CN205691485U - A kind of scan table for Terahertz Non-Destructive Testing and scanned imagery device - Google Patents
A kind of scan table for Terahertz Non-Destructive Testing and scanned imagery device Download PDFInfo
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- CN205691485U CN205691485U CN201620468926.8U CN201620468926U CN205691485U CN 205691485 U CN205691485 U CN 205691485U CN 201620468926 U CN201620468926 U CN 201620468926U CN 205691485 U CN205691485 U CN 205691485U
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Abstract
The utility model discloses a kind of scan table for Terahertz Non-Destructive Testing and scanned imagery device, this scan table includes the first support, X-axis support guide mechanism is installed on described first support, it is provided with the first slide block in described X-axis support guide mechanism, first slide block is under the effect of X-axis drive mechanism, for linear motion along X-axis support guide mechanism；Being provided with the second support on first slide block, described second support is provided with Y-axis support guide mechanism, Y-axis support guide mechanism is provided with the second slide block, the second slide block is under the effect of Y-axis drive mechanism, for linear motion along Y-axis support guide mechanism；It is respectively arranged with on the first grating scale and the second grating scale, the first slide block and the second slide block in X-axis support guide mechanism and Y-axis support guide mechanism and is respectively arranged with the first read head and the second read head.
Description
Technical field
This utility model belongs to automatic field, particularly relates to a kind of scan table for Terahertz Non-Destructive Testing and scanning
Imaging device.
Background technology
THz wave (THz, 1THz=1012Hz) frequency it is commonly referred to as at 0.1～10THz (wavelength is at 330um～3mm)
Between electromagnetic wave.It can penetrate most of non-polar material (such as plastics, composite, cardboard etc.), may be used to
Disclose sample surfaces, the defect being particularly hidden in sample interior or damage.During existing THz Non-Destructive Testing, mostly need
Utilize a kind of scanning means to drive test sample to carry out moving line by line or by column, realize THz scanning imagery according to this.
In existing Terahertz Non-Destructive Testing scanning means, the error produced except machinery itself, its position control
System directly determines positioning precision, realizes position control according to servosystem, and positioning precision is higher, but implementation cost is high,
According to step-by-step control system, simple in construction, easily realize, but positioning precision is a common problem, it is difficult to meet height
Resolution detection demand.
Existing in Terahertz Non-Destructive Testing scan table and scanned imagery device, " step one is stopped, and one stops one in employing
Read " fixed point scan pattern, Detection results is preferable, defect point registration, but sweep time is longer, inefficient；The company of employing
Continuous scan pattern, significantly reduces sweep time, but owing to not stopping in centre, in scanning process, waveform sampling point and scanning step
Enter point coordinates and cannot keep the most consistent, use scanning stepping point imaging to will ultimately result in scanogram and error or distortion occur.
Utility model content
In order to solve the shortcoming of prior art, this utility model provide a kind of scan table for Terahertz Non-Destructive Testing and
Scanned imagery device.It is overall that this scan table being used for Terahertz Non-Destructive Testing of the present utility model can quickly complete test sample
Scanning, its registration, simple in construction；This scanned imagery device meets high resolution detection demand, it have registration,
The feature that simple in construction, automaticity are high and easy to spread.
For achieving the above object, this utility model is by the following technical solutions:
A kind of scan table for Terahertz Non-Destructive Testing, including the first support, described first support is provided with X-axis and props up
Support guiding mechanism, described X-axis support guide mechanism is provided with the first slide block, and described first slide block is at the work of X-axis drive mechanism
Under with, for linear motion along X-axis support guide mechanism；
Second support is installed on described first slide block, described second support is provided with Y-axis support guide mechanism, described
Being provided with the second slide block in Y-axis support guide mechanism, described second slide block, under the effect of Y-axis drive mechanism, supports along Y-axis and leads
For linear motion to mechanism；Described second slide block is provided with the fixture for fixing test sample；
It is respectively arranged with the first grating scale and the second grating in described X-axis support guide mechanism and Y-axis support guide mechanism
The first read head and the second read head it is respectively arranged with on chi, the first slide block and the second slide block；First read head reads it with the
The X-axis relative displacement information that one grating scale is parallel, and be sent to controller and carry out calculating scanning element positional information in X-axis；Second
Read head reads the Y-axis relative displacement information that it is parallel with the second grating scale, and is sent to controller and carries out calculating in Y-axis and scan
Dot position information.
Being provided with the fixture for fixing test sample on second slide block of the present utility model, such test sample is along with
Two slide block movements and move, and the first grating scale and the second grating scale are separately fixed at X-axis support guide mechanism and Y-axis and support and lead
In mechanism, the first read head and the second read head move along with X-axis drive mechanism and Y-axis drive mechanism respectively.This reality
It is capable of continuous scan pattern with novel, shortens sweep time, and in scanning process, by waveform sampling point coordinates pair
Image scanning stepping point coordinates is modified, and improves the accuracy of detection of scanogram.
The two ends of described first support are also equipped with X-axis proximity switch, and X-axis proximity switch is for detection the first slide block and the
The distance at one support two ends, and it is sent to controller generation enable signal to control the work of X-axis drive mechanism.
Described X-axis support guide mechanism includes that the first guide rail and the second guide rail, described first guide rail and the second guide rail are symmetrical
It is fixed on the both sides of the first support.
The two ends of described second support are also equipped with Y-axis proximity switch, and Y-axis proximity switch is for detection the second slide block and the
The distance at two support two ends, and it is sent to controller generation enable signal to control the work of Y-axis drive mechanism.
Described Y-axis support guide mechanism includes that the 3rd guide rail and the 4th guide rail, described 3rd guide rail and the 4th guide rail are symmetrical
It is fixed on the both sides of the second support.
A kind of scanned imagery device for Terahertz Non-Destructive Testing, it includes above-mentioned scan table, and terahertz sources
Source, THz wave is launched through test sample in described terahertz sources source.
Described controller and host computer use position serial ports and order serial ports both serial ports clastotypes to carry out phase intercommunication
Letter.It is achieved in that scan table moving displacement, movement velocity control and position feedback function, it is to avoid signal in scanning process
Interference, scanning process is reliable and stable.
The beneficial effects of the utility model are:
(1) fixture for fixing test sample it is provided with on the second slide block in scan table of the present utility model, so
Test sample is moved along with the second slide block movement, and the first grating scale and the second grating scale are separately fixed at X-axis support guide
In mechanism and Y-axis support guide mechanism, the first read head and the second read head are respectively along with X-axis drive mechanism and Y-axis driver
Structure moves.This utility model is capable of continuous scan pattern, shortens sweep time, and to waveform in scanning process
Sampled point has carried out choice judgement and has processed, and improves the accuracy of detection of scanogram；
(2) the X-axis support guide mechanism in scan table of the present utility model and Y-axis support guide mechanism have employed symmetry and set
The double guide rail structures put decrease slide block for the physical burden of drive mechanism and frictional force, allow the slide block can be in drive mechanism effect
Lower fast and stable moves, it is ensured that scanning speed and seriality, decreases test sample sweep time.
(3) this utility model uses grating scale to achieve position correction function, and positioning precision is high, is effectively increased and sweeps continuously
Retouching the resolution of Non-Destructive Testing under pattern, this device is applied in terms of Terahertz Non-Destructive Testing scanning imagery, and automaticity is relatively
Height, simple to operate, easily implement.
Accompanying drawing explanation
Fig. 1 is the scan table structural front view for Terahertz Non-Destructive Testing of the present utility model；
Fig. 2 is the scan table structural perspective for Terahertz Non-Destructive Testing of the present utility model；
Fig. 3 is the scan table X-axis front view for Terahertz Non-Destructive Testing of the present utility model；
Fig. 4 is this utility model Non-Destructive Testing scanning process figure；
Fig. 5 is this utility model data sampling process chart.
Wherein, 1. base, 2. the first support, 3. the first motor, 4. the first leading screw, 5. the first feed screw nut, 6.
One shaft coupling, 7. the first guide rail, 8. the second guide rail, 9. the first contact, 10. the second contact, 11. first grating scales, 12. first read
Several heads, 13. second supports, 14. second motors, 15. second leading screws, 16. second feed screw nuts, 17. second shaft couplings,
18. the 3rd guide rails, 19. the 4th guide rails, 20. first slide blocks, 21. second slide blocks, 22. the 3rd contacts, 23. the 4th contacts, 24.
Two grating scales, 25. second read heads, 26. fixtures.
Detailed description of the invention
With embodiment, this utility model is described further below in conjunction with the accompanying drawings:
As shown in Figure 1, Figure 2 and Figure 3, the scan table for Terahertz Non-Destructive Testing of the present utility model, including first
Frame 2, described first support 2 is provided with X-axis support guide mechanism, and described X-axis support guide mechanism is provided with the first slide block
20, described first slide block 20 is under the effect of X-axis drive mechanism, for linear motion along X-axis support guide mechanism；
Second support 13 is installed on described first slide block 20, described second support 13 is provided with Y-axis support guide machine
Structure, described Y-axis support guide mechanism is provided with the second slide block 21, described second slide block 21 under the effect of Y-axis drive mechanism,
For linear motion along Y-axis support guide mechanism；Described second slide block 21 is provided with the fixture for fixing test sample；
It is respectively arranged with the first grating scale 11 and the second grating scale in X-axis support guide mechanism and Y-axis support guide mechanism
24, the first slide block 20 and the second slide block 21 are respectively arranged with the first read head 12 and the second read head 25；First read head 12
Read its X-axis relative displacement information parallel with the first grating scale 11, and be sent to controller and carry out calculating scanning element position in X-axis
Confidence ceases；Second read head 25 reads the Y-axis relative displacement information that it is parallel with the second grating scale 24, and is sent to controller and enters
Row calculates scanning element positional information in Y-axis.
Be provided with the fixture 26 for fixing test sample on second slide block 21 of the present utility model, such test sample with
The second slide block 21 to move and move, and the first grating scale 11 and the second grating scale 24 are separately fixed at X-axis support guide mechanism
With in Y-axis support guide mechanism, the first read head 12 and the second read head 25 are respectively along with X-axis drive mechanism and Y-axis driver
Structure moves.This utility model is capable of continuous scan pattern, shortens sweep time, and in scanning process, to ripple
Shape sampled point has carried out choice judgement and has processed, and improves the accuracy of detection of scanogram.
The X-axis support guide mechanism of the scan table for Terahertz Non-Destructive Testing of the present utility model is arranged on base 1.
Embodiment one: X-axis drive mechanism of the present utility model can use motor to tie mutually with leading screw with Y-axis drive mechanism
The mode closed, concrete structure is as follows.
X-axis drive mechanism includes the first motor 3, and described first motor 3 is by the first shaft coupling 6 and first
One end of thick stick 4 is connected, and the other end and first feed screw nut 5 of the first leading screw 4 are connected.This first motor of the present utility model
3 drive the first leading screw 4 to run, and then drive the first slide block 20 to move along X-axis.
First slide block 20 is arranged on the first feed screw nut 5.Such first slide block can be along with the fortune of the first feed screw nut 5
Move and move, thus realize the row scanning of scan table.
Y-axis drive mechanism includes the second motor 14, and described second motor 14 is by the second shaft coupling 17 and the
One end of two leading screws 15 is connected, and the other end and second feed screw nut 16 of the second leading screw 15 are connected.Of the present utility model this second
Motor 14 drives the second leading screw 15 to run, and then drives the second slide block 21 to move along Y-axis.
In specific implementation process, a kind of example structure of X-axis support guide mechanism and Y-axis support guide mechanism is:
X-axis support guide mechanism includes the first support the 2, first guide rail 7 and the second guide rail 8, described first guide rail 7 and
Two guide rail 8 symmetries are fixed on the both sides vertical with the first support 2.Symmetrically arranged guide rail structure decrease the first slide block 20 for
The physical burden of the first leading screw 4 and frictional force, the first slide block 20 can be moved along the first screw mandrel 4 fast and stable, it is ensured that X-axis
Scanning speed and the seriality of scanning.
The two ends of the first support 2 are also equipped with X-axis proximity switch, and X-axis proximity switch is connected with controller.When the first slide block
When contacting with X-axis proximity switch, the first motor 3 will quit work, it is ensured that the position limitation protection of X-axis.
Specifically, X-axis proximity switch includes the first contact 9 and the second contact 10, the first contact 9 and the second contact 10 points
It is not arranged on the both sides of the first support 2.
First grating scale 11 is arranged on the first support 2, and the first read head 12 is arranged on the first slide block 20.
Owing to the first support 2 maintains static, therefore the first grating scale 11 is fixed on the first support 2, is arranged on first sliding
The first read head 12 on block 20 moves along with the motion of the first leading screw 4, and such first read head 12 can read through first
The grating signal of grating scale 11, and then it is calculated the coordinate information of scanning element in the up scanning of X-axis.
Y-axis support guide mechanism includes the 3rd guide rail 18 and the 4th guide rail 19, described 3rd guide rail 18 and the 4th guide rail 19
Symmetry is fixed on the both sides vertical with the second support 13.Symmetrically arranged guide rail structure decreases the second slide block 21 for second
The physical burden of thick stick 15 and frictional force, the second slide block 21 can be moved along the second leading screw 15 fast and stable, it is ensured that Y axis scanning
Speed and seriality.
The two ends of the second support 13 are also equipped with Y-axis proximity switch, and Y-axis proximity switch is connected with controller.When second is sliding
When block 21 contacts with Y-axis proximity switch, the second motor 14 will quit work, it is ensured that the position limitation protection of Y-axis.
Specifically, Y-axis proximity switch includes the 3rd contact 22 and the 4th contact 23, the 3rd contact 22 and the 4th contact 23 points
It is not arranged on the both sides of the second support 13.
Second grating scale 24 is arranged on the second support 13, and the second read head 25 is arranged on the second slide block 21.
Owing to the second support 13 maintains static, therefore the second grating scale 24 is fixed on the second support 13, is arranged on second
The second read head 25 on slide block 21 moves along with the motion of the second leading screw 15, and such second read head 25 can read through
The grating signal of two grating scales 24, and then it is calculated the coordinate information of scanning element in the up scanning of Y-axis.
In specific implementation process, X-axis drive mechanism of the present utility model and Y-axis drive mechanism can also use other biography
Motivation structure, such as motor carry out transmission with rack-and-pinion, chain or motor by belt, belt wheel, but pass
Dynamic precision all can decline.
Scanned imagery device for Terahertz Non-Destructive Testing of the present utility model, it includes scan table, and Terahertz
Emission source, electromagnetic wave is launched by condenser lens through test sample in terahertz sources source.
Specifically, controller and host computer use position serial ports, order serial ports double-serial port clastotype to be in communication with each other.
It is achieved in that scan table moving displacement, movement velocity control and position feedback function, it is to avoid in scanning process, signal is done
Disturbing, scanning process is reliable and stable.
The method of work of the scanned imagery device for Terahertz Non-Destructive Testing of the present utility model, comprises the following steps:
Test sample is fixed on the fixture of scan table；Test host computer and the communications status of controller, communicate successfully
Rear configuration scan table parameter: input test sample length, width and scanning stepping；
Host computer, according to the scan table parameter of configuration, calculates test sample all scanning stepping point coordinates；
Host computer sends scan table initial point calibration command to controller and is scanned the origin correction of platform, after having corrected,
Enter next step:
Host computer starts scan table position coordinates feedback real-time reception thread, and scans continuously to controller transmission scan table
Instruction starts simultaneously at sampling test sample Wave data thread, carries out sampled point accepting or rejecting judgement in test sample sampling process
Process, until scanning terminates to terminal；
Host computer, according to test sample sampling number evidence, generates test sample Non-Destructive Testing image.
Specific implementation process, the method for work flow process of scanned imagery device is as it is shown on figure 3, include following step:
Step (1): first test sample is fixed on scan table fixture；
Step (2): confirm that two Serial Port Lines of host computer and scan table controller are connected；
Step (3): in host computer procedure, arranges serial port number, baud rate, data bit, stopping position, check bit, with
Scan table carries out handshake communication；
Step (4): judge that both sides' handshake communication is the most successful, returns OK representative and communicates successfully, return Error and represent mistake
Lose, determine the reason of mistake according to the error code returned, after solution, re-execute step (3)；
Step (5): input test sample length, width and scanning stepping, host computer carries out parameter configuration to scan table；
Step (6): judge that parameter configuration is the most successful, returns OK and represents configuration successful, returns Error and represents unsuccessfully, root
Determine the reason of mistake according to the error code returned, after solution, re-execute step (5)；
Step (7): host computer foundation arranges parameter and calculates test sample all scanning stepping point coordinates；
Step (8): host computer sends scan table initial point calibration command；
Step (9): judge whether initial point calibration terminates, return OK represents calibration to be terminated, and returns Error and represents unsuccessfully, root
Determine the reason of mistake according to the error code returned, after solution, re-execute step (8)；
Step (10): host computer starts scan table position feedback coordinates real-time reception thread；
Step (11): host computer sends the continuous scan instruction of scan table and starts simultaneously at sample waveform data thread, in sampling
During sampled point carried out accepts or rejects judgement process；
Step (12): repeat step (11), until scanning terminates to terminal；
Step (13): according to signal intensity and the coordinate information imaging of sampled point.
Specifically, the implementation process of step (7) including:
Step (7-1): test sample number of scanning lines R (X-direction), columns C (Y direction) computing formula:
In formula:
W is test sample width (unit: mm)；
S is scanning stepping (unit: mm)；
L is test sample length (unit: mm).
Step (7-2): test sample the i-th row jth row scanning coordinate (x(i,j),y(i,j)) computing formula:
x(i,j)=x0+ i × S | i=0,1,2 ... C
y(i,j)=y0+ j × S | j=0,1,2 ... R is 3.
In formula: C is by 2. Shi Ke get, R by 1. Shi Ke get, and S is scanning stepping, x0It is initial point x coordinate, y0It it is initial point y-coordinate；
Step (7-3): calculate and scan stepping point coordinates during test sample progressively scans:
4., 5. in formula: C is by 1. Shi Ke get by 2. Shi Ke get, R, S is scanning stepping, x0It is initial point x coordinate, y0It it is initial point
Y-coordinate；
Making outer circulation master variable with line number j, perform formula 5., cyclic variable in making with columns i, 4. circulation execution formula, depends on
Secondary calculate all scanning element coordinates, store in scanning coordinate array sequence.
Specifically, the implementation process of step (10) including:
Step (10-1): scan table X-axis, Y-axis grating ruler reading head pulse signal are counted by controller；
Step (10-2): carry out process after counting statistics and change into X-axis, Y-axis position coordinates, on during location strings cause for gossip
Pass host computer；
Step (10-3): the position coordinate data that host computer receiving position serial ports sends, definition Dynamic Array Cx [], Cy []
For storing real-time coordinates Cxk, Cyk。
Specifically, the implementation process of step (11) as shown in Figure 4, including following step:
Step (11-1): by formula 4., 5. calculates adjacent scanning stepping point coordinates difference:
Δ Sx=| Sxi+1-Sxi| ⑥
Δ Sy=| Syi+1-Syi| ⑦
Step (11-2): calculate motion impulse quantity according to Δ Sx, Δ Sy, is sent to control by host computer order serial ports
Device processed；
Step (11-3): controller drives X-axis, Y-axis drive mechanism, scan table starts scanning continuously；
Step (11-4): sampling kth Wave data, reads coordinate Cx in the serial ports of position simultaneouslyk, CykSit as sampled point
Mark；
Cxk, CykAcquisition methods such as step (10) is described, and definition sampling point position coordinate Dynamic Array Ex [], Ey [] is used for
Storage sample point coordinate data Exk, Eyk；Exk=Cxk, Eyk=CykWherein, K represents the positive integer more than or equal to 1；
Step (11-5): the K+1 time Wave data of sampling, reads coordinate Cx in the serial ports of position simultaneouslyk+1, Cyk+1；
Work as Cyk==Cyk+1Time, twice data collection point in same a line, calculate Δ x=| Cxk+1-Cxk|:
As Δ x ＜ S/2, this time sampled data is given up, and continues data acquisition next time；
As Δ x >=S/2, preserve this sampled data, Exk+1=Cxk+1, Eyk+1=Cyk+1；
Work as Cyk！=Cyk+1Time, inter-bank scans: this time sampled data is given up, and continues to gather data next time；
Step (11-6): repeated execution of steps (11-2), step (11-3), step (11-4), step (11-5) is to scanning
Terminate.
It is negative for the load-carrying of leading screw that this utility model uses symmetrically arranged pair of guide supporting guide frame to decrease slide block
Lotus and frictional force, allow slide block test sample fast and stable can be driven to move along leading screw, it is ensured that scanning speed and seriality, subtract
Having lacked test sample sweep time, used grating scale to achieve position feedback calibration function, positioning precision is high, the company of being effectively increased
The resolution of Non-Destructive Testing under continuous scan pattern, this device is applied in terms of Terahertz Non-Destructive Testing scanning imagery, automatization's journey
Spend higher, simple to operate, easily implement；In scanning process, host computer uses position serial ports, order serial ports double-serial port clastotype
Achieve scan table moving displacement, movement velocity controls and position feedback function, it is to avoid signal disturbing in scanning process, sweeps
Retouch process stabilization reliable.
Although detailed description of the invention of the present utility model is described by the above-mentioned accompanying drawing that combines, but not new to this practicality
The restriction of type protection domain, one of ordinary skill in the art should be understood that on the basis of the technical solution of the utility model, ability
Field technique personnel need not to pay various amendments or deformation that creative work can make still at protection model of the present utility model
Within enclosing.
Claims (7)
1. the scan table for Terahertz Non-Destructive Testing, it is characterised in that include the first support, described first support is pacified
Equipped with X-axis support guide mechanism, described X-axis support guide mechanism being provided with the first slide block, described first slide block is in X-axis transmission
Under the effect of mechanism, for linear motion along X-axis support guide mechanism；
Second support is installed on described first slide block, described second support is provided with Y-axis support guide mechanism, described Y-axis
Being provided with the second slide block in support guide mechanism, described second slide block is under the effect of Y-axis drive mechanism, along Y-axis support guide
Mechanism is for linear motion；Described second slide block is provided with the fixture for fixing test sample；
It is respectively arranged with the first grating scale and the second grating scale in described X-axis support guide mechanism and Y-axis support guide mechanism,
The first read head and the second read head it is respectively arranged with on one slide block and the second slide block；First read head reads and the first grating scale
Parallel X-axis relative displacement information, and be sent to controller and carry out calculating scanning element positional information in X-axis；Second read head is read
Take the Y-axis relative displacement information parallel with the second grating scale, and be sent to controller and carry out calculating scanning element position letter in Y-axis
Breath.
A kind of scan table for Terahertz Non-Destructive Testing, it is characterised in that described first support
Two ends be also equipped with X-axis proximity switch, X-axis proximity switch for detection the first slide block and the distance at the first support two ends, and
It is sent to controller and produces enable signal to control the work of X-axis drive mechanism.
A kind of scan table for Terahertz Non-Destructive Testing, it is characterised in that described X-axis supports
Guiding mechanism includes that the first guide rail and the second guide rail, described first guide rail and the second guide rail symmetry are fixed on the two of the first support
Side.
A kind of scan table for Terahertz Non-Destructive Testing, it is characterised in that described second support
Two ends be also equipped with Y-axis proximity switch, Y-axis proximity switch for detection the second slide block and the distance at the second support two ends, and
It is sent to controller and produces enable signal to control the work of Y-axis drive mechanism.
A kind of scan table for Terahertz Non-Destructive Testing, it is characterised in that described Y-axis supports
Guiding mechanism includes that the 3rd guide rail and the 4th guide rail, described 3rd guide rail and the 4th guide rail symmetry are fixed on the two of the second support
Side.
6. the scanned imagery device for Terahertz Non-Destructive Testing, it is characterised in that it includes as claim 1-5 is arbitrary
Described scan table, and terahertz sources source, THz wave is launched through test sample in described terahertz sources source.
A kind of scanned imagery device for Terahertz Non-Destructive Testing, it is characterised in that described control
Device processed and host computer use both serial ports clastotypes of position serial ports and order serial ports to be in communication with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201620468926.8U CN205691485U (en) | 2016-05-19 | 2016-05-19 | A kind of scan table for Terahertz Non-Destructive Testing and scanned imagery device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620468926.8U CN205691485U (en) | 2016-05-19 | 2016-05-19 | A kind of scan table for Terahertz Non-Destructive Testing and scanned imagery device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105866031A (en) * | 2016-05-19 | 2016-08-17 | 山东省科学院自动化研究所 | Scanning table for terahertz nondestructive testing and scanning imaging device and method |
| CN107101941A (en) * | 2017-03-31 | 2017-08-29 | 湖北久之洋红外***股份有限公司 | A kind of Terahertz near field micro-imaging detector |
-
2016
- 2016-05-19 CN CN201620468926.8U patent/CN205691485U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105866031A (en) * | 2016-05-19 | 2016-08-17 | 山东省科学院自动化研究所 | Scanning table for terahertz nondestructive testing and scanning imaging device and method |
| CN105866031B (en) * | 2016-05-19 | 2018-09-18 | 山东省科学院自动化研究所 | A kind of scan table, scanned imagery device and method for Terahertz non-destructive testing |
| CN107101941A (en) * | 2017-03-31 | 2017-08-29 | 湖北久之洋红外***股份有限公司 | A kind of Terahertz near field micro-imaging detector |
| CN107101941B (en) * | 2017-03-31 | 2019-08-02 | 湖北久之洋红外***股份有限公司 | A kind of Terahertz near field micro-imaging detector |
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