CN205953539U - Scrubbing tower device and trichlorosilane tail gas recovery system - Google Patents
Scrubbing tower device and trichlorosilane tail gas recovery system Download PDFInfo
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- CN205953539U CN205953539U CN201620926233.9U CN201620926233U CN205953539U CN 205953539 U CN205953539 U CN 205953539U CN 201620926233 U CN201620926233 U CN 201620926233U CN 205953539 U CN205953539 U CN 205953539U
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- tower
- scrubbing tower
- hydrogen
- scrubbing
- trichlorosilane
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Abstract
The utility model discloses a scrubbing tower device and trichlorosilane tail gas recovery system, this scrubbing tower device include scrubbing tower and condenser, it has hydrogen input port and gas mixture delivery outlet to open on the scrubbing tower, and high temperature hydrogen is followed after the hydrogen input port gets into the scrubbing tower, carry out the heat transfer with chlorosilane liquid in the tower cauldron of scrubbing tower to make the vaporization of being heated of chlorosilane liquid, high temperature hydrogen after the heat transfer passes through with trichlorosilane synthetic gas after the scrubbing tower purification more together the gas mixture delivery outlet at above -mentioned in -process, makes the tower cauldron temperature of scrubbing tower keep for 30~70 DEG C in getting into the condenser. The heating load that this scrubbing tower device can satisfy washing tata cauldron realizes the purification of trichlorosilane synthetic gas to can stop serious problem such as the reboiler easily leaks in the scrubbing tower, corruption.
Description
Technical field
This utility model belongs to trichlorosilane production technical field and in particular to a kind of washing tower device and comprise this washing
The trichlorosilane tail gas recovery system of tower apparatus.
Background technology
Trichlorosilane is that to carry out gas-solid in fluid bed synthetic furnace by metallurgical grade silica flour and hydrogen chloride gas heterogeneous anti-
Answer and produce, from synthetic furnace synthesis gas out, contain trichlorosilane, Silicon chloride., dichlorosilane, hydrogen, chlorination
Hydrogen, silica flour, metal chloride and chlorosilane high polymer.In production process of trichlorosilane, generate from the synthetic furnace of trichlorosilane
Above-mentioned synthesis gas remove, through dry-dedusting system, the bulky grain silica flour that wherein carries, carry out further subsequently into scrubbing tower
Purify, remove dry method exhaust gas recovery system to remove again after the tiny silica flour in synthesis gas and metal chloride, chlorosilane high polymer
Carry out cooling down, separate.
Progressively change to maximizing with domestic and international trichlorosilane process units, the disposal ability to trichlorosilane scrubbing tower
Requirement also more and more higher, therefore in scrubbing tower, the thermic load of reboiler is also increasing, Fig. 1 and Fig. 2 is current range
Two kinds of relatively broad washing tower devices.Reboiler in both scrubbing towers all using tubular heat exchanger, by using steaming
Vapour heats to the tower bottoms of scrubbing tower.However, due to silicon thin in the trichlorosilane synthesis gas after dry-dedusting system
The impurity contents such as powder, metal chloride, chlorosilane high polymer are high, and the washing tower device in Fig. 1 tower reactor in running
Temperature is high, and it is relatively decentralized that silica flour and metal chloride are distributed ratio in tower reactor, can only be by small range around leakage fluid dram in discharge opeing process
Interior silica flour and metal chloride are discharged, and lead to it to accumulate in a large number in tower reactor, cause the decline of scrubbing tower clean-up effect, leakage fluid dram
Frequent jams, maintenance workload are big, reboiler heat exchanging pipe seriously corroded the problems such as；Washing tower device in Fig. 2 was running
The problems such as blocking of reboiler heat exchanging pipe is frequent, seriously corroded, maintenance workload are big, maintenance cost is high easily occurs in journey.
It can be seen that, the bottleneck that the problem that the reboiler in washing tower device exists has become as restriction scrubbing tower disposal ability is asked
Topic.
Utility model content
Technical problem to be solved in the utility model is according to deficiencies of the prior art, provides one kind can
Meet the thermic load of scrubbing tower tower reactor, realize the purification of trichlorosilane synthesis gas, and can prevent reboiler in scrubbing tower easily leak,
The washing tower device of the problems such as seriously corroded and the trichlorosilane tail gas recovery system comprising this washing tower device.
Solve this utility model technical problem and be employed technical scheme comprise that this washing tower device includes scrubbing tower and condensation
Device, described scrubbing tower has hydrogen input port and gaseous mixture delivery outlet, and high-temperature hydrogen enters washing from described hydrogen input port
After tower, carry out heat exchange with the chlorosilane liquid in the tower reactor of scrubbing tower, the vaporization so that chlorosilane liquid is heated, the high-temperature hydrogen after heat exchange
Enter in condenser through described gaseous mixture delivery outlet together with the trichlorosilane synthesis gas after the purification of scrubbed tower again, in above-mentioned mistake
Cheng Zhong, makes the bottom temperature of scrubbing tower remain 30～70 DEG C.
, so wash as heat carrier and when the bottom temperature of scrubbing tower is remained 30～70 DEG C when using high-temperature hydrogen
Wash and can not set reboiler in the tower reactor of tower such that it is able to solve to produce because of the presence of reboiler in prior art a variety of asks
Topic.And by using the larger hydrogen of heat capacity ratio as heat carrier, the amount of carrier can also be reduced, reduce in subsequent handling and divide
Load from device.
Preferably, the temperature of described high-temperature hydrogen is 200～300 DEG C.
Preferably, this washing tower device also includes electric heater, the entrance of described electric heater and trichlorosilane tail
Air drying recovery system connects, and the outlet of electric heater is connected with the hydrogen input port of scrubbing tower, trichlorosilane tail gas dry back
The hydrogen reclaiming in receipts system enters electric heater from the entrance of electric heater and is heated, thus forming described high temperature hydrogen
Gas.By making the hydrogen reclaiming in trichlorosilane tail gas Dry recovery system as the hydrogen source of heat carrier, thus can
Guarantee the material balance of system, foreign matter will not be introduced in systems.
Preferably, it is surrounded by steam jacket outside scrubbing tower tower reactor, be passed through steam into steam jacket, with to scrubbing tower
Tower reactor carry out protect mild heat.By introducing high-temperature hydrogen and the tower reactor setting steam jacket in scrubbing tower into scrubbing tower,
The heat balance in scrubbing tower can be kept such that it is able to the bottom temperature of scrubbing tower is controlled to 30～70 DEG C, tower top temperature control
It is made as 10～40 DEG C.
Preferably, described hydrogen input port is located at the bottom of scrubbing tower, and the position of hydrogen input port is in scrubbing tower
On trichlorosilane synthesis gas air inlet under；Described gaseous mixture equipped at outlet port is in the top of scrubbing tower.
It may further be preferable that hydrogen input port adopts four, four hydrogen input ports are along the circumferential direction uniform.By making
High-temperature hydrogen enters scrubbing tower by four different directions of the tower reactor of scrubbing tower it can be ensured that Hydrogen distribution uniformly, improves heat exchange effect
Really.
Preferably, trichlorosilane synthesis gas air inlet is located at below the orlop column plate of tower reactor of scrubbing tower, and is in
The center of scrubbing tower vertically downward.
Preferably, the column plate of the tower reactor of described scrubbing tower is sieve-plate tower, and this sieve-plate tower has sieve aperture, described sieve aperture
Aperture is Φ 5mm～Φ 15mm.
This utility model also provides a kind of trichlorosilane tail gas recovery system, and it includes washing tower device, described scrubbing tower
Device adopts above-mentioned washing tower device.
Preferably, this system also includes the chiller being sequentially communicated, compressor and segregation apparatuss, described cooling
The input of device is connected with the outfan of condenser,
From condenser, synthesis gas out enters in chiller and is cooled down, the Silicon chloride. in synthesis gas, trichlorine
Hydrogen silicon, dichlorosilane and metal chloride are condensed, and the fixed gas not being condensed enters in compressor and is pressurized,
Fixed gas after supercharging enters segregation apparatuss, and the hydrogen chloride in fixed gas and hydrogen are carried out separating by segregation apparatuss.
This utility model washing tower device is by being passed through high-temperature hydrogen in the tower reactor of scrubbing tower, so that high-temperature hydrogen and tower
Chlorosilane liquid contact in kettle carries out heat exchange, the vaporization so that the chlorosilane liquid in tower reactor is heated, and hydrogen is cooled.By trichlorine
Intermediate product (hydrogen) in the production of hydrogen silicon, as heat carrier, can reduce the tower reactor of scrubbing tower by the stripping effect of hydrogen
Temperature, the bottom temperature of traditional scrubbing tower is necessary for 80～100 DEG C, and the bottom temperature of this utility model scrubbing tower can control
At 30～70 DEG C, tower top temperature can be controlled in 10～40 DEG C, thus solving because the operation temperature of tower reactor is too high to lead to tower reactor
In liquid, high boiling metal chloride enters the problem of rear end chiller.
It can be seen that, this utility model washing tower device is by using the steam jacket pair outside high-temperature hydrogen and scrubbing tower tower reactor
The tower bottoms of scrubbing tower is heated, and is not only able to meet the thermic load of scrubbing tower tower reactor, realizes the net of trichlorosilane synthesis gas
Change, and prevented the leakage of reboiler heat exchanging pipe, the serious problems of corrosion, decrease the work of scrubbing tower reboiler maintenance maintenance
Measure, extend service life, facilitate implementation large-scale production.
The beneficial effect of this utility model washing tower device and trichlorosilane tail gas recovery system is specific as follows：
1st, environmental benefit is high：In reclaiming in the steam jacket outside scrubbing tower tower reactor and production process of trichlorosilane
Between hydrogen product as heat carrier, the tower bottoms of scrubbing tower is heated, prevented using vapor heat exchanger to scrubbing tower tower reactor
The problems such as liquid carries out the heat exchanging pipe burn into scrubbing tower leakage fluid dram frequent jams occurring in heating process, avoids impurity simultaneously
Introducing；
2nd, the labor intensity of operator can be reduced：Due to having prevented the leakage of scrubbing tower reboiler heat exchanging pipe, corrosion
The problems such as, thus maintenance workload can be reduced, decrease the frequency of human contact's poisonous and harmful substance simultaneously, operation is effectively ensured
The occupational health of personnel；
3rd, also have technique unique it is easy to operation, the advantages of service life of equipment is long.
Brief description
Fig. 1 is the structural representation in a kind of washing tower device in prior art；
Structural representation in another kind of washing tower device in Fig. 2 prior art；
Fig. 3 is the structural representation of trichlorosilane tail gas recovery system in this utility model embodiment.
In figure：1- trichlorosilane synthesis gas inlet line 2- scrubbing tower 3- electric heater 4- high-temperature hydrogen pipeline 5- arranges
Residual pipeline 6- reflux pipeline 7- gaseous mixture pipeline 8- condenser 9- the first pipeline 10- blanking pipeline 11- surge tank 12-
Backflow chlorosilane liquid pipe line 13- reflux pump 14- chiller 15- the second pipeline 16- compressor 17- the 3rd pipeline
18- segregation apparatuss 19- reclaims hydrogen and reclaims hydrogen to electric heater pipeline 21- steam jacket 22- chlorine to tank line 20-
Silane liquid produces pipeline
101- tower reactor reboiler 102- scrubbing tower 103- overhead condenser 104- return tank 105- reflux pump 106- purifies
Synthesis gas is to cooling system 107- chlorosilane to storage tank 108- tower bottoms to residual liquid processing system 201- tower reactor reboiler
202- scrubbing tower 203- return tank 204- reflux pump 205- overhead condenser 206- decontaminating syngas are to cooling system 207-
Chlorosilane is to storage tank 208- tower bottoms to residual liquid processing system
Specific embodiment
With reference to the accompanying drawing in this utility model, clear, complete description is carried out to the technical solution of the utility model,
Obviously, the embodiments described below are a part of embodiments of the present utility model, rather than whole embodiments.Based on this reality
With the embodiment in new, those of ordinary skill in the art obtained on the premise of not making creative work all its
His embodiment, broadly falls into the scope of this utility model protection.
This utility model provides a kind of washing tower device, and it includes scrubbing tower and condenser, described scrubbing tower has hydrogen
Gas input port and gaseous mixture delivery outlet, high-temperature hydrogen from described hydrogen input port enter scrubbing tower after, in the tower reactor of scrubbing tower
Chlorosilane liquid carry out heat exchange the vaporization so that chlorosilane liquid is heated, the high-temperature hydrogen after heat exchange again with scrubbed tower purification after
Trichlorosilane synthesis gas enter in condenser through described gaseous mixture delivery outlet together, in above process, make the tower reactor of scrubbing tower
Temperature remains 30～70 DEG C.
This utility model also provides a kind of trichlorosilane tail gas recovery system, including washing tower device, described scrubbing tower dress
Put using above-mentioned washing tower device.
Embodiment：
As shown in figure 3, the trichlorosilane tail gas recovery system in the present embodiment includes washing tower device and trichlorosilane tail
Air drying recovery system, described trichlorosilane tail gas Dry recovery system includes the chiller 14 being sequentially communicated, compression dress
Put 16 and segregation apparatuss 18, the wherein outlet of chiller 14 and washing tower device.
In the present embodiment, washing tower device includes scrubbing tower 2 and condenser 8, and described scrubbing tower has hydrogen input port
With gaseous mixture delivery outlet, high-temperature hydrogen from described hydrogen input port enter scrubbing tower after, with the chlorosilane in the tower reactor of scrubbing tower
Liquid carries out heat exchange, the vaporization so that chlorosilane liquid is heated, the high-temperature hydrogen after heat exchange again with scrubbed tower purification after trichlorosilane
Synthesis gas enters, through described gaseous mixture delivery outlet, the bottom temperature in above process, controlling scrubbing tower 2 in condenser 8 together
Remain 30～70 DEG C.Specifically, in the present embodiment, it is surrounded by steam jacket 21 outside scrubbing tower, by pressing from both sides to steam
It is passed through a certain amount of steam in set 21, the tower reactor of scrubbing tower 2 can be played with auxiliary heating, the effect of insulation, thus can will wash
The bottom temperature of tower is controlled to 30～70 DEG C.So, by introducing high-temperature hydrogen and the tower in scrubbing tower to the inside of scrubbing tower
Outside kettle, setting steam jacket, can keep the heat balance in scrubbing tower.So, the tower reactor of scrubbing tower avoids the need for setting again and boils
Device.
Wherein, the temperature of described high-temperature hydrogen is 200～300 DEG C.Preferably, the temperature setting of described high-temperature hydrogen is
200℃.Specifically, this washing tower device also includes electric heater 3 (can certainly adopt other kinds of heater), and
The entrance of electric heater is connected with the segregation apparatuss 18 in this trichlorosilane tail gas Dry recovery system, the outlet of electric heater with
The hydrogen input port connection of scrubbing tower, so, the height of recovery from the segregation apparatuss 18 of trichlorosilane tail gas Dry recovery system
The pressure recovered hydrogen of hydrogen enters electric heater from the entrance of electric heater to electric heater pipeline 20 and is heated, thus shape
Become described high-temperature hydrogen.Because the hydrogen source for heat carrier is in trichlorosilane tail gas Dry recovery system, thus can be true
The material balance of insurance system, will not introduce impurity in systems.
Wherein, by described gaseous mixture delivery outlet located at the top of scrubbing tower, condenser 8 is also at the tower top of scrubbing tower,
For condensing to the gaseous mixture exporting from gaseous mixture delivery outlet, the condensed device of part chlorosilane 8 in gaseous mixture condenses
After become condensed fluid and flow back in surge tank 11 through blanking pipeline 10 as backflow, and be pumped into again through reflux pump 13
In scrubbing tower, to wash to the trichlorosilane synthesis gas in scrubbing tower, when the liquid level in surge tank 11 is higher, open back
The chlorosilane liquid of stream pump 13 exit position produces the valve of pipeline 22, can be by the Liquid level in surge tank in 50%-80%.
Washing tower device is by carrying out forced refluence using reflux pump 13 to chlorosilane, thus larger capacity of returns can be kept
To improve clean result, and the amount of the chlorosilane of backflow can be adjusted in time according to the operational factor of scrubbing tower.Work as scrubbing tower
When middle chlorosilane air inflow increases, the load of scrubbing tower increases, then increase the capacity of returns of chlorosilane it is ensured that backflow chlorosilane amount with
Chlorosilane air inflow ratio is 1:1～3:1, to guarantee the drip washing effect of scrubbing tower.
Due to heat capacity ratio larger hydrogen being used as heat carrier, thus the amount of carrier can be reduced, so as to reduce
The load of follow-up segregation apparatuss.Because the hydrogen as heat carrier belongs to the intermediate product of trichlorosilane production, by hydrogen
The stripping effect of gas reduces the operation temperature of scrubbing tower, the bottom temperature of scrubbing tower can be controlled to 30～70 DEG C, scrubbing tower
Tower top temperature be controlled to 10～40 DEG C, solve high boiling metal chlorine in the tower bottoms leading to because tower reactor operation temperature is high
Compound enters the problem of rear end chiller.
So, from the high pressure hydrogen that trichlorosilane tail gas Dry recovery system reclaims after electric heater heating, then lead to
Enter the tower reactor of scrubbing tower, the chlorosilane liquid contact heat-exchanging in high-temperature hydrogen and tower reactor, so that chlorosilane liquid in tower reactor is heated vaporization, hydrogen
Gas is cooled；High-temperature hydrogen after heat exchange enters after condenser tentatively cooled down together with trichlorosilane synthesis gas, more successively
Respectively through chiller, compressor, segregation apparatuss, hydrogen and chlorosilane, HCl separation come the most at last, after separating
A hydrogen part is recycled to electric heater and is heated again, and another part is then delivered to storage tank and stored.
Leakage fluid dram is additionally provided with scrubbing tower, the tower bottoms of metal impurities can will be rich in by leakage fluid dram in the tower reactor of scrubbing tower
It is emitted into residual liquid processing apparatus.Wherein, the low head of scrubbing tower adopts ellipsoidal head, and leakage fluid dram is located at the bottom of this end socket
Portion.
Preferably, the column plate of the tower reactor of described scrubbing tower adopts the sieve-plate tower of multilamellar, and this sieve-plate tower has sieve aperture, due to
The pore size of sieve aperture may decide that the process lot size of scrubbing tower, and aperture is bigger, then scrubbing tower treating capacity is bigger.This enforcement
In example, the aperture of described sieve aperture is set to Φ 5mm～Φ 15mm.
Trichlorosilane synthesis gas air inlet is additionally provided with scrubbing tower, the position of this trichlorosilane synthesis gas air inlet is in be washed
Below the orlop column plate of the tower reactor washing tower, and it is in the center vertically downward of scrubbing tower, and make the liquid of tower bottoms
This trichlorosilane synthesis gas air inlet 10-30mm is flooded in face, to carry out preliminary washing using tower bottoms to trichlorosilane synthesis gas
Wash.
Preferably, described hydrogen input port is located at the bottom of scrubbing tower, and the position of hydrogen input port is in trichlorosilane
Under synthesis gas air inlet.In the present embodiment, hydrogen input port adopts four, and four hydrogen input ports are along the circumferential direction uniform,
So high-temperature hydrogen can enter scrubbing tower by the four of the tower reactor of scrubbing tower different directions, thus can ensure that high temperature hydrogen edema caused by disorder of QI
Cloth is uniform, to improve heat transfer effect.
In the present embodiment, the input of described chiller is connected with the outfan of the condenser in washing tower device, from
In condenser 8, synthesis gas out enters in chiller 14 and is cooled down, Silicon chloride. in synthesis gas, trichlorosilane, two
Chlorine dihydro silicon and metal chloride are condensed, and the fixed gas not being condensed enters in compressor 16 and is pressurized, supercharging
Fixed gas afterwards enters segregation apparatuss 18, and the hydrogen chloride in fixed gas and hydrogen can be carried out separating by segregation apparatuss 18.
The workflow of this trichlorosilane tail gas recovery system is as follows：
The recovered hydrogen of recovery hydrogen from trichlorosilane tail gas recovery system is entered electricity to electric heater pipeline 20
In heater 3, after electric heater 3 is heated to 200 DEG C, by four hydrogen inputs on the scrubbed tower of high-temperature hydrogen pipeline 4
Respectively enterd in the tower reactor of scrubbing tower 2 after mouth shunting by four different directions and carry out heat exchange with tower bottoms, in tower bottoms
The light components such as trichlorosilane, Silicon chloride. are relatively low due to boiling point, and vaporization after being heated enters in trichlorosilane synthesis gas, in tower reactor
The components such as silica flour, metal chloride, high polymer are higher due to its boiling point, and therefore the tower reactor in scrubbing tower is enriched with, by scrubbing tower
These components can be expelled to incomplete tube line 5 by the leakage fluid dram of tower reactor bottom, thus can be by the content of heavy constituent impurity in tower reactor
Control in certain scope, and with tower bottoms heat exchange after high-temperature hydrogen then together with trichlorosilane synthesis gas from washing column overhead
The blended gas pipeline of gaseous mixture delivery outlet 7 enter condenser 8 in, the part Silicon chloride. in trichlorosilane synthesis gas, trichlorine
Hydrogen silicon and a small amount of metallic chloride impurities are condensed into liquid and (temperature of condenser are fixedly installed as 5～10 DEG C, by control
The temperature of refrigeration condenser, can keep the balance of liquid phase) and surge tank 11 is entered by blanking pipeline 10, and the chlorine in surge tank 11
Silane liquid enters reflux pump 13 through backflow chlorosilane liquid pipe line 12 and is pressurized, and the chlorosilane liquid produced after supercharging is through reflux pipeline 6
Be again introduced into scrubbing tower top to be flowed back, and the trichlorosilane synthesis gas not being condensed then from condenser 8 out after warp
First pipeline 9 enters in chiller and is cooled down, so that Silicon chloride. in trichlorosilane synthesis gas, trichlorosilane, dichloro
Dihydro silicon and a small amount of metal chloride are condensed, and the said components condensing out are sent in chlorosilane storage tank and are stored up
Deposit, the fixed gas that volume is not condensed then continues on through in the second pipeline 15 entrance compressor 16 and is pressurized, after supercharging
High pressure fixed gas enters through the 3rd pipeline 17 and carries out in segregation apparatuss 18 separating, and segregation apparatuss 18 can be by above-mentioned high pressure fixed gas
In hydrogen chloride, hydrogen carry out separate, then reclaim hydrogen chloride therein, hydrogen, a part of recovered hydrogen of hydrogen of recovery
In to electric heater pipeline 20 to electric heater 3, another part then deliver in hydrogen-holder to tank line 19 by recovered hydrogen
Stored.
When the bottom temperature of scrubbing tower 2 raises, the high-boiling components concentration liters such as silica flour in tower reactor, metal chloride are described
Height, is processed by time the leakage fluid dram of scrubbed for tower bottoms tower bottom being discharged to residual liquid absorption plant by incomplete tube line 5,
Thus can control the concentration of impurity in tower reactor.
The above is only preferred implementation of the present utility model it is noted that common skill for the art
For art personnel, on the premise of without departing from this utility model principle, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as protection domain of the present utility model.
Claims (10)
1. a kind of washing tower device, including scrubbing tower and condenser it is characterised in that having hydrogen input port on described scrubbing tower
With gaseous mixture delivery outlet, high-temperature hydrogen from described hydrogen input port enter scrubbing tower after, with the chlorosilane in the tower reactor of scrubbing tower
Liquid carries out heat exchange, the vaporization so that chlorosilane liquid is heated, the high-temperature hydrogen after heat exchange again with scrubbed tower purification after trichlorosilane
Synthesis gas enters in condenser through described gaseous mixture delivery outlet together, in above process, so that the bottom temperature of scrubbing tower is kept
For 30～70 DEG C.
2. washing tower device according to claim 1 is it is characterised in that the temperature of described high-temperature hydrogen is 200～300
℃.
3. washing tower device according to claim 2 is it is characterised in that also include electric heater, described electric heater
Entrance and trichlorosilane tail gas Dry recovery system connectivity, the outlet of electric heater connected with the hydrogen input port of scrubbing tower,
The hydrogen reclaiming in trichlorosilane tail gas Dry recovery system enters electric heater from the entrance of electric heater and is heated, from
And form described high-temperature hydrogen.
4. washing tower device according to claim 3 is it is characterised in that be surrounded by steam jacket outside the tower reactor of scrubbing tower,
It is passed through steam into steam jacket, is heated with the tower reactor to scrubbing tower, keep the heat balance in scrubbing tower, so as to incite somebody to action
The bottom temperature of scrubbing tower is controlled to 30～70 DEG C, and tower top temperature is controlled to 10～40 DEG C.
5. the washing tower device according to any one of claim 1-4 is it is characterised in that described hydrogen input port is located at washing
The bottom of tower, and the position of hydrogen input port is under the trichlorosilane synthesis gas air inlet on scrubbing tower；Described gaseous mixture
Equipped at outlet port is in the top of scrubbing tower.
6., it is characterised in that hydrogen input port adopts four, four hydrogen are defeated for washing tower device according to claim 5
Entrance is along the circumferential direction uniform.
7. washing tower device according to claim 5 is it is characterised in that trichlorosilane synthesis gas air inlet is located at scrubbing tower
The orlop column plate of tower reactor below, and be in the center vertically downward of scrubbing tower.
8. washing tower device according to claim 7 is it is characterised in that the column plate of the tower reactor of described scrubbing tower adopts sieve plate
Tower, this sieve-plate tower has sieve aperture, the aperture of described sieve aperture is Φ 5mm～Φ 15mm.
9. a kind of trichlorosilane tail gas recovery system, including washing tower device it is characterised in that described washing tower device is using power
Profit requires the washing tower device described in 1～8 any one.
10. trichlorosilane tail gas recovery system according to claim 9 is it is characterised in that this system also includes successively
The chiller of connection, compressor and segregation apparatuss, the input of described chiller is connected with the outfan of condenser, from
In condenser, synthesis gas out enters in chiller and is cooled down, the Silicon chloride. in synthesis gas, trichlorosilane, dichloro two
Hydrogen silicon and metal chloride are condensed, and the fixed gas not being condensed enters in compressor and is pressurized, after supercharging not
Solidifying gas enters segregation apparatuss, and the hydrogen chloride in fixed gas and hydrogen are carried out separating by segregation apparatuss.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620926233.9U CN205953539U (en) | 2016-08-23 | 2016-08-23 | Scrubbing tower device and trichlorosilane tail gas recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620926233.9U CN205953539U (en) | 2016-08-23 | 2016-08-23 | Scrubbing tower device and trichlorosilane tail gas recovery system |
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|---|---|
| CN205953539U true CN205953539U (en) | 2017-02-15 |
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ID=57977265
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| CN201620926233.9U Active CN205953539U (en) | 2016-08-23 | 2016-08-23 | Scrubbing tower device and trichlorosilane tail gas recovery system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107804827A (en) * | 2017-11-02 | 2018-03-16 | 成都蜀菱科技发展有限公司 | A kind of hydrogen chloride recovery method and hydrogen chloride recovery system |
| CN112229237A (en) * | 2020-10-16 | 2021-01-15 | 新疆宜化化工有限公司 | Cooling liquid self-circulation type hydrogen washing and cooling system |
-
2016
- 2016-08-23 CN CN201620926233.9U patent/CN205953539U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107804827A (en) * | 2017-11-02 | 2018-03-16 | 成都蜀菱科技发展有限公司 | A kind of hydrogen chloride recovery method and hydrogen chloride recovery system |
| CN107804827B (en) * | 2017-11-02 | 2020-03-31 | 成都蜀菱科技发展有限公司 | Hydrogen chloride recovery method and hydrogen chloride recovery system |
| CN112229237A (en) * | 2020-10-16 | 2021-01-15 | 新疆宜化化工有限公司 | Cooling liquid self-circulation type hydrogen washing and cooling system |
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