 2016-11-03 CN CN201621177916.5U patent/CN206194706U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112011832A (en) * | 2020-08-19 | 2020-12-01 | 中国电子科技集团公司第十一研究所 | InSb wafer processing device and processing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180504 Address after: 511517 27-9B, Guangdong Qingyuan hi tech Industrial Park Patentee after: Guangdong Vital Rare Material Co., Ltd. Address before: 511517 27-9B, Guangdong Qingyuan hi tech Industrial Park Patentee before: Guangdong forerunner materials Limited by Share Ltd |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180627 Address after: 404000 Chongqing Wanzhou Jing Kai District Peak Garden (Wanzhou Jing Kai District) Patentee after: Viking microelectronic Limited by Share Ltd Address before: 511517 27-9B, Guangdong Qingyuan hi tech Industrial Park Patentee before: Guangdong Vital Rare Material Co., Ltd. |
|
| TR01 | Transfer of patent right |