CN206163523U - Polarization white light LED and packaging structure based on fluorescence pottery and double -deck nanometer grating - Google Patents
Polarization white light LED and packaging structure based on fluorescence pottery and double -deck nanometer grating Download PDFInfo
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- CN206163523U CN206163523U CN201620931980.1U CN201620931980U CN206163523U CN 206163523 U CN206163523 U CN 206163523U CN 201620931980 U CN201620931980 U CN 201620931980U CN 206163523 U CN206163523 U CN 206163523U
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Abstract
The utility model discloses a polarization white light LED and packaging structure based on fluorescence pottery and double -deck nanometer grating, it can wherein be greater than 20dB in 450nm~650nm visible light range extinction ratio according to structural parameters modulate working wavelength range, and TM ripples transmissivity is higher than 60%. The utility model discloses at the transition layer of the low refracting index of fluorescence ceramic substrate surface introduction one deck, the introduction of transition layer has not only improved the effect of device but also has avoided the sculpture to the metal for the manufacture craft is convenient and fast more, and at the surperficial composite construction who integrates a dielectric grating and double metal of transition layer, with composite construction and blue light gaN base LED phase coupling, finally realize the outgoing of polarization white light. Transition layer and dielectric layer grating are semi conducting material such as magnesium fluoride, silica, PMMA and constitute, and the nanometer grating is metal material such as aluminium, silver, gold and constitutes.
Description
Technical field
The utility model is related to optical element technology of preparing, and in particular to one kind is based on fluorescence ceramics and double-layer nanometer grating
GaN base polarized white light LED of structure and its encapsulating structure.
Background technology
With the continuous aggravation of global energy problem, energy-conserving and environment-protective have become the theme of whole world various countries development gradually.LED
（light emitting diode）With luminous efficiency is high, pollution less, energy saving the features such as, show in many applications
Huge advantage.And white light-emitting diodes（LED）As a kind of light source, with its light efficiency it is high, the life-span is long the characteristics of in solid-state illumination, liquid crystal
The fields such as display, car headlamp apply quite varied, and national governments and enterprise input in this respect is also increasing, application
Prospect is extremely had an optimistic view of.
While white light LEDs are growing, polarized white light light source as common white light a kind of extension functionally,
The aspects such as CCD polarization imagings, optical storage, optic communication, photodetection, flat panel backlight have special application.Especially in LCD
（liquid crystal display）Traditional non-polarized light can be replaced in backlight, can so give up current backlight mould
Lower polarizer and blast piece in group, and the lower polarizer given up will originally absorb 29.3% light efficiency.It is clear that polarization is white
Radiant application with reducing energy consumption, raising energy conversion efficiency and can obtain high-contrast image in an lcd, meet energy-saving ring
The themes of the times of guarantor.
In the development of the past few decades, people are not within minority for the research of device polarization characteristic, but these devices
Mainly still apply in infrared band.For the polarizer of visible light wave range, because processing technology is limited, that what is much designed should
Nano structure device used in visible-range also has a segment distance from real practical application.With deep-UV lithography, electronics
The development of the micro-nano techniques such as beam exposure, nano impression, ion beam etching, micro-nano rank polarizer is also sent out faster
Exhibition.So realizing efficient polarised light using nanostructured（High-transmission rate, High Extinction Ratio or phase-switching）Output especially
Polarized white light, for the practical application of various fields, with higher realistic meaning.White light LEDs are latent as great development
The new type light source of power, has application at many aspects, develops in recent years very rapid.The comparative maturity that white light LEDs industry is done
The mainly U.S., European Union also have Japan.China and these main gaps of country are embodied in blue chip and ultraviolet chip
In development.At present, mainly white light LEDs can be obtained by three kinds of modes, the first is the group for utilizing " blue chip+fluorescent material "
Forming white light, second is to be mixed to form white light using various monochromatic light to conjunction mode.The third is Multiple-quantum well-type.This is several
Method all can successfully produce white light parts.For in terms of manufacture craft, production efficiency and benefit etc., at present, can put into
Still blue chip and this combination of yellow fluorescent powder of a large amount of productions.Such as Ya chemical companies of Japan are exactly to utilize this
The method of kind is combined yellow fluorescent powder with blue-ray LED, have developed white light LEDs.Have passed through the development of a period of time, this producer
Formula has become main flow.With the continuous improvement of luminosity and power, traditional gluing process and organic packaging materials are for example
Epoxy resin so that device light-emitting uniformity it is difficult to ensure that, and non-refractory, material is easily aging and then affects to use the longevity
Life.
In order to tackle these problems, various countries have been focused in the research of fluorescent material, and further optimize LED's
Packaged type.It is at present main by surface coarsening process, photonic crystal, flip chip technology, phosphor powder layer away from etc. mode improving
The light extraction efficiency of LED.Fluorescence encapsulating material aspect, NEC glass company is prepared for for the micro- of white light LEDs within 2005
Crystal glass ceramic phosphor；Dutch PHILIPS Co. has reported and fluorescent material has been doped in aluminum oxide polycrystal ceramics for 2008, real
Now with the encapsulation of blue chip；Domestic Zhongshan University is rare earth doped in YAG monocrystalline to be encapsulated again with blue chip, obtains white light；
The glass fluorophor of preparation is then directly used in encapsulation white light LEDs by South China Normal University.Tenth global solid-state illumination in 2010
In international conference, PHILIPS Co. illustrates again the newest fruits with fluorescent ceramic package LED, obtains colour rendering index up to 90
The white light of various colour temperatures.The world of Shanghai in 2011 new light sources new forms of energy illumination exhibition Shang Ya companies have put on display it and have adopted Ce:
The white light LEDs product of YAG crystalline ceramics encapsulation.The MgAl that Shanghai ray machine in 2015 is worked out2O4-Ce:YAG transparent fluorescents are made pottery
Under conditions of correlated colour temperature 5000K, maximum lumen efficiency reaches 99lm/W to porcelain.
At present, mainly there are three kinds of modes to realize the polarized light of LED.（1）Magnetic element is mixed in material system, this
Sample can directly produce polarised light, but the difficulty of doping is implemented relatively difficult than larger；（2）Epitaxial growth can be passed through
Mode, in direct long GaN base LED of semi-polarity or apolar surfaces, obtain polarised light, but this polarization LED making works
Skill is complicated, and Material growth is difficult, and the extinction ratio of polarised light is nor very high；（3）Using nanocomposite optical structure assembly in LED
The surface of chip, realizes polarized light.In OLED fields polarized white light is realized mainly by the mixing of some organic matters, these
Organic matter has special property so as to produce polarized white light under specific temperature conditions, often the degree of polarization of this polarized white light
Than relatively low, heat endurance there is also some problems, also have a segment distance with actual commercial Application；And discounting for itself
The white light polarization of OLED, white light polarization output is realized in external design structure, and this raising to degree of polarization is very helpful,
But for production application or slightly complicated.With polarization LED research and photoetching process it is more and more ripe,
Mode using micro-structural in combination with white light LEDs producing polarized white light, no matter from ejecting white light quality or processing technology
All it is very promising for aspect.Therefore the new method of necessary research and development by micro nano structure in combination with fluorescence ceramics,
Obtain high-quality polarized white light.
The content of the invention
The purpose of this utility model is to provide a kind of based on fluorescence ceramics and the polarized white light of double-layer nanometer optical grating construction
LED, can realize exciting the function of polarized white light, and have that wave band is wider, the angle strong adaptability of polarized light, simple structure,
It is easy to the characteristics of making；Polarized white light LED disclosed by the invention transmitance in 450nm ~ 650nm wave bands is higher than 60%, extinction ratio
More than 20dB（±60°）.
To achieve the above object of the invention, the technical solution adopted in the utility model is：
It is a kind of based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, including blue-ray LED, fluorescence ceramics
Substrate, transition zone, dielectric grating layer, metal level；The fluorescence ceramics substrate one side coupling blue-ray LED, another side is combined transition
Layer；The dielectric grating layer is located at transition layer surface；The metal level is located at the groove of dielectric grating layer and the surface of projection；
The cycle of the dielectric grating layer is 140 nm-160nm, and dutycycle is 0.4-0.6, is highly 70nm-90nm；The metal level
Height be 40nm-60nm.
The present invention is drawn based on polarized white light LED of fluorescence ceramics and double-layer nanometer optical grating construction in fluorescence ceramics substrate surface
Enter the transition zone of one layer of low-refraction, and in the integrated dielectric grating of transition layer surface and metal level, obtain double-layer nanometer grating
Composite construction；Most at last composite construction is coupled with GaN base blue-ray LED, finally realizes polarized white light outgoing.Substrate is fluorescence
Ceramic substrate material, transition zone and dielectric layer grating are that the material such as magnesium fluoride, silica, PMMA is constituted, metal be aluminium, silver,
The metal material structure such as gold；Nanometer grating is that dielectric grating is covered in the double-layer grating and double-layer grating structure of metal composite
On transition zone, fluorescence ceramics composite double layer nanometer grating structure is coupled with GaN base blue light LED structure and realizes white light LEDs device
Part.Transition zone and the material of dielectric grating of the present invention can as can also be different, possess relatively low refractive index, preferred material
Material is consistent, and the preparation and production efficiency to device is favourable, and the film of one layer of 100nm only need to be plated in substrate, then impressing is applied on film
Glue, carries out nano impression and makes mask, then film is performed etching.
In the present invention, composite construction is double-layer nanometer dielectric-metal structure, and metal produces the electricity of TE Polarized Excitation metal wires
Son and produce electric current so that polarised light reflection in this direction, and TM polarised lights are due to having in this direction the air gap by gold
Category line is stopped and cannot produce electric current, and now light wave can pass through grating, can reach higher polarization light transmission rate and higher
Extinction ratio.
In the present invention, dielectric grating and transition zone are magnesium fluoride, silica, PMMA etc.；Preferred fluorinated magnesium of the present invention is made
For transition zone and dielectric grating layer, compound with fluorescence ceramics matrix, transport layer magnesium fluoride has higher refractive index（n~
1.83）, the structure TM ripples transmitance and extinction ratio in the short wave ranges of below 550nm are obviously improved, so as to improve
The TM ripples transmitance of device and extinction ratio.It is preferred that transition zone be magnesium fluoride transition zone, dielectric grating layer be magnesium fluoride grating layer, gold
Category layer is aluminium lamination.It is magnesium fluoride that transition zone is consistent with dielectric grating material, it is possible to obtain compared with low-refraction, and can raw material sources
Extensively, it is economical and practical, etching is also allowed for, metal layer material is aluminium, and good product performance can especially obtain higher transmitance,
Simultaneously aluminium target is relatively common and easy to maintain.
In the present invention, the substrate is fluorescence ceramics；Many performance indications of fluorescence ceramics are better than traditional LED encapsulation
Material epoxy resin and organosilicon, are that white-light LED encapsulation and fluorescence conversion provide a kind of new method, and to high-quality white
The acquisition of light has great reference value.
In preferred technical scheme, in polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction, low refraction
Rate transition region thickness H3=20nm；The cycle of the dielectric grating of double-layer nanometer optical grating construction is P=150nm, and dutycycle DC=0.5 is situated between
Matter grating layer height H2=80nm, the height of metal level is H1=50nm；Transition layer height H3=20nm, the height of fluorescence ceramics substrate
Spend for 0.5-1cm.Fluorescence ceramics composite double layer nanometer grating structure is coupled with GaN base blue light LED structure and realizes white light LEDs
Device.This group of Optimal Parameters, can make structure reach wave band most wide, with good angle adaptability, TM ripples transmitance and disappear
Light ratio reaches highest advantage.Polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction of the present invention is corresponding
Service band is visible light wave range；By the selection of structural parameters, the present invention can be suitable for different operating wave band, wherein
450nm ~ 650nm visible-ranges extinction ratio is more than 20dB, and TM ripples transmitance is higher than 60%；Its extinction ratio is in the range of ± 60 °
20dB is all higher than, with good angle adaptability.
The invention also discloses it is a kind of based on fluorescence ceramics and the encapsulating structure of double-layer nanometer grating, including fluorescence ceramics base
Bottom, transition zone, dielectric grating layer, metal level；The fluorescence ceramics substrate one side is combined transition zone；The dielectric grating layer is located at
Transition layer surface；The metal level is located at the groove of dielectric grating layer and the surface of projection；The cycle of the dielectric grating layer
For 140 nm-160nm, dutycycle is 0.4-0.6, is highly 70nm-90nm；The height of the metal level is 40nm-60nm；It is situated between
The height of matter grating obtains the optimal product of performance higher than metal level 30nm or so.
In the above-mentioned encapsulating structure based on fluorescence ceramics and double-layer nanometer grating, the transition zone be magnesium fluoride transition zone,
Silica transition zone or PMMA transition zones；The dielectric grating layer be magnesium fluoride grating layer, silica grating layer or
PMMA grating layers；The metal level is aluminium lamination, silver layer or layer gold；The cycle of the dielectric grating layer be P=150nm, dutycycle
DC=0.5, height H2=80nm；The height of the metal level is H1=50nm；Transition region thickness H3 is 20nm.
By the encapsulating structure based on fluorescence ceramics and double-layer nanometer grating and blue-ray LED such as GaN base blue light LED structure
White light LED part is realized in coupling.The present invention utilizes nano impression, ion beam etching, electron beam evaporation by substrate of fluorescence ceramics
Polarized white light LED disclosed in the white light polarization LED of the colleges and universities such as plated film micro-nano technology of preparing manufacture is in 450nm ~ 650nm wave bands
Transmitance is higher than 60%, and extinction ratio is more than 20dB（±60°）；And it is easily integrated with other photoelectric devices with small volume, it is raw
Produce efficiency high low cost and other advantages.Therefore the invention also discloses the above-mentioned encapsulation based on fluorescence ceramics and double-layer nanometer grating is tied
Application of the structure in polarized white light LED is prepared.
Further, the invention also discloses based on fluorescence ceramics and the preparation side of the encapsulating structure of double-layer nanometer grating
Method, comprises the following steps：Fluorescence ceramics substrate surface plating buffer layer material after cleaning；Then in buffer layer material surface system
Standby dielectric grating layer, finally obtain based on fluorescence ceramics in the groove of dielectric grating layer and the plating metal on surface layer of projection and
The encapsulating structure of double-layer nanometer grating.To be coupled with blue-ray LED based on the encapsulating structure of fluorescence ceramics and double-layer nanometer grating, obtained
To polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction.
Specifically, first, carry out cleaning the dirty point and greasy dirt that remove substrate surface so that substrate surface has to substrate
Preferable cleannes and adhesion；Then using ion beam sputter depositing in substrate, one layer of transition medium layer is plated, then profit
With spin-coating method coating last layer impressing glue, nanometer grating photoresist structure is carved using ultraviolet solidified nano stamping technique, then made
Use ion beam（IBE）Technique is etched, and is then removed residual photoresist and is obtained medium nanometer grating, finally heavy using ion beam sputtering
Product is obtained based on fluorescence ceramics and double-layer nanometer grating in the groove of dielectric grating and the upper surface plating layer of metal layer of projection
Encapsulating structure；Couple with blue-ray LED, obtain polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction.Can be with
Using e-beam direct-writing exposure and develop；Use reactive ion beam etching (RIBE) photoresist；Residual photoresist is removed using acetone.
Because above-mentioned technical proposal is used, the utility model has compared with prior art following advantages:
1. the utility model makes public for the first time the GaN base polarized white light based on fluorescence ceramics and double-layer nanometer optical grating construction
LED, with preferable TM ripples transmitance and extinction ratio, so as to realize exciting the function of polarized white light, it can in 450nm ~ 650nm
The extinction ratio seen in optical range is more than 20dB, and TM ripples transmitance is higher than 60%, achieves unexpected technique effect.
2. disclosed in the utility model based on fluorescence ceramics and GaN base polarized white light LED of double-layer nanometer optical grating construction
It is rational in infrastructure, be easy to make, based on the double-layer nanometer raster size Parameter adjustable of fluorescence ceramics, preparation method is partly led with existing
Body manufacture craft is completely compatible；Overcoming prior art needs loaded down with trivial details preparation process just to obtain lacking for polarized light device
Fall into.
3. disclosed GaN base polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction of the utility model is former
Material source is wide, it is simple to prepare, and compared to existing technology financial resources, time cost are lower；And excellent performance, optical sensor system,
In advanced nano-photon device and feature optical system, with very big using value.
4. the utility model designs micro-nano structure to obtain high white light by nanometer grating in combination with fluorescence ceramics
Transmitance and degree of polarization, on fluorescence ceramics surface one layer of low-refraction transition zone is introduced, and the integrated medium of transition layer surface/
Metal composite nano optical grating construction, can effectively improve the transmitance and polarization extinction ratio of structure, realize efficiently polarization GaN
The feasibility of base white light LEDs；Measurement of polarization characteristic platform is especially built, sample carries out the detection of optical property to made by
With analysis, it is higher than 60% that the present invention obtains polarized white light LED transmitance in 450nm ~ 650nm wave bands, and extinction ratio is more than 20dB
（±60°）, with good angle adaptability, achieve unexpected technique effect.
Description of the drawings
Fig. 1 is shown for embodiment one based on the GaN base polarized white light LED structure of fluorescence ceramics and double-layer nanometer optical grating construction
It is intended to；
Fig. 2 is shown for embodiment one based on the GaN base white light LEDs front view structure of fluorescence ceramics and double-layer nanometer optical grating construction
It is intended to；
Fig. 3 is to be shown based on the GaN base polarized white light LED structure of fluorescence ceramics and double-layer nanometer optical grating construction in embodiment two
It is intended to；
Wherein：1st, metal level；2nd, dielectric grating layer；3rd, transition zone；4th, fluorescence ceramics substrate；5th, blue-ray LED；
Fig. 4 is the refraction based on fluorescence ceramics and GaN base polarized white light LED of double-layer nanometer optical grating construction of embodiment one
Rate curve map；
Fig. 5 is based on the GaN base polarization of fluorescence ceramics and double-layer nanometer optical grating construction for the light of embodiment one by substrate incident
TM transmitances and extinction ratio curve map after the refractive index curve of white light LEDs；
Fig. 6 is embodiment one based on fluorescence ceramics and the blue light of GaN base polarized white light LED of double-layer nanometer optical grating construction
Spectral curve, centre wavelength is 458nm；
Fig. 7 is white light LEDs of the light of the actual measurement of embodiment one by substrate incident after double-layer nanometer metal grating
TM ripples and TE wave spectrums；
Fig. 8 is white light LEDs of the light of the actual measurement of embodiment one by substrate incident after double-layer nanometer metal grating
Extinction ratio curve map；
Fig. 9 is white light LEDs of the light of the actual measurement of embodiment one by substrate incident after double-layer nanometer metal grating
TM ripples transmittance curve figure；
Figure 10 is white light LEDs of the light of the actual measurement of embodiment one by substrate incident after double-layer nanometer metal grating
TM ripples transmitance with angle change curve map；
Figure 11 is white light LEDs of the light of the actual measurement of embodiment one by substrate incident after double-layer nanometer metal grating
Extinction ratio with angle change curve map；
Figure 12 is the transition region thickness (H3) of embodiment one to the GaN base based on fluorescence ceramics and double-layer nanometer optical grating construction
The impact figure of the transmitance of polarized white light LED；
Figure 13 is the transition region thickness (H3) of embodiment one to the GaN base based on fluorescence ceramics and double-layer nanometer optical grating construction
The impact figure of the extinction ratio of polarized white light LED；
Figure 14 is dielectric grating height (H2) of embodiment one to the GaN based on fluorescence ceramics and double-layer nanometer optical grating construction
The impact figure of the transmitance of base polarized white light LED；
Figure 15 is dielectric grating height (H2) of embodiment one to the GaN based on fluorescence ceramics and double-layer nanometer optical grating construction
The impact figure of the extinction ratio of base polarized white light LED；
Figure 16 is metal grating height (H1) of embodiment one to the GaN based on fluorescence ceramics and double-layer nanometer optical grating construction
The impact figure of the transmitance of base polarized white light LED；
Figure 17 is metal grating height (H1) of embodiment one to the GaN based on fluorescence ceramics and double-layer nanometer optical grating construction
The impact figure of the extinction ratio of base polarized white light LED；
Figure 18 is white to the GaN base polarization based on fluorescence ceramics and double-layer nanometer optical grating construction for dutycycle DC of embodiment one
The impact figure of the transmitance of light LED；
Figure 19 is white to the GaN base polarization based on fluorescence ceramics and double-layer nanometer optical grating construction for dutycycle DC of embodiment one
The impact figure of the extinction ratio of light LED.
Specific embodiment
The utility model is further described with reference to embodiment, accompanying drawing:
Embodiment one：Referring to shown in accompanying drawing 1, based on fluorescence ceramics and the GaN base polarized white light of double-layer nanometer optical grating construction
LED, including 1, metal level；2nd, dielectric grating layer；3rd, transition zone；4th, fluorescence ceramics substrate；5th, blue-ray LED.GaN base blue-ray LED
The double-layer nanometer metal grating of blue light Jing base fluorescence ceramics is sent, polarized white light is sent, is as received based on fluorescence ceramics and bilayer
GaN base polarized white light LED of rice optical grating construction.
Referring to accompanying drawing 2, based on fluorescence ceramics and the GaN base white light LEDs main structure diagram of double-layer nanometer optical grating construction；
Wherein：Dielectric grating layer cycle P=150nm；Dutycycle DC=L1/P=0.5；Metal layer height H1=50nm；Dielectric grating height
H2=80nm；Transition region thickness H3=20nm.Above-mentioned double-layer nanometer optical grating construction based on fluorescence ceramics substrate and with GaN base blue light
White light LED part is realized in LED structure coupling.
It is above-mentioned based on fluorescence ceramics and the preparation method of GaN base polarized white light LED of double-layer nanometer optical grating construction, including such as
Lower step：
（1）Fluorescence ceramics are carried out cleaning the dirty point and greasy dirt that remove surface so that fluorescence ceramics surface has preferably
Cleannes and adhesion；
（2）The silica dioxide medium layer that a layer thickness is 100nm is plated on fluorescence ceramics using ion beam sputter depositing；
（3）Using spin-coating method coating last layer impressing glue；
（4）Nanometer grating photoresist structure is carved using ultraviolet solidified nano stamping technique；
（5）Using ion beam（IBE）Technique is etched, and is then removed residual photoresist and is obtained medium nanometer grating；
（6）It is 50nm finally a layer thickness to be plated on the groove of dielectric grating and projection using ion beam sputter depositing
Aluminum metal layer；
（7）Sample area manufactured in the present embodiment is 2 inches, structural region 20mm × 20mm, from structural region cutting one
Fritter sample, uses optical adhesive（Refractive index 1.7 or so）By this fritter sample and blue chip（GaN base blue-ray LED）Do
Laminating, material is thus formed GaN base polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction.
Embodiment two
Referring to accompanying drawing 3, based on fluorescence ceramics and GaN base polarized white light LED of double-layer nanometer optical grating construction, including 1, metal
Layer；2nd, dielectric grating layer；3rd, transition zone；4th, fluorescence ceramics substrate；5th, blue-ray LED；Wherein：Dielectric grating layer cycle P=150nm；
Dutycycle DC=L1/P=0.5；Metal layer height H1=50nm；Dielectric grating（Silica）Height H2=80nm；Transition zone（Fluorine
Change magnesium）Thickness H3=20nm.Above-mentioned double-layer nanometer optical grating construction is coupled based on fluorescence ceramics substrate and with GaN base blue light LED structure
Realize white light LED part.
Based on fluorescence ceramics and the preparation method of GaN base polarized white light LED of double-layer nanometer optical grating construction, including following step
Suddenly：
（1）Fluorescence ceramics are carried out cleaning the dirty point and greasy dirt that remove surface so that fluorescence ceramics surface has preferably
Cleannes and adhesion；
（2）By the use of ion beam sputter depositing plate on fluorescence ceramics a layer thickness be 20nm magnesium fluoride film as transition
Layer, is further continued for plating the silica dioxide medium layer of 80nm as the material for making dielectric grating；
（3）Using spin-coating method coating last layer impressing glue；
（4）Nanometer grating photoresist structure is carved using ultraviolet solidified nano stamping technique；
（5）Residual photoresist is removed using ionic reaction resist remover to obtain imprinting glue medium nanometer grating；
（6）Using ion beam（IBE）Technique is carried out as mask plate using imprinting glue medium nanometer grating to silicon dioxide layer
Etching, etching depth is 80nm, then removes residual photoresist and obtains medium nanometer grating；
（7）It is 50nm finally a layer thickness to be plated on the groove of dielectric grating and projection using ion beam sputter depositing
Aluminium lamination；
（8）From the fritter sample of structural region cutting one, optical adhesive is used（Refractive index 1.7 or so）By this fritter sample
With blue chip（GaN base blue-ray LED）Fit, material is thus formed based on fluorescence ceramics and double-layer nanometer optical grating construction
GaN base polarized white light LED.
Embodiment three
GaN base polarized white light LED parameter based on fluorescence ceramics and double-layer nanometer optical grating construction is consistent with embodiment one, system
Comprise the steps as method：
（1）Fluorescence ceramics are carried out cleaning the dirty point and greasy dirt that remove surface so that fluorescence ceramics surface has preferably
Cleannes and adhesion；
（2）The magnesium fluoride dielectric layer that a layer thickness is 100nm is plated on fluorescence ceramics using ion beam sputter depositing；
（3）Using spin-coating method coating last layer impressing glue；
（4）Nanometer grating photoresist structure is carved using ultraviolet solidified nano stamping technique；
（5）Residual photoresist is removed using ionic reaction resist remover to obtain imprinting glue medium nanometer grating；
（6）Using ion beam（IBE）Technique is etched, and is then removed residual photoresist and is obtained medium nanometer grating；
（7）It is 50nm finally a layer thickness to be plated on the groove of dielectric grating and projection using ion beam sputter depositing
Layer gold；
（8）From the fritter sample of structural region cutting one, optical adhesive is used（Refractive index 1.7 or so）By this fritter sample
With blue chip（GaN base blue-ray LED）Fit, material is thus formed based on fluorescence ceramics and double-layer nanometer optical grating construction
GaN base polarized white light LED.
Example IV
Based on fluorescence ceramics and GaN base polarized white light LED of double-layer nanometer optical grating construction, wherein dielectric grating layer cycle P=
155nm；Dutycycle DC=L1/P=0.45；Metal layer height H1=52nm；Dielectric grating height H2=85nm；Transition region thickness H3=
20nm.Preparation method comprises the steps：
（1）Fluorescence ceramics are carried out cleaning the dirty point and greasy dirt that remove surface so that fluorescence ceramics surface has preferably
Cleannes and adhesion；
（2）The magnesium fluoride dielectric layer that a layer thickness is 105nm is plated on fluorescence ceramics using ion beam sputter depositing；
（3）Using spin-coating method coating last layer impressing glue；
（4）Nanometer grating photoresist structure is carved using ultraviolet solidified nano stamping technique；
（5）Residual photoresist is removed using ionic reaction resist remover to obtain imprinting glue medium nanometer grating；
（6）Using ion beam（IBE）Technique is etched, and is then removed residual photoresist and is obtained medium nanometer grating；
（7）It is 52nm finally a layer thickness to be plated on the groove of dielectric grating and projection using ion beam sputter depositing
Aluminium lamination；
（8）From the fritter sample of structural region cutting one, optical adhesive is used（Refractive index 1.7 or so）By this fritter sample
With blue chip（GaN base blue-ray LED）Fit, material is thus formed based on fluorescence ceramics and double-layer nanometer optical grating construction
GaN base polarized white light LED.
Embodiment five
Based on fluorescence ceramics and GaN base polarized white light LED of double-layer nanometer optical grating construction, wherein dielectric grating layer cycle P=
145nm；Dutycycle DC=L1/P=0.5；Metal layer height H1=55nm；Dielectric grating height H2=88nm；Transition region thickness H3=
20nm.Preparation method comprises the steps：
（1）Fluorescence ceramics are carried out cleaning the dirty point and greasy dirt that remove surface so that fluorescence ceramics surface has preferably
Cleannes and adhesion；
（2）The silica dioxide medium layer that a layer thickness is 108nm is plated on fluorescence ceramics using ion beam sputter depositing；
（3）Using spin-coating method coating last layer impressing glue；
（4）Nanometer grating photoresist structure is carved using ultraviolet solidified nano stamping technique；
（5）Residual photoresist is removed using ionic reaction resist remover to obtain imprinting glue medium nanometer grating；
（6）Using ion beam（IBE）Technique is etched, and is then removed residual photoresist and is obtained medium nanometer grating；
（7）It is 55nm finally a layer thickness to be plated on the groove of dielectric grating and projection using ion beam sputter depositing
Aluminium lamination；
（8）From the fritter sample of structural region cutting one, optical adhesive is used（Refractive index 1.7 or so）By this fritter sample
With blue chip（GaN base blue-ray LED）Fit, material is thus formed based on fluorescence ceramics and double-layer nanometer optical grating construction
GaN base polarized white light LED.
Following test is carried out by object of the product of embodiment one:
Using FDTD Solution（Canada）Software simulating calculating light field, from 2D pattern building structures, in level
Side sets up periodic boundary condition.In vertical direction because medium is present, boundary condition utilizes perfect domination set, mould
Intend light source to be arranged on inside fluorescence ceramics for plane wave, wave-length coverage is 400nm ~ 700nm, it is vertically incident, by ellipse
Instrument detection partially, obtains the above-mentioned refractive index based on fluorescence ceramics and GaN base polarized white light LED of double-layer nanometer optical grating construction bent
Line, referring to accompanying drawing 4, in whole visible light wave range, the refractive index of fluorescence ceramics is 1.82 --- and 1.87, variations in refractive index is little,
It is more stable, be suitable as substrate combined with nanometer grating do white light polarization LED.Because fluorescence ceramics substrate is relative to transport layer
Magnesium fluoride（n~1.38）With higher refractive index（n~1.83）, structure TM ripples transmission in the short wave ranges of below 550nm
Rate and extinction ratio are obviously improved.
Accompanying drawing 5 is GaN base polarized white light LED of the light by substrate incident based on fluorescence ceramics and double-layer nanometer optical grating construction
TM transmitances and extinction ratio curve map after refractive index curve, referring to accompanying drawing 4, P=150nm, H1=50nm, H2=80nm, H3=
Under the parameter of 20nm, DC=0.5, in 450nm ~ 750nm wave bands, overall transmitance and extinction ratio is respectively higher than 70% and 30dB,
Polarization characteristic is good.
Accompanying drawing 6 is the GaN base polarized white light LED blue spectrum based on fluorescence ceramics and double-layer nanometer optical grating construction, uses GaN
Used as the excitation source of white light, centre wavelength is 458nm to base blue-ray LED.As can be seen from Figure 6 GaN base blue-ray LED is in wavelength
For 458nm when energy highest, and centre wavelength spectrum is narrower, and monochromaticjty preferably, is suitable as the excitation source of white light.
Sample area is 2 inches, structural region 20mm × 20mm, viscous with optics from the fritter sample of structural region cutting one
Mixture（Refractive index 1.7 or so）This fritter sample is fitted with blue chip, the polarized white light LED core of integrated form is defined
Piece.White light LEDs are fixed on into miniature laser sleeve the inside, it is so fixed later more stable, it is easy to measurement.With two wires
Connection pin, and be connected with power supply.The white light of outgoing can pass through analyzer, and by the rotation of analyzer angle, θ white light is detected
Polarization characteristic.Polarizer is followed by spectrometer, with fibre-optical probe come receiving light, it is also possible to use condenser lens, white light is focused on
Receiving port to spectrometer is detected.The measurement of extinction ratio mainly adjusts the angle of analyzer, side rotation analyzer, side sight
Examine the spectrum change of ejecting white light.Most strong and most weak spectrum twice is recorded respectively, and TM ripples and TE ripples are corresponded to respectively.Accompanying drawing 7 is real
The TM ripples and TE wave spectrums of white light LEDs of the light of border measurement by substrate incident after double-layer nanometer metal grating；It can be seen that
In 400-700nm wave bands, TM wave energy enough through a part, in 458nm wavelength or so very big energy can be passed through, and TE exists
Whole 400-700nm wave bands are hardly passed through.
The extinction ratio of white light LEDs of the accompanying drawing 8 for the actual light for measuring by substrate incident after double-layer nanometer metal grating
Curve map；Bands of a spectrum wider range of white LED spectrum, TM wave spectrums to TE wave spectrums change obvious, extract two spectral lines
Actual numerical value, according to extinction ratio computing formula：Extinction ratio curve can be obtained such as
Fig. 8.
With pure fluorescence ceramics substrate as object, above without any micro-structural, any transition zone is not deposited yet, directly used
Blue-ray LED is excited, and measurement does not have the white-light spectrum of polarization characteristic；With the fluorescence ceramics substrate with double-layer nanometer optical grating construction
For object, the spectrum of polarized white light is measured.Second spectra values and first to take second place and be TM ripple transmitances than the curve of gained
Curve, referring to Fig. 9, it can be seen in figure 9 that light extraction efficiency of the present utility model is about 60%, and it is highly stable, can put into
To in production.
Accompanying drawing 10 and accompanying drawing 11, are that GaN base polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction is different
The polarization characteristic that angle goes out in the case of light, it can be seen that transmitance with angle change decline it is obvious, and extinction ratio exists
20dB can be maintained in the range of 60 °, good angle adaptability is embodied for extinction ratio, be met in practical application
In, the luminous requirement of white light LEDs wide angle diverging.
Accompanying drawing 12 and accompanying drawing 13 are given in whole visible-range, and the change of transport layer thickness is to transmitance and delustring
The impact of ratio.It can be seen that because fluorescence ceramics substrate is relative to transport layer magnesium fluoride（n~1.38）With higher
Refractive index（n~1.83）, the structure TM ripples transmitance and extinction ratio in the short wave ranges of below 550nm be obviously improved,
Transmitance and extinction ratio at Integrated comparative different-thickness, in H3=20nm, transmitance is in whole visible light wave for transport layer thickness
Segment limit is in higher position, and in visible light wave range, overall transmitance is higher than 70%, and extinction ratio is more than 30dB.Relative to
Situation without transport layer, the transmitance of shortwave improves 15%, and extinction ratio improves 5%.The raising of transmitance and extinction ratio can
Strengthened with being interpreted as interfering between three layers that Multi-media transport layer and fluorescence ceramics substrate and grating layer are formed.
Accompanying drawing 14 and accompanying drawing 15 give the transmitance and Extinction ratio of white light LEDs surface TM light with dielectric grating height
Change curve.Corresponding parameter is：Screen periods P=150nm, H1=50nm, H3=20nm, DC=0.5.It can be seen that
Change of the transmitance and extinction ratio of TM ripples all to dielectric grating height is very sensitive, and this is also to be easier to understand, because
Some causes to carry out travel back between upper and lower double layer of metal by upper strata metallic reflection when light propagates through following metal,
Formed and interfere constructive or negative.When dielectric grating highly be 50nm, and metal grating it is highly consistent when, TM ripple transmitances are almost
Zero.When dielectric grating highly takes 80nm, transmitance and extinction ratio are all optimum situations, so being to the preferred result of H2
80nm。
Accompanying drawing 16 and accompanying drawing 17 give the transmitance and Extinction ratio of white light LEDs surface TM light with metal grating height
Change curve.Corresponding parameter is：Screen periods P=150nm, H2=80nm, H3=20nm, DC=0.5.Can from accompanying drawing 16
Go out extinction ratio increases with the increase of metal grating height, as H1=80nm, although extinction ratio is highest, but it is actual
Situation is to define continuous metal level, causes transmitance very low.It is overall with metal grating height at transmittance curve shortwave
Increase and increase, and conversely, consider the transmitance of whole visible light wave range at long wave, choose 50nm or so and close the most
It is suitable.
Accompanying drawing 18 and accompanying drawing 19 give the transmitance and Extinction ratio of white light LEDs surface TM light as grating dutycycle becomes
The curve of change.Corresponding analog parameter is：Screen periods P=150nm, H1=50nm H2=80nm, H3=20nm.From Figure 18 and 19
In as can be seen that TM transmitances be substantially consistent with the variation tendency of dutycycle with extinction ratio, dutycycle is changed to from 0.1
0.5, transmitance and extinction ratio are all increasing, and during to 0.5, both reach maximum simultaneously, with the increase of dutycycle, transmitance and
Extinction ratio reduction simultaneously again, it is seen then that dutycycle selection 0.5 is theoretically suitable, and next from the angle of experiment preparation
Say, comparatively 0.5 dutycycle is more prone to control and realize.During for dutycycle minimum and maximum, correspond respectively to down
Layer metal grating and upper strata metal grating metallic aluminium are relatively more, so transmitance is than relatively low.The change of ER is also such.
Fluorescence ceramics are acted on of both acting primarily as in white light LEDs：（1）As fluorescent material：Fluorescence ceramics have glimmering
The effect of light conversion, when blue light incides fluorescence ceramics, a part can be converted into gold-tinted, remaining blue light and the Huang for changing into
Light outgoing together, forms white light.And the manufacture craft of fluorescence ceramics ensure that fluorescence transformational substance energy in ceramic matrix
It is enough to be more uniformly distributed, can also be produced by adjusting the doping of fluorescence transformational substance and the integral thickness of potsherd
The white light of different correlated colour temperatures and colour rendering index.（2）As package casing：Due to fluorescence ceramics translucency preferably, and not
Frangible good stability, can be used directly to encapsulate white light LEDs, its refractive index（n=1.8）Than traditional encapsulating material epoxy resin（n=
1.5）It is high, there are some researches show, when the refractive index of encapsulating material is improved, the extraction efficiency of light also can be improved accordingly.And make pottery
The thermal conductivity of ceramic material is higher than organic material, can alleviate impact of the temperature for LED.Meanwhile, possess the aspect such as corrosion-resistant
Characteristic so that the life-span of white light LEDs is longer, and can use under some special environment.Due to many of fluorescence ceramics
Performance indications are better than traditional LED encapsulation material epoxy resin and organosilicon.The utility model be existing white-light LED encapsulation with
And fluorescence conversion provides a kind of new method, and the acquisition to high-quality white light has great reference value.
The utility model plates the uniform of thick layer about 100nm using the method for magnetron sputtering plating in fluorescence ceramics substrate
Dielectric film, then revolves figure nano impression glue on film, carries out nano impression using nano marking press and makes mask plate, utilizes
The mask plate that ion beam etching made according to before prepares optical grating construction on medium, then using the side of electron beam evaporation deposition
Method plates layer of metal film, and electron beam evaporation deposition is a kind of very strong plated film mode of directionality, very high to the loyalty of grooved,
The rectangular channel of grating and the raised surface of grating can all deposit metal, and the pattern of metal is loyal in the pattern of dielectric grating,
Also it is rectangular.The cycle of grating is 150nm, is operated in visible light wave range；The utility model only needs etch media plated film again, then profit
Fluorescence ceramics substrate is used, highly purified polarized white light is excited, technics comparing is simple, and efficiency high, success rate is high, is adapted to industry raw
Produce；Prior art is solved because complicated process of preparation ratio is if desired for erosion metal and medium in the same time, and industrialized cannot be lacked
Fall into.
Claims (10)
1. a kind of based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, it is characterised in that：It is described based on fluorescence
Polarized white light LED of ceramics and double-layer nanometer optical grating construction includes blue-ray LED, fluorescence ceramics substrate, transition zone, dielectric grating
Layer, metal level；The fluorescence ceramics substrate one side coupling blue-ray LED, another side is combined transition zone；The dielectric grating layer is located at
Transition layer surface；The metal level is located at the groove of dielectric grating layer and the surface of projection；The cycle of the dielectric grating layer
For 140 nm-160nm, dutycycle is 0.4-0.6, is highly 70nm-90nm；The height of the metal level is 40nm-60nm.
2., according to claim 1 based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, its feature exists
In：The blue-ray LED is GaN base blue-ray LED；The transition zone is magnesium fluoride transition zone, silica transition zone or PMMA
Transition zone；The dielectric grating layer is magnesium fluoride grating layer, silica grating layer or PMMA grating layers；The metal level is
Aluminium lamination, silver layer or layer gold.
3., according to claim 1 based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, its feature exists
In：The cycle of the dielectric grating layer is 150nm, and dutycycle is 0.5, is highly 80nm；The height of the metal level is 50nm.
4., according to claim 1 based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, its feature exists
In：The height of the transition zone is 20nm.
5., according to claim 1 based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, its feature exists
In：The corresponding service band of polarized white light LED based on fluorescence ceramics and double-layer nanometer optical grating construction is visible light wave range.
6., according to claim 1 based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction, its feature exists
In：The height of the fluorescence ceramics substrate is 0.5-1cm.
7. a kind of based on fluorescence ceramics and the encapsulating structure of double-layer nanometer grating, it is characterised in that：It is described based on fluorescence ceramics and
The encapsulating structure of double-layer nanometer grating includes fluorescence ceramics substrate, transition zone, dielectric grating layer, metal level；The fluorescence ceramics
The compound transition zone of substrate one side；The dielectric grating layer is located at transition layer surface；The metal level is located at the recessed of dielectric grating layer
The surface of groove and projection；The cycle of the dielectric grating layer is 140 nm-160nm, and dutycycle is 0.4-0.6, is highly
70nm-90nm；The height of the metal level is 40nm-60nm.
8. according to claim 7 based on fluorescence ceramics and the encapsulating structure of double-layer nanometer grating, it is characterised in that：The mistake
Layer is crossed for magnesium fluoride transition zone, silica transition zone or PMMA transition zones；The dielectric grating layer be magnesium fluoride grating layer,
Silica grating layer or PMMA grating layers；The metal level is aluminium lamination, silver layer or layer gold.
9. according to claim 7 based on fluorescence ceramics and the encapsulating structure of double-layer nanometer grating, it is characterised in that：Given an account of
The cycle of matter grating layer is 150nm, and dutycycle is 0.5, is highly 80nm；The height of the metal level is 50nm.
10. according to claim 7 based on fluorescence ceramics and the encapsulating structure of double-layer nanometer grating, it is characterised in that：It is described
The height of transition zone is 20nm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098910A (en) * | 2016-08-24 | 2016-11-09 | 苏州大学 | Based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction |
| CN110568541A (en) * | 2019-08-27 | 2019-12-13 | 清华大学深圳研究生院 | Metal polaroid and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098910A (en) * | 2016-08-24 | 2016-11-09 | 苏州大学 | Based on fluorescence ceramics and polarized white light LED of double-layer nanometer optical grating construction |
| CN110568541A (en) * | 2019-08-27 | 2019-12-13 | 清华大学深圳研究生院 | Metal polaroid and manufacturing method thereof |
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