CN206122901U - Laser welding packaging hardware based on under atmosphere protective strip spare - Google Patents
Laser welding packaging hardware based on under atmosphere protective strip spare Download PDFInfo
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- CN206122901U CN206122901U CN201620912707.4U CN201620912707U CN206122901U CN 206122901 U CN206122901 U CN 206122901U CN 201620912707 U CN201620912707 U CN 201620912707U CN 206122901 U CN206122901 U CN 206122901U
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- vacuum
- valve
- laser
- laser welding
- environment storehouse
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Abstract
The utility model discloses a laser welding packaging hardware based on under atmosphere protective strip spare, especially one kind based on the laser welding packaging hardware under special gas protection or the vacuum condition, and the device includes: the travelling car, environment bin, the laser window, the fore vacuum pump, differential pressure valve, the tee bend, vacuum pressure meter, low valve, valve in advance, low vacuum measurement sensor, the main pump, the main valve, transition duct, nonrust corrugated steel pipe, the inflation valve, pressure transmitter, the relief valve, high vacuum measurement sensor and tight pulley, this device can extensively be used for semiconductor device, photoelectric converter spare, integrated circuit, superelevation mach motion device etc. Need carry out the product that protective atmosphere encapsulated down, the visual degree of this equipment is high, and convenient for operation, and the performance is stable, can prevent encapsulating material oxidation in the air, increase the mobility of solder, gas pocket when reducing the welding, press from both sides weld defects such as sediment, show the gas tightness that improves the product encapsulation, intensity and super high acceleration's (more than the 50G) shock resistance, higher society and economic value have.
Description
Technical field
The utility model discloses a kind of laser welding packaging device based under the conditions of atmosphere protection, especially a kind of base
Laser welding packaging device under special gas protection or vacuum condition.
Background technology
Currently, when the special parts such as semiconductor device, integrated circuit, photoelectric device carry out laser welding packaging operation,
Welding material exposes in atmosphere, is particularly easy to oxidation under the high temperature conditions, causes device pore, slag inclusion, crackle, welding occur
The low weld defect of intensity, causes the disqualification rates such as poor device air tightness, low intensity, not impact resistance to rise violently, particularly intolerant to punching
Hit defect the device for causing high Mach flight is damaged, cause great security incident and property loss, it is domestic at present general
Protection weld job is carried out all over the vacuum glove box for adopting, but this kind of scheme laser instrument needs to be integrated in glove box, basic nothing
Method or be difficult to observe operation process, cause operative weldability extreme difference, in consideration of it, market in urgent need one kind can under vacuum or
Laser welding packaging device under special atmosphere protective condition, possesses the equipment of good man-machine environment and flexibility, meets high
End-apparatus part is particularly the demand of Aero-Space high-speed aircraft dedicated devices.
The content of the invention
For the weak point in original technology, the purpose of this utility model is to provide a kind of based on atmosphere protection condition
Under laser welding packaging device, laser light laser form carries out operation in environment storehouse, can be in vacuum and arbitrary gas group
Operation under point, solves welding and the product defectses such as material oxidation, poor air-tightness, weld strength difference.
To solve existing problem, the technical solution adopted in the utility model is：There is provided a kind of based on atmosphere protection condition
Under laser welding packaging device, it is characterised in that：Vacuum acquiring system is integrated in moving cart, by forepump, master
Pump, valve for pressure difference, low valve, pre- valve, main valve, three-way pipeline, transition conduit, pressure vacuum gauge, low vacuum measuring sensor and other
Pipeline is constituted, and vacuum pump is oilless vacuum pump, and vacuum pipe is constituted using the inside and outside polishing pipes of SUS304, and vacuum system passes through
SUS304 flexible bellows are connected with environment storehouse；Environment storehouse is aided with electrochemical polishing process, leak rate by the stainless steel makings of SUS304
Better than 1X10-9Pa.L/S, bottom have centralized positioning pin-and-hole, have fixed bolt hole；Environment silo roof portion is equipped with laser form, laser video
Anti- laser resistant to damage thin film is coated with window；Pressure transmitter and charging valve composition inflation system, top dress are housed on environment storehouse
There is relief valve, side is equipped with low vacuum measuring sensor, fine vacuum measurement sensor, and the sealing of all flow passage components adopts fluorine
Rubber cushion rubber vacuum sealing.
Preferably, vacuum pump is oilless vacuum pump, and vacuum pipe is constituted using the inside and outside polishing pipes of SUS304, vacuum system
It is connected with environment storehouse by SUS304 flexible bellows.
Preferably, environment storehouse is aided with electrochemical polishing process by the stainless steel makings of SUS304, and leak rate is better than 1X10-9Pa.L/
S, bottom have centralized positioning pin-and-hole, have fixed bolt hole.
Preferably, environment silo roof portion is equipped with laser form, and anti-laser resistant to damage thin film is coated with laser form.
Preferably, pressure transmitter and charging valve are housed on environment storehouse, top is equipped with relief valve, and side is equipped with coarse vacuum
Measurement sensor and fine vacuum measurement sensor.
The beneficial effect of the invention：This utility model has with following compared with prior art as a result of above-mentioned technology
Beneficial effect：Solve the technique and product defects of device welding in air；Man machine interface and operative weldability are much better than existing setting
It is standby；Laser instrument is placed on outside equipment and can be reduced significantly machine volume, reduces process exploitation difficulty；Environment storehouse can be fixed in office
On meaning laser welding apparatus, functions of the equipments are more diversified and flexibility.
Description of the drawings
Fig. 1 is this utility model structural representation；
In figure：1- moving carts；2- environment storehouse；3- laser forms；4- forepumps；5- valve for pressure difference；6- threeways；7- is true
Hollow pressure gauge；The low valves of 8-；The pre- valves of 9-；10- low vacuum measuring sensors；11- main pumps；12- main valves；13- transition conduits；14- is not
Rust corrugated steel pipe；15- charge valves；16- pressure transmitters；17- relief valves；18- low vacuum measuring sensors；19- fine vacuum is surveyed
Quantity sensor；20- fast pulleys.
Specific embodiment
Vacuum acquiring system is integrated in moving cart（1）On, by forepump（4）, main pump（11）, valve for pressure difference（5）, it is low
Valve（8）, pre- valve（9）, main valve（12）, three-way pipeline（6）, transition conduit（13）, pressure vacuum gauge（7）, low-vacuum measurement sensing
Device（10）Constitute with other pipelines, vacuum pump is oilless vacuum pump, vacuum pipe is constituted using the inside and outside polishing pipes of SUS304, very
Empty set system is by SUS304 flexible bellows（14）With environment storehouse（2）It is connected, to environment storehouse evacuation, vacuum can be obtained；Environment
Storehouse（2）It is upper that pressure transmitter is housed（15）And charging valve（16）, special gas are filled with according to welding procedure demand and enter environment
Storehouse（2）, it is possible to provide special gas protects working environment；Environment storehouse（2）By the stainless steel makings of SUS304, it is aided with electrochemical polish work
Skill, leak rate are better than 1X10-9Pa.L/S, bottom have centralized positioning pin-and-hole, have fixed bolt hole, are accurately located at laser welding apparatus
Workbench on；Environment storehouse（2）Top is equipped with laser form（3）, laser form（3）On be coated with anti-laser resistant to damage thin film, swash
The laser light laser form of flush weld connection device is to environment storehouse（2）In workpiece be packaged operation；Packaging operation is beaten after terminating
Drive top relief valve（17）Carry out environment storehouse（2）Inside and outside differential pressure is balanced；Environment storehouse（2）Side is equipped with low vacuum measuring sensor
（18）, fine vacuum measurement sensor（19）, pressure transmitter（15）, the pressure of vacuum environment and the precious China's environment of extraordinary atmosphere is entered
Row accurate measurement and control, the sealing of all flow passage components adopt fluorubber cushion rubber vacuum sealing.
The above, only this utility model preferably specific embodiment, but protection domain of the present utility model is not
Be confined to this, any those familiar with the art in the technical scope of present disclosure, according to this utility model
Technical scheme and its inventive concept equivalent or change in addition, should all cover within protection domain of the present utility model.
Claims (5)
1. a kind of laser welding packaging device based under the conditions of atmosphere protection, it is characterised in that：Vacuum acquiring system is integrated in
Moving cart（1）On, by forepump（4）, main pump（11）, valve for pressure difference（5）, low valve（8）, pre- valve（9）, main valve（12）, three
Thread a pipe（6）, transition conduit（13）, pressure vacuum gauge（7）, low vacuum measuring sensor（10）Constitute with other pipelines, vacuum
Pump is oilless vacuum pump, and vacuum pipe is constituted using the inside and outside polishing pipes of SUS304, and vacuum system passes through SUS304 flexible corrugations
Pipe（14）With environment storehouse（2）It is connected；Environment storehouse（2）By the stainless steel makings of SUS304, it is aided with electrochemical polishing process, leak rate is better than
1X10-9Pa.L/S, bottom have centralized positioning pin-and-hole, have fixed bolt hole；Environment storehouse（2）Top is equipped with laser form（3）, laser
Form（3）On be coated with anti-laser resistant to damage thin film；Environment storehouse（2）It is upper that pressure transmitter is housed（15）And charging valve（16）Composition
Inflation system, top are equipped with relief valve（17）, side is equipped with low vacuum measuring sensor（18）, fine vacuum measurement sensor
（19）, the sealing of all flow passage components is using fluorubber cushion rubber vacuum sealing.
2. a kind of laser welding packaging device based under the conditions of atmosphere protection according to claim 1, vacuum pump are
Oilless vacuum pump, vacuum pipe are constituted using the inside and outside polishing pipes of SUS304, and vacuum system passes through SUS304 flexible bellows（14）
With environment storehouse（2）It is connected.
3. a kind of laser welding packaging device based under the conditions of atmosphere protection according to claim 1, environment storehouse（2）By
SUS304 stainless-steel vacuum argon arc weldings are manufactured, and are aided with electrochemical polishing process, and leak rate is better than 1X10-9Pa.L/S, bottom have
Centralized positioning pin-and-hole, has fixed bolt hole.
4. a kind of laser welding packaging device based under the conditions of atmosphere protection according to claim 1, environment storehouse（2）Top
Portion is equipped with laser form（3）, laser form（3）On be coated with anti-laser resistant to damage thin film.
5. a kind of laser welding packaging device based under the conditions of atmosphere protection according to claim 1, environment storehouse（2）On
Equipped with pressure transmitter（15）And charging valve（16）, top is equipped with relief valve（17）, side is equipped with low vacuum measuring sensor
（18）, fine vacuum measurement sensor（19）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620912707.4U CN206122901U (en) | 2016-08-22 | 2016-08-22 | Laser welding packaging hardware based on under atmosphere protective strip spare |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620912707.4U CN206122901U (en) | 2016-08-22 | 2016-08-22 | Laser welding packaging hardware based on under atmosphere protective strip spare |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206122901U true CN206122901U (en) | 2017-04-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620912707.4U Active CN206122901U (en) | 2016-08-22 | 2016-08-22 | Laser welding packaging hardware based on under atmosphere protective strip spare |
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| CN (1) | CN206122901U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107775191A (en) * | 2017-09-30 | 2018-03-09 | 重庆长安工业(集团)有限责任公司 | Reserve type lithium battery liquid storage bottle laser seal method |
-
2016
- 2016-08-22 CN CN201620912707.4U patent/CN206122901U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107775191A (en) * | 2017-09-30 | 2018-03-09 | 重庆长安工业(集团)有限责任公司 | Reserve type lithium battery liquid storage bottle laser seal method |
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