CN205789142U - The Elevated temperature irradiation target chamber of temperature-controllable - Google Patents

The Elevated temperature irradiation target chamber of temperature-controllable Download PDF

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Publication number
CN205789142U
CN205789142U CN201620212874.8U CN201620212874U CN205789142U CN 205789142 U CN205789142 U CN 205789142U CN 201620212874 U CN201620212874 U CN 201620212874U CN 205789142 U CN205789142 U CN 205789142U
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irradiation
temperature
sample
chamber
vacuum
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CN201620212874.8U
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夏海鸿
袁大庆
李怀林
燕鹏
孔淑妍
范平
张乔利
温阿利
马海亮
左翼
朱升云
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China Nuclear (beijing) Science And Technology Research Institute Co Ltd
China Institute of Atomic of Energy
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China Nuclear (beijing) Science And Technology Research Institute Co Ltd
China Institute of Atomic of Energy
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Abstract

This utility model provides the Elevated temperature irradiation target chamber of a kind of temperature-controllable, including: vacuum chamber, at least one vacuum beam current tube interface it is provided with, so that ion beam exposes to through vacuum beam current tube interface in the irradiation sample of vacuum chamber on the chamber wall of described vacuum chamber;Irradiation supports platform, and described irradiation supports platform and is arranged in described vacuum chamber;Heater, described heater is arranged on described irradiation and supports on platform, described heater carrying irradiation sample, and with irradiation sample electric insulation contact, thus irradiation sample is heated to the temperature of regulation in the way of contact heating;Temperature measuring equipment, described temperature measuring equipment is for measuring the temperature of irradiation sample;And beam measurement system, described beam measurement system beam intensity on the irradiation sample measuring target chamber central authorities.Higher according to Elevated temperature irradiation target chamber heating-up temperature of the present utility model and quickly to sample temperature control, and the beam intensity on irradiation sample can not affected.

Description

The Elevated temperature irradiation target chamber of temperature-controllable
Technical field
This utility model relates to the Elevated temperature irradiation target chamber of a kind of temperature-controllable, and the multi beam of a kind of temperature-controllable is simultaneously The high-temperature target chamber of irradiation, this high-temperature target chamber is mainly used in the HIB under hot conditions, H rays, helium ion beam simultaneously The experiment of exposed material.
Background technology
In reactor, the topmost failure mode of heap inner structure material is irradiation damage, and the structure thus caused The decline of the combination property of material.Irradiation damage can affect the service life of heap inner structure material, and the safety of initiation reaction heap Problem, the problem that therefore it must take into and study in being reactor structural material research and development.
Heap inner structure material is subject primarily to the irradiation carrying moderate energy neutron and transmuting charged particle etc. of high dose.Transmuting band electrochondria Son is the product of the transmuting reaction of reactor, mainly hydrogen and helium.Therefore, material is not only subject to the neutron irradiation of very high dose, But also with by hydrogen, the synergism of helium.Neutron and heavy ion are all the displacements of the atom being produced material by collision, Therefore, it is possible to use heavy ion irradiation simulates neutron irradiation.Heavy ion, hydrogen, helium three beams irradiation test simultaneously is generally used The irradiation damage of research reactor inner structure material.
But, the temperature of existing three beams irradiation devices is the highest.It is currently used for the target chamber temperature one of heavy ion irradiation As can only achieve six or seven hundred degree, this type of target chamber be generally used for secondary reactor structural material irradiation damage research.More of new generation The structural material of nuclear power system typically work at higher temperature and irradiation dose, existing irradiation target chamber is not owing to reaching The irradiation temperature of structural material of a new generation's nuclear power system and the structural material irradiation damage of a new generation's nuclear power system can not be supported Research.It is thus desirable to research and develop a kind of novel Elevated temperature irradiation target chamber.
On the other hand, current irradiation target chamber can not be taken into account in terms of temperature control and in terms of beam current measurement very well.Generally Take two kinds of mode of heatings to heat material in irradiation target chamber, i.e. radiation is heated and contacts heating.Use radiation heating During mode heating irradiance sample, heater circuit discord sample directly contacts, it is not easy to impact beam current measurement, but sample Intensification cooling rate is slow, it is impossible to the variations in temperature at the irradiation zone of irradiation sample causing beam intensity change is done rapidly Go out corresponding regulation.Another kind of to sample contact heating can with quick control sample temperature, but due to sample and heater circuit Between there is no an insulation and the line that cannot directly measure on irradiation sample.It is thus desirable to research and development one can take into account temperature control and The Elevated temperature irradiation target chamber of two aspects of beam current measurement.
On the other hand, due to the Beam breakup unstability of accelerator, during irradiation experiment, accelerator line it may happen that Beam spot size variation and position excursion.The infrared measurement of temperature of the some thermometric that the temperature measuring equipment of current irradiation target chamber generally uses Instrument, it can only measure the central temperature of irradiation sample, it is impossible to the Temperature Distribution of monitoring irradiation sample and beam spot position excursion.Cause These needs arrange corresponding monitoring device in high-temperature target chamber, so as to measure multiple positions on irradiation sample simultaneously Temperature, thus monitor the size of beam spot and the drift of position in real time.
Utility model content
The purpose of this utility model is to provide the Elevated temperature irradiation target chamber of a kind of temperature-controllable, and it combines radiation heating methods With the advantage contacting heating means, irradiation sample can be heated to high temperature (up to 1500 DEG C) and do not affect line and survey Amount, quickly can regulate the temperature of irradiation sample simultaneously, reduces the line fluctuation impact on irradiation temperature.This utility model institute The temperature measurement system stated can also measure the Temperature Distribution of irradiation sample irradiation zone, can monitor irradiation line in real time simultaneously Situation.
An aspect of the present utility model provides the Elevated temperature irradiation target chamber of a kind of temperature-controllable, including: vacuum chamber, institute State and on the chamber wall of vacuum chamber, be provided with at least one vacuum beam current tube interface, so that ion beam is through vacuum beam current tube Interface exposes in the irradiation sample of vacuum chamber;Irradiation supports platform, and described irradiation supports platform and is arranged in described vacuum chamber; Heater, described heater is arranged on described irradiation and supports on platform, described heater carrying irradiation sample, and and irradiation The contact of sample electric insulation ground, thus in the way of contact heating, irradiation sample is heated to the temperature of regulation;Temperature measuring equipment, Described temperature measuring equipment is for measuring the temperature of irradiation sample;And beam measurement system, described beam measurement system is used for Measure the beam intensity on the irradiation sample of target chamber central authorities.
According to a kind of embodiment, described heater includes the heating plate that insulate, and described heater is heated by insulation Sheet contacts with irradiation sample, thus carries out contact heating.
According to a kind of embodiment, described heating plate is boron nitride-graphite heating sheet.
According to a kind of embodiment, the outside of described heater is provided with at least one thermal radiation shield so that spoke Product and surrounding thermal isolation in the same old way.
According to a kind of embodiment, described vacuum chamber includes columnar cylinder, is additionally provided with signal on described cylinder And power supply input/output interface, suction interface.
According to a kind of embodiment, the quantity of described heater is multiple, and is all disposed within irradiation support platform.
According to a kind of embodiment, described radiation supports platform and is configured to rotate to and translates, so that carried is added hot charging Put and in irradiation sample one rotation and push/exit target chamber central authorities;
According to a kind of embodiment, at least one vacuum beam current tube interface described respectively with multiple vacuum beam current tube phases Even, the plurality of vacuum beam current tube is arranged so that the axis of the plurality of vacuum beam current tube can converge at vacuum chamber Centre such that it is able to irradiate irradiation sample.
According to a kind of embodiment, the quantity of described vacuum beam current tube interface is three, respectively with three vacuum lines Pipeline is connected, and is loaded with HIB, H rays and helium ion beam respectively in described three vacuum beam current tubes.
According to a kind of embodiment, the chamber wall of described vacuum chamber is additionally provided with observation window, so as to observe Irradiation sample within vacuum chamber.
According to a kind of embodiment, described temperature measuring equipment includes that thermal infrared imager, described thermal infrared imager are arranged on Outside described high-temperature target chamber, relative with described observation window, described thermal infrared imager measures irradiation sample by described observation window Surface temperature distribution, and record the temperature data of the multiple point of sample surfaces, thus realize line is radiated on irradiation sample The real-time monitoring of the size and location drift of beam spot.
Accompanying drawing explanation
Fig. 1 illustrates the sectional view of the Elevated temperature irradiation target chamber according to an embodiment of the present utility model, there is shown The internal structure of vacuum chamber;
Fig. 2 illustrates the top view of the Elevated temperature irradiation target chamber according to an embodiment of the present utility model, illustrated therein is The internal structure of vacuum chamber;
Fig. 3 illustrate the heater of the Elevated temperature irradiation target chamber according to an embodiment of the present utility model front view and Top view.
Detailed description of the invention
Below by embodiment, and combine accompanying drawing, the technical solution of the utility model is described in further detail.? In description, same or analogous drawing reference numeral represents same or analogous parts.Following real to this utility model referring to the drawings The explanation executing mode is intended to explain overall utility model of the present utility model design, and is not construed as this practicality Novel a kind of restriction.
According to general plotting of the present utility model, the Elevated temperature irradiation target chamber of a kind of temperature-controllable, including: vacuum chamber, institute State and on the chamber wall of vacuum chamber, be provided with at least one vacuum beam current tube interface, so that ion beam is through vacuum beam current tube Interface exposes in the irradiation sample of vacuum chamber;Irradiation supports platform, and described irradiation supports platform and is arranged in described vacuum chamber; Heater, described heater is arranged on described irradiation and supports on platform, described heater carrying irradiation sample, and and irradiation The contact of sample electric insulation ground, thus in the way of contact heating, irradiation sample is heated to the temperature of regulation;Temperature measuring equipment, Described temperature measuring equipment is for measuring the temperature of irradiation sample;And beam measurement system, described beam measurement system is used for Measure the beam intensity on the irradiation sample of target chamber central authorities.
It addition, in the following detailed description, for ease of explaining, elaborate that many concrete details are to provide present disclosure Comprehensive understanding of embodiment.It should be apparent, however, that one or more embodiment also may be used in the case of not having these details To be carried out.
Fig. 1 and Fig. 2 is shown respectively the side view according to Elevated temperature irradiation target chamber of the present utility model and top view, there is shown The internal structure of vacuum chamber 1.
As it can be seen, the Elevated temperature irradiation target chamber of the temperature-controllable of embodiment of the present utility model includes: heater 3, institute State heater 3 and carry irradiation sample 15, and with irradiation sample 15 electric insulation contact, thus by spoke in the way of contact heating Product 15 are heated to the temperature of regulation in the same old way.Wherein, heater 3 includes the heating plate that insulate, and described heater 3 is added by insulation Backing contacts with irradiation sample 15, thus heats irradiation sample 15.In embodiment of the present utility model, insulation heating Sheet is made up of boron nitride-graphite.So, irradiation sample 15 contact can be added by Elevated temperature irradiation target chamber the most of the present utility model Heat, can be with the temperature of quick control sample, on the other hand, due to the electrical insulating property of the heating plate that insulate, therefore, it is possible to directly measure Beam intensity on irradiation sample 15.Therefore, irradiation sample 15 can be heated to by Elevated temperature irradiation target chamber of the present utility model The high temperature of up to 1500 DEG C and do not affect beam intensity and measure, quickly can also regulate the temperature of irradiation sample 15 simultaneously, Reduce the line fluctuation impact on the temperature of irradiation sample 15.
The Elevated temperature irradiation target chamber of the temperature-controllable of embodiment of the present utility model also includes that irradiation supports platform 2, described irradiation Supporting platform 2 and carry heater 3, described irradiation supports platform 2 and can rotate and translate, by the heater 3 carried on it and Irradiation sample 15 rotates and pushes/exit target chamber central authorities;Wherein, irradiation support platform 2 can carry multiple such heating Device 3, so can disposably load multiple irradiation sample 15, without the setting within change Elevated temperature irradiation target chamber.
The Elevated temperature irradiation target chamber of the temperature-controllable of embodiment of the present utility model includes vacuum chamber 1, described vacuum chamber 1 Inside can be evacuated, and inner containment heater 3 and irradiation support platform 2;Described vacuum chamber 1 is cylindrical shape, It is respectively arranged with vacuum beam current tube interface 7,8,9 on columnar chamber wall, signal and power supply input/output interface 11, bleeds Interface 10.Wherein, described vacuum beam current tube interface 7,8,9 is connected with vacuum beam current tube, with by ion beam irradiation to target chamber On the irradiation sample 15 of central authorities.The quantity of vacuum beam current tube interface can be multiple, at the cylindrical chamber locular wall of the present embodiment On have three, be connected with conveying HIB, the vacuum beam tube road of H rays and helium ion beam respectively.These three vacuum line In pipe joint is arranged in the dead ahead of vacuum chamber and is arranged in the same radial section of cylindrical shape vacuum chamber, these three is true The axis of empty beam current tube is arranged to converge at vacuum chamber centre.Wherein, HIB vacuum pipe is arranged in centre, hydrogen Ion beam and helium ion beam vacuum pipe are separately positioned on the both sides of HIB vacuum pipe, and with HIB vacuum tube Angle between road is ± 30 °, this angle not necessarily 30 °, it is also possible to be other angles, if H rays and helium ion Bundle vacuum pipe is arranged in the lateral symmetry of HIB vacuum pipe and is distributed.The purpose of above-mentioned setting is so that three Ion beam in individual line vacuum pipe can converge at vacuum chamber centre, thus irradiates vacuum chamber central authorities exactly Irradiation sample.Wherein, the output of such as beam intensity, temperature etc is believed by signal and power supply input/output interface 11 by being used for Number, the input signal input/output of such as control signal etc and powering for the relevant parts in vacuum chamber.Wherein, Described suction interface 10 is connected so that by described vacuum chamber evacuation with vacuum-pumping system.
The Elevated temperature irradiation target chamber of the temperature-controllable of embodiment of the present utility model also includes temperature measuring equipment 5, described temperature Degree measurement apparatus 5 is for measuring the temperature of irradiation sample;Temperature control system, described temperature control system adds hot charging for control Put 3 so that the temperature of irradiation sample on heater 3 can be controlled;Beam measurement system, described beam current measurement system System beam intensity on the irradiation sample measuring target chamber central authorities.
Observation window 4 it is additionally provided with, so as to observe on the chamber wall of the vacuum chamber of embodiment of the present utility model Irradiation sample within vacuum chamber.
The high-temperature target chamber of embodiment of the present utility model also includes that thermal infrared imager 5, described thermal infrared imager 5 are arranged on institute Stating the outside of high-temperature target chamber, relative with described observation window 4, described thermal infrared imager 5 measures irradiation sample by described observation window 4 Surface temperature distribution, and record the temperature data of the multiple point of sample surfaces.The Elevated temperature irradiation target of embodiment of the present utility model Room is capable of multipoint temperature measuring and the record of room temperature to 1500 DEG C, measures the spatial resolution about 0.3mm of point.Temperature survey Precision is ± 2% or ± 2 DEG C.Due to when line carries out irradiation to irradiation sample, the radiation exposed region of irradiation sample 15 Temperature can raise, and thermal infrared imager 5 also has realization and adjusts bundle to light and in real time monitor beam shape of spot and the function of position.Thus it is real Now shape and the real-time monitoring of position excursion to beam spot on irradiation sample 15 of the line of accelerator.In the present embodiment, Due to thermal infrared imager 5 can thermometric, therefore thermal infrared imager is used as temperature measuring equipment, thus without arranging special temperature Measurement apparatus.
Fig. 3 illustrates the front view of the heater 3 of the Elevated temperature irradiation target chamber according to an embodiment of the present utility model And top view.As it can be seen, described heater 3 includes that two add thermode 13, add thermode 13 and insulation heating plate 14 phase Even, insulation heating plate 14 being provided with irradiation sample and fixes seat 16, irradiation sample is fixed seat 16 and is fixed on absolutely by irradiation sample 15 In heater 3 central authorities on hot heating plate 14 so that adiabatic heat sheet 14 contacts heating with irradiation sample 15.Described heater Outside be additionally provided with thermal radiation shield 12 so that irradiation sample 15 protects against heat radiation.This is provided with on irradiation rotating disk The situation of multiple heaters is particularly advantageous, and multiple irradiation sample can be avoided to interfere.Described thermal radiation shield Can be with one or more layers.As it is shown on figure 3, in the present embodiment, thermal radiation shield is multilamellar.
Although being illustrated this utility model in conjunction with accompanying drawing, but the embodiment disclosed in accompanying drawing is intended to this practicality Novel preferred implementation is illustrative, and it is not intended that one of the present utility model is limited.
Although some embodiments of this utility model general plotting are shown and explanation, those of ordinary skill in the art will Understand, in the case of the principle conceived without departing substantially from this overall utility model and spirit, these embodiments can be made a change, this The scope of utility model limits with claim and their equivalent.

Claims (11)

1. an Elevated temperature irradiation target chamber for temperature-controllable, including:
Vacuum chamber, the chamber wall of described vacuum chamber is provided with at least one vacuum beam current tube interface, so that ion beam Expose to through vacuum beam current tube interface in the irradiation sample of vacuum chamber;
Irradiation supports platform, and described irradiation supports platform and is arranged in described vacuum chamber;
Heater, described heater is arranged on described irradiation and supports on platform, described heater carrying irradiation sample, and with The contact of irradiation sample electric insulation ground, thus in the way of contact heating, irradiation sample is heated to the temperature of regulation;
Temperature measuring equipment, described temperature measuring equipment is for measuring the temperature of irradiation sample;And
Beam measurement system, described beam measurement system beam intensity on the irradiation sample measuring target chamber central authorities.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that described heater includes the heating plate that insulate, Described heater is contacted with irradiation sample by insulation heating plate, thus carries out contact heating.
Elevated temperature irradiation target chamber the most according to claim 2, it is characterised in that described heating plate is boron nitride-graphite heating Sheet.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that the outside of described heater is provided with at least One thermal radiation shield so that irradiation sample and surrounding thermal isolation.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that described vacuum chamber includes columnar cylinder Body, is additionally provided with signal and power supply input/output interface, suction interface on described cylinder.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that the quantity of described heater is multiple, and And be all disposed within irradiation support platform.
Elevated temperature irradiation target chamber the most according to claim 6, it is characterised in that described irradiation support platform be configured to rotate to and Translation, to rotate in the heater of carried and irradiation sample and to push/exit target chamber central authorities.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that at least one vacuum beam current tube interface described Being connected with multiple vacuum beam current tubes respectively, the plurality of vacuum beam current tube is arranged so that the plurality of vacuum beam current tube Axis can converge at vacuum chamber centre such that it is able to irradiate irradiation sample.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that the quantity of described vacuum beam current tube interface is Three, it is connected with three vacuum beam current tubes respectively, described three vacuum beam current tubes are loaded with HIB, hydrion respectively Bundle and helium ion beam.
Elevated temperature irradiation target chamber the most according to claim 1, it is characterised in that also set on the chamber wall of described vacuum chamber It is equipped with observation window, so as to observe the irradiation sample within vacuum chamber.
11. Elevated temperature irradiation target chambers according to claim 10, it is characterised in that described temperature measuring equipment includes infra-red heat As instrument, described thermal infrared imager is arranged on outside described Elevated temperature irradiation target chamber, relative with described observation window, described thermal infrared imager Measured the surface temperature distribution of irradiation sample by described observation window, and record the temperature data of the multiple point of sample surfaces, thus Realize the real-time monitoring of the size and location drift of the beam spot that line is radiated on irradiation sample.
CN201620212874.8U 2016-03-18 2016-03-18 The Elevated temperature irradiation target chamber of temperature-controllable Active CN205789142U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021469A (en) * 2015-07-10 2015-11-04 中山大学 In-situ mechanical property testing device of nuclear material in high temperature irradiation simulation environment
CN107204211A (en) * 2016-03-18 2017-09-26 国核(北京)科学技术研究院有限公司 The Elevated temperature irradiation target chamber of temperature-controllable
CN109751868A (en) * 2019-01-15 2019-05-14 福建江夏学院 A kind of vacuum chamber with wireless control warming module

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021469A (en) * 2015-07-10 2015-11-04 中山大学 In-situ mechanical property testing device of nuclear material in high temperature irradiation simulation environment
CN107204211A (en) * 2016-03-18 2017-09-26 国核(北京)科学技术研究院有限公司 The Elevated temperature irradiation target chamber of temperature-controllable
CN109751868A (en) * 2019-01-15 2019-05-14 福建江夏学院 A kind of vacuum chamber with wireless control warming module

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