CN2056715U - Membrane flow valve for corrosive gas or liquid - Google Patents
Membrane flow valve for corrosive gas or liquid Download PDFInfo
- Publication number
- CN2056715U CN2056715U CN 89216721 CN89216721U CN2056715U CN 2056715 U CN2056715 U CN 2056715U CN 89216721 CN89216721 CN 89216721 CN 89216721 U CN89216721 U CN 89216721U CN 2056715 U CN2056715 U CN 2056715U
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- valve
- needle
- type flow
- screw rod
- spring
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Abstract
The utility model is membrane type flow valve suitable for strong corrosive fluids, comprising a valve seat, a valve body, regulating nuts, regulating bolts, a diaphragm, a valve needle, a pressure spring, a knob, etc. The membrane type flow valve is characterized in that the valve needle is contacted with a valve port in a non-rigidity mode, so that the valve needle and the valve port are not easy to be damaged, and are also kept closed after abrasion. When mediums in a pipeline excess pressure, the mediums flush the valve needle open to reduce pressure, and thus the membrane type flow valve can be used as a safety valve. When the direction of the pipeline is connected inversely, the diaphragm is flushed open together with the valve needle, so that metal parts inside the valve can not be rusted due to the damage of the diaphragm to affect the purity of the mediums and reduce production quality. The membrane type flow valve can be widely used for the pipeline system of epitaxial stoves for preparing semiconductor materials.
Description
The utility model relates to the diaphragm type Flow valve that the deep-etching fluid is used, and especially is fit to produce in the equipment such as silicon epitaxy, gallium arsenide epitaxy and the silicon nitride gas phase of semi-conducting material be integrated deposited pipe-line system and uses.
Producing used silicon epitaxy stove of semi-conducting material or gallium arsenide epitaxy stove mainly is made of reaction chamber and pipe-line system.Nucleus is placed reaction chamber, in reaction chamber, bring SiCl into by H by pipe-line system
6Or SiH
4As growth source with bring PCl into
3Or AsCl
3Or B
2H
6Deng as doped source, growth source is to produce semi-conductive material, and doped source is used for controlling the performance such as the specific resistance of semi-conducting material.Therefore, the component in pipe-line system and the pipe-line system are that epitaxial furnace must indispensable important component part.Employed various valves mainly contain solenoid valve and Flow valve in pipe-line system, and the former is used for the flow direction of control media realizing automation mechanized operation, and the latter is used for the flow of control media.Solenoid valve and Flow valve can be provided with separately as required, also both can be combined into using, and reach the purpose of the automatic control media flow and the flow direction.Present employed barrier film Flow valve, mainly form (Fig. 1) by valve seat 1, valve body 2, knob 3, adjusting nut 4, screw rod 5, positioning dowel 6, pin type barrier film 7 etc., valve seat 1 is all made with corrosion-resistant plastic with barrier film 7, screw-thread fit between adjusting nut 4 and the screw rod 5, screw rod 5 usefulness positioning dowels 6 guiding are done straight line motion, and the screw rod lower end is connected with pin type barrier film 7.During use, rotary knob 3, adjusting nut 4 rotation, screw rod 5 is done straight line motion, makes needle and the valve port driving fit on the needle-valve barrier film 7 or opens.The shortcoming of this valve is conspicuous, at first, needle is that rigidity contacts with valve port, because rotary knob directly is pressed in needle on the valve port screw rod 5, undue force or the excessive damage that very easily causes needle or valve port, cause valve leakage and must renewal part; Its two, under valve cuts out situation, when the pipeline misconnection oppositely or outlet end pressure medium when being higher than entry end, the medium reverse flow will cause membrane ruptures; The 3rd, because breaking of barrier film scurried in the above metal parts of barrier film medium, cause metal parts corrosion and corrosion thing to enter pipeline, influenced the purity of medium, therefore also just influenced the quality of product.
The purpose of this utility model is to design a kind of novel diaphragm type Flow valve, and making contacting between needle and valve port is Elastic Contact, and needle and valve port are not fragile guaranteeing to protect under needle and the valve port driving fit performance prerequisite.
Another purpose of the present utility model be the requirement medium oppositely when the diaphragm type Flow valve, be difficult for causing membrane ruptures.
Diaphragm type Flow valve described in the utility model mainly by valve seat, and the valve body that links into an integrated entity of valve seat, be installed in adjusting nut in the valve body and adjusting screw rod, barrier film, and the needle that links into an integrated entity of barrier film, make between needle and valve port and formed by the spring of certain pressure.Be the screw-thread fit transmission between adjusting nut and adjusting screw rod, needle can be moved up and down, the pressure by spring make needle can be under certain pressure with the valve port driving fit or open.In order to prevent the corrosion to valve of corrosivity gas, liquid, valve seat, needle and barrier film all should adopt resistant material.
The erection drawing of accompanying drawing 1 existing diaphragm type Flow valve.
The erection drawing of accompanying drawing 2 a kind of diaphragm type Flow valves of the present utility model.
The erection drawing of accompanying drawing 3 another kind of diaphragm type Flow valves of the present utility model.
Below in conjunction with embodiment diaphragm type Flow valve described in the utility model is further elaborated:
The diaphragm type Flow valve of present embodiment comprises mechanical position limitation mechanism, spring jackscrew 32, adjusting screw rod 33, pressure spring 34, positioning screwn 36, the spring guide pillar 37 of valve seat 22, needle 23, barrier film 24, valve body 25, adjusting nut 26, knob 27, adjusting nut.25 of valve seat 22 and valve bodies fuse with screw 21, in valve body 25 endoporus, adjusting nut 26 has been installed, knob 27 is equipped with in adjusting nut 26 upper ends, 33 of adjusting nut 26 and adjusting screw rods adopt the thread fiting mode transmission, screw-thread fit is also adopted in the assembling that adjusting screw rod 33 and spring jackscrew are 32, the spring guide pillar 37 that is contained in adjusting screw rod 33 endoporus lower ends can move in the adjusting screw rod endoporus, between spring jackscrew 32 and the spring guide pillar 37 pressure spring 34 is arranged, the excircle of barrier film 24 is pressed between valve body and the valve seat, central position is connected with spring guide pillar, needle 23 is installed in the center hole of barrier film 24, the valve port center of needle centrally aligned valve seat 22,25 of adjusting screw rod 33 and valve bodies have the guide mechanism that makes the adjusting screw rod moving linearly, valve seat 22 can be provided with separately for each Flow valve, also can be the common valve seat of plurality of valves in the pipe-line system.When requiring valve to close, turning knob rotates adjusting nut 26, and adjusting screw rod 33 moves downward, and needle 23 is sealed valve port, and the pressure between needle and the valve port depends on spring 34, and the pressure of spring 34 gives earlier when valve is installed and adjusting.When opening valve, the backward rotation knob, adjusting screw rod 33 drives spring jackscrew 32, spring 34, spring guide pillar 37 and barrier film 24 and needle 23 rises together, and the size of valve opening depends on the counter-rotational angle of knob.
Manual control adjuster accurately for the adjustment sensitivity level that further improves valve and when adjusting, between adjusting screw rod 33 and adjusting nut 26, set up a pressure spring 29, eliminated the gap between motion thread between adjusting nut 26 and the adjusting screw rod 33 by the pressure of spring 29, between spring 29 and adjusting nut, set up a steel ball 28, then more can make knob (Fig. 3) flexibly.
Because this kind valve opening degree little (within 1.5-2mm), requiring adjusting nut 26 only to rotate within 360 ° gets final product, positioning dowel 30 has been installed on the appropriate location of valve body 25 for this reason, a positioning dowel 31 also has been installed on adjusting nut 26, when positioning dowel 31 was run into positioning dowel 30 in rotary course, adjusting nut can not be rotated further (Fig. 2) again.
Guarantee that adjusting screw rod 33 straight line motions then must have guide mechanism between valve body 25 and adjusting screw rod 33, for simplified structure with for the purpose of being convenient to make, this guide mechanism is to squeeze into an open washer 35 at adjusting screw rod 33 bottom suitable positions, make adjusting screw rod 33 and open washer constitute a firm integral body, positioning screwn 36 on the valve seat 25 stretches in the opening of open washer 35, and positioning screwn 36 limits adjusting screw rod 33 and does straight line motion.
In order to strengthen anticorrosion ability, valve seat and barrier film all adopt polytetrafluoroethylmaterial material to make, and needle adopts poly-trifluoro-ethylene or poly-perfluorinated material to make.
The utility model has the advantage of:
1〉because the effect of mechanical position limitation and spring, form non-rigid the contact between needle on the barrier film and the valve port, prevent the unfettered valve port of too clamp-oning of needle, cause the damage of needle and/or valve port, prolonged the working life of valve, especially for the expensive valve seat that a plurality of valve shared, clear meaning is arranged more economically.
2〉same effect owing to mechanical position limitation and spring has not only guaranteed the driving fit of needle and valve port, and can automatically regulate compensation when valve port weares and teares, and guarantees the driving fit performance of needle and valve port.
3〉under valve cuts out situation, when surpassing spring pressure as pipeline medium pressure, medium is washed needle automatically open, therefore also can use as safety valve.
4〉when medium because of pipeline misconnection when reverse, barrier film can be washed open by medium automatically together with needle, therefore unlikely generation membrane ruptures has also just been avoided medium to enter barrier film top and has been caused the metal parts corrosion, influence medium purity and quality of product.
5〉with the fluorine rubber barrier film that uses in the teflon replacement prior art, make its anti-aging, corrosion resistance greatly improves.
Claims (5)
1, the diaphragm type Flow valve used of corrosivity gas, liquid, comprise valve seat 22, valve body 25, adjusting nut 26, adjusting screw rod 33, barrier film 24, needle 23, knob 27,33 of adjusting nut 26 and adjusting screw rods are the screw thread transmission, diaphragm edge is pressed between the valve body and valve seat, 25 limited joint screw rods 33 of setting the tone of adjusting screw rod 33 and valve body are made straight-line guide mechanism, it is characterized in that:
1) adjusting screw rod 33 is for there being the part of center hole, its endoporus top has spring jackscrew 32, bottom that spring guide pillar 37 is arranged, at spring jackscrew 32 and 37 of spring guide pillars pressure spring 34 is arranged, the external diameter of spring jackscrew 32 is connected with adjusting screw rod 33 inner hole threads, spring guide pillar 37 can move in adjusting screw rod 33 endoporus, spring guide pillar 37 is linked to be integral body with barrier film 24, and needle 23 is installed in the diaphragm center lower end;
2) the mechanical position limitation mechanism of 26 limited joint nut 26 angle of swing of setting the tone of valve body 25 and adjusting nut.
2, the diaphragm type Flow valve used of corrosivity gas according to claim 1, liquid is characterized in that between adjusting nut 26 and spring jackscrew 32 pressure spring 29 being arranged.
3, the diaphragm type Flow valve used of corrosivity gas according to claim 2, liquid is characterized in that on the appropriate location of valve body 25 positioning screwn 30 being installed, and another positioning screwn 31 that can bump against positioning screwn 30 has been installed on adjusting nut 26.
4, the diaphragm type Flow valve used of corrosivity gas according to claim 3, liquid is characterized in that having one to be assembled into the open washer 35 of firm integral body with adjusting screw rod 33, and positioning screwn 36 is fixed on the valve body and stretches in the middle of the opening of open washer 35.
5, the diaphragm type Flow valve of using according to claim 1 or 2 or 3 or 4 described corrosivity gas, liquid is characterized in that valve seat and barrier film all adopt polytetrafluoroethylmaterial material to make, and needle is made with poly-trifluoro-ethylene or poly-perfluorinated material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89216721 CN2056715U (en) | 1989-09-19 | 1989-09-19 | Membrane flow valve for corrosive gas or liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89216721 CN2056715U (en) | 1989-09-19 | 1989-09-19 | Membrane flow valve for corrosive gas or liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2056715U true CN2056715U (en) | 1990-05-02 |
Family
ID=4872120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 89216721 Expired - Lifetime CN2056715U (en) | 1989-09-19 | 1989-09-19 | Membrane flow valve for corrosive gas or liquid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2056715U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101849125B (en) * | 2007-11-05 | 2013-01-23 | 费希尔控制产品国际有限公司 | Diaphragm for use with control valves |
| CN105420893A (en) * | 2015-10-30 | 2016-03-23 | 厦门驭波超声技术有限公司 | Ultrasonic rolling type ribbon bonding machine |
-
1989
- 1989-09-19 CN CN 89216721 patent/CN2056715U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101849125B (en) * | 2007-11-05 | 2013-01-23 | 费希尔控制产品国际有限公司 | Diaphragm for use with control valves |
| CN105420893A (en) * | 2015-10-30 | 2016-03-23 | 厦门驭波超声技术有限公司 | Ultrasonic rolling type ribbon bonding machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |