CN205843625U - Instrument for measuring three-dimensional profile - Google Patents
Instrument for measuring three-dimensional profile Download PDFInfo
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- CN205843625U CN205843625U CN201620530075.5U CN201620530075U CN205843625U CN 205843625 U CN205843625 U CN 205843625U CN 201620530075 U CN201620530075 U CN 201620530075U CN 205843625 U CN205843625 U CN 205843625U
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- axis
- measuring
- platform
- lens
- instrument
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Abstract
This utility model relates to measuring three-dimensional profile technical field, especially disclose a kind of instrument for measuring three-dimensional profile, including measuring instrument body, arrange on measuring instrument body for disposing the object stage of object under test and the axis optical module of object under test three-D profile can be obtained, described axis optical module is positioned at the surface of object stage；It is characterized in that: the optical axis direction of described axis optical module is perpendicular to the loading plane of described object stage；Spectroscope that light source that axis optical module includes setting gradually from the top down, lens, liquid crystal grating, the first telecentric beam path battery of lens, the first diaphragm are in a certain angle with described optical axis direction and the second telecentric beam path battery of lens, be sequentially provided with the second diaphragm, the 3rd telecentric beam path battery of lens and industrial camera from the near to the remote in the side being perpendicular to described optical axis direction.This utility model is particularly suited for for having deep hole, the measurement of the testee of the surface character of deep trouth class, and certainty of measurement is high, effective.
Description
Technical field
This utility model relates to measuring three-dimensional profile technical field, especially relates to a kind of instrument for measuring three-dimensional profile, especially
It is applicable to for having deep hole, the measurement of the testee of the surface character of deep trouth class.
Background technology
The three-dimensional measurement technology always industry challenging problem of field of precision measurement.Up to the present present each
Planting three-dimensional measuring method and technology, many of which has been provided with industrial applicibility, such as three-coordinates measuring machine, based on structure light
Three-dimensional measurement technology had maturation product.
Measuring three-dimensional profile based on structure light is high due to its precision, and fireballing feature has obtained extensively at numerous areas
General concern and development.The most existing instrument for measuring three-dimensional profile device based on structure light or sensor all use industrial camera
Being perpendicular to object stage install, light source and the vertical optical axis of industrial camera camera lens are that certain angle is installed.This mode has one
Individual significant shortcoming, due to light source and object stage angle at an acute angle, causes the part surface of object under test cannot be irradiated by light source,
And then the surface profile information of this part cannot obtain, although by rotate by the way of object under test can part customer service such lack
Fall into, but be so that complicated integral structure, and owing to rotation platform instead of planar movement platform, it is impossible to measurement size is bigger
Object.What is more important, existing contourgraph cannot be measured for deep hole, the common configuration such as deep trouth.
Summary of the invention
This utility model is in order to overcome the deficiencies in the prior art, it is provided that a kind of instrument for measuring three-dimensional profile, and certainty of measurement is high, effect
The best.
To achieve these goals, this utility model is by the following technical solutions:
A kind of instrument for measuring three-dimensional profile, including measuring instrument body (3), arranges treating for arrangement on measuring instrument body (3)
Survey the object stage (2) of object and the axis optical module (1) of object under test three-D profile can be obtained, described axis optical module
(1) surface of object stage (2) it is positioned at；It is characterized in that: the optical axis direction of described axis optical module (1) is perpendicular to described load
The loading plane of thing platform (2)；Light source (11) that axis optical module (1) includes setting gradually from the top down, lens (12), liquid crystal
The spectroscope that grating (13), the first telecentric beam path battery of lens (14), the first diaphragm (15) are in a certain angle with described optical axis direction
(16) and the second telecentric beam path battery of lens (17), the second light it is sequentially provided with from the near to the remote in the side being perpendicular to described optical axis direction
Door screen (18), the 3rd telecentric beam path battery of lens (19) and industrial camera (10).This utility model is by using liquid crystal grating and light source
Build coded structured light, meanwhile, by using the first telecentric beam path battery of lens, the second telecentric beam path battery of lens and the 3rd telecentricity light
Road battery of lens can form bilateral telecentric beam path, light source and image acquisition is all devised bilateral telecentric beam path so that coding structure
The image information of the information of light and entrance industrial camera does not becomes along with adjustment or the change of testee thickness of Z axis height
Change so that light source incidence and measured object reflection light light path is identical, in opposite direction, it is to avoid due to light source and reflected light path formation one
Clamp angle and occur that light blocks, hence for having deep hole, the testee of the surface character of deep trouth class has sensitiveer
Measurement effect and higher certainty of measurement, thus significantly improve the precision of three-dimensional measurement.
Further, described spectroscope (16) plane is 45 ° with the angle of optical axis direction.
Further, described light source (11) is LED white light source.
Further, described object stage is adjustable object under test X-Y-Z tri-axle along X-axis, Y-axis and Z-direction position
Motion article carrying platform.This setting accurately can adjust the position of object under test simultaneously easily.
Further, described X-Y-Z three-axis moving object stage includes: X-axis platform (22) and drive described X-axis platform to transport
Dynamic the first power set (221)；Y-axis platform (23) and drive the second power set (231) that described Y-axis platform moves；Z
Shaft platform (24) and drive the 3rd power set (241) that described Z axis platform moves；X-axis platform (22) and the first power dress
Putting and be jointly arranged on Y-axis platform (23), Y-axis platform and the second power set arrange on Z axis platform jointly, Z axis platform (24)
It is installed on measuring instrument body (3) by a fixed plate (21), and the vertical optical axis of described axis optical module is put down with X-axis
Platform (22) loading plane is vertical；It is slidably connected with coordinating of slide block by slide rail between Z axis platform with fixed plate (21).This setting
Simple in construction, easy to control, accurate, easily realize.
Further, described measuring instrument body bottom portion is provided with base.Strengthen the stability of measuring instrument body.
Further, the control computation processor of a connection described axis optical module is also included.Axis optical module root
According to controlling the instruction luminescence of computation processor and gathering image, obtain determinand body surface according to image by method set in advance
Face three-D profile information, controls computation processor and goes out measurement result according to the setting measurement task computation of operator；Control to calculate
Processor also can connect described driver part, controls the movement of object stage according to the instruction of operator so that axis optical module
The surface profile information of the diverse location of object under test can be gathered.
Further, described control computation processor connects display device.Control computation processor can information be exported
Display device, facilitates operator to use.
In sum, this utility model is by using liquid crystal grating to build coded structured light with light source, meanwhile, by making
Form two groups of telecentric beam paths two-by-two by three lens cluster group, light source and image acquisition are all devised bilateral telecentric beam path so that light
Source is incident identical with measured object reflection light light path, in opposite direction, it is to avoid owing to light source and reflected light path shape form an angle
Occurring that light blocks, hence for having deep hole, the testee of the surface character of deep trouth class has sensitiveer measurement effect
With higher certainty of measurement.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is axis optical modular structure schematic diagram of the present utility model；
Fig. 3 is this utility model X-Y-X three-axis moving article carrying platform structural representation.
Detailed description of the invention
In order to make those skilled in the art be better understood from this utility model scheme, real below in conjunction with this utility model
Execute the accompanying drawing in example, the technical scheme in this utility model embodiment is carried out clear, complete description.
As Figure 1-3, a kind of instrument for measuring three-dimensional profile, including object stage 2, axis optical module 1, measuring instrument body 3,
Base 4 and control computation processor 5, described axis optical module 1 and described object stage 2 be both secured on measuring instrument body 3, institute
State axis optical module 1 and be positioned at the surface of object stage 2, and the optical axis direction of axis optical module 1 is perpendicular to the load of object stage 2
Object plane.As in figure 2 it is shown, dotted line direction represents the optical axis direction of axis optical module 1 in figure.
Described base 4 is located at the bottom of measuring instrument body 3, and object stage 2 is then used for disposing object under test, axis optical module
1 can obtain object under test three-D profile, controls computation processor 5 and connects described axis optical module 1.Described control calculating processes
Device 5 connects display device.
Concrete, the optical axis direction of described axis optical module 1 is perpendicular to the loading plane of described object stage 2；Axis light
Learn light source 11 that module 1 includes setting gradually from the top down, lens 12, liquid crystal grating the 13, first telecentric beam path battery of lens 14, the
Spectroscope 16 that one diaphragm 15 is in a certain angle with described optical axis direction and the second telecentric beam path battery of lens 17, being perpendicular to
The side stating optical axis direction is sequentially provided with the second diaphragm the 18, the 3rd telecentric beam path battery of lens 19 and industrial camera 10 from the near to the remote.
Being adjusted the object under test position on object stage 3 for convenience, the most described object stage is X-Y-Z tri-axle fortune
Dynamic article carrying platform, this X-Y-Z three-axis moving article carrying platform 2 adjustable object under test is along X-axis, Y-axis and Z-direction position.Described
X-Y-X three-axis moving article carrying platform 2 includes X-axis platform 22 and the first power set 221 driving described X-axis platform to move；Y
Shaft platform 23 and drive the second power set 231 that described Y shaft platform moves；Z axis platform 24 and drive described Z axis put down
3rd power set 241 of platform motion；X-axis platform 22 and the first power set are arranged on Y-axis platform 23 jointly, Y-axis platform
And second power set jointly arrange on Z axis platform, Z axis platform 24 is installed on measuring instrument body 3 by a fixed plate 21, and
The vertical optical axis making described axis optical module is vertical with X-axis platform 22 loading plane；Lead between Z axis platform and fixed plate 21
Cross slide rail to be slidably connected with coordinating of slide block；As shown in Figure 3.
Described first power set the 221, second power set 231 and the 3rd power set 241 can use servo electricity
Machine, cylinder, the existing power set of oil cylinder, be not repeated herein.
Axis optical module 1, by light source luminescent, controls the form of structure light used, by coaxially through liquid crystal grating 13
Optics module 1 forms telecentric beam path and is irradiated to object under test surface, and object under test surface image information passes through telecentric beam path by work
Industry camera 10 gathers, and controls computation processor 5 and controls at the movement of X-Y-Z three-axis moving object stage 2 and the calculating of three-dimensional data
Reason.
During use, object under test is positioned on X-Y-Z three-axis moving object stage, controls computation processor 5 according to operation
The instruction of member controls the movement of X-Y-Z three-axis moving object stage so that axis optical module 1 can gather the difference of object under test
The surface profile information of position.
Then axis optical module 1 is luminous according to the instruction controlling computation processor 5 and gathers image, obtains object under test
Surface tri-dimensional profile information, controls computation processor 5 and goes out measurement result according to the setting measurement task computation of operator, and output is arrived
Display device.
Work process of the present utility model and principle are as follows:
The light that light source 11 sends reflects through the first lens 12, becomes the one group parallel rays parallel with lens principal axis,
Described parallel rays, under the control of Programmable Logic Controller, is required modulation according to algorithm by described liquid crystal grating 13, forms coding
Structure light, described coded structured light forms tiny light beam, described tiny light beam after the first telecentric beam path battery of lens 14 refraction
Through the first diaphragm 15, described tiny light beam is from top to bottom through spectroscope 16, shape after the 3rd telecentric beam path battery of lens 19
Becoming the parallel code structure light that cross section expands, those parallel code structure light are irradiated to be positioned over the testee of object stage 2
Upper formation is reflected, anti-through spectroscope 16 after being wherein parallel to reflection light entrance the 3rd telecentric lens group 19 of vertical direction optical axis
By the two the second diaphragms 18 after penetrating, by forming collimated light beam, finally, those directional lights after the second telecentric beam path battery of lens 17
Bundle images in industrial camera 10, thus records the surface profile of testee.
This utility model by three lens cluster group (that is: the first telecentric beam path battery of lens, the first telecentric beam path battery of lens, the
Three telecentric beam path battery of lens) two groups of telecentric beam paths forming two-by-two, wherein, the first telecentric beam path battery of lens and the 3rd telecentricity light
Road battery of lens one telecentric beam path of composition, to throwing the modulation of incoming light source direction so that it is become collimated light beam；Second telecentricity light
Road battery of lens and the 3rd telecentric beam path battery of lens form another telecentric beam path, its role is to filter the light in other directions,
Only accept to be parallel to the light of the 3rd telecentric beam path battery of lens optical axis direction, so that instrument for measuring three-dimensional profile of the present utility model
Insensitive to the height (thickness) of testee, it is possible to be greatly improved the precision that body surface is measured.
Obviously, described embodiment is only a part of embodiment of the present utility model rather than whole embodiments.
Based on the embodiment in this utility model, those of ordinary skill in the art are obtained under not making creative work premise
Every other embodiment, all should belong to the scope of this utility model protection.
Claims (8)
1. an instrument for measuring three-dimensional profile, including measuring instrument body (3), arranges being used on measuring instrument body (3) and disposes to be measured
The object stage (2) of object and the axis optical module (1) of object under test three-D profile can be obtained, described axis optical module (1)
It is positioned at the surface of object stage (2)；It is characterized in that: the optical axis direction of described axis optical module (1) is perpendicular to described loading
The loading plane of platform (2)；Light source (11) that axis optical module (1) includes setting gradually from the top down, lens (12), liquid crystal light
The spectroscope that grid (13), the first telecentric beam path battery of lens (14), the first diaphragm (15) are in a certain angle with described optical axis direction
(16) and the second telecentric beam path battery of lens (17), the second light it is sequentially provided with from the near to the remote in the side being perpendicular to described optical axis direction
Door screen (18), the 3rd telecentric beam path battery of lens (19) and industrial camera (10).
Instrument for measuring three-dimensional profile the most according to claim 1, it is characterised in that: described spectroscope (16) plane and optical axis side
To angle be 45 °.
Instrument for measuring three-dimensional profile the most according to claim 1, it is characterised in that: described light source (11) is LED white light source.
Instrument for measuring three-dimensional profile the most according to claim 1, it is characterised in that: described object stage (2) is for adjusting respectively
Object under test is at the X-Y-Z three-axis moving article carrying platform of X-axis, Y-axis and Z-direction position.
Instrument for measuring three-dimensional profile the most according to claim 4, it is characterised in that: described X-Y-Z three-axis moving object stage bag
Include: X-axis platform (22) and the first power set (221) driving described X-axis platform to move；Y-axis platform (23) and driving
Second power set (231) of described Y-axis platform motion；Z axis platform (24) and drive the described Z axis platform moves the 3rd to move
Power apparatus (241)；X-axis platform (22) and the first power set are arranged on Y-axis platform (23) jointly, and Y-axis platform and second moves
Power apparatus arranges on Z axis platform jointly, and Z axis platform (24) is installed on measuring instrument body (3) by a fixed plate (21), and makes
The vertical optical axis obtaining described axis optical module is vertical with X-axis platform (22) loading plane；Between Z axis platform and fixed plate (21)
It is slidably connected with coordinating of slide block by slide rail.
Instrument for measuring three-dimensional profile the most according to claim 1, it is characterised in that: the bottom of described measuring instrument body (3) sets
There is base (4).
Instrument for measuring three-dimensional profile the most according to claim 1, it is characterised in that: also include a connection described axis optical mould
The control computation processor (5) of group (1).
Instrument for measuring three-dimensional profile the most according to claim 7, it is characterised in that: described control computation processor (5) connects
Display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620530075.5U CN205843625U (en) | 2016-06-03 | 2016-06-03 | Instrument for measuring three-dimensional profile |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620530075.5U CN205843625U (en) | 2016-06-03 | 2016-06-03 | Instrument for measuring three-dimensional profile |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205843625U true CN205843625U (en) | 2016-12-28 |
Family
ID=57622910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620530075.5U Expired - Fee Related CN205843625U (en) | 2016-06-03 | 2016-06-03 | Instrument for measuring three-dimensional profile |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205843625U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105890547A (en) * | 2016-06-03 | 2016-08-24 | 杭州汉振科技有限公司 | Three-dimensional profile measurement instrument |
| CN115144404A (en) * | 2022-09-01 | 2022-10-04 | 茉丽特科技（深圳）有限公司 | Vision measuring instrument based on telecentric optics technology |
-
2016
- 2016-06-03 CN CN201620530075.5U patent/CN205843625U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105890547A (en) * | 2016-06-03 | 2016-08-24 | 杭州汉振科技有限公司 | Three-dimensional profile measurement instrument |
| CN105890547B (en) * | 2016-06-03 | 2019-03-12 | 浙江汉振智能技术有限公司 | Instrument for measuring three-dimensional profile |
| CN115144404A (en) * | 2022-09-01 | 2022-10-04 | 茉丽特科技（深圳）有限公司 | Vision measuring instrument based on telecentric optics technology |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161228 Termination date: 20210603 |
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| CF01 | Termination of patent right due to non-payment of annual fee |