CN205720917U - A kind of scattered spot laser instrument relevant based on low time coherence and low spatial - Google Patents

A kind of scattered spot laser instrument relevant based on low time coherence and low spatial Download PDF

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Publication number
CN205720917U
CN205720917U CN201620310175.7U CN201620310175U CN205720917U CN 205720917 U CN205720917 U CN 205720917U CN 201620310175 U CN201620310175 U CN 201620310175U CN 205720917 U CN205720917 U CN 205720917U
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laser
coherence
low
laser instrument
optical element
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罗宁
罗宁一
范辉
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Pavilion Integration Suzhou Co Ltd
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Pavilion Integration Suzhou Co Ltd
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Abstract

The utility model discloses a kind of scattered spot laser instrument relevant based on low time coherence and low spatial, and this scattered spot laser instrument includes radio-frequency modulator, laser instrument, diffraction optical element and the condenser lens coaxially setting gradually on same optical table;Diffraction optical element is positioned on the direction of described laser emitting, and laser instrument is modulated by radio-frequency modulator, and the laser light incident through radio-frequency modulator modulation enters diffraction optical element;Laser beam via diffraction optical element outgoing is zero to be concerned with speckle laser beam, and laser beam enters to inject condenser lens, and the laser of line focus lens outgoing forms the scattered spot laser of focusing.The utility model proposes a kind of scattered spot laser instrument based on low temporal coherence and low spatial coherence, reduce temporal coherence by a kind of and the technology of spatial coherence has obtained a kind of scattered spot laser output beam, the problem solving the speckle producing because of temporal coherence and spatial coherence.

Description

A kind of scattered spot laser instrument relevant based on low time coherence and low spatial
Technical field
The utility model relates to field of laser device technology, is specifically related to a kind of relevant less than low time coherence and low spatial Scattered spot laser instrument.
Background technology
The features such as high brightness, high coherence and high collimation that laser has due to it, at industry, communication, medical treatment, laser Detection has a wide range of applications with the aspect such as measurement, instrument and meter.Laser has high coherence and amplitude differs mutually with position Light beam, form graininess the speckle------laser speckle of random distribution at spatial points.Laser speckle as one with Machine process, is the objective physical phenomenon using with laser instrument and certainly existing.Laser speckle not only causes energy loss, with When also become restriction picture quality, reduce the principal element of image resolution ratio and contrast, such as swashing in research and application at present Light Projection Display and field of laser illumination, laser speckle becomes restriction laser display and realizes really practical key.
Varied with regard to the method eliminating laser speckle at present, two classes can be divided in general: the first is static to dissipate Spot method;As reduced laser chamber length or restrainting to closing again after incident beam beam splitting in the optical path, reduce the coherence of incident beam, but The method operation complexity, light path connective stability is low.CN102122081A disclosed " laser-beam uniform-light light shaping and dissipation spot dress Put " use by pure phase diffractive device electromagnetic oscillation device driving under complete even light shaping and dissipation spot function; CN101950087A disclosed " a kind of method eliminating laser speckle effect " is by the liquid of the led to light by vibration for the incident beam Beam phase is carried out destroying and eliminates laser speckle effect by body.
It two is dynamic speckle method.Enter Mobile state process to laser speckle, utilize the time averagely to suppress speckle, as rotate or Vibrational scattering body (frosted glass, liquid-crystal apparatus, phase-plate), supercritical ultrasonics technology etc..When using dynamic speckle method, speckle variations frequency is got over Hurry up, between speckle, correlation is less, better in time averagely rear speckle inhibition, but takes the knot of dynamic speckle method at present Structure is complicated, and the stability of system is bad.During current speckle eliminates, speckle refrequency control range is limited, and the phase adjusted degree of depth is little to be made Obtaining speckle correlation relatively big, factors above reduces speckle inhibition, and incident beam passes through liquid-crystal apparatus and frosted glass simultaneously Capacity usage ratio is relatively low, and energy loss is big, and along with angular expanse phenomenon, have impact on the performance of system.
In sum, either static ecchymose removing method or dynamically ecchymose removing method, be all itself to go out from laser instrument (or laser) Send reduce the performance on system for the laser speckle impact, during both approaches be only reduce laser speckle to system The impact of performance, but can not cut down (or compensation) easily thus obtain one from further Real-Time Evaluation and measurement system Plant the impact of low speckle, the view data of high s/n ratio.
Content of the invention
The purpose of this utility model is contemplated to solve the above-mentioned problems in the prior art, it is proposed that a kind of based on low The scattered spot laser instrument that time coherence and low spatial are concerned with, reduces time phase by one
The technology of dryness and spatial coherence has obtained the light beam of a kind of scattered spot laser output.
The purpose of this utility model is achieved through the following technical solutions: a kind of relevant based on low time coherence and low spatial Scattered spot laser instrument, including coaxially set gradually on same optical table for reducing laser beam temporal coherence Radio-frequency modulator, laser instrument, for reducing diffraction optical element and the condenser lens of laser beam space coherence;Described diffraction Optical element is positioned on the direction of described laser emitting, and described laser instrument is modulated by described radio-frequency modulator, Jing Guosuo The laser light incident stating radio-frequency modulator modulation enters described diffraction optical element;Laser light via described diffraction optical element outgoing Bundle is for being concerned with speckle laser beam based on the zero of low temporal coherence and low spatial coherence, and described laser beam enters to inject described Condenser lens, forms the scattered spot laser of focusing through the laser of described condenser lens outgoing.
Preferably, under the modulating action of described radio-frequency modulator, the Laser Time of the outgoing of described laser instrument own is concerned with Length shortens, and forms the laser of low time attribute.
Preferably, the laser of described low time coherence attribute is through diffraction optical element, and the wave surface of laser carries out weight Newly constructed, the phase bit position of the single part of the wave surface of the laser rebuilding creates skew.
Preferably, the coherence length of the laser of described phase pushing figure and low time coherence attribute is mated, and reaches Matching relationship for exactly relative to swashing to the laser part of neighbouring low time coherence attribute or low time coherence attribute Light self, can form the position relationship of the condition of low time coherence, thus has reached a kind of based on low temporal coherence with low The relevant laser output dissipating class of the zero of spatial coherence.
Preferably, described zero laser emitting being concerned with speckle based on low temporal coherence and low spatial coherence passes through poly- Focus lens part, the outgoing wave front of laser instrument is reconstructed again, makes this kind of base under outgoing wave front reconstruct effect Reach the purpose focusing in zero laser emitting being concerned with speckle of low temporal coherence and low spatial coherence, obtain focusing Be concerned with the laser of speckle based on the zero of low temporal coherence and low spatial coherence.
Preferably, the material of described diffraction optical element can be vitreous silica, optical glass or optical resin material.
Preferably, described diffraction optical element is by molding or etching technics is made.
The advantage of technical solutions of the utility model is mainly reflected in: the utility model proposes a kind of based on low time coherence Property and the scattered spot laser instrument of low spatial coherence, reduce temporal coherence and the technology of spatial coherence obtains by a kind of The light beam of a kind of scattered spot laser output, relative to current technology scheme, solves because of temporal coherence and spatial coherence And the problem of the speckle producing, thus obtain the laser instrument of scattered spot laser output.
Brief description
Fig. 1 is the structure of a kind of scattered spot laser instrument relevant based on low time coherence and low spatial of the present utility model Schematic diagram;
Fig. 2 be a kind of scattered spot laser instrument relevant based on low time coherence and low spatial of the present utility model have laser The contrast schematic diagram of speckle and scattered spot.
Detailed description of the invention
The purpose of this utility model, advantage and feature, will carry out figure by the non-limitative illustration of preferred embodiment below Show and explain.These embodiments only be application technical solutions of the utility model prominent example, all take equivalent or etc. Effect conversion and the technical scheme that formed, all fall within the utility model within the scope of claim.
As shown in Figure 1.A kind of scattered spot laser instrument relevant based on low time coherence and low spatial, including at same optics Radio-frequency modulator the 1st, the laser instrument for reducing laser beam temporal coherence coaxially setting gradually on platform is the 2nd, for reducing The diffraction optical element 3 of laser beam space coherence and condenser lens 4.In the present embodiment, described laser instrument 2 is preferably one Semiconductor laser, the advantage of selection semiconductor laser is: the wave-length coverage width of semiconductor laser, makes simple, cost Low, laser utilization ratio height is easy to produce in a large number, and volume is little, lightweight, length in service life, cost performance are high and power-saving.
Described diffraction optical element 3 is positioned on the direction of described laser instrument 2 outgoing, the material of described diffraction optical element 3 Can be vitreous silica, optical glass or optical resin material, in the present embodiment, the material of described diffraction optical element 3 is preferred For optical resin material.Optical resin material why is selected to be because that optical resin has the advantage that optical resin not only Transparent light transmission is good, and at visible region, the light transmittance of optical resin is similar with glass, in infrared light district, and the printing opacity of optical resin Rate is more slightly higher than glass, in ultra-violet (UV) band, starts to reduce with the reduction light transmittance of wavelength with 0.4 micron, the light less than 0.3 micron for the wavelength Almost all absorbs;Strong shock resistance, the impulsive force of optical resin is several times of glass, not broken, safety durable.When So in the course of the work, it is possible to select optical glass, when when selecting optical glass, preferably SCHOTT Schott AG of Germany is raw The BK7 glass producing, is equivalent to domestic K9 glass, and the design parameter of BK7 glass is as follows: refractive index 1.51680, acid resistance 1, K Family name's hardness 610.
Described diffraction optical element 3 is made up of mold pressing or etching technics, and described diffraction optical element 3 is applicable to Nd: The various laser instruments such as YAG, CO2, femto-second laser, semiconductor laser carry out beam shaping, the master of described diffraction optical element 3 Apply include laser beam shaping (such as Laser Processing, medical treatment, imaging system, sensor, circular or square flat top beam is whole Shape, matrix, grid, linear, circular pattern shaping) and as the phase place device in astronomy.
When described radio-frequency modulator 1 and described laser instrument 2 are operated, described radio-frequency modulator 1 is to described laser instrument 2 It is modulated, under the modulating action of described radio-frequency modulator 1, the Laser Time coherence length of the outgoing of described laser instrument 2 own Shorten, i.e. Laser Time coherence length shortens, and the laser coherence time shortens and forms the laser 001 of low time attribute.
Laser 001 through the modulation of described radio-frequency modulator 1 enters to inject described diffraction optical element 3;Via described diffraction The laser beam of optical element 3 outgoing is for being concerned with speckle laser beam based on the zero of low temporal coherence and low spatial coherence 002, the wave surface of laser, through diffraction optical element 3, is rebuild, again by the laser of described low time coherence attribute The phase bit position of the single part of the laser wave front building creates skew.
The function of described diffraction optical element 3 is to rebuild the wave surface of laser, the laser building further Wave surface single part phase bit position produce skew, the relevant length of the laser of phase pushing figure and low time coherence attribute Degree is mated, and the matching relationship reached is for exactly relative to the laser part of neighbouring low time coherence attribute or low The laser of time coherence attribute self, can form the position relationship of the condition of low time coherence.
Laser beam via the spatial coherence of described diffraction optical element 3 reduction enters to inject described condenser lens 4, warp The laser of described condenser lens 4 outgoing forms the scattered spot laser 003 of focusing;Described phase pushing figure and low time coherence belong to Property the coherence length of laser mated, the matching relationship reached is for exactly belonging to relative to neighbouring low time coherence The laser part of property or the laser self of low time coherence attribute, can form the position relationship of the condition of low time coherence, Thus reached a kind of zero relevant laser output dissipating class based on low temporal coherence and low spatial coherence.
It described is concerned with the laser emitting of speckle through condenser lens based on the zero of low temporal coherence and low spatial coherence Part, the outgoing wave front of laser instrument is reconstructed again, makes this kind based on when low under outgoing wave front reconstruct effect Between zero laser emitting being concerned with speckle of coherence and low spatial coherence reach the purpose that focuses on, mating follow-up reality should With ultimately forming the laser of the speckle that is concerned with based on the zero of low temporal coherence and low spatial coherence of focusing.Such as Fig. 2 institute Show, Fig. 2 be a kind of scattered spot laser instrument relevant based on low time coherence and low spatial have the right of laser speckle and scattered spot Than schematic diagram more as seen from Figure 2, through the schematic diagram of the laser instrument before elimination laser speckle, it can be seen that Laser speckle is the graininess speckle of random distribution;Laser instrument through RF modulation reduces temporal coherence, after RF modulation Laser beam enter to inject diffraction optical element after reduce spatial coherence, through diffraction optical element reduce spatial coherence Laser light incident enter condenser lens, as shown in Figure 2, obtain focusing based on the zero of low temporal coherence and low spatial coherence The laser beam of relevant speckle;The above-mentioned concrete embodiment for low spatial coherence and low temporal coherence, can obtain scattered spot Or the output of low speckle.
In each wave surface, partially coherent ripple is spatial coherence, and partially coherent is at axial direction;Compound phase mass dryness fraction g (r1, r2) depends on time delay, and temporal coherence and the spatial coherence of light have position characteristic.Time coherence characteristic is by g (r1, r2,0) describes, and the axial distance that fluctuation separates at two points is about incoherent more than coherence length.Propagate from light Ripple and complicated wave function must are fulfilled for wave equation, and the time of light and space wave are closely related.For quasi-monochromatic light Compound phase mass dryness fraction g (r1, r2,0) of ripple is represented by g (r1, r2), and DOE (diffraction optical element) can make coherent area movement be less than light The resolution ratio of system, the compound phase mass dryness fraction of relevant g (r1, r2) can be considered the i.e. all r1 of infinitesimal and be not equal to r2.
In the case of the limit, g (r1, r2)=0 is just incoherent, by the backscattered coherent interference of light from enough unrestrained The space structure of the laser speckle pattern that reflecting surface produces.Space beyond low spatial coherent illumination stage conjugate time reverse ripple Coherent area movement, this Low coherence semiconductor laser can obtain scattered spot or low speckle plus DOE (diffraction optical element).
Semiconductor laser is modulated at High Data Rate, and it is due to transient state Spectral Phenomenon, different modulation that laser spectrum expands Index produce there is the different modulating degree of depth widen spectrum.This semiconductor laser has stable wide wave band and not mode hopping, This semiconductor laser can produce low temporal coherence.If we define ρcIt is coherence distance, then coherent area is ρc, then ρc=1.22 λ/θs.θ heres=2a/d is the angle corresponding to light source, and a is the radius of a Circular Aperture, and d is from light source to sight Examine the distance of wave surface.Give an example, wavelength X=0.5 μm of a light source and θs=0.5o, then their coherence length ρc= 115 λ=57.5 μm.
The utility model compact conformation, can obtain zero and be concerned with speckle laser, in actual application, substantially increase The efficiency of light energy utilization, has that volume is little, a low cost and the advantage such as can be mass.
The utility model proposes a kind of scattered spot laser instrument relevant based on low time coherence and low spatial, pass through simultaneously A kind of technology reducing temporal coherence and spatial coherence has obtained the light beam of a kind of scattered spot laser output, relative to existing Technical scheme in technology, solves the speckle issue producing because of temporal coherence and spatial coherence, thus has obtained zero The laser instrument of speckle laser output.
The foregoing is only embodiment of the present utility model, not thereby limit the scope of the claims of the present utility model, every Utilize the equivalent structure that the utility model specification and accompanying drawing content made or equivalence flow process conversion, or be directly or indirectly used in Other related technical fields, all in like manner include in scope of patent protection of the present utility model.

Claims (6)

1. the scattered spot laser instrument being concerned with based on low time coherence and low spatial, it is characterised in that: include at same optics Coaxially set gradually on platform for reducing radio-frequency modulator (1), the laser instrument (2) of laser beam temporal coherence, being used for Reduce diffraction optical element (3) and the condenser lens (4) of laser beam space coherence;Described diffraction optical element (3) is positioned at On the direction of described laser instrument (2) outgoing, described laser instrument (2) is modulated by described radio-frequency modulator (1), penetrates through described The laser light incident that converting modulator (1) is modulated enters described diffraction optical element (3);Via described diffraction optical element (3) outgoing Laser beam is for being concerned with speckle laser beam based on the zero of low temporal coherence and low spatial coherence, and described laser beam is incident Enter described condenser lens (4), form the scattered spot laser of focusing through the laser of described condenser lens (4) outgoing.
2. a kind of scattered spot laser instrument relevant based on low time coherence and low spatial according to claim 1, its feature It is: under the modulating action of described radio-frequency modulator (1), the Laser Time coherence length of the outgoing of described laser instrument (2) own Shorten, form the laser of low time attribute.
3. a kind of scattered spot laser instrument relevant based on low time coherence and low spatial according to claim 2, its feature It is: the wave surface of laser, through diffraction optical element (3), is rebuild by the laser of described low time coherence attribute, The phase bit position of the single part of the laser wave front rebuilding creates skew.
4. a kind of scattered spot laser instrument relevant based on low time coherence and low spatial according to claim 1, its feature It is: the material of described diffraction optical element (3) can be vitreous silica, optical glass or optical resin material.
5. a kind of scattered spot laser instrument relevant based on low time coherence and low spatial according to claim 1, its feature It is: described diffraction optical element (3) is made up of mold pressing or etching technics.
6. a kind of scattered spot laser instrument relevant based on low time coherence and low spatial according to claim 1, its feature It is: described laser instrument (2) is semiconductor laser.
CN201620310175.7U 2016-04-14 2016-04-14 A kind of scattered spot laser instrument relevant based on low time coherence and low spatial Withdrawn - After Issue CN205720917U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105717661A (en) * 2016-04-14 2016-06-29 维林光电(苏州)有限公司 Speckle laser device based on low time coherence and low spatial coherence and preparation method thereof
CN109254415A (en) * 2018-10-31 2019-01-22 四川长虹电器股份有限公司 The laser of engraving external diffusion disappears speckle device in a kind of multidimensional
CN109557680A (en) * 2019-01-04 2019-04-02 浙江工业大学 A kind of static laser speckle inhibition system of combination multimode lightguide and diffraction optical device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105717661A (en) * 2016-04-14 2016-06-29 维林光电(苏州)有限公司 Speckle laser device based on low time coherence and low spatial coherence and preparation method thereof
WO2017177937A1 (en) * 2016-04-14 2017-10-19 维林光电(苏州)有限公司 Speckle laser device based on low time coherence and low spatial coherence, and preparation method therefor
CN105717661B (en) * 2016-04-14 2018-06-26 维林光电(苏州)有限公司 A kind of scattered spot laser being concerned with based on low time coherence and low spatial and preparation method thereof
CN109254415A (en) * 2018-10-31 2019-01-22 四川长虹电器股份有限公司 The laser of engraving external diffusion disappears speckle device in a kind of multidimensional
CN109557680A (en) * 2019-01-04 2019-04-02 浙江工业大学 A kind of static laser speckle inhibition system of combination multimode lightguide and diffraction optical device
CN109557680B (en) * 2019-01-04 2024-04-16 浙江工业大学 Static laser speckle suppression system incorporating multimode optical waveguide and diffractive optics

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