CN205957920U - Z axle verticality error measuring device based on image measurement - Google Patents
Z axle verticality error measuring device based on image measurement Download PDFInfo
- Publication number
- CN205957920U CN205957920U CN201620676155.1U CN201620676155U CN205957920U CN 205957920 U CN205957920 U CN 205957920U CN 201620676155 U CN201620676155 U CN 201620676155U CN 205957920 U CN205957920 U CN 205957920U
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- camera lens
- error
- image measurement
- axis
- axle
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Abstract
The utility model provides the utility model discloses a Z axle verticality error measuring device based on image measurement including workstation and laser instrument, sets gradually the receipt target on the laser beam of laser instrument and 45 turns to the mirror, and set gradually 45 and turn to mask version and the image measurement camera lens on the mirror emitting light path, wherein, the receipt target install on the workstation and can follow the workstation and remove, the mask version with the image measurement camera lens is installed in that to await measuring Z epaxial, and can follow the Z axle that awaits measuring removes. The utility model discloses Z axial in the needle sit opposite mark measuring engine to the workstation surface is the benchmark, utilizes good just light intensity stability's the characteristic of laser beam straightness accuracy, combines with the pentaprism, has established the benchmark straight line of an ideal for coordinate measuring machine Z axle verticality error. In the measurement process, directly utilize the two -dimentional position degree of image measurement camera lens to differentiate the ability, acquire the facula position and carry out the error evaluation to realize convenient, accurate, accomplish Z axle verticality error examination fast.
Description
Technical field
This utility model is related to a kind of error of perpendicularity of coordinate measuring machine.More particularly to one kind contains or can put
Put image gauge head based on Eikonometric Z axis error of perpendicularity device.
Background technology
Coordinate measuring machine is a kind of efficient fine measuring instrument, has been widely used for machine-building, Aero-Space, electricity
In son and automobile and other industries.Due to being limited by conditions such as manufacture and mounting process, measuring machine Z axis inevitably will be deposited
In the error of perpendicularity.In measurement process, this error will have a direct impact to the certainty of measurement of coordinate measuring machine.Therefore,
The error of perpendicularity of coordinate measuring machine Z axis is significant.Error of perpendicularity evaluation is between straight line, between plane
Or the plumbness between straight line and plane.
Content of the invention
It is quick that technical problem to be solved in the utility model is to provide a kind of Z axis error of perpendicularity with versatility
Detection based on Eikonometric Z axis error of perpendicularity device.
This utility model be employed technical scheme comprise that：One kind is for based on Eikonometric Z axis error of perpendicularity
Device, includes workbench and laser instrument, is successively set on the reception target on the laser optical path of laser instrument and 45 ° of deviation mirrors, according to
The secondary mask plate being arranged on 45 ° of deviation mirror emitting light paths and radiographic measurement camera lens, wherein, described reception target is arranged on described
On workbench and can be along movable workbench, mask plate and described radiographic measurement camera lens be arranged on Z axis to be measured, and can be along institute
State Z axis to be measured to move.
45 ° of described deviation mirrors are pentaprism or pentamirror.
Described reception target is CCD or PSD.
Of the present utility model based on Eikonometric Z axis error of perpendicularity device, for Z axis in coordinate measuring machine
To, on the basis of table surface, the characteristic of and stabilized intensity good using laser beam linearity, is combined with pentaprism, for seat
The co-ordinate measuring machine Z axis error of perpendicularity establishes a preferable reference line.In measurement process, directly utilize radiographic measurement mirror
Head two-dimensional position degree discriminating power, obtain facula position carry out error evaluation, thus realize convenient, accurate, quickly complete Z
The axle error of perpendicularity is examined and determine.
Brief description
Fig. 1 is that this utility model is used for the structure of the device based on Eikonometric Z axis error of perpendicularity method and shows
It is intended to.
In figure
1：Laser instrument 2：Receive target
3：45 ° of deviation mirrors 4：Mask plate
5：Radiographic measurement camera lens 6：Z axis to be measured
7：Workbench
Specific embodiment
With reference to embodiment and accompanying drawing to of the present utility model based on Eikonometric Z axis error of perpendicularity device
It is described in detail.
As shown in figure 1, of the present utility model for based on Eikonometric Z axis error of perpendicularity device, including：Work
Station 7 and laser instrument 1, are successively set on the reception target 2 on the laser optical path of laser instrument 1 and 45 ° of deviation mirrors 3, described reception
Target 2 can be CCD or PSD, and 45 ° of described deviation mirrors 3 can be pentaprism or pentamirror.It is successively set on 45 ° of deviation mirrors 3 to go out
Penetrate the mask plate 4 in light path and radiographic measurement camera lens 5.Wherein, described reception target 2 is arranged on described workbench 7, and can
Move along workbench 7, mask plate 4 and described radiographic measurement camera lens 5 are all arranged on Z axis 6 to be measured, and can be along described Z to be measured
Axle 6 is mobile.
During reception target 2 moves into place A ＇ from position A, the laser beam of laser instrument 1 is radiated on reception target 2
Luminous point height keep constant, you can know that laser beam is parallel with workbench 7 surface.Laser beam after pentaprism, light
Direction perpendicular to the surface of workbench 7, that is, establishes the light benchmark perpendicular to table surface direction.In radiographic measurement camera lens
5 along Z axis 6 to be measured during position B moves into place B ＇, by radiographic measurement camera lens 5 measurement and recording laser light beam exist
Facula position on mask plate.This change in location can reflect the perpendicularity on Z axis to be measured in coordinate measuring machine between position B and B ＇
Error, according to facula position amount of change, obtains the error of perpendicularity of Z axis to be measured.
Of the present utility model based on Eikonometric Z axis error of perpendicularity method it is proposed that a kind of surveyed using image
The method of amount facula position is it is therefore intended that on the premise of meeting required precision, obtain a kind of Z axis perpendicularity with versatility
Error method for quick.
Of the present utility model for the measuring method based on Eikonometric Z axis error of perpendicularity device, including such as
Lower step：
1) utilize facular height change in location on receiving target for the laser, obtain a branch of ideal parallel with table surface
Light；Including：
(1) a branch of laser beam parallel to table surface is sent using laser instrument, place a reception target in the optical path
(CCD, PSD) is so that light is radiated at the position receiving target, and records the height of this position；
(2) receive target along optical path direction is mobile, adjust laser device laser exit direction, make laser spot on receiving target
Height and position keeps constant, thus obtaining a branch of light parallel with table surface.
2) adjusted laser beam is incided on 45 ° of deviation mirrors, 45 ° of deviation mirrors can be by incident beam direction
Change 90 °, thus obtaining a branch of ideal light rays vertical with table surface；
3) 45 ° of deviation mirror emergent rays are radiated on the mask plate at radiographic measurement camera lens object distance focal plane and are formed
Hot spot, described radiographic measurement camera lens is integrally fixed on Z axis to be measured；When moving with Z axis to be measured, spot definition is constant.
4) measure and record the facula position on the mask plate that described radiographic measurement camera lens obtains；
5) when image gauge head moves with Z axis to be measured, the hot spot position on mask plate that described radiographic measurement camera lens obtains
Put and be always maintained at constant, illustrate that Z axis to be measured are in desired vertical state relative to workbench；When described radiographic measurement camera lens obtains
Mask plate on facula position occur change when, illustrate that Z axis to be measured have the error of perpendicularity relative to workbench, according to hot spot position
Put amount of change, obtain the error of perpendicularity of Z axis to be measured.
Claims (3)
1. one kind is based on Eikonometric Z axis error of perpendicularity device it is characterised in that including workbench (7) and swashing
Light device (1), is successively set on the reception target (2) on the laser optical path of laser instrument (1) and 45 ° of deviation mirrors (3), is successively set on
Mask plate (4) on 45 ° of deviation mirror (3) emitting light paths and radiographic measurement camera lens (5), wherein, described reception target (2) is arranged on
Described workbench (7) is upper and can be along workbench (7) movement, and mask plate (4) and described radiographic measurement camera lens (5) are arranged on to be measured
On Z axis (6), and can be mobile along described Z axis (6) to be measured.
2. according to claim 1 based on Eikonometric Z axis error of perpendicularity device it is characterised in that described
45 ° of deviation mirrors (3) be pentaprism or pentamirror.
3. according to claim 1 based on Eikonometric Z axis error of perpendicularity device it is characterised in that described
Reception target (2) be CCD or PSD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620676155.1U CN205957920U (en) | 2016-06-28 | 2016-06-28 | Z axle verticality error measuring device based on image measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620676155.1U CN205957920U (en) | 2016-06-28 | 2016-06-28 | Z axle verticality error measuring device based on image measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205957920U true CN205957920U (en) | 2017-02-15 |
Family
ID=57969734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620676155.1U Expired - Fee Related CN205957920U (en) | 2016-06-28 | 2016-06-28 | Z axle verticality error measuring device based on image measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205957920U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974586A (en) * | 2019-04-20 | 2019-07-05 | 北京工业大学 | For the another compensation device of laser traces instrument geometric error |
-
2016
- 2016-06-28 CN CN201620676155.1U patent/CN205957920U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974586A (en) * | 2019-04-20 | 2019-07-05 | 北京工业大学 | For the another compensation device of laser traces instrument geometric error |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170215 Termination date: 20190628 |