CN205752215U - Prepare the silicon chip Turnover Box of heterojunction solar battery - Google Patents
Prepare the silicon chip Turnover Box of heterojunction solar battery Download PDFInfo
- Publication number
- CN205752215U CN205752215U CN201620473623.5U CN201620473623U CN205752215U CN 205752215 U CN205752215 U CN 205752215U CN 201620473623 U CN201620473623 U CN 201620473623U CN 205752215 U CN205752215 U CN 205752215U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- turnover box
- casing
- nitrogen
- chip turnover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 74
- 239000010703 silicon Substances 0.000 title claims abstract description 74
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 70
- 230000007306 turnover Effects 0.000 title claims abstract description 49
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 126
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 63
- 239000007789 gas Substances 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 9
- 230000007717 exclusion Effects 0.000 abstract description 4
- 239000003570 air Substances 0.000 description 70
- 239000000428 dust Substances 0.000 description 5
- 150000003376 silicon Chemical class 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620473623.5U CN205752215U (en) | 2016-05-23 | 2016-05-23 | Prepare the silicon chip Turnover Box of heterojunction solar battery |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620473623.5U CN205752215U (en) | 2016-05-23 | 2016-05-23 | Prepare the silicon chip Turnover Box of heterojunction solar battery |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205752215U true CN205752215U (en) | 2016-11-30 |
Family
ID=57362576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201620473623.5U Active CN205752215U (en) | 2016-05-23 | 2016-05-23 | Prepare the silicon chip Turnover Box of heterojunction solar battery |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN205752215U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107845592A (en) * | 2017-11-17 | 2018-03-27 | 米亚索乐装备集成(福建)有限公司 | For storing the drying box of solar battery chip |
CN109637955A (en) * | 2018-12-29 | 2019-04-16 | 长江存储科技有限责任公司 | Object scratch system |
-
2016
- 2016-05-23 CN CN201620473623.5U patent/CN205752215U/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107845592A (en) * | 2017-11-17 | 2018-03-27 | 米亚索乐装备集成(福建)有限公司 | For storing the drying box of solar battery chip |
CN107845592B (en) * | 2017-11-17 | 2023-10-03 | 东君新能源有限公司 | Drying oven for storing solar cell chips |
CN109637955A (en) * | 2018-12-29 | 2019-04-16 | 长江存储科技有限责任公司 | Object scratch system |
CN109637955B (en) * | 2018-12-29 | 2021-03-12 | 长江存储科技有限责任公司 | Temporary storage system for target object |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231026 Address after: 201400 Nanqiao Zhenjianghai Economic Park, Fengxian District, Shanghai Patentee after: GCL SYSTEM INTEGRATION TECHNOLOGY Co.,Ltd. Patentee after: GCL INTEGRATION TECHNOLOGY (SUZHOU) Co.,Ltd. Patentee after: Wuhu GCL Integrated New Energy Technology Co.,Ltd. Address before: Room 125, building 2, No.58, Zhonghui Road, Suzhou Industrial Park, Suzhou, Jiangsu 215000 Patentee before: SUZHOU GCL SYSTEM INTEGRATION TECHNOLOGY INDUSTRIAL APPLICATION RESEARCH INSTITUTE Co.,Ltd. Patentee before: GCL INTEGRATION TECHNOLOGY (SUZHOU) Co.,Ltd. Patentee before: GCL SYSTEM INTEGRATION TECHNOLOGY Co.,Ltd. |