CN205621704U - 一种节水型晶体硅片刻蚀清洗设备 - Google Patents
一种节水型晶体硅片刻蚀清洗设备 Download PDFInfo
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- CN205621704U CN205621704U CN201620278550.4U CN201620278550U CN205621704U CN 205621704 U CN205621704 U CN 205621704U CN 201620278550 U CN201620278550 U CN 201620278550U CN 205621704 U CN205621704 U CN 205621704U
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107658250A (zh) * | 2017-11-03 | 2018-02-02 | 通威太阳能(安徽)有限公司 | 一种用于硅片清洗及水膜形成的一体化清洗机 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107658250A (zh) * | 2017-11-03 | 2018-02-02 | 通威太阳能(安徽)有限公司 | 一种用于硅片清洗及水膜形成的一体化清洗机 |
CN107658250B (zh) * | 2017-11-03 | 2023-10-13 | 通威太阳能(安徽)有限公司 | 一种用于硅片清洗及水膜形成的一体化清洗机 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Hao Baocai Inventor after: Huang Rihong Inventor before: Huang Rihong Inventor before: Huang Yong |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 215312 Jiangsu Province, Kunshan City Shipai Town Plaza Road No. 92, room 2 Patentee after: Jiangsu Xi Gil Equipment Technology Co. Address before: Shipai Town Plaza Road Kunshan city 215312 Suzhou city in Jiangsu province No. 92 room 2 Patentee before: Kunshan Xi Gil Automation System Co. Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161005 Termination date: 20190405 |