CN205832837U - A kind of emission-control equipment with flowing liquid membrane - Google Patents
A kind of emission-control equipment with flowing liquid membrane Download PDFInfo
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- CN205832837U CN205832837U CN201620547258.8U CN201620547258U CN205832837U CN 205832837 U CN205832837 U CN 205832837U CN 201620547258 U CN201620547258 U CN 201620547258U CN 205832837 U CN205832837 U CN 205832837U
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Abstract
This application discloses a kind of emission-control equipment with flowing liquid membrane, including water tank, described water tank upper includes the reaction chamber being positioned at left side being interconnected and the wet scrubbing parts being positioned at right side, the top of described reaction chamber has the gas inlet parts introduced exhaust gas within described reaction chamber, described reaction chamber is internally provided with porous sepage inner core, gap tank is formed between inwall and the outer wall of described porous sepage inner core of described reaction chamber, liquid feeding parts is utilized to be connected between described gap tank and described water tank, described liquid feeding parts forms flowing liquid membrane in the water in described water tank is continuously introduced into described gap tank and from the inwall that the through hole of described porous sepage inner core overflows to described porous sepage inner core.The emission-control equipment with flowing liquid membrane that the application provides, it is possible to avoid the inner space of dust blocking processing device, increases the capacity of gas treatment, reduces the burden safeguarding cleaning, it is to avoid the formation of potential safety hazard.
Description
Technical field
This utility model relates to gas purification technique field, more particularly, it relates to a kind of waste gas with flowing liquid membrane
Processing means.
Background technology
In the manufacture field such as quasiconductor, panel display, LED, solar energy and MEMS be micro electronmechanical, production process all can
Producing waste gas, as a example by semiconductor manufacturing, its process apparatus gas of discharge when producing can be divided into following three types: the first kind
It is flammable explosive gas, such as hydrogen (H2) or silane (SiH4)；Equations of The Second Kind is toxic gas, such as nitrous oxide (N2O), chlorine
(Cl2), fluorine gas (F2)；3rd class is greenhouse gases, such as carbon tetrafluoride (CF4), Nitrogen trifluoride (NF3), sulfur hexafluoride (SF6)
Etc., wherein Nitrogen trifluoride (NF3) also there is toxicity, carbon tetrafluoride (CF4) be also proved in zoopery and can destroy cell wall
Structure so that it is it is intracellular that his pollutant are easier to entrance, therefore must carry out before these gases are discharged in surrounding
Process.
At present, along with the increase of new processing procedure plant waste gases discharge capacity in recent years, the such as silicon dioxide of the by-product in production process
This kind of dust can be mingled with in the offgas, and this is accomplished by making corresponding process.Such as process apparatus is based on silane (SiH4) work
In the production of skill, the burning of combustion gas in reaction chamber needs combustion-supporting gas such as oxygen (O2), due to silane (SiH4) can be with oxygen (O2)
Produce oxidation reaction, produce silicon dioxide (SiO2), and this type of fuel gas buring emission-control equipment is for reducing oxynitride
(NOx) generation, the multistage combustion mode extensively used in many every profession and trades will be used to supply, and this kind of mode is in reaction
Chamber provides unnecessary oxygen.And too much oxygen easily produces above-mentioned reaction and causes the generation of silica dust, this dust
After entering emission-control equipment inside, can gradually block emission-control equipment inner space, owing to processing means is gradually hindered
Plug, will affect the capacity of place's process gases, the most also can form potential safety hazard.
Utility model content
For solving above-mentioned technical problem, this utility model provides a kind of emission-control equipment with flowing liquid membrane, energy
Enough avoid the inner space of dust blocking processing device, increase the capacity of gas treatment, reduce the burden safeguarding cleaning, it is to avoid peace
The formation of full hidden danger.
The above-mentioned emission-control equipment with flowing liquid membrane that this utility model provides, including:
Water tank, described water tank upper includes the reaction chamber being positioned at left side being interconnected and the wet scrubbing portion being positioned at right side
Part, the top of described reaction chamber has the gas inlet parts introduced exhaust gas within described reaction chamber, inside described reaction chamber
It is provided with porous sepage inner core, between inwall and the outer wall of described porous sepage inner core of described reaction chamber, forms gap tank,
Utilizing liquid feeding parts to be connected between described gap tank and described water tank, described liquid feeding parts is for by described water
In water in case is continuously introduced into described gap tank and overflow to described porous sepage from the through hole of described porous sepage inner core
Flowing liquid membrane is formed on the inwall of inner core.
Preferably, in the above-mentioned emission-control equipment with flowing liquid membrane, described liquid feeding parts include water pump and
Liquid supplying tubing, the first end of described liquid supplying tubing is positioned at described water tank, and the second end is positioned at described gap tank.
Preferably, in the above-mentioned emission-control equipment with flowing liquid membrane, the hole of described porous sepage inner core is diameter
Scope is the hole of 0.5 millimeter to 0.8 millimeter.
Preferably, in the above-mentioned emission-control equipment with flowing liquid membrane, described porous sepage inner core is that nickel porous is oozed
Liquid inner core.
Preferably, in the above-mentioned emission-control equipment with flowing liquid membrane, the middle part of the upper surface of described reaction chamber sets
It is equipped with decomposition source generator.
Preferably, in the above-mentioned emission-control equipment with flowing liquid membrane, described decomposition source generator is arranged on described
The surface at the center of porous sepage inner core.
From technique scheme it can be seen that a kind of exhaust-gas treatment with flowing liquid membrane provided by the utility model fills
Put, owing to described reaction chamber is internally provided with porous sepage inner core, the inwall of described reaction chamber and described porous sepage inner core
Form gap tank between outer wall, utilize liquid feeding parts to be connected between described gap tank and described water tank, described liquid
Body supply part leading in the water in described water tank is continuously introduced into described gap tank and from described porous sepage inner core
Overflow to be formed on the inwall of described porous sepage inner core flowing liquid membrane at hole so that dust, particulate matter in air-flow adhere to stream
On hydrodynamic wall such that it is able to avoid the inner space of dust blocking processing device, increase the capacity of gas treatment, reduce and safeguard clearly
The burden of reason, it is to avoid the formation of potential safety hazard.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawing can be obtained according to the accompanying drawing provided.
Fig. 1 provide for the embodiment of the present application the first there is the schematic diagram of emission-control equipment of flowing liquid membrane；
Fig. 2 illustrates for the processing procedure of the first emission-control equipment with flowing liquid membrane that the embodiment of the present application provides
Figure.
Detailed description of the invention
Core concept of the present utility model is to provide a kind of emission-control equipment with flowing liquid membrane, it is possible to avoid powder
The inner space of dirt blocking processing device, increases the capacity of gas treatment, reduces the burden safeguarding cleaning, it is to avoid potential safety hazard
Formed.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
The first of the embodiment of the present application offer has the emission-control equipment of flowing liquid membrane as it is shown in figure 1, Fig. 1 is this Shen
Please embodiment provide the first there is the emission-control equipment of flowing liquid membrane, this device includes:
Water tank 1, wherein equipped with water, for collecting the water fallen from top, these water also can be again introduced into gap tank
In, and so forth, form circulation, play the effect fully absorbing waste gas；
Described water tank 1 top includes the reaction chamber 2 being positioned at left side being interconnected and the wet scrubbing parts being positioned at right side
3, the top of described reaction chamber 2 has gas inlet parts 4 introduced exhaust gas within described reaction chamber 2, in this case,
Waste gas can be lighted after entering reaction chamber, is processed into innocuous gas and is only absorbed by the water；
Described reaction chamber 2 is internally provided with in porous sepage inner core 5, the inwall of described reaction chamber 2 and described porous sepage
Form gap tank 6 between the outer wall of cylinder 5, between described gap tank 6 with described water tank 1, utilize liquid feeding parts 7 to be connected
Logical, described liquid feeding parts 7 in being continuously introduced into described gap tank 6 and from described porous by the water in described water tank 1
The through hole of sepage inner core 5 overflows to be formed on the inwall of described porous sepage inner core 5 flowing liquid membrane 8, this flowing liquid membrane 8 ring
Around this porous sepage inner core 5, wherein, described flowing liquid membrane 8 is as shown in the periphery arrow of porous sepage inner core 5 in figure, thus
Can cover its whole surface, in this case, gas after treatment just can sufficiently be formed with this flowing liquid membrane 8
Contact, bigger contact area is to ensure that more preferable assimilation effect, makes waste gas preferably be processed, it is to avoid pollute around
Environment.
The processing procedure of this emission-control equipment as in figure 2 it is shown, Fig. 2 provide for the embodiment of the present application the first there is stream
The processing procedure schematic diagram of the emission-control equipment of hydrodynamic film.Represent the flow direction of gas with the arrow of zone circle, containing dust and
The waste gas of grain thing enters reaction chamber 2 from gas inlet parts 4, the decomposition source generator ejection decomposition gas on reaction chamber 2 top, will
In waste gas stream inflammable and explosive and have virose gas carry out decompose disinfection, decompose source generator can use combustion flame
Gas, handling principle is: natural gas (CH4), oxygen (O2) and Nitrogen trifluoride (NF3) produce carbon dioxide upon ignition
(CO2), water (H2O), nitrogen (N2) and Fluohydric acid. (HF), while decomposing the decomposition air-flow of source generator ejection, also can be by waste gas
Push the flowing liquid membrane 8 in reaction chamber 2 to so that the dust in air-flow, particulate matter adhere on flowing liquid membrane 8, and then air-flow is at stream
After the wet scrubbing parts 3 of back segment, reach Environmental Safety discharge standard, be then discharged in environment.It is further to note that
The arrow of the not zone circle in figure represents the direction of current, and water out enters in gap tank 6 from water tank 1 afterwards, and from porous
Flow out in the hole of sepage inner core 5 and overflow from top, thus forming the flowing liquid membrane 8 covering whole inner cylindrical surface, to realize
Fully absorbing gas, subsequently, the water of outflow under gravity, falls into again in water tank 1, it is achieved move in circles utilization,
It addition, the water in water tank 1 also can enter forms circulation in wet scrubbing parts, here is omitted.
From technique scheme it can be seen that the embodiment of the present application provided above-mentioned the first there is the useless of flowing liquid membrane
Flash Gas Compression Skid System, owing to described reaction chamber is internally provided with porous sepage inner core, the inwall of described reaction chamber oozes with described porous
Form gap tank between the outer wall of liquid inner core, between described gap tank and described water tank, utilize liquid feeding parts to be connected
Logical, described liquid feeding parts is in being continuously introduced into described gap tank by the water in described water tank and from described porous sepage
The through hole of inner core overflows to be formed on the inwall of described porous sepage inner core flowing liquid membrane so that the dust in air-flow, granule
Thing sticks to flow on liquid wall such that it is able to avoid the inner space of dust blocking processing device, increases the capacity of gas treatment,
Reduce the burden safeguarding cleaning, it is to avoid the formation of potential safety hazard.
The second that the embodiment of the present application provides has the emission-control equipment of flowing liquid membrane, at the first waste gas above-mentioned
On the basis of reason device, also include following technical characteristic:
With continued reference to Fig. 1, described liquid feeding parts 7 includes water pump 702 and liquid supplying tubing 701, and described liquid supplies
Being positioned at described water tank 1 to the first end of pipe arrangement 701, the second end is positioned at described gap tank 6.Due to the waste gas containing particulate matter
Pass through from porous sepage inner core, therefore for prevent particulate matter from sticking to the inner peripheral surface of porous sepage inner core, just utilize this liquid
Supply part makes liquid flow along the inner peripheral surface of porous sepage inner core, say, that by the liquid in water tank to gap tank
Supply, makes water overflow from the upper end of porous sepage inner core, utilizes water pump 702 to provide the power flowed to be a kind of conventional choosing for it
Selecting, cost is relatively low.
The embodiment of the present application provide the third there is the emission-control equipment of flowing liquid membrane, at above-mentioned the second waste gas
On the basis of reason device, also include following technical characteristic:
The hole of described porous sepage inner core be diameter range be the hole of 0.5 millimeter to 0.8 millimeter.This porous sepage inner core exists
Use the loose structure of this size in structure, can make liquid in addition to forming the liquid film of flowing in an overflow manner, moreover it is possible to from respectively
The outer peripheral face of individual porous sepage inner core permeates to inner peripheral surface, and this improves the uniform of porous sepage inner core inner peripheral surface liquid film the most further
Property.
The 4th kind of the embodiment of the present application offer has the emission-control equipment of flowing liquid membrane, at the third waste gas above-mentioned
On the basis of reason device, also include following technical characteristic:
Described porous sepage inner core is nickel porous sepage inner core, the porous sepage inner core low cost of this material, it is easy to system
Make and be easily obtained, therefore, it is possible to reduce the manufacturing cost of whole emission-control equipment.
The 5th kind of the embodiment of the present application offer has the emission-control equipment of flowing liquid membrane, at any of the above-described kind of waste gas
On the basis of reason device, also include following technical characteristic:
The middle part of the upper surface of described reaction chamber is provided with decomposition source generator.Wherein, decomposition source can be: combustion flame gas
Body, plasma gas, oxidation or reducibility gas.
Further, described decomposition source generator is arranged on the surface at center of described porous sepage inner core.This
In the case of, just can being absorbed by flowing liquid membrane of maximum of probability decomposing gas that the reaction of source generator position produces.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses this practicality new
Type.Multiple amendment to these embodiments will be apparent from for those skilled in the art, is determined herein
The General Principle of justice can realize in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause
This, this utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest scope consistent with features of novelty.
Claims (6)
1. an emission-control equipment with flowing liquid membrane, it is characterised in that include that water tank, described water tank upper include mutually
The reaction chamber being positioned at left side of connection and be positioned at the wet scrubbing parts on right side, the top of described reaction chamber has and introduces exhaust gas into
Gas inlet parts within described reaction chamber, described reaction chamber is internally provided with porous sepage inner core, described reaction chamber interior
Form gap tank between the outer wall of wall and described porous sepage inner core, between described gap tank and described water tank, utilize liquid
Supply part is connected, described liquid feeding parts in the water in described water tank is continuously introduced into described gap tank and from
The through hole of described porous sepage inner core overflows to be formed on the inwall of described porous sepage inner core flowing liquid membrane.
The emission-control equipment with flowing liquid membrane the most according to claim 1, it is characterised in that described liquid supply unit
Part includes that water pump and liquid supplying tubing, the first end of described liquid supplying tubing are positioned at described water tank, and the second end is positioned at institute
State in the tank of gap.
The emission-control equipment with flowing liquid membrane the most according to claim 2, it is characterised in that in described porous sepage
Cylinder hole be diameter range be the hole of 0.5 millimeter to 0.8 millimeter.
The emission-control equipment with flowing liquid membrane the most according to claim 3, it is characterised in that in described porous sepage
Cylinder is nickel porous sepage inner core.
5. according to the emission-control equipment with flowing liquid membrane described in any one of claim 1-4, it is characterised in that described instead
The middle part answering the upper surface in chamber is provided with decomposition source generator.
The emission-control equipment with flowing liquid membrane the most according to claim 5, it is characterised in that described decomposition source occurs
Device is arranged on the surface at the center of described porous sepage inner core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620547258.8U CN205832837U (en) | 2016-06-07 | 2016-06-07 | A kind of emission-control equipment with flowing liquid membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620547258.8U CN205832837U (en) | 2016-06-07 | 2016-06-07 | A kind of emission-control equipment with flowing liquid membrane |
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| Publication Number | Publication Date |
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| CN205832837U true CN205832837U (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620547258.8U Active CN205832837U (en) | 2016-06-07 | 2016-06-07 | A kind of emission-control equipment with flowing liquid membrane |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111093806A (en) * | 2017-08-31 | 2020-05-01 | 易克易呢根股份有限公司 | IPA-containing process system for treating an engineered exhaust stream |
-
2016
- 2016-06-07 CN CN201620547258.8U patent/CN205832837U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111093806A (en) * | 2017-08-31 | 2020-05-01 | 易克易呢根股份有限公司 | IPA-containing process system for treating an engineered exhaust stream |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180726 Address after: No. 1789 Chengliu Middle Road, Jiading District, Shanghai Patentee after: Shanghai Sheng Jian Ventilation Pipe Co., Ltd. Address before: 201821 25F, Taihu Shijia International Building, 1198 De Fu Road, Jiading District, Shanghai Patentee before: SHANGHAI SHENGJIAN ENVIRONMENT SYSTEM TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200103 Address after: No.318, Dechang Road, Shipai, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Jiangsu Shengjian environmental equipment Co., Ltd Address before: No. 1789 Chengliu Middle Road, Jiading District, Shanghai Patentee before: Shanghai Sheng Jian Ventilation Pipe Co., Ltd. |