CN206069386U - A kind of Silicon chloride. energy-conservation carburator - Google Patents
A kind of Silicon chloride. energy-conservation carburator Download PDFInfo
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- CN206069386U CN206069386U CN201620904276.7U CN201620904276U CN206069386U CN 206069386 U CN206069386 U CN 206069386U CN 201620904276 U CN201620904276 U CN 201620904276U CN 206069386 U CN206069386 U CN 206069386U
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- silicon chloride
- heating tube
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Abstract
The utility model discloses a kind of Silicon chloride. energy-conservation carburator, including：Vaporizer shell, Hydrogen distribution device and closed heating tube；The bottom and top of two relative walls of the vaporizer shell offers Silicon chloride. entrance and silicon tetrachloride vapor outlet respectively；The Hydrogen distribution device is placed on the bottom of the vaporizer shell, is connected with the insertion tube being communicated to outside the vaporizer shell thereon, and the closed heating tube is longitudinally arranged in the vaporizer shell；The mouth of pipe of the closed heating tube is closed, and its pipe has been inserted into electrically heated rod, and sealing is filled with conduction oil between the electrically heated rod and heating tube shell.Structure design of this utility model by closed heating tube, not only simplify heating operation, also avoid heating a large amount of conduction oils, energy consumption is effectively reduced, its also contacts area is big, and temperature is uniform, the thermal source of efficient stable, excellent combination property, wide market are improved to Silicon chloride..
Description
Technical field
This utility model is related to production of polysilicon apparatus field, more particularly to a kind of Silicon chloride. energy-conservation carburator.
Background technology
In recent years, developing rapidly with solar photovoltaic industry, polysilicon is used as solar panel or component
Raw material constant is also significantly increased, and at the same time, the silicon tetrachloride as by-product in polysilicon production process also significantly increases, and this is right
Environment generates huge pressure, and the also circulation for the raw material trichlorosilane of production of polysilicon is generated and brings puzzlement, and real
Existing Silicon chloride. seeks to realize the vaporization of Silicon chloride. to the conversion of trichlorosilane first.Therefore, it is above-mentioned in order to realize
Purpose, Silicon chloride. must first pass through vaporization process.
Existing silicon tetrachloride vaporization device is essentially horizontal or vertical and hot using electrically heated rod or U heat exchange offer
Realize the purpose of vaporization in source.But electrically heated rod is present, and contact area is little, non-uniform temperature, easily there is turbulent flow etc. and lacks in Silicon chloride.
Point, and U heat exchange is adopted, with conduction oil as heat transferring medium, need to arrange conduction oil storage box in addition, respectively with U-shaped heat exchange
The entrance and exit connection of pipe, complex process, and the heating amount of conduction oil is big, cost of energy is high.
Utility model content
This utility model is mainly solving the technical problems that a kind of Silicon chloride. energy-conservation carburator of offer, can solve the problem that
The disadvantages mentioned above that existing silicon tetrachloride vaporization device is present.
To solve above-mentioned technical problem, the technical scheme that this utility model is adopted is：A kind of Silicon chloride. section is provided
Energy carburator, including：Vaporizer shell, Hydrogen distribution device and closed heating tube；Two opposite walls of the vaporizer shell
The bottom and top in face offers Silicon chloride. entrance and silicon tetrachloride vapor outlet respectively；The Hydrogen distribution device is placed on institute
The bottom of vaporizer shell is stated, the insertion tube being communicated to outside the vaporizer shell, the closed heating is connected with thereon
Pipe is longitudinally arranged in the vaporizer shell；The mouth of pipe of the closed heating tube is closed, and its pipe has been inserted into electrically heated rod,
And sealing is filled with conduction oil between the electrically heated rod and heating tube shell.
In one preferred embodiment of this utility model, loading of the conduction oil in the closed heating tube is accounted for
The 60～80% of the closed heating pipe volume, and the electrically heated rod is immersed in the conduction oil.
In one preferred embodiment of this utility model, the electrically heated rod is located at the mouth of pipe one of the closed heating tube
End is with the electrode being connected with heating power supply.
In one preferred embodiment of this utility model, the closed heating tube is U-tube, and the U-tube is at least
Electrically heated rod is carried in one tube wall.
In one preferred embodiment of this utility model, the Hydrogen distribution device is inverted cone-shaped structure, on its taper surface
It is even that pore is distributed with.
In one preferred embodiment of this utility model, the number of the Hydrogen distribution device is 1～3.
In one preferred embodiment of this utility model, the insertion tube is located on the port outside the vaporizer shell
It is connected with hydrogen gas buffer.
The beneficial effects of the utility model are：A kind of Silicon chloride. energy-conservation carburator of this utility model, simple structure, design
Rationally, its structure design by closed heating tube, not only simplify heating operation, also avoids heating a large amount of conduction oils, has
Effect reduces energy consumption, and its also contacts area is big, and temperature is uniform, improves the thermal source of efficient stable, combination property to Silicon chloride.
It is excellent, wide market.
Description of the drawings
Fig. 1 is a kind of dimensional structure diagram of one preferred embodiment of Silicon chloride. energy-conservation carburator of this utility model；
In accompanying drawing, the labelling of each part is as follows：1. vaporizer shell, 2. Hydrogen distribution device, 3. closed heating tube, 4. four
Silicon chloride entrance, 5. silicon tetrachloride vapor outlet, 6. insertion tube, 7. hydrogen gas buffer, 8. electrically heated rod, 9. conduction oil, 10. electric
Pole.
Specific embodiment
Below in conjunction with the accompanying drawings preferred embodiment of the present utility model is described in detail, so that advantage of the present utility model
Can be easier to be readily appreciated by one skilled in the art with feature, it is apparent clear and definite so as to make to protection domain of the present utility model
Define.
Fig. 1 is referred to, this utility model embodiment includes：
Embodiment 1
A kind of Silicon chloride. energy-conservation carburator, including：Vaporizer shell 1, Hydrogen distribution device 2 and closed heating tube 3.
Wherein, the bottom and top of two relative walls of the vaporizer shell 1 offers Silicon chloride. entrance 4 respectively
With silicon tetrachloride vapor outlet 5.
The Hydrogen distribution device 2 is inverted cone-shaped structure, is evenly distributed with pore, for hydrogen is sprayed downwards on its taper surface
Go out, to mix with Silicon chloride. gas componant, the number of the Hydrogen distribution device 2 is 1～3, is uniformly placed on vaporizer shell 1
Bottom, its bottom is used to providing the insertion tube 6 of hydrogen stream with one and connects, and the other end of the insertion tube 6 stretches out carburator shell
The outside of body 1, and hydrogen gas buffer 7 is connected with, so that hydrogen is flowed in Hydrogen distribution device 2 with uniform gentle speed.
3 longitudinal direction of the closed heating tube is arranged in vaporizer shell 1, and its mouth of pipe is closed, and pipe has been inserted into electrical heating
Rod 8, and sealing is filled with conduction oil 9 between electrically heated rod 8 and heating tube shell, the loading of conduction oil 9 accounts for the closing
The 60～80% of formula heating pipe volume, on the one hand make electrically heated rod be immersed in conduction oil, on the other hand prevent conduction oil from receiving flatulence of heat type
Broken heating tube.Electrically heated rod 8 is located at mouth of pipe one end of closed heating tube 3 and carries electrode 10, for being connected with heating power supply.
Above-mentioned closed heating tube 3 is that electrically heated rod 8 is carried in U-tube, and a pipe arm of U-tube.
Embodiment 2
Difference with embodiment 1 is that electrically heated rod 8 is carried on two pipe arms of the closed heating tube 3.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is every
The equivalent structure made using this utility model description and accompanying drawing content or equivalent flow conversion, or be directly or indirectly used in
Other related technical fields, are included in scope of patent protection of the present utility model in the same manner.
Claims (7)
1. a kind of Silicon chloride. energy-conservation carburator, it is characterised in that include：Vaporizer shell, Hydrogen distribution device and it is closed plus
Heat pipe；The bottom and top of two relative walls of the vaporizer shell offers Silicon chloride. entrance and Silicon chloride. respectively
Steam (vapor) outlet；The Hydrogen distribution device is placed on the bottom of the vaporizer shell, is connected with thereon and is communicated to the carburator
The insertion tube of hull outside, the closed heating tube are longitudinally arranged in the vaporizer shell；The closed heating tube
The mouth of pipe it is closed, its pipe has been inserted into electrically heated rod, and between the electrically heated rod and heating tube shell sealing filled with leading
Deep fat.
2. Silicon chloride. energy-conservation carburator according to claim 1, it is characterised in that the conduction oil is described closed
Loading in heating tube accounts for the 60～80% of the closed heating pipe volume, and the electrically heated rod is immersed in the heat conduction
In oily.
3. Silicon chloride. energy-conservation carburator according to claim 1 and 2, it is characterised in that the electrically heated rod is located at institute
Mouth of pipe one end of closed heating tube is stated with the electrode being connected with heating power supply.
4. Silicon chloride. energy-conservation carburator according to claim 1 and 2, it is characterised in that the closed heating tube is U
Type pipe, carries electrically heated rod at least one pipe arm of the U-tube.
5. Silicon chloride. energy-conservation carburator according to claim 1, it is characterised in that the Hydrogen distribution device is inverted cone
Structure, is evenly distributed with pore on its taper surface.
6. Silicon chloride. energy-conservation carburator according to claim 1 or 5, it is characterised in that the Hydrogen distribution device
Number is 1～3.
7. Silicon chloride. energy-conservation carburator according to claim 1, it is characterised in that the insertion tube is located at the vaporization
Hydrogen gas buffer is connected with the port of device hull outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620904276.7U CN206069386U (en) | 2016-08-19 | 2016-08-19 | A kind of Silicon chloride. energy-conservation carburator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620904276.7U CN206069386U (en) | 2016-08-19 | 2016-08-19 | A kind of Silicon chloride. energy-conservation carburator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206069386U true CN206069386U (en) | 2017-04-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620904276.7U Active CN206069386U (en) | 2016-08-19 | 2016-08-19 | A kind of Silicon chloride. energy-conservation carburator |
Country Status (1)
| Country | Link |
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| CN (1) | CN206069386U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106082236A (en) * | 2016-08-19 | 2016-11-09 | 太仓市金锚化工有限公司 | A kind of energy-conservation carburator of Silicon chloride. |
-
2016
- 2016-08-19 CN CN201620904276.7U patent/CN206069386U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106082236A (en) * | 2016-08-19 | 2016-11-09 | 太仓市金锚化工有限公司 | A kind of energy-conservation carburator of Silicon chloride. |
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