CN206052148U - Gas distributor - Google Patents
Gas distributor Download PDFInfo
- Publication number
- CN206052148U CN206052148U CN201621087590.7U CN201621087590U CN206052148U CN 206052148 U CN206052148 U CN 206052148U CN 201621087590 U CN201621087590 U CN 201621087590U CN 206052148 U CN206052148 U CN 206052148U
- Authority
- CN
- China
- Prior art keywords
- dispersion
- gas
- cone
- gas distributor
- boron nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model discloses a kind of gas distributor, including：Dispersion for gas dispersion is bored；For supporting the support of the dispersion cone.During boron nitride crucible is prepared, make gas outlet of the cone of dispersion cone just to air inlet pipe, after unstrpped gas so from air inlet pipe out runs into dispersion cone during rising, can spray along the conical surface of dispersion cone to surrounding dispersion, the drawbacks of so avoiding the unstrpped gas in prior art in air inlet pipe and only spray in one direction, it is dispersed through boring scattered gas and can uniformly sprays in body of heater, the uniformity of boron nitride crucible thickness is which improves, so as to improve the quality of boron nitride crucible.
Description
Technical field
This utility model is related to chemical vapor deposition field, more particularly, it relates to a kind of gas distributor.
Background technology
The preparation of boron nitride crucible generally adopts chemical vapour deposition technique, unstrpped gas to enter into body of heater by air inlet pipe
It is interior, it is deposited on the mould in body of heater, ultimately forms boron nitride crucible.During preparation, from air inlet pipe raw material out
Gas can only spray in one direction, and this results in unstrpped gas and sprays uneven in body of heater, and then causes boron nitride crucible
Uneven thickness, have a strong impact on the quality of boron nitride crucible.
Therefore, a kind of gas distributor how is designed, the gas distributor can be such that unstrpped gas uniformly sprays in body of heater
Penetrate, so as to improve the uniformity of boron nitride crucible thickness, and then improve the quality of boron nitride crucible, be those skilled in the art urgently
Critical problem to be solved.
Utility model content
The purpose of this utility model is to provide a kind of gas distributor, and the gas distributor can make unstrpped gas in body of heater
Interior uniform injection, so as to improve the uniformity of boron nitride crucible thickness, and then improves the quality of boron nitride crucible.
To reach above-mentioned purpose, this utility model provides technical scheme below：
A kind of gas distributor, including：
Dispersion for gas dispersion is bored；
For supporting the support of the dispersion cone.
Preferably, the connecting cylinder also including the rounded bottom surface for being connected to the dispersion cone, the connecting cylinder and the support
Connection.
Preferably, the connecting cylinder has circular arc chamfering away from the end of the dispersion cone.
Preferably, the support includes：
The cross bar being arranged in the connecting cylinder；
Vertical pole, the two ends of the cross bar are inserted in a vertical pole respectively.
Preferably, the cross bar includes into two of top-bottom cross arrangement.
Preferably, the spanner flat with a pair of opposing on the cross bar.
From above-mentioned technical proposal as can be seen that the gas distributor in this utility model includes dispersion cone and divides for supporting
Dissipate the support of cone.During boron nitride crucible is prepared, the gas outlet of the cone just to air inlet pipe of dispersion cone is made, so from entering
After trachea unstrpped gas out runs into dispersion cone during rising, can spray along the conical surface of dispersion cone to surrounding dispersion
Penetrate, the drawbacks of so avoiding the unstrpped gas in prior art in air inlet pipe and only spray in one direction, be dispersed through cone point
Scattered gas can be uniformly sprayed in body of heater, which improves the uniformity of boron nitride crucible thickness, so as to improve nitridation
The quality of boron crucible.
Description of the drawings
For the scheme being illustrated more clearly that in this utility model embodiment, will make to required described in embodiment below
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present utility model,
For those skilled in the art, on the premise of not paying creative work, can be obtaining other according to these accompanying drawings
Accompanying drawing.
The structural representation of the gas distributor that Fig. 1 is provided for one specific embodiment of this utility model；
Front views of the Fig. 2 for Fig. 1.
Wherein, 11 for dispersion cone, 12 be connecting cylinder, 2 be cross bar, 21 be spanner flat, 3 be vertical pole.
Specific embodiment
This utility model provides a kind of gas distributor, and the gas distributor can make unstrpped gas uniform in body of heater
Injection, so as to improve the uniformity of boron nitride crucible thickness, and then improves the quality of boron nitride crucible.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the present utility model, rather than all
Embodiment.Based on embodiment of the present utility model, those of ordinary skill in the art are not making the premise of creative work
Lower obtained all other embodiment, belongs to the scope of this utility model protection.
Accompanying drawing 1-2 is refer to, in one specific embodiment of this utility model, gas distributor includes dispersion cone 11 and props up
Frame.Dispersion cone 11 is used for gas dispersion, and support is used to support dispersion cone 11.During boron nitride crucible is prepared, dispersion is made
Gas outlet of the cone of cone 11 just to air inlet pipe, the so unstrpped gas from air inlet pipe out run into dispersion during rising
After cone 11, can spray to surrounding dispersion along the conical surface of dispersion cone 11, so avoid the original in air inlet pipe in prior art
The drawbacks of material gas only sprays in one direction, being dispersed through 11 scattered gases of cone can uniformly spray in body of heater, thus carry
The high uniformity of boron nitride crucible thickness, so as to improve the quality of boron nitride crucible.
In one specific embodiment of this utility model, also including connecting cylinder 12, the connecting cylinder 12 is connected to dispersion cone 11
Rounded bottom surface, and 11 coaxial lines are bored with dispersion.It will be appreciated by persons skilled in the art that circular cone with summit, one
Rounded bottom surface and a side, the dispersion cone 11 in the present embodiment equally have summit, a rounded bottom surface and a side
Face.Connecting cylinder 12 with it is above-mentioned in support be connected.Connecting cylinder 12 can be with dispersion 11 integrated castings of cone.
In one specific embodiment of this utility model, connecting cylinder 12 has circular arc chamfering away from one end of dispersion cone 11.This
Art personnel are it is understood that during boron nitride crucible is prepared, micro unstrpped gas is inevitably
Be deposited on gas distributor, on connecting cylinder 12 circular arc chamfering be disposed to facilitate the peeling of boron nitride deposit.
In one specific embodiment of this utility model, support includes cross bar 2 and vertical pole 3.Cross bar 2 is arranged in connecting cylinder 12
Interior, cross bar 2 is vertical with the axis of connecting cylinder 12.The diameter parallel of vertical pole 3 and connecting cylinder 12.One is inserted respectively in the two ends of cross bar 2
In individual vertical pole 3.Specifically, can open up on vertical pole 3 for inserting the patchhole of cross bar 2.Cross bar 2 and connecting cylinder in the present embodiment
12 are detachably connected for plug-type, and cross bar 2 is also detachably connected for plug-type with vertical pole 3, thus facilitates gas point
The assembly and disassembly of scattered device.
Further, in one specific embodiment of this utility model, cross bar 2 includes two, and two 2 one-tenth of cross bars are handed over up and down
Fork arrangement, or two 2 one-tenth of cross bars upper and lower decussation arrangement is so significantly improved into stablizing for support support directly
Property.Each two vertical poles 3 of correspondence of cross bar 2, so, the support in the present embodiment includes two cross bars 2 and four vertical poles 3.
In one specific embodiment of this utility model, there is on cross bar 2 a pair of spanner flats 21, this pair of 21 phase of spanner flat
To arrangement.Spanner flat 21 is the clamping of convenient wrench, and user is clamped cross bar 2 to realize the dismounting of cross bar 2 by spanner
And installation.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use that this practicality is new
Type.Various modifications to these embodiments will be apparent for those skilled in the art, determined herein
The General Principle of justice can be realized in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause
This, this utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (6)
1. a kind of gas distributor, it is characterised in that include：
Dispersion for gas dispersion is bored；
For supporting the support of the dispersion cone.
2. gas distributor according to claim 1, it is characterised in that also including the circular base for being connected to the dispersion cone
The connecting cylinder in face, the connecting cylinder are connected with the support.
3. gas distributor according to claim 2, it is characterised in that end of the connecting cylinder away from the dispersion cone
With circular arc chamfering.
4. gas distributor according to claim 2, it is characterised in that the support includes：
The cross bar being arranged in the connecting cylinder；
Vertical pole, the two ends of the cross bar are inserted in a vertical pole respectively.
5. gas distributor according to claim 4, it is characterised in that the cross bar includes into the two of top-bottom cross arrangement
Root.
6. gas distributor according to claim 4, it is characterised in that pulling with a pair of opposing on the cross bar
Handss plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621087590.7U CN206052148U (en) | 2016-09-26 | 2016-09-26 | Gas distributor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621087590.7U CN206052148U (en) | 2016-09-26 | 2016-09-26 | Gas distributor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206052148U true CN206052148U (en) | 2017-03-29 |
Family
ID=58366191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621087590.7U Active CN206052148U (en) | 2016-09-26 | 2016-09-26 | Gas distributor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206052148U (en) |
-
2016
- 2016-09-26 CN CN201621087590.7U patent/CN206052148U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204522540U (en) | Gas-filtering device and blowback system thereof | |
| CN104790048A (en) | Needleless electrostatic spinning device | |
| CN206052148U (en) | Gas distributor | |
| CN203438086U (en) | Inner nozzle device for steel pipe inner wall sandblasting process | |
| CN105112991A (en) | Draft tube for single crystal furnace | |
| CN208099251U (en) | A kind of accurate positioning die | |
| CN201287095Y (en) | Air-pressure gun | |
| CN203764438U (en) | Arc spray gun | |
| CN204313625U (en) | Steel wire annular blow device | |
| CN204107700U (en) | A kind of rush-harvesting and rush-planting thorax pipe-type electrostatic spray gun | |
| CN207783241U (en) | A kind of tangent line feeding type laminar flow plasma spheroidization device | |
| CN201206114Y (en) | Two-purpose outer end head glass tube forming apparatus | |
| CN209852580U (en) | Novel agricultural multi-rotor unmanned aerial vehicle | |
| CN107716853A (en) | A kind of not viscous aluminium venting plug | |
| CN202758837U (en) | Powder applying device for energy-saving lamp tube | |
| CN206027965U (en) | Do not have to block up and install and remove centrifuge nozzle fast | |
| CN207439129U (en) | A kind of curing carbon felt heat preservation screen device | |
| CN203992794U (en) | Plasma gun head | |
| CN215612457U (en) | Anti-blocking porous high-temperature-resistant ceramic atomizing head | |
| CN205011358U (en) | Multifunctional bottle opener | |
| CN104451960B (en) | A kind of preparation method of the micro-tree of charcoal | |
| CN202594944U (en) | Nichrome orifice ring | |
| CN208960320U (en) | A kind of spraying toy case dries frame | |
| CN203991063U (en) | A kind of split high life production of carbon black raw material oil spray nozzle | |
| CN203981001U (en) | Shower nozzle with main body peep hole |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220530 Address after: No. 1116-1, building 1, Dianzhong Business Plaza, Dianzhong new area, Kunming, Yunnan 650000 Patentee after: Kunming forerunner New Material Technology Co.,Ltd. Address before: 511500 Industrial Zone, wo Yun town, Qingxin County, Qingyuan, Guangdong (beside the fish dam road) Patentee before: FIRST RARE MATERIALS Co.,Ltd. |