CN205790035U - Tubular type PECVD graphite boat process point erecting device - Google Patents
Tubular type PECVD graphite boat process point erecting device Download PDFInfo
- Publication number
- CN205790035U CN205790035U CN201620650658.1U CN201620650658U CN205790035U CN 205790035 U CN205790035 U CN 205790035U CN 201620650658 U CN201620650658 U CN 201620650658U CN 205790035 U CN205790035 U CN 205790035U
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- process point
- guide plate
- tubular type
- stationary fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
This utility model relates to a kind of tubular type PECVD graphite boat process point erecting device, and including graphite boat conveyer device and process point press-loading apparatus, process point press-loading apparatus is arranged on the surface of graphite boat conveyer device.This utility model includes graphite boat stationary fixture and the mobile device driving graphite boat stationary fixture to move, graphite boat stationary fixture is installed after fixing graphite boat, use mobile device that the graphite boat fixed moves to the underface of guide plate, guide plate is moved down into and graphite boat upper surface by lowering or hoisting gear, process point is placed in the pilot sleeve of guide plate, finally by process point pressure point device, process point is arranged in the fabrication hole of graphite boat, all operation is all automatically performed by machine, save manpower, improve installation effectiveness, improve labor productivity.
Description
Technical field
This utility model relates to solar battery sheet manufacturing technology field, especially relates to a kind of tubular type PECVD graphite boat
Process point erecting device.
Background technology
In the manufacture process of solar battery sheet, when silicon chip carries out its surface coating operation, need uncoated silicon
Sheet inserts on the loader of PECVD vacuum coating equipment, and at present, loader generally uses graphite boat as shown in Figure 8, specifically grasps
As process it is: silicon chip inserted graphite boat and is positioned thereon by graphite boat process point, then, the graphite boat of silicon chip will be loaded with
It is placed in PECVD vacuum coating equipment, uses pecvd process that silicon chip is carried out plated film.
Existing graphite boat process point is mainly installed by fixture block and the cylinder shape for being arranged in graphite boat piece installing hole
Portion forms, and fixture block is two and is symmetrically distributed in installation portion both ends of the surface, and fixture block is the most tapered cylinder, its end face
And use arc-shaped transitional surface between side, between root and the end face of installation portion of fixture block, form the card for engaging silicon chip respectively
Groove.Existing graphite boat is when using 30run (secondary), it may appear that edge blushing, and more serious to the later stage, and is doing
During MUL and NY technique, process point can be burnt, and when especially doing MUL technique, process point is burnt and increased the weight of, and ratio of burning once exceeded
30%.Therefore, in daily production, the maintenance of tubular type PECVD graphite boat and maintenance are more frequent, and the process point of graphite boat length is more,
If the most manually installing, labor workload is very big, and installation effectiveness is relatively low.
Utility model content
The technical problems to be solved in the utility model is: in order to overcome in prior art the maintenance of tubular type PECVD graphite boat and
Safeguarding more frequent, the process point of graphite boat length is more, if the most manually installing, labor workload is very big, and installation effectiveness is relatively
Low problem, it is provided that a kind of tubular type PECVD graphite boat process point erecting device.
This utility model solves its technical problem and be the technical scheme is that a kind of tubular type PECVD graphite boat process point
Erecting device, including graphite boat conveyer device and process point press-loading apparatus, described process point press-loading apparatus is arranged on described graphite
The surface of boat conveyer device.
Further, described graphite boat conveyer device includes graphite boat stationary fixture and drives graphite boat stationary fixture to move
Mobile device, described graphite boat stationary fixture is slidably mounted in described mobile device.
Further, for the most fixing graphite boat, described graphite boat stationary fixture includes base plate, solid on described base plate
Dingan County, equipped with mounting blocks, described mounting blocks has always open, and two described mounting blocks are symmetrical arranged, and described base plate has
Screwed hole, described screwed hole female thread is provided with screw, described base plate has some and on graphite boat fabrication holes corresponding
Technique blind hole.
Further, the degree of depth of described technique blind hole is equal with the height of fixture block in process point, it is simple in the peace of process point
In process of assembling, limit process point position in this fabrication hole.
Further, described process point press-loading apparatus includes guider and pressure point device, and described guider is with described
Pressure point device is oppositely arranged.
Further, described guider includes guide plate and drives the lowering or hoisting gear of guide plate lifting, described guide plate
It is fixedly mounted on described lowering or hoisting gear, described guide plate has on some pilot holes, some described pilot holes and graphite boat
Fabrication hole corresponding, be installed with pilot sleeve, described pilot hole at described guide plate upper surface pilot hole position
With described pilot sleeve concentric.
Further, described pressure point device includes pressing plate and drives the lowering or hoisting gear of pressing plate lifting, the fixing peace of described pressing plate
It is contained on described lowering or hoisting gear, described pressing plate is installed with the depression bar that some and on graphite boat fabrication holes are corresponding, institute
State depression bar and described pilot sleeve concentric.
Further, in order to simplify overall structure of the present utility model, described mobile device is screw rod driving device, including
Screw mandrel, screw mandrel tumbler, the guide rail with chute and slide block, described screw rod driving device is fixing with described screw mandrel to be connected, institute
Stating slide block to be connected with described screw rod transmission, described slide block is slidably mounted in described guide rail.
Further, in order to simplify overall structure of the present utility model, described lowering or hoisting gear is for promoting cylinder.
The beneficial effects of the utility model are: this utility model includes graphite boat stationary fixture and drives graphite boat fixation clamp
The mobile device of tool movement, installs on the graphite boat stationary fixture after fixing graphite boat, and use mobile device will fix
Graphite boat moves to the underface of guide plate, and guide plate is moved down into and graphite boat upper surface by lowering or hoisting gear, is guiding
Place process point in the pilot sleeve of plate, finally by process point pressure point device, process point is arranged on the fabrication hole of graphite boat
In, whole operations are all automatically performed by machine, save manpower, improve installation effectiveness, improve labor productivity.
Accompanying drawing explanation
With embodiment, this utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is three-dimensional assembling schematic diagram of the present utility model；
Fig. 2 is front view of the present utility model；
Fig. 3 is that in this utility model, graphite boat conveyer device assembles schematic diagram with the three-dimensional of guider；
Fig. 4 is that in this utility model, graphite boat stationary fixture assembles schematic diagram with the three-dimensional of graphite boat；
Fig. 5 is the three-dimensional assembling schematic diagram of graphite boat stationary fixture in this utility model；
Fig. 6 is the schematic three dimensional views of guide plate in this utility model；
Fig. 7 is the schematic three dimensional views of this utility model center platen；
Fig. 8 is the top view of graphite boat.
In figure: 1. base plate, 2. mounting blocks, the most always open, 4. screw, 5. technique blind hole, 6. guide plate, 7. pilot hole,
8. pilot sleeve, 9. pressing plate, 10. depression bar, 11. screw mandrels, 12. guide rails, 13. motors, 14. lift cylinders, 15. bases, 16.
Frame, 17. crossbeams, 18. graphite boats.
Detailed description of the invention
Presently in connection with accompanying drawing, the utility model is described in more detail.These accompanying drawings are the schematic diagram of simplification,
Basic structure of the present utility model is described the most in a schematic way, and therefore it only shows the composition relevant with this utility model.
A kind of tubular type PECVD graphite boat process point erecting device as depicted in figs. 1 and 2, including base 15, on base 15
Being provided with two closed slides 12, screw mandrel 11 is rotatably installed on base 15, and screw mandrel 11 is driven by motor 13 and rotates, on screw mandrel 11
Slide block is installed in transmission, slide block fixedly mounts base plate 1, as shown in Figure 3.Two base plate 1 intervals are installed, fixing on described base plate 1
Being provided with mounting blocks 2, described mounting blocks 2 has always open 3, two described mounting blocks 2 are symmetrical arranged, on described base plate 1
Having screwed hole, described screwed hole female thread is provided with screw 4, and described base plate 1 has some and on graphite boat 18 technique
The technique blind hole 5 that hole is corresponding, as it is shown in figure 5, the degree of depth of technique blind hole 5 is equal with the height of fixture block in process point, it is simple to
In the installation process of process point, limit process point position in this fabrication hole.
The equal mounting bracket in both sides 16 of base 15 upper plate 1 place guide rail 12, support 16 fixedly mounts lifting air
Cylinder 14, the external part fixed installation guide plate 6 of lift cylinder 14, described guide plate 6 has some pilot holes 7, such as Fig. 6 institute
Showing, some described pilot holes 7 are corresponding with the fabrication hole on graphite boat 18, described guide plate 6 upper surface pilot hole 7 position
Place is installed with pilot sleeve 8, described pilot hole 7 and described pilot sleeve 8 concentric.
Fixedly mount a crossbeam 17 by support 16 on described base 15, crossbeam 17 fixedly mount lift cylinder 14,
The external part of lift cylinder 14 is fixing with pressing plate 9 as shown in Figure 7 to be connected, and pressing plate 9 is positioned at the surface of guide plate 6, described pressure
The depression bar 10 that some and on graphite boat 18 fabrication holes are corresponding, described depression bar 10 and described fairlead it is installed with on plate 9
Cylinder 8 concentrics.
Work process:
1, install at graphite boat and fixedly mount graphite boat 18, as shown in Figure 4, mounted stone on the base plate 1 of stationary fixture
Fabrication hole on ink boat 18 and technique blind hole 5 one_to_one corresponding on base plate 1.
2, starting the motor 13 in graphite boat conveyer device, motor 13 rotates, and drives screw mandrel 11 to rotate, and screw mandrel 11 rotates,
Band movable slider moves, and slide block drives base plate 1 to move to guide plate 6, treats that base plate 1 moves to the underface of guide plate 6, graphite boat 18
On fabrication hole and guide plate 6 in pilot hole 7 one_to_one corresponding time, close motor 13, owing to being provided with two on a screw mandrel 11
Individual base plate 1, two base plate 1 intervals are arranged, and when a base plate 1 is positioned at immediately below guide plate 6, another base plate 1 is away from guiding
Plate 6, convenient installation graphite boat 18 on base plate 1.
3, start drive guide plate 6 lifting lift cylinder 14, lift cylinder 14 external part stretches out, drive guide plate 6 to
Base plate 1 immediately below guide plate 6 moves, and during the upper surface of the lower surface of subject-oriented plate 6 and graphite boat 18, closes lifting air
Cylinder 14.
4, process point is put into the pilot sleeve 8 on guide plate 6, due to inside radius and the process point of pilot sleeve 8
Radius is equal, and the fixture block in process point is setting up and down, enters in pilot sleeve 8.
5, starting the lift cylinder 14 driving pressing plate 9 to lift, lift cylinder 14 external part stretches out, and band dynamic pressure plate 9 is to guiding
Plate 6 is close, and depression bar 10 stretches in pilot sleeve 8, promotes the process point in pilot sleeve 8 to move downward, treats below process point
Fixture block is with when on base plate 1, the bottom of technique blind hole 5 contacts, and lift cylinder 14 shrinks, and band dynamic pressure plate 9 is away from guide plate 6, lifting air
After cylinder 14 resets, close lift cylinder 14.
With above-mentioned according to desirable embodiment of the present utility model for enlightenment, by above-mentioned description, related work people
Member can carry out various change and amendment completely in the range of without departing from this utility model technological thought.This reality
The content being not limited in description by novel technical scope, it is necessary to determine its technology according to right
Property scope.
Claims (4)
1. a tubular type PECVD graphite boat process point erecting device, it is characterised in that: include graphite boat conveyer device and process point
Press-loading apparatus, described process point press-loading apparatus is arranged on the surface of described graphite boat conveyer device, described graphite boat conveying dress
Putting the mobile device including graphite boat stationary fixture and driving graphite boat stationary fixture to move, described graphite boat stationary fixture slides
Being arranged in described mobile device, described graphite boat stationary fixture includes that base plate (1), described base plate are installed with peace on (1)
Dress block (2), described mounting blocks (2) has always open (3), and two described mounting blocks (2) are symmetrical arranged, described base plate (1)
On have screwed hole, described screwed hole female thread is provided with screw (4), described base plate (1) has some with graphite boat (18)
On the corresponding technique blind hole (5) of fabrication hole；
Described process point press-loading apparatus includes guider and pressure point device, and described guider is relative with described pressure point device to be set
Put；
Described guider includes guide plate (6) and the lowering or hoisting gear driving guide plate (6) to lift, and described guide plate (6) is fixed
It is arranged on described lowering or hoisting gear, described guide plate (6) has some pilot holes (7), some described pilot holes (7) and graphite
Fabrication hole on boat (18) is corresponding, is installed with fairlead at described guide plate (6) upper surface pilot hole (7) position
Cylinder (8), described pilot hole (7) and described pilot sleeve (8) concentric；
Described pressure point device includes pressing plate (9) and the lowering or hoisting gear driving pressing plate (9) to lift, and described pressing plate (9) is fixedly mounted on
On described lowering or hoisting gear, described pressing plate (9) is installed with the depression bar that some and on graphite boat (18) fabrication holes are corresponding
(10), described depression bar (10) and described pilot sleeve (8) concentric.
2. tubular type PECVD graphite boat process point erecting device as claimed in claim 1, it is characterised in that: described technique blind hole
(5) the degree of depth is equal with the height of fixture block in process point.
3. tubular type PECVD graphite boat process point erecting device as claimed in claim 1, it is characterised in that: described mobile device
For screw rod driving device, including screw mandrel (11), screw mandrel tumbler, the guide rail (12) with chute and slide block, described screw mandrel
(11) driving means is fixing with described screw mandrel (11) is connected, and described slide block is in transmission connection with described screw mandrel (11), and described slide block is sliding
Move and be arranged in described guide rail (12).
4. tubular type PECVD graphite boat process point erecting device as claimed in claim 1, it is characterised in that: described lowering or hoisting gear
For promoting cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620650658.1U CN205790035U (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point erecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620650658.1U CN205790035U (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point erecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205790035U true CN205790035U (en) | 2016-12-07 |
Family
ID=58127820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620650658.1U Withdrawn - After Issue CN205790035U (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point erecting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205790035U (en) |
-
2016
- 2016-06-27 CN CN201620650658.1U patent/CN205790035U/en not_active Withdrawn - After Issue
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161207 Effective date of abandoning: 20180102 |